Alcatel ASM 180 TD User Manual page 104

operation
The gas line test option is
an addition to the basic
detector functions.
The ASM 180TD+I is
optimized for the 1/4" gas
line test (in terms of response
time and sensitivity).
The ASM 180TD+I provides
reduced response time for
gas lines diameters higher
than 1/4".
Alcatel Vacuum Technology France - ASM 180 TD/TD+ - ASM 181 TD+ User's Manual
Use of the "I" gas line option
For ASM 180 TD and ASM 180 TD+
Detector
ASM 180 TDI
18
17
16
15
ASM 180 TD+I
18
17
16
15
1. Detector inlet port
4. Roughing valve
13.Detection valve
11.Roughing membrane pump
(MD4E)
12.Roughing molecular pump
(MDP)
13
14 a
b
c
19
9
10
8
12
12
13
a
14
b
c
9
8
12
12
17.Hybrid turbomolecular pump
18.Analyzer cell
20.Dry roughing pump (CP20)
21."I" gas line inlet port
22."I" gas line membrane
23."I" gas line valves
C 70
21
1
23a
22
2
23b
3
5
4
7
11
21
1
23a
22
2
23b
3
5
4
7
20
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