165472-1CD
Sensor Function
No.
Contents
71
Resolution for path control under individual resolution
mode [0.01 mm/V]
72
73
74
75
76
86
Path correction delay compensation, maximum correction speed
[0.1 mm/s]
9
Sensor Parameters (SxE)
9-2
Initial
Setting
Value
Range
CH1
0
CH2
0
CH3
0
CH4
0
CH5
0
CH6
0
1000
HW1482281
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