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Varian 948 Manuals
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Varian 948 manuals available for free PDF download: Operation And Service Manual, Instruction Manual
Varian 948 Operation And Service Manual (242 pages)
Leak Detectors
Brand:
Varian
| Category:
Security Sensors
| Size: 5.41 MB
Table of Contents
Table of Contents
3
Declaration of Conformity
13
Warranty
14
Warranty Replacement and Adjustment
14
Garantie
15
Ersatz und Einstellung unter Garantie
15
Factory Calibration Data
17
List of Options or Accessories Included with System
17
Hazard and Safety Information
18
Solvents
19
Equipment, General
20
Power and Static
21
Vacuum Equipment and Cleanliness
22
O-Ring Care
23
Spectrometer Tube
24
Pumps
24
Contacting Varian Vacuum Technologies
25
Varian Services
25
Informationen über Gefahren und Sicherheit
26
Lösungsmittel
27
Maschinen, Allgemein
28
Strom und Statik
29
Vakuumgeräte und Sauberkeit
31
Pflege von O-Ringen
32
Spektrometerrohr
33
Pumpen
33
Dienstleistungen von Varian
34
Kontaktieren von Varian Vacuum Technologies
34
Leak Detector
36
Figure Description
37
Leak Detector
37
Section 1. Introduction to Models 947, 948 and 960 Leak Detectors
38
Platform Electronics
38
Unpacking Instructions
38
Removing the 947/948/960 from the Skid
39
Removing Loose Packing from Interior of 947/948/960
40
Front Panel Controls and Indicators
40
Inner Door Instruction Label
43
Rear Panel Power Connection and Circuit Breakers
44
Service pendant
45
Installation Preparation
46
Power
46
Liquid Nitrogen (Models 948/960 Only)
47
Oil-Sealed Vacuum Pumps
47
Special Installation Requirements
47
Installation Services
47
Storage
48
Optional Rear Panel Interface Connections
48
Lecksucher
50
Lecksucher
51
Einführung in die Lecksucher, Modell 947, 948 und 960
52
Plattformelektronik
52
Auspacken der 947/948/960
52
Anleitungen zum Auspacken
53
Entfernen der 947/948/960 von der Palette
53
Entfernen der Losen Verpackungsteile aus dem Innenraum der 947/948/960
54
Anzeigen und Steuerelemente der Fronttafel
55
Anweisungsschild an der Innentür
58
Rückseitige Schalttafelstromanschluss und Trennschalter
59
Hängebedienungstafel
60
Vorbereitung zur Installation
61
Strom
61
Flüssigstickstoff (nur Modell 948/960)
62
Öldichte Vakuumpumpen
62
Spezielle Anforderungen bei der Installation
62
Installationsdienste
63
Aufbewahrung
63
Optionale Anschlüsse an der Rückseitigen Schalttafel
64
Section 2. Leak Detector Integration
65
Physical Considerations
65
Common Configuration
65
Flow Diagram
66
Ablaufdiagramm
67
Table Description
68
Valve Operation
68
Flow Diagram
69
Ablaufdiagramm
70
Flow Diagram
71
Flow Diagram
72
Electronic Considerations for the Optional Rear Panel Interface
73
Discrete I/O J120 Inputs
73
BCD J121 Outputs
74
Host Serial Port J123 Pinouts
75
Optional Interface Connections
76
Grounding and Isolation
76
Discrete I/O
77
Setup
77
Operation Using the Optional Rear Panel Interface
79
Parallel Enable
79
Section 3. Operation
81
Front Panel LED Indicators and Controls
81
Initial System Parameter Setup
83
Parameters and Operating Modes
83
Start-Up
89
Startup Procedure
90
Calibration and Sensitivity Checks
91
Calibration and Sensitivity Checks
92
Operating Procedures
94
Auto Ranging
94
Manual Ranging
95
Standby
96
Shutdown
97
Using the pendant for Parameter Setup
97
Optional Discrete I/O
98
Betrieb
99
LED-Anzeigen und Steuerelemente auf der Fronttafel
100
Erste Einstellung der Systemparameter
102
Parameter und Betriebsmod
102
Inbetriebnahme
108
Anleitungen zur Inbetriebnahme
110
Kalibrierungs- und Empfindlichkeitsprüfungen
111
Kalibrierungs- und Empfindlichkeitsprüfungen
112
Betriebsverfahren
114
Automatische Bereichseinstellung
114
Position des Schalters AUTO/MAN MODE
115
Manuelle Bereichseinstellung
116
Bereitschaft
117
Abschalten
117
Parametereinstellung mit der Hängebedienungstafel
118
Optionale Diskrete E/A
119
Section 4. Maintenance
121
Scheduled Maintenance
123
As-Required Maintenance
124
Daily Maintenance
125
Calibration Check
125
Leak Checking
125
General Suggestions for Leak Checking
126
Yearly Maintenance
127
Re-Calibrate the Internal Calibrated Leak
127
Removing the Internal Calibrated Leak
127
Replacing the Calibrated Leak
127
Replacing the Internal Calibrated Leak
129
Liquid Nitrogen Cold Trap (Models 948/960 Only)
130
Flüssigstickstoff-Kühlfalle (nur Modele 948/960)
131
Spectrometer Tube Overhaul
132
Removal of the Spectrometer Tube and Preamplifier
133
Spectrometer Tube Removal
134
Disassembly of the Spectrometer Tube and Preamplifier
135
Spectrometer Tube Disassembly
136
Spectrometer Tube Cleaning
137
Reassembly of the Spectrometer Tube and Preamplifier
137
Spectrometer Tube Reassembly
138
Spectrometer Tube Reassembly (Magnet Assembly)
140
Reinstallation of the Spectrometer Tube
141
Air Filter
142
Spectrometer Tube Exchange
143
Reinstalling the Spectrometer Tube
143
Removing and Replacing both the Spectrometer Tube Assembly and Preamplifier
143
Spectrometer Tube Installation
144
Replacement of the TC1 Gauge in the Main Valve Block Assembly
146
TC1 and TC2 Gauge Replacement and Calibration
146
Replacement of the TC2 Gauge in the Service Block Assembly
148
System Pressure Gauge (TC2) Calibration
150
Thermocouple Gauge Calibration Procedures
150
Vacuum (Low Pressure) Calibration
150
Atmospheric Calibration
151
Test Port Pressure Gauge (TC1) Calibration
152
Vacuum (Low Pressure) Calibration
152
Atmospheric Calibration
153
Rough Pump and Forepump Oil Level Check (Oil-Sealed Mechanical Pumps)
154
Cleaning the Test Port
155
Condition of Oil (Oil-Sealed Mechanical Pumps)
155
Removing the Test Port
155
Examining and Cleaning the Test Port
156
Replacing the Test Port
157
Spare Parts
157
Exchange Assemblies
157
Replacement Parts
158
Ersatz Teile
159
Section 5. Troubleshooting
161
Error Condition Codes
162
Troubleshooting Symptoms and Solutions
163
Fehlerzustandscodes
165
Symptome und Lösungen bei der Fehlersuche
166
Appendix A. Service pendant Keypad Functions
169
Using the Service pendant
170
Glossary of Function Keys
171
Glossary of Input and Data Keys
171
Appendix B. Parts Replacement
177
Removing the Covers
177
Opening the Turret
178
Removing the Service pendant Shelf
178
Removing the Top Panel
179
Replacing All Panels and Covers
180
Replacing the Service pendant Shelf
180
Replacing the Top Panel
181
Replacing the Ion Source
182
Replacing the Turbo Pump
185
Turbo Pump
185
Removing the Turbo Pump
186
B-8 the Turbo Power Connection
187
Examining and Cleaning Centering Rings, O-Rings and Manifold
188
Replacing the Turbo Pump
188
Connecting the Turbo Pump to the SVBA
189
Replacing the Rough Pump
191
Wet Systems
191
Removing the Wet System Rough Pump
192
Examining and Cleaning Centering Rings, O-Rings and Manifold
193
Replacing the Wet System Rough Pump
193
Re-Installing the Wet System Rough Pump
194
Dry Systems
196
Removing the Dry System Rough Pump
196
Examining and Cleaning Centering Rings, O-Rings and Manifold
197
Re-Installing the Dry System Rough Pump
197
Replacing the Dry System Rough Pump
197
Replacing the Forepump
198
Wet
198
Removing the Wet System Forepump
199
Examining and Cleaning Centering Rings, O-Rings and Manifold
200
Re-Installing the Wet System Forepump
200
Replacing the Wet System Forepump
200
Dry System
202
Removing the Dry System Forepump
202
Removing the Isolation Valve from the Forepump
202
Examining and Cleaning Centering Rings, O-Rings and Manifold
203
Removing the Exhaust Fitting
203
Removing the Nitrogen Purge Connection from Pump
203
Removing the Pump from the Cabinet
203
Replacing the Dry System Forepump
203
Connecting the Nitrogen Purge Pump
204
Re-Installing the Dry System Forepump
204
Replacing the Isolation Valve
204
Completing Mounting the Pump to the Cabinet Floor
205
Replacing the Exhaust Fitting
205
Appendix C. Communications Protocol
207
Protocol
207
C-1 Internal Operating Parameters
208
C-2 Non-Volatile Operating Parameters
211
C-3 Spectrometer Operating Parameters
212
C-4 Command Parameters for Leak Detection Actions
213
Appendix D. Inputs and Outputs
215
Service Serial Interface (J1
215
Optional Rear Panel Interface
215
Discrete I/O Parallel Interface (J120
215
BCD Discrete Output Parallel Interface (J121
217
Interface (J122) for Optional Universal Remote Control
218
Host Serial Port (J123
218
Technische Daten für 947/948
227
Appendix E. 947/948 Specifications
227
Appendix E. 947/948 Specifications
227
Appendix F. Accessories
227
Appendix G. Leak Detection Theory
229
Leak Testing-Why Is It Needed
229
Classes of Leak Detection
229
Terminology
230
Various Methods of Testing for Leaks
231
Helium Mass Spectrometer Leak Detection (MSLD
232
Principles of Mass Spectrometry
232
Application as a Leak Detector
232
The Nature of Flow in a Vacuum
232
Facts about Leak Rates
232
Leak Detection Methods
233
Test Piece Evacuated
234
Test Piece Pressurized
234
Test Piece Already Sealed
235
Mass Spectrometer Leak Detector-Simplified Description
236
G.7 Mass Spectrometer Leak Detector—Simplified Description
236
Index
237
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Varian 948 Operation And Service Manual (230 pages)
Leak Detectors
Brand:
Varian
| Category:
Security Sensors
| Size: 6.17 MB
Table of Contents
Table of Contents
3
Declaration of Conformity
13
Warranty
15
Warranty Replacement and Adjustment
15
Warranty
16
Warranty Replacement and Adjustment
16
Factory Calibration Data
17
List of Options or Accessories Included with System
17
Hazard and Safety Information
18
Solvents
19
Equipment, General
20
Power and Static
20
Vacuum Equipment and Cleanliness
22
O-Ring Care
22
Spectrometer Tube
23
Pumps
23
Varian Services
24
Contacting Varian Vacuum Technologies
24
Hazard and Safety Information
25
Solvents
26
Equipment, General
27
Power and Static
27
Vacuum Equipment and Cleanliness
29
O-Ring Care
29
Spectrometer Tube
30
Pumps
30
Varian Services
31
Contacting Varian Vacuum Technologies
31
Platform Electronics
36
Unpacking the 947/948/960
36
Unpacking Instructions
36
Removing the 947/948/960 from the Skid
37
Removing Loose Packing from Interior of 947/948/960
38
Front Panel Controls and Indicators
38
Inner Door Instruction Label
40
Rear Panel Power Connection and Circuit Breakers
41
Service pendant
42
Installation Preparation
43
Power
43
Liquid Nitrogen (Models 948/960 Only)
44
Oil-Sealed Vacuum Pumps
44
Special Installation Requirements
44
Installation Services
44
Storage
45
Optional Rear Panel Interface Connections
45
Platform Electronics
49
Unpacking the 947/948/960
49
Unpacking Instructions
49
Removing the 947/948/960 from the Skid
50
Removing Loose Packing from Interior of 947/948/960
51
Front Panel Controls and Indicators
51
Inner Door Instruction Label
53
Rear Panel Power Connection and Circuit Breakers
54
Service pendant
55
Installation Preparation
56
Power
56
Liquid Nitrogen (Models 948/960 Only)
57
Oil-Sealed Vacuum Pumps
57
Special Installation Requirements
57
Installation Services
57
Storage
58
Optional Rear Panel Interface Connections
58
Section 2. Leak Detector Integration
59
Physical Considerations
59
Common Configuration
59
Electronic Considerations for the Optional Rear Panel Interface
67
Discrete I/O J120 Inputs
67
BCD J121 Outputs
68
Host Serial Port J123 Pinouts
69
Optional Interface Connections
70
Grounding and Isolation
70
Setup
71
Discrete I/O
71
Operation Using the Optional Rear Panel Interface
73
Parallel Enable
73
Section 3. Operation
75
Front Panel LED Indicators and Controls
75
Initial System Parameter Setup
77
Parameters and Operating Modes
77
Start-Up
82
Startup Procedure
84
Calibration and Sensitivity Checks
85
Operating Procedures
87
Auto Ranging
88
Manual Ranging
89
Standby
90
Shutdown
90
Using the pendant for Parameter Setup
91
Optional Discrete I/O
92
Operation
93
Front Panel LED Indicators and Controls
93
Initial System Parameter Setup
95
Parameters and Operating Modes
95
Start-Up
100
Startup Procedure
102
Calibration and Sensitivity Checks
103
Calibration and Sensitivity Checks
104
Operating Procedures
105
Auto Ranging
106
Manual Ranging
107
Standby
108
Shutdown
108
Using the pendant for Parameter Setup
109
Optional Discrete I/O
110
Section 4. Maintenance
111
Daily Maintenance
115
Calibration Check
115
Leak Checking
115
General Suggestions for Leak Checking
116
Yearly Maintenance
117
Replacing the Calibrated Leak
117
Re-Calibrate the Internal Calibrated Leak
117
Removing the Internal Calibrated Leak
117
Replacing the Internal Calibrated Leak
119
Liquid Nitrogen Cold Trap (Models 948/960 Only)
120
Liquid Nitrogen Cold Trap (Models 948/960 Only)
121
Spectrometer Tube Overhaul
122
Removal of the Spectrometer Tube and Preamplifier
123
Disassembly of the Spectrometer Tube and Preamplifier
125
Spectrometer Tube Cleaning
127
Reassembly of the Spectrometer Tube and Preamplifier
127
Reinstallation of the Spectrometer Tube
130
Air Filter
131
Spectrometer Tube Exchange
132
Removing and Replacing both the Spectrometer Tube Assembly and Preamplifier
132
Reinstalling the Spectrometer Tube
132
TC1 and TC2 Gauge Replacement and Calibration
134
Replacement of the TC1 Gauge in the Main Valve Block Assembly
134
Replacement of the TC2 Gauge in the Service Block Assembly
136
Thermocouple Gauge Calibration Procedures
138
System Pressure Gauge (TC2) Calibration
138
Vacuum (Low Pressure) Calibration
138
Atmospheric Calibration
139
Test Port Pressure Gauge (TC1) Calibration
140
Vacuum (Low Pressure) Calibration
140
Atmospheric Calibration
141
Rough Pump and Forepump Oil Level Check (Oil-Sealed Mechanical Pumps)
142
Condition of Oil (Oil-Sealed Mechanical Pumps)
143
Cleaning the Test Port
143
Removing the Test Port
143
Examining and Cleaning the Test Port
144
Replacing the Test Port
145
Spare Parts
145
Exchange Assemblies
145
Replacement Parts
146
Section 5. Troubleshooting
149
Error Condition Codes
150
Troubleshooting Symptoms and Solutions
151
Error Condition Codes
153
Troubleshooting Symptoms and Solutions
154
Appendix A. Service pendant Keypad Functions
157
Keypad Functions
157
Using the Service pendant
158
Glossary of Function Keys
159
Glossary of Input and Data Keys
160
Appendix B. Parts Replacement
165
Removing the Covers
165
Opening the Turret
166
Removing the Service pendant Shelf
166
Removing the Top Panel
167
Replacing All Panels and Covers
168
Replacing the Service pendant Shelf
168
Replacing the Top Panel
169
Replacing the Ion Source
170
Replacing the Turbo Pump
173
Turbo Pump
173
Removing the Turbo Pump
174
Replacing the Turbo Pump
176
Examining and Cleaning Centering Rings, O-Rings and Manifold
176
Connecting the Turbo Pump to the SVBA
177
Replacing the Rough Pump
179
Wet Systems
179
Removing the Wet System Rough Pump
180
Replacing the Wet System Rough Pump
181
Examining and Cleaning Centering Rings, O-Rings and Manifold
181
Re-Installing the Wet System Rough Pump
182
Dry Systems
184
Removing the Dry System Rough Pump
184
Replacing the Dry System Rough Pump
185
Examining and Cleaning Centering Rings, O-Rings and Manifold
185
Re-Installing the Dry System Rough Pump
185
Replacing the Forepump
186
Wet
186
Removing the Wet System Forepump
187
Replacing the Wet System Forepump
188
Examining and Cleaning Centering Rings, O-Rings and Manifold
188
Re-Installing the Wet System Forepump
188
Dry System
190
Removing the Dry System Forepump
190
Removing the Isolation Valve from the Forepump
190
Removing the Nitrogen Purge Connection from Pump
191
Removing the Exhaust Fitting
191
Removing the Pump from the Cabinet
191
Replacing the Dry System Forepump
191
Examining and Cleaning Centering Rings, O-Rings and Manifold
191
Re-Installing the Dry System Forepump
192
Connecting the Nitrogen Purge Pump
192
Replacing the Isolation Valve
192
Replacing the Exhaust Fitting
193
Completing Mounting the Pump to the Cabinet Floor
193
Appendix C. Communications Protocol
195
Protocol
195
Appendix D. Inputs and Outputs
203
Service Serial Interface (J1
203
Optional Rear Panel Interface
203
Discrete I/O Parallel Interface (J120
203
BCD Discrete Output Parallel Interface (J121
205
Interface (J122) for Optional Universal Remote Control
206
Host Serial Port (J123
206
Appendix F. Accessories
215
Appendix G. Leak Detection Theory
217
Leak Testing-Why Is It Needed
217
Classes of Leak Detection
217
Terminology
218
Various Methods of Testing for Leaks
219
Helium Mass Spectrometer Leak Detection (MSLD
220
Principles of Mass Spectrometry
220
Application as a Leak Detector
220
The Nature of Flow in a Vacuum
220
Facts about Leak Rates
221
Leak Detection Methods
221
Test Piece Evacuated
222
Test Piece Pressurized
222
Test Piece Already Sealed
223
Mass Spectrometer Leak Detector-Simplified Description
224
Varian 948 Operation And Service Manual (176 pages)
Leak Detectors
Brand:
Varian
| Category:
Security Sensors
| Size: 5.75 MB
Table of Contents
Table of Contents
3
Declaration of Conformity
13
Warranty
14
Warranty Replacement and Adjustment
14
Factory Calibration Data
15
List of Options or Accessories Included with System
15
Hazard and Safety Information
16
Solvents
17
Equipment, General
18
Power and Static
18
Vacuum Equipment and Cleanliness
20
O-Ring Care
20
Spectrometer Tube
21
Pumps
21
Varian Services
22
Contacting Varian Vacuum Technologies
22
Platform Electronics
26
Unpacking Instructions
26
Removing the 947/948/960 from the Skid
27
Removing Loose Packing from Interior of 947/948/960
28
Front Panel Controls and Indicators
28
Inner Door Instruction Label
30
Rear Panel Power Connection and Circuit Breakers
31
Service pendant
32
Installation Preparation
33
Power
33
Liquid Nitrogen (Models 948/960 Only)
34
Oil-Sealed Vacuum Pumps
34
Special Installation Requirements
34
Installation Services
34
Storage
35
Optional Rear Panel Interface Connections
35
Section 2. Leak Detector Integration
37
Physical Considerations
37
Common Configuration
37
Electronic Considerations for the Optional Rear Panel Interface
42
Discrete I/O J120 Inputs
42
BCD J121 Outputs
43
Host Serial Port J123 Pinouts
44
Optional Interface Connections
45
Grounding and Isolation
45
Setup
46
Discrete I/O
46
Operation Using the Optional Rear Panel Interface
48
Parallel Enable
48
Section 3. Operation
49
Front Panel LED Indicators and Controls
49
Initial System Parameter Setup
51
Parameters and Operating Modes
51
Start-Up
56
Startup Procedure
58
Calibration and Sensitivity Checks
59
Calibration and Sensitivity Checks
60
Operating Procedures
61
Auto Ranging
62
Manual Ranging
63
Standby
64
Shutdown
64
Using the pendant for Parameter Setup
65
Optional Discrete I/O
66
Section 4. Maintenance
67
Daily Maintenance
71
Calibration Check
71
Leak Checking
71
General Suggestions for Leak Checking
72
Yearly Maintenance
73
Replacing the Calibrated Leak
73
Re-Calibrate the Internal Calibrated Leak
73
Removing the Internal Calibrated Leak
73
Replacing the Internal Calibrated Leak
75
Liquid Nitrogen Cold Trap (Models 948/960 Only)
76
Spectrometer Tube Overhaul
77
Removal of the Spectrometer Tube and Preamplifier
78
Disassembly of the Spectrometer Tube and Preamplifier
80
Reassembly of the Spectrometer Tube and Preamplifier
82
Spectrometer Tube Cleaning
82
Reinstallation of the Spectrometer Tube
85
Air Filter
86
Spectrometer Tube Exchange
87
Reinstalling the Spectrometer Tube
87
Removing and Replacing both the Spectrometer Tube Assembly and Preamplifier
87
TC1 and TC2 Gauge Replacement and Calibration
89
Replacement of the TC1 Gauge in the Main Valve Block Assembly
89
Replacement of the TC2 Gauge in the Service Block Assembly
91
System Pressure Gauge (TC2) Calibration
93
Thermocouple Gauge Calibration Procedures
93
Vacuum (Low Pressure) Calibration
93
Atmospheric Calibration
94
Test Port Pressure Gauge (TC1) Calibration
95
Vacuum (Low Pressure) Calibration
95
Atmospheric Calibration
96
Rough Pump and Forepump Oil Level Check (Oil-Sealed Mechanical Pumps)
97
Condition of Oil (Oil-Sealed Mechanical Pumps)
98
Cleaning the Test Port
98
Removing the Test Port
98
Examining and Cleaning the Test Port
99
Replacing the Test Port
100
Spare Parts
100
Exchange Assemblies
100
Replacement Parts
101
Section 5. Troubleshooting
103
Error Condition Codes
104
Troubleshooting Symptoms and Solutions
105
Appendix A. Service pendant Keypad Functions
107
Keypad Functions
107
Using the Service pendant
108
Glossary of Function Keys
109
Glossary of Input and Data Keys
110
Appendix B. Parts Replacement
115
Removing the Covers
115
Opening the Turret
116
Removing the Service pendant Shelf
116
Removing the Top Panel
117
Replacing All Panels and Covers
118
Replacing the Service pendant Shelf
118
Replacing the Top Panel
119
Replacing the Ion Source
120
Replacing the Turbo Pump
123
Turbo Pump
123
Removing the Turbo Pump
124
Replacing the Turbo Pump
126
Examining and Cleaning Centering Rings, O-Rings and Manifold
126
Connecting the Turbo Pump to the SVBA
127
Replacing the Rough Pump
129
Wet Systems
129
Removing the Wet System Rough Pump
130
Examining and Cleaning Centering Rings, O-Rings and Manifold
131
Replacing the Wet System Rough Pump
131
Re-Installing the Wet System Rough Pump
132
Dry Systems
134
Removing the Dry System Rough Pump
134
Replacing the Dry System Rough Pump
135
Examining and Cleaning Centering Rings, O-Rings and Manifold
135
Re-Installing the Dry System Rough Pump
135
Replacing the Forepump
136
Wet
136
Removing the Wet System Forepump
137
Replacing the Wet System Forepump
138
Examining and Cleaning Centering Rings, O-Rings and Manifold
138
Re-Installing the Wet System Forepump
138
Dry System
140
Removing the Dry System Forepump
140
Removing the Isolation Valve from the Forepump
140
Examining and Cleaning Centering Rings, O-Rings and Manifold
141
Removing the Exhaust Fitting
141
Removing the Nitrogen Purge Connection from Pump
141
Removing the Pump from the Cabinet
141
Replacing the Dry System Forepump
141
Connecting the Nitrogen Purge Pump
142
Re-Installing the Dry System Forepump
142
Replacing the Isolation Valve
142
Completing Mounting the Pump to the Cabinet Floor
143
Replacing the Exhaust Fitting
143
Appendix C. Communications Protocol
145
Protocol
145
Appendix D. Inputs and Outputs
153
Service Serial Interface (J1
153
Optional Rear Panel Interface
153
Discrete I/O Parallel Interface (J120
153
BCD Discrete Output Parallel Interface (J121
155
Interface (J122) for Optional Universal Remote Control
156
Host Serial Port (J123
156
Appendix E. 947/948 Specifications
161
Appendix F. Accessories
161
Appendix G. Leak Detection Theory
163
Leak Testing-Why Is It Needed
163
Classes of Leak Detection
163
Terminology
164
Various Methods of Testing for Leaks
165
Helium Mass Spectrometer Leak Detection (MSLD
166
Principles of Mass Spectrometry
166
Application as a Leak Detector
166
The Nature of Flow in a Vacuum
166
Facts about Leak Rates
167
Leak Detection Methods
167
Test Piece Evacuated
168
Test Piece Pressurized
168
Test Piece Already Sealed
169
Mass Spectrometer Leak Detector-Simplified Description
170
G.7 Mass Spectrometer Leak Detector—Simplified Description
170
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Varian 948 Instruction Manual (16 pages)
Service Pendant Hand-Held Terminal
Brand:
Varian
| Category:
Touch terminals
| Size: 0.81 MB
Table of Contents
Hazard and Safety Information
2
Service Pendant Hand-Held Terminal
3
The Service Pendant
3
Keypad Functions
4
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