Varian TriScroll 300 Series Manual
Dry scroll
vacuum pump
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Also See for TriScroll 300 Series:
- Maintenance manual (100 pages) ,
- Replacement manual (32 pages)
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Maintenance Manual
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Table of Contents
Related Manuals for Varian TriScroll 300 Series
Summary of Contents for Varian TriScroll 300 Series
- Page 1 vacuum technologies TriScroll 300 Series MODULE REPLACEMENT MANUAL Dry Scroll Vacuum Pump idealvac.com Manual No. 699904285 (505)872-0037 Revision E idealvac.com May 2003...
- Page 2 Varian TriScroll™ 300 Dry Scroll Vacuum Pump TriScroll is a trademark of Varian Vacuum Technologies. Loctite and PST are registered trademarks of Loctite Corporation. Krytox, Teflon and Viton are registered trademarks of E. I. du Pont de Nemours and Company.
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Page 3: Table Of Contents
Serial Numbers Notes ..... . .ix Contacting Varian Vacuum Technologies ..ix General Information ......1 Equipment Required to Install Pump Module . -
Page 4: Declaration Of Conformity
Declaration of Conformity Declaration of Conformity Konformitätserklärung Déclaration de Conformité Declaración de Conformidad Verklaring de Overeenstemming Dichiarazione di Conformità Varian, Inc. Nous Vacuum Technologies Nosotros 121 Hartwell Avenue Lexington, MA, 02421-3133 USA declare under our sole responsibility that the product, erklären, in alleniniger Verantwortung, daß... -
Page 5: Preface
Every maintenance person must read and thoroughly understand the materials discussed and the instructions provided in this manual, as well as any additional information provided by Varian Vacuum Technologies. - Page 6 If applicable, apply a small amount of ® Krytox GPL 224 grease and wipe the O-rings “shiny” dry. Varian Vacuum Technologies recom- NOTE mends replacing all O-rings during rou- tine maintenance or during any maintenance procedure requiring that O-rings be removed.
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Page 7: Related Triscroll Manuals
TriScroll 300 Dry Scroll Vacuum Pump Related TriScroll Manuals Manuals related to the installation and operation, tip seal replacement, and major maintenance for the TriScroll 300 series pumps are listed in the following table: Title Applicable TriScroll Model Part Number... -
Page 8: Factory Service Options
PTS0310SCRP Serial Numbers Notes This manual applies to TriScroll 300 series with serial numbers beginning with LP, and ascending from LPB80124. For service on TriScroll series pumps with serial numbers J7000001 to A8000108, contact your nearest Varian Vacuum Technologies office. -
Page 9: General Information
TriScroll 300 Dry Scroll Vacuum Pump General Information Varian TriScroll 300 series pumps are designed to provide years of trouble-free service if maintenance procedures and intervals are observed. Bearing grease replenishment and tip seal replacement is recommended when the pump base pressure has risen to an unacceptably high level for your application. -
Page 10: Maintenance Took Kit
TriScroll 300 Dry Scroll Vacuum Pump Maintenance Took Kit... - Page 11 TriScroll 300 Dry Scroll Vacuum Pump Maintenance Took Kit (continued)
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Page 12: Triscroll Disassembly
TriScroll 300 Dry Scroll Vacuum Pump TriScroll Disassembly 1. Remove three M5x16 screws attaching cowling to module. 2. Remove cowling. 3. Remove the four M6x16 screws attaching pump module to the frame. - Page 13 TriScroll 300 Dry Scroll Vacuum Pump TriScroll Disassembly (continued) 4. Remove pump module from the frame. 5. Remove M8x12 screw and washer attaching fan assembly to crankshaft.
- Page 14 TriScroll 300 Dry Scroll Vacuum Pump TriScroll Disassembly (continued) 6. Remove fan assembly from crankshaft. 7. Remove key from slot in crankshaft.
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Page 15: Triscroll Reassembly
TriScroll 300 Dry Scroll Vacuum Pump TriScroll Reassembly Tool required: Allen wrench Locate the following items shown in the photos on the left: Pump Module Assembly Fan Assembly M6x16 screws (4) Spider Coupling Washer M8x12 screw Cowling M5x16 screws (3) - Page 16 TriScroll 300 Dry Scroll Vacuum Pump TriScroll Reassembly (continued) 1. Install key in slot on crankshaft. 2. Slide fan assembly onto crankshaft engaging key and against seal spacer. 3. Secure fan assembly to crankshaft with M8x12 screw and washer previously removed in step 5 on page 5.
- Page 17 TriScroll 300 Dry Scroll Vacuum Pump TriScroll Reassembly (continued) 4. Insert spider in motor coupling. 5. Install pump module on frame, aligning fingers on fan assembly with fingers on coupling. Assure proper fit of dowel pins on mating holes in frame. Exhaust fitting in the down- NOTE ward position.
- Page 18 TriScroll 300 Dry Scroll Vacuum Pump TriScroll Reassembly (continued) 6. Secure pump module to frame with four M6x16 screws. 7. Install cowling over pump module. Secure with three M5x16 screws.
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Page 19: Pump Conditioning And Performance Verification
TriScroll Reassembly (continued) This figure illustrates a fully reassembled TriScroll 300 Series Pump. Pump Conditioning and Performance Verification Pump Module conditioning and performance verification has been performed at Varian Vacuum Technologies factory. Further conditioning or performance verification is not necessary.
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