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Varian 947 Operation And Service Manual

Leak detectors
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NOTICE: This document contains references to Varian.
Please note that Varian, Inc. is now part of Agilent
Technologies. For more information, go to
www.agilent.com/chem.
Models
947, 948 and 960
Leak Detectors
Part No. 699909947
Revision H
May 2003
Advanced Test Equipment Rentals
www.atecorp.com 800-404-ATEC (2832)
vacuum technologies
OPERATION AND
SERVICE MANUAL

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  • Page 1 ® Advanced Test Equipment Rentals www.atecorp.com 800-404-ATEC (2832) NOTICE: This document contains references to Varian. Please note that Varian, Inc. is now part of Agilent Technologies. For more information, go to www.agilent.com/chem. vacuum technologies Models OPERATION AND SERVICE MANUAL 947, 948 and 960 Leak Detectors Part No.
  • Page 2 Models 947, 948 and 960 Leak Detectors Contra-Flow, MacroTorr, TriScroll and ConvecTorr are trademarks or registered trademarks of Varian Vacuum Technologies. Apiezon is a registered trademark of M&I Materials Ltd. Alconox is a registered trademark of Alconox, Inc. Loctite and PST are registered trademarks of Loctite Corporation.

  • Page 3: Table Of Contents

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual Table of Contents Declaration of Conformity ......................xiii Warranty ............................xiv Warranty Replacement and Adjustment ..................xiv Garantie ............................xv Ersatz und Einstellung unter Garantie ..................xv Factory Calibration Data ......................xvii List of Options or Accessories Included with System ...............
  • Page 4 Models 947, 948 and 960 Leak Detectors Operations and Service Manual Section 1. Introduction to Models 947, 948 and 960 Leak Detectors ........1-1 1.1 Platform Electronics ......................1-4 1.2 Unpacking the 947/948/960 ....................1-4 1.2.1 Unpacking Instructions....................1-4 1.2.2 Removing the 947/948/960 from the Skid..............1-5 1.2.3 Removing Loose Packing from Interior of 947/948/960 ..........
  • Page 5 Models 947, 948 and 960 Leak Detectors Operations and Service Manual Section 2. Leak Detector Integration ................... 2-1 2.1 Physical Considerations ...................... 2-1 2.2 Common Configuration ......................2-1 2.3 Electronic Considerations for the Optional Rear Panel Interface......... 2-9 2.3.1 Discrete I/O J120 Inputs....................2-9 2.3.2 BCD J121 Outputs ....................
  • Page 6 Models 947, 948 and 960 Leak Detectors Operations and Service Manual Section 4. Maintenance ........................ 4-1 4.1 Daily Maintenance ......................4-5 4.1.1 Calibration Check......................4-5 4.1.1.1 Leak Checking ....................4-5 4.1.1.2 General Suggestions for Leak Checking ............4-6 4.2 Yearly Maintenance ......................4-7 4.2.1 Replacing the Calibrated Leak ..................
  • Page 7 Models 947, 948 and 960 Leak Detectors Operations and Service Manual Section 5. Troubleshooting ......................5-1 5.1 Error Condition Codes ......................5-2 5.2 Troubleshooting Symptoms and Solutions ................5-3 5.3 Fehlerzustandscodes......................5-5 5.4 Symptome und Lösungen bei der Fehlersuche ..............5-6 Appendix A.
  • Page 8 Models 947, 948 and 960 Leak Detectors Operations and Service Manual B.5.2 Dry System ......................B-26 B.5.2.1 Removing the Dry System Forepump............B-26 B.5.2.1.1 Removing the Isolation Valve from the Forepump......B-26 B.5.2.1.2 Removing the Nitrogen Purge Connection from Pump ....B-27 B.5.2.1.3 Removing the Exhaust Fitting ............B-27 B.5.2.1.4 Removing the Pump from the Cabinet ..........B-27...
  • Page 9 Models 947, 948 and 960 Leak Detectors Operations and Service Manual List of Figures Figure Description Page 947 Leak Detector....................... 1-2 948/960 Leak Detector......................1-3 Front Panel Controls and Indicators ................... 1-6 Turret Door Instruction Label ....................1-9 Rear Power Panel......................1-10 Service Pendant........................
  • Page 10 Models 947, 948 and 960 Leak Detectors Operations and Service Manual 947/948/960 Spectrometer Tube Installation ..............4-24 4-10 TC1 Gauge in the MVBA ....................4-26 4-11 TC2 Gauge in the SBA ..................... 4-28 4-12 Rough Pump and Forepump Oil Level Check ..............4-34 4-13 The Test Port ........................
  • Page 11 Models 947, 948 and 960 Leak Detectors Operations and Service Manual List of Tables Table Description Page Valve Operation ......................... 2-4 J120 Input Connections ..................... 2-9 J121 Output Summary ..................... 2-10 J123 Pinout Summary...................... 2-11 NOT READY Condition Codes ..................3-12 Zustandscodes für nicht betriebsbereites System ............
  • Page 12 Models 947, 948 and 960 Leak Detectors Operations and Service Manual This page intentionally left blank.

  • Page 13: Declaration Of Conformity

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual to which this declaration relates is in conformity with the following standard(s) or other normative documents.

  • Page 14: Warranty

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual Warranty Products manufactured by Seller are warranted against defects in materials and workmanship for twelve (12) months from date of shipment thereof to Customer, and Seller’s liability under valid warranty claims is limited, at the option of Seller, to repair, to replace, or refund of an equitable portion of the purchase price of the Product.

  • Page 15: Garantie

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual Garantie Die vom Anbieter hergestellten Produkte sind im Hinblick auf schadhafte Werkstoffe und Verarbeitung für eine Zeitdauer von zwölf (12) Monaten ab Versanddatum derselben an den Kunden garantiert, und die Verpflichtungen des Anbieters im Rahmen gültiger Garantieansprüche ist nach Ermessen des Anbieters auf die...
  • Page 16 Models 947, 948 and 960 Leak Detectors Operations and Service Manual This page intentionally left blank.

  • Page 17: Factory Calibration Data

    Serial Number: Initials: Your Varian 947/948/960 leak detector has been thoroughly tested prior to shipment. It is shipped tuned to helium on Filament No. 1. Normally, once set, the tuning adjustments are left untouched and calibration may be verified as required.

  • Page 18: Hazard And Safety Information

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual Hazard and Safety Information This manual uses the following standard safety protocols: The warning messages are for attracting the attention of WARNING the operator to a particular procedure or practice which, if not followed correctly, could lead to serious injury.

  • Page 19: Solvents

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual Solvents The mechanical components of leak detectors are CAUTION typically cleaned with alcohol, methanol, or other solvents. When heated, sprayed, or exposed to high-temperature equipment, these solvents become flammable and explosive, causing serious injury or death.

  • Page 20: Equipment, General

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual Equipment, General The leak detector is not designed for use with hazardous WARNING gases. Verify that the system to be tested has been purged of all hazardous gases prior to using the leak detector.When testing a system that contained...

  • Page 21: Power And Static

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual Power and Static Disconnect power from the leak detector before WARNING performing any maintenance procedure that requires physically disconnecting any part of the system. Many components of the leak detector are CAUTION static-sensitive devices.

  • Page 22: Vacuum Equipment And Cleanliness

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual This equipment generates, uses, and can radiate RF CAUTION energy, and if not installed and used in accordance with the instructional manual, may cause harmful interference to radio communications.

  • Page 23: O-Ring Care

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual O-ring Care When removing, checking, or replacing O-rings, keep in mind the following: Varian Vacuum Technologies recommends replacing NOTE all O-rings during routine maintenance or during any maintenance procedure requiring that O-rings be removed.

  • Page 24: Spectrometer Tube

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual Spectrometer Tube The spectrometer tube operates at a very high vacuum CAUTION produced by the high vacuum pump. Service of the spectrometer tube requires that this vacuum be vented to the atmosphere.

  • Page 25: Varian Services

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual Varian Services The following are just a few of the many services that Varian offers its customers. Please see our catalog, or contact us to learn of the services that are available. Contact Varian Vacuum Technologies Customer Service at 1-800-8VARIAN for details.

  • Page 26: Informationen Über Gefahren Und Sicherheit

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual Informationen über Gefahren und Sicherheit In diesem Handbuch werden die folgenden standardgemäßen Sicherheitsprotokolle verwendet: Warnhinweise dienen dazu, die Aufmerksamkeit des WARNUNG Bedieners auf bestimmte Verfahren oder Vorgehensweisen zu lenken, die, wenn sie nicht vorschriftsmäßig befolgt werden, zu schwerwiegenden...

  • Page 27: Lösungsmittel

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual Lösungsmittel Die mechanischen Komponenten des Lecksuchers VORSICHT werden in der Regel mit Alkohol, Methanol oder anderen Lösungsmitteln gereinigt. Werden diese Komponenten erwärmt, besprüht oder Hochtemperaturgeräten ausgesetzt, entwickeln diese Lösungsmittel entzündbare und explosive Eigenschaften und können somit schwerwiegende Verletzungen mit...

  • Page 28: Maschinen, Allgemein

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual Maschinen, allgemein Der Lecksucher eignet sich nicht für eine Verwendung WARNUNG mit gefährlichen Gasen. Vergewissern Sie sich, dass alle gefährlichen Gase vom System abgelassen wurden, bevor Sie den Lecksucher benutzen. Bei der Prüfung eines Systems, das gefährliche Gase enthalten hat, muss...

  • Page 29: Strom Und Statik

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual Strom und Statik Trennen Sie den Lecksucher von der WARNUNG Netzstromversorgung, bevor Sie jegliche Wartungsverfahren durchführen, die eine physikalische Trennung eines beliebeigen Systemteils erfordert. Viele Komponenten des Lecksuchers sind statisch VORSICHT geladen.
  • Page 30 Models 947, 948 and 960 Leak Detectors Operations and Service Manual Diese Maschine generiert, benutzt und gibt u.U. VORSICHT Hochfrequenzenergie ab und kann, wenn sie nicht in Übereinstimmung mit den im Handbuch enthaltenen Anleitungen installiert und benutzt wird, schädliche Störungen des Funkverkehrs verursachen.

  • Page 31: Vakuumgeräte Und Sauberkeit

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual Vakuumgeräte und Sauberkeit Bei der Wartung von Lecksuchern oder Vakuumgeräten jeglicher Art ist Sauberkeit von größter Bedeutung. Einige Vorgehensweisen spielen bei der Wartung von Lecksuchern eine größere Rolle als bei allgemeinen Arbeiten an Vakuumgeräten.

  • Page 32: Pflege Von O-Ringen

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual Pflege von O-Ringen Beim Entfernen, Prüfen oder Auswechseln von O-Ringen ist Folgendes zu beachten: Varian Vacuum Technologies empfiehlt, im Rahmen HINWEIS routinemäßiger Wartungsarbeiten oder Verfahrensweisen, die das Entfernen von O-Ringen erfordern, alle O-Ringe zu ersetzen.

  • Page 33: Spektrometerrohr

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual Spektrometerrohr Das Spektrometerrohr wird mit einem sehr hohen VORSICHT Vakuum betrieben, das von der Hochvakuumpumpe generiert wird. Bei der Wartung des Spektrometerrohrs ist eine Ableitung dieses Vakuums ins Freie erforderlich.

  • Page 34: Dienstleistungen Von Varian

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual Dienstleistungen von Varian Im Folgenden werden nur einige der umfassenden Dienstleistungen aufgeführt, die Varian seinen Kunden zu bieten hat. Um Näheres über die verfügbaren Dienstleistungen zu erfahren, nehmen Sie bitte auf unseren Katalog Bezug oder setzen Sie sich mit uns in Verbindung.
  • Page 35 Vacuum system (960 uses conventional flow) Platform electronics Front panel and indicators The 947/948/960 can be configured with dry or wet pumps. The 948/960 have a nitrogen cold trap. The platform electronics, service pendant, and displays are located in the turret. Leak rate and system status information is displayed on the front panel, and is also available through the rear panel I/O.

  • Page 36: Leak Detector

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual The Model 947 is shown in Figure 1-1. Descriptions of the turret and operational buttons identified in Figure 1-1 follow the figure. Models 948/960 are shown in Figure 1-2.

  • Page 37: Leak Detector

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual Models 948/960 are shown in Figure 1-2. The door on the working surface of the 948/960 provides access to the nitrogen cold trap. Descriptions of the turret, operational buttons, and nitrogen trap identified in Figure 1-2 follow the figure.

  • Page 38: Platform Electronics

    Refer to the Unpacking Instructions located on the outside of the shipping container before opening the container. The 947/948/960 are carefully packed onto a shock absorbing skid and enclosed by a heavy cardboard container banded to the skid. The factory packing provides maximum protection during shipment.

  • Page 39: Removing The 947/948/960 From The Skid

    4. Carefully cut the strapping holding the leak detector on the skid. 5. Remove any loose boxes or packages and put them aside. Keep the original packing for re-use in the event that it is necessary to return the leak detector to Varian Vacuum Technologies.

  • Page 40: Removing Loose Packing From Interior Of 947/948/960

    Once the 947/948/960 is off the skid, the loose packing inside the enclosure must be removed. 1. Open the front panel of the 947/948/960, which is the main access to service the pumps and the spectrometer tube. 2. Take out and remove all loose packing from inside the leak detector.
  • Page 41 Models 947, 948 and 960 Leak Detectors Operations and Service Manual Volume Control Controls the volume of the audible leak rate signal. Display Button Displays the selected reject level of the leak detector using the 50-segment leak rate bar graph and the appropriate range exponent.
  • Page 42 Models 947, 948 and 960 Leak Detectors Operations and Service Manual Smaller/Larger Exponent When Manual Range changing is selected: Selection Buttons SMALLER decreases the leak rate exponent. LARGER increases the leak rate exponent. Holding the SMALLER or LARGER button down for more than 3 seconds (wait for the exponent to begin flashing) stores the value of the manual range exponent in EPROM.

  • Page 43: Inner Door Instruction Label

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual 1.4 Inner Door Instruction Label The label on the inside of the lockable turret door (Figure 1-4) provides: An abbreviated list of leak detector operating instructions to be used when the operator is familiar with normal operation of the 947/948/960.

  • Page 44: Rear Panel Power Connection And Circuit Breakers

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual 1.5 Rear Panel Power Connection and Circuit Breakers Figure 1-5 shows the rear power panel of the 947/948/960. Descriptions of the rear panel elements follow the figure. Figure 1-5 Rear Power Panel...

  • Page 45: Service Pendant

    LCD display (see Figure 1-6). The service pendant is stored in the turret and connects to the 947/948/960 using a six-foot cable that connects to an RS-232 serial port (J1, a 9-pin D sub connector) located inside the lockable turret.

  • Page 46: Installation Preparation

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual 1.7 Installation Preparation To prepare the 947/948/960 for operation: Have power and liquid nitrogen (948/960 only) available Check oil level of wet pumps Adhere to special installation requirements for a clean room (if required) Set up an appointment for Installation services (see page 1-13) 1.7.1 Power...

  • Page 47: Liquid Nitrogen (Models 948/960 Only)

    1.7.3 Oil-Sealed Vacuum Pumps The 947/948/960 is available with either dry or wet (oil-sealed) mechanical pumps. Units built with oil-sealed pumps are shipped with the proper initial charge of oil, however, the oil level should be checked after the pumps have been running for at least ten minutes. On the front of each of the roughing and forepumps is an oil level sight glass.

  • Page 48: Storage

    Refer to Section 3, “Operation”, of this manual for operating instructions. 1.9 Optional Rear Panel Interface Connections Figure 1-7 shows the optional rear interface connection panel of the 947/948/960. Descriptions of the rear panel connectors follow the figure. Figure 1-7 Rear Panel Interface Connectors...
  • Page 49 Models 947, 948 and 960 Leak Detectors Operations and Service Manual Einführung in die Lecksucher, Modell 947, 948 und 960 Die Modell 947, Modell 948 und Modell 960 von Varian Vacuum Technologies sind ® Plattform Auto-Test Helium-Spektrometer-Lecksucher. In diesem Handbuch werden die Lecksucher als Modelle 947/948/960 bezeichnet.

  • Page 50: Lecksucher

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual Modell 947 ist in Abbildung 1-8 zu sehen. Beschreibungen des Aufsatzes und der Betriebstasten, die in Abbildung 1-8 gekennzeichnet sind, entsprechen der Abbildung. Modelle 948/960 sind in Abbildung 1-9 zu sehen.

  • Page 51: Lecksucher

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual Modelle 948/960 sind in Abbildung 1-9 zu sehen. Die Tür auf der Arbeitsfläche der 948/960 ermöglicht den Zugang zur Stickstoff-Kühlfalle. Beschreibungen des Aufsatzes, der Betriebstasten und Stickstoff-Kühlfalle, die in Abbildung 1-9 gekennzeichnet sind, entsprechen der Abbildung.

  • Page 52: Plattformelektronik

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual 1.10 Plattformelektronik Die 947/948/960 benutzen die Plattform-Lecksuchelektronik von Varian Vacuum Technologies, Die Spektrometereinheit zu betätigen Die mechanischen und Hochvakuum-Pumpen zu steuern Die Ventile zu steuern Informationen über die Leckrate und den Systemstatus an die Bedienerschnittstelle und den rückseitigen E/A zu leiten...

  • Page 53: Anleitungen Zum Auspacken

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual 1.11.6 Anleitungen zum Auspacken Gehen Sie beim Auspacken und Lösen der 947/948/960 von der Palette wie folgt vor: 1. Untersuchen Sie den Container auf Anzeichen von während des Transports entstandenen Schäden.

  • Page 54: Entfernen Der Losen Verpackungsteile Aus Dem Innenraum Der 947/948/960

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual Vorgehensweise 1 1. Rollen Sie den Lecksucher mit Hilfe einer zweiten Person vorsichtig zur Vorderseite der Palette. 2. Heben Sie das vordere Ende der Einheit an und senken Sie sie behutsam auf den Boden.

  • Page 55: Anzeigen Und Steuerelemente Der Fronttafel

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual 1.12 Anzeigen und Steuerelemente der Fronttafel Die Steuerelemente und Anzeigen der Fronttafel werden in Abbildung 1-10 anhand von Zahlen gekennzeichnet Abbildung 1-10. 16 17 Abbildung 1-10 Anzeigen und Steuerelemente der Fronttafels Lautstärkenregelung...
  • Page 56 Models 947, 948 and 960 Leak Detectors Operations and Service Manual Prüfschalter "Umstellen auf Fein" Stellt den Lecksucher im Großleckmodus in der Position NEIN fest. In der Position AUTO erfolgt eine Umstellung auf den Feinprüfmodus. Anzeige Sollwerttaste Zeigt den Sollwert des Übertragungsdrucks auf dem Prüfausgangsdruck-Balkendiagramm an.
  • Page 57 Models 947, 948 and 960 Leak Detectors Operations and Service Manual Wahltasten für kleinere / größere Bei einer Auswahl der manuellen Exponenten Bereichsänderung: verringert KLEINER den Exponenten der Leckrate. erhöht GRÖSSER den Exponenten der Leckrate. Wird die Taste KLEINER oder GRÖSSER länger als 3 Sekunden niedergehalten...

  • Page 58: Anweisungsschild An Der Innentür

    Das Schild an der Innenseite der verschließbaren Aufsatztür (Abbildung 1-11) enthält folgende Angaben: Eine verkürzte Liste der Betriebsanleitungen des Lecksuchers, die dann zu benutzen ist, wenn der Bediener mit dem normalen Betrieb der 947/948/960 vertraut ist. Fehlercodes und Lösungen Die Standard-Leckeinstellung des Lecksuchers nach Werksmessung Abbildung 1-11 Anweisungsschild auf Aufsatztür...

  • Page 59: Rückseitige Schalttafelstromanschluss Und Trennschalter

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual 1.14 Rückseitige Schalttafelstromanschluss und Trennschalter Abbildung 1-12 zeigt die rückseitige Schalttafel der 947/948/960. Die Beschreibungen der Elemente auf der rückseitigen Schalttafel entsprechen der Abbildung. Abbildung 1-12 Rückseitige Schalttafel Strom- und Trennschalter auf der rückseitigen Schalttafel...

  • Page 60: Hängebedienungstafel

    1.15 Hängebedienungstafel Die Hängebedienungstafel dient zum Einstellen und Anzeigen von Parametern für die Lecksucher 947/948/960. Es handelt sich dabei um eine handgehaltene Einheit mit einem 40 Tasten umfassenden Tastenfeld und einer hinterleuchteten Flüssigkristallanzeige aus 20 Zeichen x 4 Zeilen (siehe Abbildung 1-13). Die Hängebedienungstafel wird im Aufsatz aufbewahrt und wird anhand eines 2m langen Kabels an einen seriellen Anschluss (J1, ein 9-Pin D Neben verbinder) im verschließbaren Aufsatz an die 947/948/960 angeschlossen.

  • Page 61: Vorbereitung Zur Installation

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual 1.16 Vorbereitung zur Installation Bereiten Sie die 947/948/960 wie folgt auf den Betrieb vor: Vergewissern Sie sich, dass ein Stromanschluss und Flüssigstickstoff (nur 948/960) verfügbar sind. Prüfen Sie den Ölstand der Nasspumpen.

  • Page 62: Flüssigstickstoff (Nur Modell 948/960)

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual 1.16.2 Flüssigstickstoff (nur Modell 948/960) Die Menge des Flüssigstickstoffs, die zur Wahrung der Betriebsfähigkeit der Kühlfalle erforderlich ist, beträgt ca. drei Liter täglich (bei der ersten Inbetriebnahme etwas mehr).

  • Page 63: Installationsdienste

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual 1.16.5 Installationsdienste Installation, Betriebsprüfungen und Betriebsanleitungen für ihre 947/948/960 sind von einem qualifiziertenVarian Techniker von Vacuum Technologies erhältlich. Wenn Sie Ihren Lecksucher ausgepackt haben und der gewünschte Dienst verfügbar ist, wenden Sie sich bitte an Ihre nächste Varian Vacuum Technologies Niederlassung, um...

  • Page 64: Optionale Anschlüsse An Der Rückseitigen Schalttafel

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual 1.18 Optionale Anschlüsse an der rückseitigen Schalttafel Abbildung 1-14 zeigt die optionale rückseitige Schalttafel der 947/948/960. Die Beschreibungen der Anschlüsse auf der rückseitigen Schalttafel entsprechen der Abbildung. Abbildung 1-14 Schnittstellenanschlüsse an der rückseitigen Schalttafel An der rückseitigen Schalttafel sind folgende Anschlüsse verfügbar:...

  • Page 65: Section 2. Leak Detector Integration

    Although Models 947/948/960 are considered stand-alone units, all the models can be incorporated into a production line connected to a host computer or PLC. This section details the setup and operation of Models 947/948/960 into a production line, or for use as automated equipment, rather than stand-alone equipment.

  • Page 66: Flow Diagram

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual In Figure 2-1 and Figure 2-3 on page 2-5, valves are designated by numbers in white circles ( ), other key parts of the vacuum system are designated by numbers in black circles ( ).

  • Page 67: Ablaufdiagramm

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual In Abbildung 2-2 und Abbildung 2-4 on page 2-6, werden Ventile durch Nummern in weißen Kreisen ( ), andere wichtige Teile des Vakuumsystems durch Nummern in schwarzen Kreisen ( ) gekennzeichnet. Die wichtigen Teile werden in der nachfolgenden Abbildung identifiziert.

  • Page 68: Valve Operation

    Table 2-1 serves two purposes. In the upper portion, the valve name and type are defined. In the lower portion, Table 2-1 indicates the valve state (open or closed) in relation to the system status for testing the 947/948/960. The following abbreviations are used in Table 2-1: V=Vacuum...

  • Page 69: Flow Diagram

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual In Figure 2-3, numbers in white circles designate the location of valves. Other key parts of the vacuum system, represented by numbers in black circles, are identified after Figure 2-3.

  • Page 70: Ablaufdiagramm

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual In Abbildung 2-4 kennzeichnen die Nummern in weißen Kreisen die Position der Ventile. Andere wichtige Teile des Vakuumsystems, angezeigt durch Nummern in schwarzen Kreisen, werden nach Abbildung 2-4 identifiziert.

  • Page 71: Flow Diagram

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual In Figure 2-5, numbers in white circles designate the location of valves. Other key parts of the vacuum system, represented by numbers in black circles, are identified after Figure 2-5.

  • Page 72: Flow Diagram

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual In Figure 2-6, numbers in white circles designate the location of valves. Other key parts of the vacuum system, represented by numbers in black circles, are identified after Figure 2-6.

  • Page 73: Electronic Considerations For The Optional Rear Panel Interface

    2.3 Electronic Considerations for the Optional Rear Panel Interface This section includes information necessary to interface the 947/948/960 with a PLC or a host computer using either serial or parallel communications through the optional rear panel interface via J120 Discrete I/O, J121 BCD Outputs and J123 Host Serial Port.

  • Page 74: Bcd J121 Outputs

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual Table 2-2 J120 Input Connections (Continued) Description Pin on Input Name Momentary or Level J120 Calibrating Active High Active when Auto Cal. Ready Active High Active when system is operating (inverse of “Not Ready”).

  • Page 75: Host Serial Port J123 Pinouts

    Ground for J121 2.3.3 Host Serial Port J123 Pinouts The Host Serial Port is used to interface the 947/948/960 to a PLC or host computer via an RS-232 connection. Table 2-4 provides details about the connection. J123 connections are referenced to the chassis ground and are not isolated. Electrical characteristics comply with EIA/TIA Standard EIA/TIA-232-E.

  • Page 76: Optional Interface Connections

    The rear panel connectors are shown in Figure 2-7. Figure 2-7 Rear Panel 2.4.1 Grounding and Isolation The service, remote, and rear panel RS-232 ports in the 947/948/960 are referenced to the chassis ground and to the system ground. 2-12...

  • Page 77: Setup

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual 2.4.2 Setup Parameters relating to the operation and performance of the 947/948/960 Platform are stored in EPROM. These parameters can be viewed and changed via the service pendant or rear serial ports.
  • Page 78 Models 947, 948 and 960 Leak Detectors Operations and Service Manual If the I/O on J120 is used, then: +5 VDC to +24 VDC must be applied to J120, pins 27 and 28. The +5 VDC to +24 VDC return must be connected to J120, pins 1 and 25.

  • Page 79: Operation Using The Optional Rear Panel Interface

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual 2.5 Operation using the Optional Rear Panel Interface Once setup is complete and the 947/948/960 is warmed up, operation can be turned over to the discrete I/O by asserting the PARALLEL ENABLE input (J120 pin 6). Operations can be monitored using the front panel display, or via a PLC.
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  • Page 81: Section 3. Operation

    Section 3. Operation To obtain accurate readings using the 947/948/960 leak detectors, follow the operational procedures listed in this section. The 947/948/960 measure the leak rate in atm cc/sec. The procedures explain how to: Start and warm up the 947/948/960.
  • Page 82 Models 947, 948 and 960 Leak Detectors Operations and Service Manual During operation, the LED functions are illuminated to indicate the operation being performed. The definitions of the operations are as follows: VENT Illuminates when the vent valve is open. The LED is off when the valve is closed.

  • Page 83: Initial System Parameter Setup

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual 3.2 Initial System Parameter Setup The 947/948/960 performs functions and tests based upon parameter values. Some parameters are entered and set when the system is assembled and tested. Some parameters are calculated and change automatically during power up, Calibrate, or Zero functions.
  • Page 84 Models 947, 948 and 960 Leak Detectors Operations and Service Manual This feature is useful when a product specification is more than one decade less stringent than the sensitivity of the leak detection system as it is configured. If the configured −9...
  • Page 85 Models 947, 948 and 960 Leak Detectors Operations and Service Manual REJECT SET POINTS The REJECT SET POINTS are used to alert the operator that a measured leak rate has exceeded the set value. There are four set points available. Each set point must be enabled before they are operational.
  • Page 86 Models 947, 948 and 960 Leak Detectors Operations and Service Manual AUTO-SEQUENCER Provides clear accept/reject signals and allows programming for roughing, testing, and cycling times. Auto sequencer provides the ability to set up the 947/948/960 so that it automatically runs through a complete test cycle (START/ROUGH/TEST/VENT), passing or failing the test part per the test specification entered by the user.
  • Page 87 Models 947, 948 and 960 Leak Detectors Operations and Service Manual ROUGH TIME The ROUGH TIME variable determines the amount of time that the leak detector is allowed to evacuate the test object to the tolerable test transfer pressure. In AUTO SEQUENCER mode, the 947/948/960 transfers into test as soon as the tolerable transfer pressure is met.
  • Page 88 Models 947, 948 and 960 Leak Detectors Operations and Service Manual TRANSFER POINTS Set the test transfer pressures for each testing mode. The transfer pressure settings can be adjusted to lower values for specific applications. The 947/948/960 has pre-programmed upper transfer pressure limits that are slightly greater than the default settings.

  • Page 89: Start-Up

    Helium tank with spray gun or hook up for auto test (Helium for the 948/960) Figure 3-2 shows the important 947/948/960 operation controls for start up and power. For circuit breaker descriptions, refer to Section 1.5, “Rear Panel Power Connection and Circuit Breakers”...

  • Page 90: Startup Procedure

    Refer to Figure 3-2 and follow the start up procedure, listed in the next Section, and in Section 3.4, “Calibration and Sensitivity Checks” procedure to put the 947/948/960 in a Ready for Operation state from the All Systems off condition.

  • Page 91: Calibration And Sensitivity Checks

    947/948/960. 3.4 Calibration and Sensitivity Checks At the beginning of each workday or shift, or as conditions require, verify 947/948/960 integrity by performing the Calibration and Sensitivity Check procedure. Compliance with this procedure prepare your detector for normal daily operation. If the NOT READY LED comes on during calibration, refer to the condition code that appears in the leak rate exponent display shown in Figure 3-3.

  • Page 92: Calibration And Sensitivity Checks

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual Table 3-1 lists the Not Ready condition codes and the action to take to correct the error condition. Table 3-1 NOT READY Condition Codes Code Problem Solution Amplifier Offset is Notify Varian Vacuum Technologies Customer Service.
  • Page 93 Models 947, 948 and 960 Leak Detectors Operations and Service Manual 5. Press the START button. The VENT LED goes off. The START LED illuminates. The TEST LED illuminates when test pressure drops. The START LED goes off (1 second) after TEST LED illuminates.

  • Page 94: Operating Procedures

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual 3.5 Operating Procedures The testing parameters vary from one manufacturing environment to another. Appendix G, “Leak Detection Theory” describes the conditions under which the 947/948/960 Leak Detectors can be utilized. There are many applications. A Varian Vacuum Technologies representative is always available for technical assistance.

  • Page 95: Manual Ranging

    3. Press the SMALLER or LARGER button to select the exponent of the leak rate range to which you want to test. 4. Securely attach the new unit under test to the test port while the 947/948/960 is in VENT mode.

  • Page 96: Standby

    When continued use of 947/948/960 is not anticipated, STANDBY mode, a partial shutdown, can be used to save energy. To put the 947/948/960 into STANDBY mode: 1. Press the VENT button and hold it until the Vent LED comes on.

  • Page 97: Shutdown

    3.8 Using the Pendant for Parameter Setup The service pendant is stored in the turret and is connected to Models 947/948/960 at J1 in the turret for parameter changes, monitoring, or diagnostics. The pendant must be connected to the 947/948/960 to operate any of the functions. Refer to Appendix G, “Leak Detection Theory”...

  • Page 98: Optional Discrete I/O

    To use the optional discrete I/O connections, connect to J120 and J121 on the rear panel. Refer to Appendix D, “Inputs and Outputs” for detailed information. When operating the 947/948/960 from the optional discrete I/O, it is necessary to make the PARALLEL ENABLE (J120 pin 6) active. This allows the leak detector to accept commands from the other discrete I/O inputs.

  • Page 99: Betrieb

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual Betrieb Um mit den Lecksuchern 947/948/960 genaue Werte zu erzielen, befolgen Sie die in diesem Abschnitt aufgeführten Betriebsverfahren. Die 947/948/960 messen die Leckrate in atm cc/Sek. Die Verfahren erkären: Starten und Warmlaufen der 947/948/960.

  • Page 100: Led-Anzeigen Und Steuerelemente Auf Der Fronttafel

    3.10 LED-Anzeigen und Steuerelemente auf der Fronttafel Abbildung 3-6 zeigt die LED-Anzeigen und Steuerelemente auf der Fronttafel (rechte Seite) des 947/948/960 Aufsatzes. Eine Definition der Tasten ist unter Abschnitt 1.12, “Anzeigen und Steuerelemente der Fronttafel” auf Seite 1-21 zu finden.
  • Page 101 Models 947, 948 and 960 Leak Detectors Operations and Service Manual ZERO (Null) Leuchtet auf, wenn die Taste ZERO betätigt oder wenn im Rahmen der Kalibrierungssequenz die automatische Nullstellung durchgeführt wird. Die LED erlischt eine Sekunde nach Beendigung der automatischen Nullstellung oder wenn der Lecksucher seinen Bereitschaftszustand verlässt.

  • Page 102: Erste Einstellung Der Systemparameter

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual 3.11 Erste Einstellung der Systemparameter Die 947/948/960 führen Funktionen und Prüfungen durch, die auf Parameterwerten beruhen. Einige Parameter werden beim Aufstellen und Prüfen des Systems eingegeben und eingestellt. Einige Parameter werden während der Inbetriebnahme, Kalibrierung oder Nullstellung berechnet und automatisch geändert.
  • Page 103 Models 947, 948 and 960 Leak Detectors Operations and Service Manual RANGE STOP Mit der Funktion RANGE STOP werden die 947/948/960 so konfiguriert, dass ihr Bereich automatisch nur bis zur vorab ausgewählten Dekade, die im Variablenfeld für "Bereich Stopp" eingegeben wurde, eingestellt wird. Wenn zum Beispiel RANGE STOP aktiviert und auf −07 eingestellt ist,...
  • Page 104 Models 947, 948 and 960 Leak Detectors Operations and Service Manual ZERO (Null) Die Funktion ZERO liest das Hintergrund-Leckratensignal, speichert den Wert und stellt dann den Nullbezugspunkt zurück. Anschließende tatsächliche Prüfmessungen schließen sowohl Helium vom echten Leck als auch Helium von Hintergrundbedingungen ein, das verzeichnete...
  • Page 105 Models 947, 948 and 960 Leak Detectors Operations and Service Manual AUTO-SEQUENCER Diese Funktion generiert Annahme-/Rückweisungssignale (automatische und ermöglicht die Programmierung von Grob-, Prüf- und Ablaufsteuerung) Zykluszeiten. Die automatische Ablaufsteuerung ermöglicht die Einstellung der 947/948/960, sodass sie automatisch einen kompletten Prüfzyklus (START/ROUGH/TEST/VENT) durchlaufen und den jeweiligen Teil der Prüfung je nach den vom Benutzer...
  • Page 106 Models 947, 948 and 960 Leak Detectors Operations and Service Manual ROUGH TIME (Grobzeit) Die Variable ROUGH TIME bestimmt die Zeitdauer, die dem Lecksucher für die Evakuierung des Prüfobjekts zum annehmbaren Prüfübertragungsdruck zugemessen wird. Im automatischen Ablaufsteuerungsmodus beginnen die 947/948/960 die Prüfung, sobald der annehmbare Prüfübertragungsdruck erreicht wird.
  • Page 107 Models 947, 948 and 960 Leak Detectors Operations and Service Manual GROSS TEST ONLY Die Lecksucher 947/948/960 benutzen das (nur Grobprüfung) Contra-Flow-System, das über ein Grobleckmanifold HOLDING IN GROSS FOR verfügt und eine Prüfung bei höherem Eingangsdruck und LARGE LEAKS reduzierter Empfindlichkeit zulässt.

  • Page 108: Inbetriebnahme

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual 3.12 Inbetriebnahme Für den Betrieb der 947/948/960 benötigen Sie: Prüfanschlüsse für die zu prüfende Einheit Heliumtank mit Spritzpistole oder Anschluss für automatische Prüfung (Helium für 948/960) Abbildung 3-7 zeigt die wichtigen Steuerelemente der 947/948/960 für Inbetriebnahmen und Netzanschluss.
  • Page 109 Models 947, 948 and 960 Leak Detectors Operations and Service Manual Netzschalter / Netzstrom- und Trennschalter Trennschalter Schalter für Zum Ein-/Ausschalten der Grobvakuumpumpe Grobvakuumpumpe Lecksucher-Schalter Zum Ein-/Ausschalten der Vorvakuum- und Hochvakuumpumpe START-Taste Startet das Prüfverfahren der 947/948/960. Drücken Sie diese Taste und halten Sie sie eine Sekunde lang nieder, um das Verfahren zu aktivieren.

  • Page 110: Anleitungen Zur Inbetriebnahme

    Nehmen Sie vor dem Nachfüllen Bezug auf Abschnitt 4, “Maintenance” wo das Reinigungsverfahren für die Kühlfalle beschrieben wird. 5. Warten Sie 30 Minuten, bis die 947/948/960 ihre Betriebstemperatur erreicht haben. 6. Der Lecksucher ist nun eingeschaltet und für den Normalbetrieb einsatzbereit. Führen Sie eine Kalibrierungs- und HINWEIS Empfindlichkeitsprüfung vor, bevor Sie mit den...

  • Page 111: Kalibrierungs- Und Empfindlichkeitsprüfungen

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual 3.13 Kalibrierungs- und Empfindlichkeitsprüfungen Verifizieren Sie zu Beginn jedes Arbeitstages oder jeder Schicht oder je nach Bedingungen die Integrität der 947/948/960, indem Sie eine Kalibrierungs- und Empfindlichkeitsprüfung vornehmen. Eine Einhaltung dieser Vorgehensweise bereiten Ihren Lecksucher auf den normalen täglichen Betrieb vor.

  • Page 112: Kalibrierungs- Und Empfindlichkeitsprüfungen

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual Tablelle 3-2 Zustandscodes für nicht betriebsbereites System Code Problem Lösung Automatische Klopfen Sie leicht auf die AUTO CAL Taste. (Ein kurzes Klopfen kann Feineinstellung liegt diesen Fehlerzustand beheben und den Betrieb des Lecksuchers außerhalb des Bereichs...
  • Page 113 Models 947, 948 and 960 Leak Detectors Operations and Service Manual 5. Drücken Sie die Taste START. Die LED VENT erlischt. Die LED START leuchtet auf. Die LED TEST leuchtet auf, wenn der Prüfdruck abfällt. Die LED START erlischt (1 Sekunde) nach Aufleuchten der LED TEST.

  • Page 114: Betriebsverfahren

    Automatische Bereichseinstellung für Outside-In-Prüfungen: 1. Drücken Sie die Taste VENT. Schließen Sie die neue Einheit, die geprüft werden soll, sicher am Prüfport an, während die 947/948/960 sich im Modus VENT befinden. Die LED TEST erlischt. Die LED VENT leuchtet auf.

  • Page 115: Position Des Schalters Auto/Man Mode

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual Abbildung 3-9 Position des Schalters AUTO/MAN MODE 3. Drücken Sie die Taste START. Die LED VENT erlischt und eine Sekunde später leuchtet die LED START auf. Die LED TEST leuchtet auf.

  • Page 116: Manuelle Bereichseinstellung

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual 3.14.2 Manuelle Bereichseinstellung Die manuelle Bereichseinstellung wird dann benutzt, wenn der Fehlerbereich des Teils, das geprüft wird, bekannt ist. Gehen Sie bei der manuellen Bereichseinstellung wie folgt vor: 1. Drücken Sie die Taste VENT.

  • Page 117: Bereitschaft

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual 3.15 Bereitschaft Wenn nicht mit einem kontinuierlichen Gebrauch der 947/948/960 zu rechnen ist, kann der Modus STANDBY, in dem die Einheit teilweise abgeschaltet wird, benutzt werden, um Energie zu sparen. 947/948/960 werden wie folgt auf den Modus STANDBY eingestellt: 1.

  • Page 118: Parametereinstellung Mit Der Hängebedienungstafel

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual 3.17 Parametereinstellung mit der Hängebedienungstafel Die Hängebedienungstafel wird im Aufsatz aufbewahrt und ist zwecks Parameteränderungen, Überwachung und Diagnostik an den Modellen 947/948/960 an J1 im Aufsatz angeschlossen. Um eine dieser Funktionen bedienen zu können, muss die Hängebedienungstafel an die 947/948/960 angeschlossen sein.

  • Page 119: Optionale Diskrete E/A

    Anschlüsse an J121 und J121 an der rückseitigen Schalttafel vor. Für detaillierte Informationen siehe Anhang D, “Inputs and Outputs”. Bei einem Betrieb der 947/948/960 über die optionalen diskreten E/A ist es erforderlich, PARALLEL ENABLE (J120 Pin 6) zu aktivieren. So kann der Lecksucher Befehle von den anderen diskreten E/A-Eingängen empfangen.
  • Page 120 Models 947, 948 and 960 Leak Detectors Operations and Service Manual This page intentionally left blank.

  • Page 121: Section 4. Maintenance

    For heavy production use, more frequent overhauls are needed. In most cases, this work is done by user maintenance personnel, but it may also be done by Varian Vacuum Technologies under the terms of a service contract.
  • Page 122 Models 947, 948 and 960 Leak Detectors Operations and Service Manual Cleanliness is vital when servicing the leak detector or any vacuum equipment. The following are especially important in the servicing of leak detectors: Do not use silicone oil or silicone grease.

  • Page 123: Scheduled Maintenance

    See “Spare Parts” on page 4-37 for more information. The 947/948/960 must be calibrated to verify sensitivity at least once a day. However, other functions may be carried out more or less often, depending on the frequency of use.

  • Page 124: As-Required Maintenance

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual On-demand maintenance functions are listed in Table 4-2. Table 4-2 As-Required Maintenance Most Common Symptom Refer to Trap almost empty, nearly 14 hours without a refill. “Liquid Nitrogen Cold Trap (Models 948/960 only)” on page 4-10 Preamplifier failure.

  • Page 125: Daily Maintenance

    To perform a calibration check: 1. Press the STD LEAK button. 2. Compare the value displayed on the 947/948/960 to the value of the known calibrated leak listed on the label on the top of the turret. Refer to Figure 1-1 on page 1-2 for the location of the label.

  • Page 126: General Suggestions For Leak Checking

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual 4.1.1.2 General Suggestions for Leak Checking The following suggestions apply whether leak checking components, systems, or the leak detector itself: 1. When spraying suspected leak locations: Always apply helium sparingly.

  • Page 127: Yearly Maintenance

    Helium calibrated leaks typically degrade at 3 percent per year. The calibrated leak supplied with your 947/948/960 must be checked at least once a year to ensure it is at the value stated on its label. Failure to check the leak could result in unreliable testing. You can arrange for testing and re-calibration at a lab of your choice.
  • Page 128 Models 947, 948 and 960 Leak Detectors Operations and Service Manual To remove the internal calibrated leak: 1. Disconnect the mains power supply and make sure all pumps are off. Disconnect power from the 947/948/960 before WARNING performing any maintenance procedure that requires physically disconnecting any part of the system.

  • Page 129: Replacing The Internal Calibrated Leak

    (Models 948/960 only)” on page 4-10. Follow all warnings and cautions in the procedure. 8. Calibrate the 947/948/960 using the procedure described in “Re-calibrate the Internal Calibrated Leak” on page 4-7. 9. Leak check the assembly before using the 947/948/960 for testing.

  • Page 130: Liquid Nitrogen Cold Trap (Models 948/960 Only)

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual 4.2.3 Liquid Nitrogen Cold Trap (Models 948/960 only) The trap should be refilled with liquid nitrogen (LN ) as needed. A typical time frame for refilling is every 14 hours, depending on usage. During normal usage of the 948/960 Platform leak detector, water vapor and other contaminants build up on the surface of the nitrogen trap.

  • Page 131: Flüssigstickstoff-Kühlfalle (Nur Modele 948/960)

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual 4.2.4 Flüssigstickstoff-Kühlfalle (nur Modele 948/960) Die Falle muss je nach Bedarf mit Flüssigstickstoff (LN ) aufgefüllt werden. Je nach Gebrauch ist ein Nachfüllen alle 14 Stunden erforderlich. Während des Gebrauchs des 948/960 Plattform-Lecksuchers sammeln sich Wasserdampf und andere Kontaminationsstoffe auf der Oberfläche der Stickstofffalle an.

  • Page 132: Spectrometer Tube Overhaul

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual 4.2.5 Spectrometer Tube Overhaul Spectrometer tube overhaul consists of removing, cleaning, and re-installing the 947/948/960 Spectrometer Tube Assembly. Liquid nitrogen causes burns upon contact. Use WARNING appropriate protective devices, including heavy loose gloves and eye or face shields.

  • Page 133: Removal Of The Spectrometer Tube And Preamplifier

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual 4.2.5.1 Removal of the Spectrometer Tube and Preamplifier Refer to Figure 4-2 for the removal of the 947/948/960 spectrometer tube. Liquid nitrogen causes burns upon contact. Use WARNING appropriate protective devices, including heavy loose gloves and eye or face shields.

  • Page 134: Spectrometer Tube Removal

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual 6. Disconnect all four electrical connections to the spectrometer tube To remove the locking connector shown in Figure 4-2, NOTE both metal tabs at the left of the connector must be pushed to unlock the connector, then pull the connector to the right to remove it.

  • Page 135: Disassembly Of The Spectrometer Tube And Preamplifier

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual 4.2.5.2 Disassembly of the Spectrometer Tube and Preamplifier To disassemble the spectrometer tube: 1. Remove the four screws on the spectrometer tube (Figure 4-3), noting the placement of the grounding strap The grounding strap must go back on the same screw during reassembly.

  • Page 136: Spectrometer Tube Disassembly

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual Figure 4-3 Spectrometer Tube Disassembly Store the Ion Source in a cool, dry area in a tightly WARNING sealed container. Wash hands thoroughly after handling the Ion Source and especially before smoking or eating.

  • Page 137: Spectrometer Tube Cleaning

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual Use new O-rings wiped clean with a lint-free cloth. Do not apply vacuum grease to O-rings that come in contact with the spectrometer tube. 4.2.5.3 Spectrometer Tube Cleaning To clean the spectrometer tube: ™...

  • Page 138: Spectrometer Tube Reassembly

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual Figure 4-4 Spectrometer Tube Reassembly 6. Put the heater cartridge back in its cavity (Figure 4-5). Figure 4-5 Spectrometer Tube Reassembly (Ground Slit Plate) 7. With the new O-rings on each of the two deflection pole pieces...
  • Page 139 Models 947, 948 and 960 Leak Detectors Operations and Service Manual 8. When installing the ground slit plate , be sure that the snap prongs are facing up, then align the slit at 90° with the side wall of the spectrometer tube, and concentrically align the circular hole in the plate with the smaller guide hole in the bottom of the ion source cavity (Figure 4-5, View A).

  • Page 140: Spectrometer Tube Reassembly (Magnet Assembly)

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual Figure 4-6 Spectrometer Tube Reassembly (Magnet Assembly) 4-20...

  • Page 141: Reinstallation Of The Spectrometer Tube

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual 4.2.5.5 Reinstallation of the Spectrometer Tube Liquid nitrogen causes burns upon contact. Use WARNING appropriate protective devices, including heavy loose gloves and eye or face shields. Models 948/960 only: Before servicing the NOTE Spectrometer Tube, refer to “Liquid Nitrogen Cold Trap...

  • Page 142: Air Filter

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual 4. Models 948/960 only: Fill the Liquid Nitrogen Cold Trap using the procedure described in “Liquid Nitrogen Cold Trap (Models 948/960 only)” on page 4-10, steps 5 and 6.

  • Page 143: Spectrometer Tube Exchange

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual 4.2.7 Spectrometer Tube Exchange The spectrometer tube replaceable parts consist chiefly of the ion source, the preamplifier, the magnetic poles, and the spectrometer tube as a complete assembly. Because of the complexity and sensitivity of the...

  • Page 144: Spectrometer Tube Installation

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual Do not use grease or other substances on O-rings that CAUTION come in contact with the spectrometer tube. Wipe all O-rings clean with a lint-free cloth before installation to ensure that no foreign matter is present to impair the seal.
  • Page 145 (Models 948/960 only)” on page 4-10. Follow all warnings and cautions in the procedure. 8. Calibrate and tune the 947/948/960 using the procedure described in “Re-calibrate the Internal Calibrated Leak” on page 4-7. 9. Leak check the assembly before using the 947/948/960 for testing.

  • Page 146: Tc1 And Tc2 Gauge Replacement And Calibration

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual 4.2.8 TC1 and TC2 Gauge Replacement and Calibration 4.2.8.1 Replacement of the TC1 Gauge in the Main Valve Block Assembly Figure 4-10 shows the valve block removed from the system.
  • Page 147 Models 947, 948 and 960 Leak Detectors Operations and Service Manual 6. Examine the O-ring for wear. If necessary, use a new O-ring, otherwise clean the O-ring. Before re-using O-rings or installing new O-rings, wipe NOTE them down with a lint-free cloth before installation to ensure that no foreign matter is present to impair the seal.

  • Page 148: Replacement Of The Tc2 Gauge In The Service Block Assembly

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual 4.2.8.2 Replacement of the TC2 Gauge in the Service Block Assembly Liquid nitrogen causes burns upon contact. Use WARNING appropriate protective devices, including heavy loose gloves and eye or face shields.
  • Page 149 Models 947, 948 and 960 Leak Detectors Operations and Service Manual 7. Clean the centering ring and adapter with acetone. making sure all traces of pipe sealant are removed from the threads of the adapter. 8. Examine the O-ring for wear.

  • Page 150: Thermocouple Gauge Calibration Procedures

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual 4.2.8.3 Thermocouple Gauge Calibration Procedures Use the Service Pendant to perform a calibration on either the system pressure thermocouple (TC2) or the test port thermocouple gauge (TC1). Refer to Appendix A, “Service Pendant Keypad Functions”...

  • Page 151: Atmospheric Calibration

    1. Once the system thermocouple (TC2) has been replaced and before powering up the leak detector, turn off the ROUGH pump and DETECTOR switches. 2. Turn on the power switch located on the rear panel of the 947/948/960. 3. Wait for the system NOT READY LED to illuminate.

  • Page 152: Test Port Pressure Gauge (Tc1) Calibration

    6. Wait approximately five minutes for the vacuum system pressure to stabilize. 7. Adjust the Tuning Leak to 100 mTorr as indicated by the Varian 801 and verify that the test port pressure on the test port pressure graph reads 1.0E-01 Torr.

  • Page 153: Atmospheric Calibration

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual 9. Type XYZZY<CR>, then 100 INIT-TPTCZERO<CR>. The system should respond OK. The test port pressure on the test port pressure bar graph should read 1.0E-01 Torr. A FAILED response on the PC is an indication that the calibration was not successful.

  • Page 154: Rough Pump And Forepump Oil Level Check (Oil-Sealed Mechanical Pumps)

    (Figure 4-12). Refer to your pump manual for the proper oil level. If it is low, fill it to the proper level with Varian Vacuum Technologies’ pump oil (part no. 695409005).

  • Page 155: Condition Of Oil (Oil-Sealed Mechanical Pumps)

    4.2.10 Cleaning the Test Port The test port is located at the front center of Models 947/948/960. Thus, it is not necessary to turn the leak detector off or disconnect it from mains power if this is the only procedure being performed.

  • Page 156: Examining And Cleaning The Test Port

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual 2. Remove the test port compression ring and O-ring from the top of the test port (Figure 4-14). Figure 4-14 Remove the Test Port Compression Ring and O-ring 4.2.10.2 Examining and Cleaning the Test Port To perform this procedure: 1.

  • Page 157: Replacing The Test Port

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual 4.2.10.3 Replacing the Test Port To replace the test port: 1. Place the O-ring into the groove of the compression ring. 2. Place the compression ring and O-ring onto the top of the test port (Figure 4-15).

  • Page 158: Replacement Parts

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual Table 4-4 lists the exchange assembly parts. Table 4-4 Exchange Assembly Parts Section Description Part Number Spectrometer Tube Re-gaussed Magnet GGK9814301 Re-built Spec Tube GGK9735301 Vacuum System V70 Turbo Pump...

  • Page 159: Ersatz Teile

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual Tablelle 4-6 enthält eine Liste der auswechselbaren Bauteile. Tablelle 4-6 Auswechselbare Bauteile Abschnitt Beschreibung Teilnummer Spektrometerrohr Neu gegaußter Magnet GGK9814301 Erneuertes Spek.rohr GGK9735301 Vakuumsystem V70 Turbopumpe 9699358 V70D MacroTorr Pumpe...
  • Page 160 Models 947, 948 and 960 Leak Detectors Operations and Service Manual 4-40...

  • Page 161: Section 5. Troubleshooting

    Verify that the leak detector is plugged into an appropriately powered and properly grounded receptacle. Verify that all plugs and connectors are firmly seated (spectrometer tube, electronic cables, pumps, and power supplies). For information about pumps shipped with your 947/948/960, refer to the pump manual that came with your 947/948/960 leak detector.

  • Page 162: Error Condition Codes

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual 5.1 Error Condition Codes Use Table 5-1 to identify the problem by condition code or Figure 5-2 to identify the symptom. Table 5-1 Error Condition Codes Code Problem Area...

  • Page 163: Troubleshooting Symptoms And Solutions

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual 5.2 Troubleshooting Symptoms and Solutions Table 5-2 lists the particular symptoms encountered when troubleshooting the leak detector. For every symptom, there is a list of possible causes and actions you can take to remedy the situation.
  • Page 164 Models 947, 948 and 960 Leak Detectors Operations and Service Manual Table 5-2 Troubleshooting (Continued) Symptom Check For Corrective Action Pumps is gurgling Pump oil is low. Add oil. KF clamps are loose. Tighten the clamps. Forepump manifold or vacuum Check for leaks.

  • Page 165: Fehlerzustandscodes

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual 5.3 Fehlerzustandscodes Identifizieren Sie das Problem nach Zustandscode unter Bezugnahme auf Table 5-3 oder das Symptom unter Bezugnahme auf Tablelle 5-4. Tablelle 5-3 Fehlerzustandscodes Code Problembereich Lösung Verstärker-Offset Der Spektrometerrohr-Verstärker muss gewartet werden. Setzen Sie außerhalb des Bereichs...

  • Page 166: Symptome Und Lösungen Bei Der Fehlersuche

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual 5.4 Symptome und Lösungen bei der Fehlersuche Table 5-4 enthält eine Liste spezifischer Symptome, die bei der Fehlersuche am Lecksucher auftreten können. Für jedes Symptom wird eine Liste möglicher Ursachen und Maßnahmen zur Behebung der Situation aufgeführt.
  • Page 167 Models 947, 948 and 960 Leak Detectors Operations and Service Manual Tablelle 5-4 Fehlersuche (Continued) Symptom Prüfung Korrektive Maßnahme Elektrische Komponenten Kein ON/OFF Schalter an der rückseitigen Vergewissern Sie sich, dass Strom, keine Lampen an der Schalttafel steht nicht auf ON.
  • Page 168 Betrieb. Ein Leck oder Bruch in der Vakuumintegrität kann einen anormalen Betrieb zur Folge haben. Beim Auftreten anderer Probleme wenden Sie sich bitte an den Kundendienst von Varian Vacuum Technologies. Varian Vacuum Technologies verweigert die Annahme HINWEIS eines zurückgesendeten Teils ohne das vorschriftsmäßig ausgefüllte Formular Return Materials Authorization...

  • Page 169: Appendix A. Service Pendant Keypad Functions

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual Appendix A. Service Pendant Keypad Functions A.1 Keypad Functions Figure A-1 shows the service pendant keypad. “Glossary of Function Keys” on page A-3 explains the keys that perform special functions when entering information.

  • Page 170: Using The Service Pendant

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual A.1.1 Using the Service Pendant Each function is printed in black in the center of the key (for example, REJ#). Some functions require the input of a number before the function key is pressed. Other functions, such as queries, do not require any numeric input.

  • Page 171: Glossary Of Function Keys

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual A.2 Glossary of Function Keys Performs the red function on the key pressed after the SHIFT key. SHIFT LK RATE Enters the E for exponential notation inputs such as reject set point.
  • Page 172 Models 947, 948 and 960 Leak Detectors Operations and Service Manual Sets the value of the Gross Leak Transfer Point. Enter X.XE-X (the desired value), followed by SHIFT, then the function key. [SHIFT] GR XFR Example: 5.0E-2 [SHIFT] SET GR XFER (sets Gross Leak Transfer SHOW to 50 mTorr).
  • Page 173 Models 947, 948 and 960 Leak Detectors Operations and Service Manual PRSRS Displays the Test Port and System Pressures. [SHIFT] SHOW VLV ST OFFSET Displays the value of the electronic offset in the Preamplifier. SHOW Sets a temporary value of the electronic offset in the Preamplifier.
  • Page 174 Models 947, 948 and 960 Leak Detectors Operations and Service Manual Sets a permanent new value for Emission Current. Enter XXXX INIT (the desired value), followed by the SHIFT key, then the [SHIFT] EMIS function key. ZERO Initiates an atmosphere calibration of the Test Port TC.
  • Page 175 Models 947, 948 and 960 Leak Detectors Operations and Service Manual [SHIFT] A SEQ Turns on the Auto Sequencer function. Selects filament #1 in the Ion Source. FIL SEL Selects filament #2 in the Ion Source. [SHIFT] FIL SEL OUT V Displays the active filament number.
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  • Page 177: Appendix B. Parts Replacement

    “Replacing the Rough Pump” on page B-15 “Replacing the Forepump” on page B-22 B.1 Removing the Covers Before opening any part of Models 947/948/960 for service, heed the following: Disconnect power from the 947/948/960 before performing any WARNING maintenance procedure that requires physically disconnecting any part of the system.

  • Page 178: Opening The Turret

    1. Loosen the screws of the service pendant serial connection and remove the connection (Figure B-1). The service pendant power cable is still attached to the NOTE electronics housed beneath the pendant shelf. 2. Place the service pendant on the top of the 947/948/960 or on another nearby surface. Screw Serial Connection Screw Figure B-1 Removing the Service Pendant Shelf 3.

  • Page 179: Removing The Top Panel

    B.1.2 Removing the Top Panel The top panel is one piece that includes the turret and its door, a covering of the sides of the control and display panel, and the stainless steel top of the 947/948/960. To remove the 947/948/960 top panel: 1.

  • Page 180: Replacing All Panels And Covers

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual 6. Remove the three, 5-16 screws from under the front of the top cover (Figure B-4). Screw Screw Screw Figure B-4 The Top Panel from the Front of the 947/948/960 7.

  • Page 181: Replacing The Top Panel

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual B.1.3.2 Replacing the Top Panel Be sure power is disconnected from the leak detector WARNING before attempting to replace the top cover. The start button could be pressed while maneuvering the cover into place and the leak detector inadvertently started.

  • Page 182: Replacing The Ion Source

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual B.2 Replacing the Ion Source If the ion source needs replacement (Figure B-5), replace it during spectrometer tube cleaning. Adjustment is required after replacement is complete. Refer to “Calibration and Sensitivity Checks”...
  • Page 183 5. Discard the ion source in accordance with local regulations, or return it to Varian Vacuum Technologies for exchange. 6. Remove the ground slit plate by placing a thin, slotted screwdriver into the slot and carefully twisting and prying with the screwdriver.
  • Page 184 Models 947, 948 and 960 Leak Detectors Operations and Service Manual 11. When installing the ground slit plate, be sure that the snap prongs are facing up. Align the slit at 90° with the side wall of the spectrometer tube and concentrically align the circular hole in the plate with the smaller guide hole in the bottom of the ion source cavity.

  • Page 185: Replacing The Turbo Pump

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual B.3 Replacing the Turbo Pump Models 947/948/960 have one turbo pump and two mechanical pumps: a forepump and a rough pump. B.3.1 Turbo Pump The turbo pump (Figure B-6) is located in the middle front of the main cabinet. You must remove connections to the valve block, spectrometer tube and power to remove the turbo pump.

  • Page 186: Removing The Turbo Pump

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual B.3.1.1 Removing the Turbo Pump To replace the turbo pump: 1. Disconnect the mains power supply and make sure that all pumps are off. Disconnect power from the 947/948/960 before...

  • Page 187: B-8 The Turbo Power Connection

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual 4. Follow the power wire from the fan to two pink connectors labeled 1+ and 2−. If the connections are not fully labeled, label them now (Figure B-8). Fan Power...

  • Page 188: Replacing The Turbo Pump

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual 6. Loosen the wing nut and remove the NW25 clamp that connects the foreline to the turbo (Figure B-7 on page B-10). 7. Remove the centering ring and O-ring and place them on a clean surface.

  • Page 189: Connecting The Turbo Pump To The Svba

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual 3. Before re-using O-rings or installing new O-rings, wipe them down with a lint-free cloth to ensure that no foreign matter is present to impair the seal. Remove O-rings carefully with your fingers. Do not use CAUTION metal tools for this task.
  • Page 190 17. Turn the leak detector on and wait for the system to be ready. Allow the pumps to warm up if the detector has been off for some time. 18. Calibrate the 947/948/960 using the procedure described in “Re-calibrate the Internal Calibrated Leak” on page 4-7.

  • Page 191: Replacing The Rough Pump

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual B.4 Replacing the Rough Pump B.4.1 Wet Systems This discussion includes procedures for replacing rough pumps in wet systems (“Removing the Wet System Rough Pump” on page B-16) and rough pumps in dry systems (“Removing the Dry System Rough Pump”...

  • Page 192: Removing The Wet System Rough Pump

    4. Disconnect the pump power plug from the 947/948/960. 5. Drain the oil according to the pump manual instructions. 6. If you are replacing the pump as part of a Varian exchange program, return it in accordance with the program, or discard it in accordance with all applicable regulations.

  • Page 193: Replacing The Wet System Rough Pump

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual 8. Remove the centering ring and O-ring and place all connections where the oil will not contaminate other parts. 9. Remove the NW16 clamp from the exhaust connection. 10. Remove the exhaust fitting.

  • Page 194: Re-Installing The Wet System Rough Pump

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual B.4.1.1.3 Re-installing the Wet System Rough Pump To avoid injury, use proper lifting techniques when WARNING moving pumps. Your system may have pumps that require two people to move them safely.
  • Page 195 (Models 948/960 only)” on page 4-10. Follow all warnings and cautions in the procedure. 19. Calibrate the 947/948/960 using the procedure described in “Re-calibrate the Internal Calibrated Leak” on page 4-7. 20. Leak check the assembly before using the 947/948/960 for testing.

  • Page 196: Dry Systems

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual B.4.2 Dry Systems B.4.2.1 Removing the Dry System Rough Pump To perform this procedure: 1. Disconnect the mains power supply and make sure that all pumps are off. Disconnect power from the 947/948/960 before...

  • Page 197: Replacing The Dry System Rough Pump

    1. Ensure the area is clean for the new pump. 2. Place the new pump in the 947/948/960 oriented as shown in Figure B-10 on page B-15, placing the mounting bolts into the holes in the floor of the cabinet.

  • Page 198: Replacing The Forepump

    (Models 948/960 only)” on page 4-10. Follow all warnings and cautions in the procedure. 17. Calibrate the 947/948/960 using the procedure described in “Re-calibrate the Internal Calibrated Leak” on page 4-7. 18. Leak check the assembly before using the 947/948/960 for testing.

  • Page 199: Removing The Wet System Forepump

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual B.5.1.1 Removing the Wet System Forepump To perform this procedure: 1. Disconnect the mains power supply and make sure that all pumps are off. Disconnect power from the 947/948/960 before...

  • Page 200: Replacing The Wet System Forepump

    1. Ensure the area is clean for the new pump. 2. Place the new pump in the 947/948/960 oriented as shown in Figure B-10 on page B-15, placing the mounting bolts into the mounting holes in the bottom of the cabinet.
  • Page 201 (Models 948/960 only)” on page 4-10. Follow all warnings and cautions in the procedure. 20. Calibrate the 947/948/960 using the procedure described in “Re-calibrate the Internal Calibrated Leak” on page 4-7. 21. Leak check the assembly before using the 947/948/960 for testing.

  • Page 202: Dry System

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual B.5.2 Dry System B.5.2.1 Removing the Dry System Forepump To perform this procedure: 1. Disconnect the mains power supply and make sure that all pumps are off. Disconnect power from the 947/948/960 before...

  • Page 203: Removing The Nitrogen Purge Connection From Pump

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual B.5.2.1.2 Removing the Nitrogen Purge Connection from Pump An electrician or electrical technician is required for NOTE proper removal and installation. If only maintenance is being performed, the pump can be removed with the valve attached.

  • Page 204: Re-Installing The Dry System Forepump

    1. Ensure the area is clean for the new pump. 2. Place the new pump in the 947/948/960 oriented as shown in Figure B-10 on page B-15, and the mounting bolts into the holes in the floor of the cabinet.

  • Page 205: Replacing The Exhaust Fitting

    Nitrogen Cold Trap using the procedure described in “Liquid Nitrogen Cold Trap (Models 948/960 only)” on page 4-10. 8. Calibrate the 947/948/960 using the procedure described in “Re-calibrate the Internal Calibrated Leak” on page 4-7. 9. Leak check the assembly before using the 947/948/960 for testing.
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  • Page 207: Appendix C. Communications Protocol

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual Appendix C. Communications Protocol This appendix defines the technical specifications for the RS-232 protocol to be used with the 947/948/960 Leak Detection System optional rear panel interface. C.1 Protocol (RS-232) The RS-232 ports operate at 9600 baud, 8 bits, no parity, and one stop bit.

  • Page 208: C-1 Internal Operating Parameters

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual Table C-1 through Table C-4 outline the available control and query commands. Table C-1 lists inquiries used to determine internal operating parameters. All inquiries, except VER, begin with and end with <CR>.
  • Page 209 Models 947, 948 and 960 Leak Detectors Operations and Service Manual Table C-1 Internal Operating Parameters (Continued) Inquiry Response ?GL-XFER A string of seven characters that tells the maximum pressure in Torr for transfer from roughing to gross leak test (e.g., 7.5E-01).
  • Page 210 Models 947, 948 and 960 Leak Detectors Operations and Service Manual Table C-1 Internal Operating Parameters (Continued) Inquiry Response ?SETUP Eight lines that report a summary of setup parameters. Each line begins with a <CR><LF>. The format is as follows:...

  • Page 211: C-2 Non-Volatile Operating Parameters

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual Table C-2 lists the commands used to set NON-VOLATILE operating parameters. The current value of the operating parameter is changed to a new value. If parallel enable is asserted, the response is cant <CR>...

  • Page 212: C-3 Spectrometer Operating Parameters

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual Table C-2 Non-volatile Operating Parameters (Continued) Command Response INIT-RANGESTOP Sets the most sensitive range exponent attainable when the feature is operating. Preceded by a minus sign and one or two digits (e.g., -08).

  • Page 213: C-4 Command Parameters For Leak Detection Actions

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual Table C-4 lists the commands used to cause leak detection actions. Table C-4 Command Parameters for Leak Detection Actions Command Action CALIBRATE Adjusts the Ion source parameters to cause a maximum response to helium, then adjusts the gain so that the current helium signal is the same as most recently input using INIT-STDLEAK.
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  • Page 215: Appendix D. Inputs And Outputs

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual Appendix D. Inputs and Outputs The Table D-1 through Table D-5 list the signals available on the connector in the turret, and the various connectors of the optional rear panel interface.
  • Page 216 Models 947, 948 and 960 Leak Detectors Operations and Service Manual Table D-2 Optional Discrete I/O Parallel Interface (J120) (Continued) Parallel Enable Active High Enables rear panel Input PLC Interface. Zero 200 msec high pulse Begins Auto Zero routine. Input...

  • Page 217: Bcd Discrete Output Parallel Interface (J121

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual D.2.2 BCD Discrete Output Parallel Interface (J121) The discrete I/O DB25 connector is used to control operations via a PLC. Table D-3 provides the J121 DB25 BCD connections. Table D-3 Optional BCD Discrete Output Parallel Interface (J121)

  • Page 218: Interface (J122) For Optional Universal Remote Control

    Input D.2.4 Host Serial Port (J123) The Host Serial Port connector is used to interface the 947/948/960 to a PLC or computer via an RS-232 DB25 connection. Table D-5 provides details about this connection. Table D-5 Optional Host Serial Port RS-232 Interface (J123)
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  • Page 227: Appendix F. Accessories

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual Appendix F. Accessories The accessories listed below can be purchased separately for use with the 947/948/960. Call Varian Vacuum Technologies for further information at 1-800-8VARIAN. Table F-1 947/948/960 Accessories...
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  • Page 229: Appendix G. Leak Detection Theory

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual Appendix G. Leak Detection Theory G.1 Leak Testing—Why is it Needed? Even with today's complex technology it is, for all practical purposes, impossible to manufacture a sealed enclosure or system that can be guaranteed leak proof without first being tested.

  • Page 230: Terminology

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual G.3 Terminology The following terminology has application throughout this manual: Flow atm cc/sec One cubic centimeter of gas per second at a pressure differential of one standard atmosphere (760 Torr at 0 °C).

  • Page 231: Various Methods Of Testing For Leaks

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual G.4 Various Methods of Testing for Leaks There are many methods of testing for leaks in enclosures, systems or containers. The more commonly used methods and their accuracy ranges are listed below: −3...

  • Page 232: Helium Mass Spectrometer Leak Detection (Msld

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual G.5 Helium Mass Spectrometer Leak Detection (MSLD) Helium is an excellent trace gas because it is the lightest of the inert gases and as a consequence readily penetrates small leaks. In addition, its presence in the atmosphere is minute (5 PPM or 4 milliTorr absolute).

  • Page 233: Leak Detection Methods

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual Audible or Visual Detection by Observer −4 a. Bubbles rising in water atm cc/sec or larger −1 b. Audible Leaks atm cc/sec or larger Sizes of Leaks in Man-Made Studies indicate that almost all leaks at joints are about −7...

  • Page 234: Test Piece Evacuated

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual G.6.1 Test Piece Evacuated The object to be tested is evacuated by the leak detector roughing pump, then valved into the spectrometer vacuum system (see Figure G-1 and Figure G-2). The surface of the test object is then probed with a small jet of helium to locate individual leaks, or surrounded by helium (hooded) for an overall leak check.

  • Page 235: Test Piece Already Sealed

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual A sampling probe is connected to the leak detector. The object to be tested is filled with helium at the desired test pressure and the probe is moved over its surface. Some of the helium escaping from a leak is captured through the probe and enters the leak detector, thus locating the leak.

  • Page 236: Mass Spectrometer Leak Detector-Simplified Description

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual G.7 Mass Spectrometer Leak Detector—Simplified Description The 947/948/960 consist of an analytical sensing tube called a spectrometer tube, electronics to operate the tube, and a vacuum system to maintain a very high vacuum within this tube (usually less than 0.1 milliTorr or about one ten-millionth of ordinary...

  • Page 237: Index

    Models 947, 948 and 960 Leak Detectors Operations and Service Manual Index J120 inputs 2-5 Parallel enable 2-11 Accessories available F-1 Parallel interface D-1 Air filter replacement 4-21 Dual mechanical pump configuration atm vs. std G-2 Gross test only 3-7...
  • Page 238 Models 947, 948 and 960 Leak Detectors Operations and Service Manual Helium G-3 Radioisotope G-3 Hazard and safety information 1-iv Ultrasonic G-3 Helium for sealing G-7 Water immersion G-3 Helium mass spectrometer leak detection G-4 Leak testing G-1 Hermetic Auto ranging 3-13...
  • Page 239 Models 947, 948 and 960 Leak Detectors Operations and Service Manual Manual tuning 4-5 Auto-range 3-3 Mass spectrometer leak detector G-8 Auto-sequencer 3-5 Mass spectrometry principles G-4 Calibrate 3-4 Model specifications E-1 Calibrated leak value 3-4 Model types and part numbers E-3...
  • Page 240 Models 947, 948 and 960 Leak Detectors Operations and Service Manual Gauge cal 4-27 Pressurized G-6 Service pendant 1-10, 2-9, 3-16, A-1, D-1 Test port pressure gauge calibration 4-29 Function keys A-3 Atmospheric 4-31 Input and data keys A-4 Vacuum (low pressure) 4-30...
  • Page 242 Fax:(31) 343 469961 India Fax:(44) 1932 22 8769 Tel:(91) 11 5548444 Brazil United States Fax:(91) 11 5548445 Varian Industria e Comercio Ltda. Varian Vacuum Technologies Italy Avenida Dr. Cardoso de Mello 1644 121 Hartwell Avenue Varian Vacuum Technologies Vila Olimpia...

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