Asm 180 Td Detector Operating Principle; Detector Operating Principle - Alcatel ASM 180 TD User Manual

Vacuum circuit
Pumping capacities
Test capacities
Alcatel Vacuum Technology France - ASM 180 TD/TD+ - ASM 181 TD+ User's Manual
ASM 180 TD

Detector operating principle

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18
17
8
16
15
1. Detector inlet port
2. Inlet vent valve
3. Vent filter connector
4. Roughing valve
5. Inlet pressure gauge (PI3C)
7. By-pass valve
8. Exhaust pressure gauge (PI1)
9. Exhaust valve
10. Roughing pump vent valve
11. Roughing membrane pump
(MD4E)
3
4 m /h roughing (membrane pump MD4E)
+ 10 l/s ( molecular drag pump MDP).
Helium pumping speed at inlet port : 4.4 l/s.
Short test cycle.
Quick response time.
Autocalibration with integrated calibrated leak.
1
13
a
5
b
4
c
19
9
10
12 12
12. Roughing molecular drag pump
(MDP)
13. Detection valve
14. Calibrated leak module
15. Connector for long distance
sniffer
16. Sniffer valve
17. Hybrid turbomolecular pump
(PTM 5154)
18. Analyzer cell
19. Connector for inert gas purge
A 20
3
2
7
11
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