Varian 947 Instruction Manual
Service pendant hand-held terminal
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- Operation and service manual (242 pages) ,
- Operation and service manual (176 pages) ,
- Operation and service manual (230 pages)
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Summary of Contents for Varian 947
- Page 1 YDFXXP WHFKQRORJLHV Service Pendant INSTRUCTION MANUAL Hand-Held Terminal Manual No. 699909985 Revision C December 2001...
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Page 2: Hazard And Safety Information
Every leak detector operator or service person must read and thoroughly understand leak detector operation/maintenance manuals and any additional information provided by Varian Vacuum Technologies. All warnings and cautions should be read carefully and strictly observed. Consult local, state, and national agencies regarding specific requirements and regulations. -
Page 3: Service Pendant Hand-Held Terminal
Service Pendant Hand-Held Terminal The Service Pendant The service pendant is used to set up and display parameters for the Model 947, 948 and 960 Leak Detectors. It is a hand-held terminal with a 40-key keypad and a 20 character by 4 line backlit LCD display (see Figure 1). -
Page 4: Keypad Functions
Service Pendant Hand-Held Terminal Keypad Functions Figure 2 shows the service pendant keypad. A glossary of the keys begins on page 8. Table 1 on page 8 explains the keys that perform special functions when entering information. Table 2 on page 8 explains the remaining keys, which are used to input or display data. To give you a better understanding of how to use the pendant, step-by-step instructions for a few common leak detector functions follow this figure. - Page 5 Service Pendant Hand-Held Terminal Figure 3 has four illustrations of the keypad each highlighting a different functional group of keys (Service, System Setup, Operation/Status, and Auto Sequence). As an operator, you will primarily use the System Setup and the Operation/Status keys. We have not included an illustration grouping the general entry keys, such as SHIFT, CANCEL and the numeric keys.
- Page 6 Service Pendant Hand-Held Terminal Example 1 – Set Reject Set Point Four individual reject set points can be set, but only one reject set point is enabled at a time. To set a reject set point value and make it the active reject set point: 1.
- Page 7 Service Pendant Hand-Held Terminal Example 2 – Check and Set the Value of the Crossover (Transfer) Pressure to Fine Test The pressure at which a test transfers to fine (or gross) test can be set and verified using the pendant. The value can also be verified on the test port pressure display on the front panel. 1.
- Page 8 Service Pendant Hand-Held Terminal Example 3 – Check and Set the Auto Sequence Parameters The Auto Sequence rough time and test time intervals can be set and the Auto Sequence option turned on using the pendant. 1. Display the currently set rough time and test time. ❑...
- Page 9 Example 5 – Display the Ion Source Parameter Parameters such as Ion Source Voltage should only be changed by Varian qualified service personnel. The example is included here because in determining the cause of a problem, a service person may request that you display these values.
- Page 10 Service Pendant Hand-Held Terminal Glossary Table 1 Glossary of Function Keys Performs the red function on the key that is pressed after the SHIFT SHIFT key is pressed. Enters the E for exponential notation inputs such as reject set point. LK RATE Displays the current leak rate.
- Page 11 Service Pendant Hand-Held Terminal Table 2 Glossary of Input and Data Keys (continued) [SHIFT] Sets the value of the Gross Leak Transfer Point. GR XFR − Enter X.XE X (the desired value), followed by SHIFT, then the SHOW function key. −...
- Page 12 Service Pendant Hand-Held Terminal Table 2 Glossary of Input and Data Keys (continued) [SHIFT] PRSRS Displays the Test Port and System Pressures in the format: SHOW ?test port 2.3 (value is in mTorr) VLV ST system TC 1 (value is in mTorr) Displays the value of the electronic offset of the Preamplifier in the OFFSET format:...
- Page 13 The turbo pump must be turned off, and the spectrometer tube must be vented. For additional information, see the Model 947/948 or the Model 960 Operation manuals. Initiates a zero calibration of the System TC. [SHIFT]...
- Page 14 Service Pendant Hand-Held Terminal Table 2 Glossary of Input and Data Keys (continued) [SHIFT] Selects filament #2 in the Ion Source. FIL SEL Displays the active filament number. OUT V SHOW FIL # [SHIFT] OUT V Displays the format (LOG or LIN) of the analog leak rate output SHOW voltage.
- Page 16 Tel: (39) 011 997 9111 Tel: (39) 011 997 9111 Fax: (39) 011 997 9350 Brazil Fax: (39) 011 997 9350 Varian Industria e Comercio Ltda. Japan Avenida Dr. Cardoso de Mello 1644 Internet Users: Varian Vacuum Technologies Vila Olimpia...