Alcatel ASM 180 TD User Manual page 15

Operation
in internal
calibration mode
4/4
ASM 180 TD
Detector operating principle
1
Roughing of calibrated
leak
14
c
12
11
3
Venting of calibrated
leak
The leak is returned to
atmospheric pressure
14
b
Alcatel Vacuum Technology France - ASM 180 TD/TD+ - ASM 181 TD+ User's Manual
A 20
2
Calibration
14
18
17
9
12
11
a