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Varian 990 dCLD II Operation Manual

Component leak detector
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Model 990 dCLD II
Component
Leak Detector
Manual No. 699909694
Revision F
April 2007
NOTICE: This document contains references to Varian.
Please note that Varian, Inc. is now part of Agilent
Technologies. For more information, go to
www.agilent.com/chem.
vacuum technologies
OPERATIONS MANUAL

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  • Page 1 NOTICE: This document contains references to Varian. Please note that Varian, Inc. is now part of Agilent Technologies. For more information, go to www.agilent.com/chem. vacuum technologies Model 990 dCLD II OPERATIONS MANUAL Component Leak Detector Manual No. 699909694 Revision F...
  • Page 2 Model 990 dCLD II Component Leak Detector shown with Optional Front Control Panel Contra-Flow, MacroTorr, ConvecTorr, TriScroll, and VacuSolv are trademarks or registered trademarks of Vacuum Technologies. Alconox is a registered trademark of Alconox, Inc. Apiezon is a registered trademark of M&I Materials Ltd.
  • Page 3 Model 990 dCLD II Component Leak Detector Warranty Products manufactured by Seller are warranted against defects in materials and workmanship for twelve (12) months from date of shipment thereof to Customer, and Seller’s liability under valid warranty claims is limited, at the option of Seller, to repair, to replace, or refund of an equitable portion of the purchase price of the Product.
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  • Page 5: Table Of Contents

    Vacuum Equipment and Cleanliness ...................xvi O-ring Care ..........................xvi Contacting Varian ........................xvii Section 1. Introduction to the Model 990 dCLD II ................1-1 1.1 Unpacking the 990 dCLD II ....................1-1 1.2 Control Unit .......................... 1-2 1.2.1 Front Panel Connections..................... 1-2 1.2.2 Rear Panel Connections and Controls................
  • Page 6 Model 990 dCLD II Component Leak Detector 3.3 Initial System Parameter Setup ................... 3-7 3.3.1 Parameters and Operating Modes ................3-7 3.4 Startup ..........................3-16 3.4.1 Start up Indications on the Optional Front Control Panel.......... 3-17 3.4.2 Calibration......................... 3-17 3.4.3 Tuning ........................3-18 3.4.4 Running........................
  • Page 7 Model 990 dCLD II Component Leak Detector 5.2 Recalibrate the Internal Calibrated Leak................5-5 5.3 Spectrometer Tube Overhaul....................5-5 5.3.1 Removing the Spectrometer Tube Assembly.............. 5-6 5.3.2 Removing the Button TC..................... 5-9 5.3.3 Removing the Ion Source..................5-10 5.3.4 Removing the Preamplifier..................5-13 5.3.5 Removing the Magnetic Poles ..................
  • Page 8 Model 990 dCLD II Component Leak Detector C.5 Helium Mass Spectrometer Leak Detection (MSLD)............C-4 C.5.1 Principles of Mass Spectrometry ................C-4 C.5.2 Application as a Leak Detector ..................C-4 C.5.3 The Nature of Flow in a Vacuum ................C-4 C.5.4 Facts About Leak Rates ....................C-5 C.6 Leak Detection Methods......................C-5...
  • Page 9 1 V/Decade Logarithmic Leak Rate Output Voltage Response ........3-22 2 V/Decade Logarithmic Analog Output Voltage .............. 3-23 3 V/Decade Logarithmic Analog Output Voltage .............. 3-23 990 dCLD II Optional Front Control Panel ................4-1 Menu Hierarchy (up to Service Menu) ................4-6 Service Menu Hierarchy...................... 4-7 Touch Panel Home Screen....................
  • Page 10 Model 990 dCLD II Component Leak Detector Button TC Assembly ......................5-9 Removing the Button TC Header..................5-9 Button TC.......................... 5-10 Removing the Ion Source ....................5-11 5-10 The Ion Source ......................... 5-11 5-11 Ion Source Cavity ......................5-12 5-12 Ground Slit Plate.......................
  • Page 11 Leak Rate Range for High Vacuum Pump Type and Speed Combinations ...... 3-6 Analog Leak Rate Voltage Outputs.................. 3-21 990 dCLD II Operating States ................... 4-9 990 dCLD II Leak Detector Status ..................4-9 990 dCLD II Condition States ..................4-10 System Information Screen Conditions ................4-11 Scheduled Maintenance ....................
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  • Page 13: Declaration Of Conformity

    Model 990 dCLD II Component Leak Detector to which this declaration relates is in conformity with the following standards: • EN61010-1-1993 Safety requirements for electrical equipment for control and laboratory use, incorporating amendments No.

  • Page 14: Preface

    Every operator or service person must read and thoroughly understand operation/maintenance manuals and any additional information provided by Varian. All warning and cautions should be read carefully and strictly observed. Consult local, state, and national agencies regarding specific requirements and regulations.

  • Page 15: Vacuum Equipment And Cleanliness

    Model 990 dCLD II Component Leak Detector Vacuum Equipment and Cleanliness Cleanliness is vital when servicing any vacuum equipment. CAUTION ❑ Do not use silicone oil or silicone grease. ❑ Use powder-free butyl or polycarbonate gloves to prevent skin oils from getting on vacuum surfaces.

  • Page 16: Contacting Varian

    VacuSolv is compatible with most materials and does not contain toxic chemicals or CFCs (chlorofluorocarbons). Contacting Varian In the United States, you can contact Varian Customer Service at 1-800-8VARIAN. Internet users: ❑ Send email to Customer Service & Technical Support at vpl.customer.support@varianinc.com...

  • Page 17: Section 1. Introduction To The Model 990 Dcld Ii

    1.1 Unpacking the 990 dCLD II The 990 dCLD II is shipped to you in two or three boxes, depending on whether or not you ordered the optional front control panel. The contents of the boxes include: ❑...

  • Page 18: Control Unit

    Model 990 dCLD II Component Leak Detector 1.2 Control Unit The 990 dCLD II control unit operates and controls the turbo spec tube assembly and pro- vides leak rate and system status information to a host computer or Programmable Logic Controller (PLC) through optically isolated discrete I/O connections and/or an RS-232 host serial port, or to the optional front control panel interface.

  • Page 19: Rear Panel Connections And Controls

    Model 990 dCLD II Component Leak Detector 1.2.2 Rear Panel Connections and Controls The rear panel of the 990 dCLD II, Figure 1-2, provides power, cooling for the control unit, connection and control to various devices through the interfaces discussed below.

  • Page 20: Turbomolecular Pump Spectrometer Tube Assembly

    ➁ Spectrometer Magnetic-sector spectrometer optimized for the detection of Assembly helium ions. ➂ Internal calibrated A helium leak standard that provides verification of 990 dCLD II leak operation. ➃ Cal leak valve Provides valving for the internal calibrated leak. block...

  • Page 21: Cables

    1.5 Mating Connectors A kit containing mating connectors and pins for building cables for connections J3, J4 and J6 is supplied with your 990 dCLD II. Build the cables according to the tables included in Appendix B “Customer Accessible Inputs and Outputs”.

  • Page 22: Specifications

    Model 990 dCLD II Component Leak Detector 1.7 Specifications The specifications for the 990 dCLD II are listed below. Maximum Test V70 Configuration Pressure ≤ Fast Speed 500 mTorr ≤ Slow Speed 100 mTorr V70D Configuration ≤ Fast Speed 3 Torr ≤...
  • Page 23 Model 990 dCLD II Component Leak Detector Recommended Operating Temperature Control Unit: 0 °C to 50 °C (32 °F to 122 °F) Ambient Operating Turbo Spec Tube Assy.: 5 °C to 35 °C (41 °F to Conditions 95 °F) Optional Front Control Panel: 0 °C to 35 °C (32 °F to 95 °F)
  • Page 24 Model 990 dCLD II Component Leak Detector System I/O Capability J3 Inputs Opto-isolated, 5 to 24 VDC 3600 Ohm resistive load. J3 Outputs Emitter follower with 10 Ohm series resistor, 14 mA max drive current, 24 VDC max. J3 Momentary Inputs Opto-isolated, 5 to 24 VDC 3600 Ohm resistive load, requires 200 ms per min pulse width.

  • Page 25: Section 2. Customer Integration

    2.1 Physical Considerations The control unit of the Model 990 dCLD II is intended to be mounted in a standard 19-inch rack enclosure. It can, however, be mounted in any orientation provided that air movement through the unit is not impeded.

  • Page 26: Common Configurations

    Model 990 dCLD II Component Leak Detector 2.2 Common Configurations The 990 dCLD II is available with your choice of three pumps: ❑ V70 Turbomolecular Pump ® ❑ V70D MacroTorr Turbomolecular Pump ® ❑ V70LP MacroTorr Turbomolecular Pump Table 2-1 lists operating information about the three pumps and compares advantages and limitations relating to sensitivity and clean up time.

  • Page 27: Configuration Comparison

    Model 990 dCLD II Component Leak Detector The 990 dCLD II component system has been modularly designed to fit your operations. Table 2-2 provides a comparison of the three most commonly used configurations: ❑ Single mechanical pump See Figure 2-1 and Table 2-3 on page 2-4.

  • Page 28: Single Mechanical Pump Configuration

    3 minutes. Test Closed Opened Opened The Test Valve re-opens at the appropriate foreline pressure, backing the turbo and exposing the fixture to the foreline. Note: Foreline and Cal Leak valves are under the control of the 990 dCLD II.

  • Page 29: Dual Mechanical Pump Configuration

    The Roughing state brings the fixture to vacuum. Test Closed Closed Opened The Test Valve re-opens at the appropriate foreline pressure, exposing the fixture to the foreline. Note: Foreline and Cal Leak valves are under the control of the 990 dCLD II.

  • Page 30: Split Flow Dual Mechanical Pump Configuration

    The Roughing state brings the fixture to vacuum. Test Closed Opened Opened The Test Valve re-opens at the appropriate foreline pressure, exposing the fixture to the foreline. Note: Foreline and Cal Leak valves are under the control of the 990 dCLD II.

  • Page 31: Size Of Mechanical Pumps

    When selecting rough and forepumps for your system, the pumps listed in Table 2-6 are recommended. These pumps can be paired (within type) in any combination for forepump and rough pump except where noted. For more information, contact Varian Customer Ser- vice 1-800-8VARIAN.

  • Page 32: Electronic Considerations

    Model 990 dCLD II Component Leak Detector 2.4 Electronic Considerations This section includes information necessary to interface the 990 dCLD II with a PLC or a host computer using either serial or parallel communications. This includes connection via J3 Discrete I/O, J4 BCD Outputs and J6 Host Serial Port.

  • Page 33: J3 Input Circuit Sketch

    Model 990 dCLD II Component Leak Detector Table 2-7 J3 Inputs Summary Table Input Name Momentary Description or Level Input Common Return for J3 inputs (with pin 25). RUN / IDLE Level Turns ON the spec tube and turbo (leave IDLE state).

  • Page 34: Discrete I/O J3 Outputs

    Model 990 dCLD II Component Leak Detector 2.4.2 Discrete I/O J3 Outputs Table 2-8 provides the J3 output connections. For detailed information see Table B-2 on page B-4. For a cross reference of the functions in other modes of operation, see Table 2-11 on page 2-15.

  • Page 35: J3 Output Circuit Sketch

    Model 990 dCLD II Component Leak Detector Table 2-8 J3 Outputs Summary Table Output Name Momentary Description or Level REJECT #1 Level Active when Leak Rate is over set point #1. Ready Level Active when Fil and Turbo ok, i.e., the system is ready to test.

  • Page 36: Bcd J4 Outputs

    Model 990 dCLD II Component Leak Detector 2.4.3 BCD J4 Outputs Table 2-9 provides the J4 output connections. For detailed information see Table B-2 on page B-4. J4 outputs are opto-isolated emitter followers with 10 Ohm series resistor, 14 mA max drive current, 24 VDC max.

  • Page 37: J4 Output Circuit Sketch

    Model 990 dCLD II Component Leak Detector Table 2-9 J4 Outputs Summary Table Output Momentary Description Name or Level LSD A MAN Level Mantissa BCD Leak Rate, the ones place of the least significant digit. LSD B MAN Level Mantissa BCD Leak Rate; the twos place of the least significant digit.

  • Page 38: Host Serial Port J6

    Model 990 dCLD II Component Leak Detector 2.4.4 Host Serial Port J6 The Host Serial Port is used to interface the 990 dCLD II to a PLC or computer via an RS-232 connection. Table 2-10 and Figure 2-7 provide details of the connection.
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  • Page 51: Section 3. Setup And Operations Via The Rear Panel

    Section 3. Setup and Operations via the Rear Panel 3.1 Physical Setup Figure 3-1 on page 3-3 shows the system block diagram for the 990 dCLD II. Information regarding the physical setup is discussed below. 3.1.1 Control Unit The Control Unit is designed to be mounted in a 19-inch rack cabinet. Air is required to flow through the control unit entering through the two filtered air intakes at the front of the unit and exiting at the rear of the unit through a fan.

  • Page 52: Connecting The Control Unit To The Turbo Spec Tube Assembly

    3.1.3 Connecting the Control Unit to the Turbo Spec Tube Assembly Make the following connections from the rear panel of the 990 dCLD II to the turbo spec tube assembly. The rear panel connections are shown in Figure 1-2. This section discusses connection to turbo spec tube assembly only.

  • Page 53: System Block Diagram

    Model 990 dCLD II Component Leak Detector Figure 3-1 System Block Diagram...

  • Page 54: Optional Front Control Panel Connection

    3.1.4.1 Optional Front Control Panel Connection If you are using the optional front control panel for setup and monitoring of the 990 dCLD II, connect it to the front of the control unit by lining up the connection brackets ¿...

  • Page 55: Discrete I/O Connection

    See Appendix A “Communications Protocol” for detailed information regarding the commands used to set up, monitor and operate the 990 dCLD II. A cross reference of the different modes of operation is provided in Table 2-11 on page 2-15.

  • Page 56: System Sensitivity And Configuration

    During the process of installing the 990 dCLD II and building the associated vacuum sys- tem, it is necessary to determine the sensitivity of the system. The 990 dCLD II is able to measure four decades of leak rate signal at once for a given configuration. For example, in a typical system with the V70D MacroTorr pump running at high speed, the four decades of −7...

  • Page 57: Initial System Parameter Setup

    Section 2. Adding to the stability and reliability of the 990 dCLD II, several parameters relating to the operation and performance are stored in EPROM in the control unit. This means if you lose power, or when the control unit is shut off, you do not lose that information.
  • Page 58 The 990 dCLD II is shipped from the factory with Auto-Ranging enabled set as the default. Manual Range is used to force the 990 dCLD II to respond to a leak rate detected in only one decade (the exponent never changes).
  • Page 59 Section 4.6.4 “Range Stop and Manual Range Set Up and Control” on page 4-15). RANGE STOP The RANGE STOP feature configures the 990 dCLD II so that it only auto-ranges down to the pre-selected decade entered in the range stop variable field, as opposed to all four decades beginning at the TOP RANGE.
  • Page 60 CALIBRATE button. CALIBRATED The 990 dCLD II is shipped from the factory with a calibrated leak LEAK VALUE (Cal Leak) as part of the turbo spec tube assembly. Its value is noted on the tag attached to it and on the Cal Leak Certification.
  • Page 61 Model 990 dCLD II Component Leak Detector NORMAL The NORMAL calibration routine performs a thorough tuning pro- CALIBRATION cess and a system gain adjustment (calibration). The full tuning pro- cess involves independently scanning the ion source chamber voltage and the variable focus voltage, and optimizing each value for a maximum helium signal.
  • Page 62 Model 990 dCLD II Component Leak Detector NOTE No ZEROing takes place during an EXTERNAL calibration because the 990 dCLD II has no control over the external calibrated leak. The SPEC TUBE LED on the front of the control unit flashes while calibration is taking place, the Discrete I/O J3/22 is active, and the response to the inquiry ?STATUS<CR>...
  • Page 63 Model 990 dCLD II Component Leak Detector REJECT SET POINTS The REJECT SET POINTS are used to alert the operator that a mea- sured leak rate has exceeded the set value. There are four set points available. Each set point must be enabled before they are opera- tional.
  • Page 64 Model 990 dCLD II Component Leak Detector LOG BAR In LOG BAR GRAPH DISPLAY mode, the 50-segment bar graph GRAPH DISPLAY display on the optional front control panel represents the entire −11 LINEAR BAR leak rate range of the leak detector, spanning from 10...
  • Page 65 Model 990 dCLD II Component Leak Detector AUTO-ZERO<0 When AUTO-ZERO<0 is activated, it automatically adjusts the ACTIVE zero reference point back up to zero when the helium level drops below the previously set zero reference point. This feature ensures that the leak detector maintains calibration after a previously zeroed background signal naturally cleans up.

  • Page 66: Startup

    The NOT READY line in the discrete I/O is active and the response to ?STATUS<CR> contains RDY/, indicating that the 990 dCLD II is not ready. If IDLE is enabled (see “IDLE MODE RUN MODE” on page 3-10), the control unit is waiting for the RUN command to be issued.

  • Page 67: Start Up Indications On The Optional Front Control Panel

    990 dCLD II). For more information see Section 4.4, “Touch Panel Home Screen”. If the 990 dCLD II is being started after a long period of being off (several hours), it can take up to 30 minutes to stabilize and provide reliable, quantitative leak rate readings.

  • Page 68: Tuning

    The ion source is changed 3.4.4 Running The 990 dCLD II senses the level of helium in the foreline of the high vacuum pump and converts the signal into a leak rate based upon the latest calibration and zero parameters in memory.

  • Page 69: Quick Start Checklist

    Make mains power connection to the control unit. ❑ Power the 990 dCLD II by turning on the main power switch on the rear panel. ❑ Check that the POWER LED on the front panel of the control unit is lit after the power on lamp test is completed.

  • Page 70: Operation Via Rear Panel

    Model 990 dCLD II Component Leak Detector 3.6 Operation via Rear Panel Once setup is complete and the 990 dCLD II is warmed up, operation can be turned over to the PLC by asserting PARALLEL ENABLE. Monitoring operations can take place using the optional front control panel or PLC, or by issuing commands using a host computer connected to the host serial port.

  • Page 71: Analog Leak Rate Output Voltage

    To use the analog leak rate output voltage to measure leak rate, you must set the format of the output voltage. The 990 dCLD II offers a choice of four leak rate output voltage formats as shown in Table 3-2. The output voltage format is selected by entering the appropriate command listed in Table 3-2, through the host serial port or, if the optional front control panel is installed, through the Output Control Set-Up screen (see Section 4.6.5 “Output...

  • Page 72: Analog Leak Rate Output Voltage Conversion Charts

    Model 990 dCLD II Component Leak Detector 3.7.1 Analog Leak Rate Output Voltage Conversion Charts Use the charts below (Figure 3-3 to 3-6) to convert the output voltage to the leak rate. Linear Analog Output Voltage Leak Rate Mantissa = Output Voltage 10.0...

  • Page 73: V/Decade Logarithmic Analog Output Voltage

    Model 990 dCLD II Component Leak Detector 2 V/Decade Log Analog Output Voltage 1.00E+01 1.00E+00 1.00E-01 1.00E-02 1.00E-03 1.00E-04 1.00E-05 1.00E-06 1.00E-07 1.00E-08 1.00E-09 Top Range Variable Output Voltage (V) Figure 3-5 2 V/Decade Logarithmic Analog Output Voltage 3 V/Decade Log Analog Output Voltage...

  • Page 74: Conversion Of 2 V/Dec Log To Leak Rate If

    3.7.2 Conversion of 2 V/Dec Log to Leak Rate if 10 Function Not Available To read leak rates in all four decades of the 990 dCLD II using the analog leak rate output voltage, it is recommended that the 2 V/Decade Log format be used. Use the following...

  • Page 75: Section 4. Setup And Monitor Operations Via The Optional Front Control Panel

    Section 4. Setup and Monitor Operations via the Optional Front Control Panel The Optional Front Control Panel of the 990 dCLD II is shown in Figure 4-1. It can be mounted remotely from the control unit or directly onto the front face of the unit. Operation controls include control buttons and a touch panel for the initial setup of the leak detector.

  • Page 76: Control Buttons

    The ZERO button is functional only when the key switch is in the SET-UP or SERVICE positions, and when PARALLEL ENABLE is off. Press the ZERO button to cause the 990 dCLD II to read the background leak rate signal, store the reading in memory, and then reset the zero reference point.
  • Page 77 Press the READ STANDARD LEAK button to display the value on the bar graph, and on the System Information screen allowing verification of 990 dCLD II cali- bration. When the system is in READ STANDARD LEAK mode, its LED indicator lights and STD LEAK is displayed on the HOME screen operating state line.

  • Page 78: Key Switch

    Model 990 dCLD II Component Leak Detector 4.1.1 Key Switch The 990 dCLD II Key Switch allows three different levels of access to the touch panel sys- tem controls, RUN, SET-UP or SERVICE. Two different keys are provided with the leak detector: ❑...

  • Page 79: Changing Variables In Touch Panel Screens

    Model 990 dCLD II Component Leak Detector 4.2.2 Changing Variables in Touch Panel Screens Touching the box that contains the variable to be changed causes the first digit of the vari- able to be highlighted. 1. Touch the box for the parameter you want to change to highlight the digit.

  • Page 80: Menu Hierarchy

    Model 990 dCLD II Component Leak Detector 4.3 Menu Hierarchy Figure 4-2 and Figure 4-3 show the hierarchy of the 990 dCLD II touch screen menus and the parameters that can be changed from each menu. The numbers to the left of each menu refer to the section in this document that discusses that menu in detail.

  • Page 81: Touch Panel Home Screen

    Figure 4-3 Service Menu Hierarchy 4.4 Touch Panel Home Screen The 990 dCLD II Touch Panel Home Screen, Figure 4-4, displays a summary of the status and configuration that has been set, and has two touch screen boxes that either provide access to information or change the configuration.

  • Page 82: Bar Graph Display: 0.8 X 10 -09 Atm Cc/Sec

    4-9 for a listing and description of the messages that can appear here. Leak Detector Status This line displays the current operating state of the 990 dCLD II. Under normal operating conditions, this line reads SYSTEM READY. See Table 4-2 on page 4-9 for a listing and description of the messages that can appear here.

  • Page 83: Dcld Ii Operating States

    The Zero routine is only initiated automatically during the start up and calibration routines, or manually when the operator presses the ZERO button on the optional front control panel. Table 4-2 990 dCLD II Leak Detector Status Display Description FILAMENT WAIT Indicates that the system is lighting the filament.

  • Page 84: Dcld Ii Condition States

    Model 990 dCLD II Component Leak Detector Table 4-3 990 dCLD II Condition States Display Description [BLANK] This line is blank under normal operating conditions. BOTH FILAMENTS BURNT OUT Indicates that both filament 1 and filament 2 of the ion source have burnt out.

  • Page 85: System Information Screen

    Model 990 dCLD II Component Leak Detector 4.5 System Information Screen The System Information screen, Figure 4-7, displays details of the leak detector setup and operating conditions. Table 4-4 describes the displayed system information in detail. SYSTEM INFORMATION <0 AUTO ZERO...

  • Page 86: System Software Version

    Model 990 dCLD II Component Leak Detector 4.5.1 System Software Version The System Software Version screen (Figure 4-8) provides system software revision informa- tion and the phone number for Varian. SYSTEM INFORMATION VERSION <0 AUTO ZERO ACTIVE TURBO SLOW AAXX.XX...

  • Page 87: Main Menu Selection Screen

    The Main Menu screen displays the screens available for performing general setup of the 990 dCLD II. Touching the BACK box from this screen displays the Home screen. The screens available through the Main Menu screen are described in this section. Many menus contain toggle boxes that switch between selections each time you touch them.

  • Page 88: Selecting Internal Or External Calibrated Leak For Calibration

    Touch the USE INT/EXT LEAK toggle box to switch between selecting whether the 990 dCLD II performs an automated calibration to the internal calibrated leak standard sup- plied with the leak detector, or to an external calibrated leak placed in the test port.

  • Page 89: Units Set-Up

    Model 990 dCLD II Component Leak Detector 4.6.3 Units Set-Up Touch the UNITS SET-UP box to display the Units Set-Up screen (Figure 4-12). This setup screen is used to select the leak rate and pressure units that are displayed on the leak rate bar graph, and in the Gauge Calibration screen, Section 4.7.3 “Gauge Calibration”...

  • Page 90: Leak Rate Range Selection Through Turbo Speed Set-Up

    4.6.4.1 Leak Rate Range Selection through Turbo Speed Set-Up The 990 dCLD II electronics allow for the display of only four full decades of sensitivity at one time. The four decades displayed depend on the pump model being used in conjunc- tion with the TURBO SPEED and TOP RANGE selection set by the user.

  • Page 91: Bar Graph Display Set-Up

    Model 990 dCLD II Component Leak Detector 4.6.5.1 Bar Graph Display Set-Up Touch the LINEAR BAR GRAPH DISPLAY toggle box to switch the bar graph display between LOG BAR GRAPH DISPLAY mode and LINEAR BAR GRAPH DISPLAY mode. Note, this change is effective immediately upon selection.

  • Page 92: Service Menus

    Figure 4-16 Service Menu Selection Screen CAUTION Many of the values for the parameters included in the Service Menus are calculated when the 990 dCLD II performs functions such as CALIBRATE and ZERO. Changing these values can cause unreliable test results.

  • Page 93: Manual Tuning

    BACK BACK Figure 4-18 Manual Tuning Screen You may need to manually tune the 990 dCLD II if: ❑ The control unit is connected to a spectrometer assembly in the field other than the one with which it was tested ❑...

  • Page 94: Gauge Calibration

    Model 990 dCLD II Component Leak Detector 4.7.3 Gauge Calibration Touch the GAUGE CAL box to view the Gauge Calibration screen shown in Figure 4-19. GAUGE CALIBRATION GAUGE MANUAL CALIBRATE SPEC-TUBE TC ZERO SPEC-TUBE TC ATM SPEC-TUBE PRESSURE: Torr MANUAL...

  • Page 95: Section 5. Maintenance

    For heavy production use, more frequent overhauls may be needed. Conversely, lighter use may permit a longer period between overhauls. In most cases, this work is done by user maintenance personnel, but it may also be done by Varian under the terms of a ser- vice contract.
  • Page 96 Model 990 dCLD II Component Leak Detector Cleanliness is vital when servicing the leak detector or any vacuum equipment. There are some techniques more important in leak detector servicing than in general vacuum work: CAUTION Do not use silicone oil or silicone grease.

  • Page 97: Scheduled Maintenance

    Model 990 dCLD II Component Leak Detector For simplicity, the maintenance functions in this section are grouped by recommended frequency, as shown in Table 5-1, based on assumed everyday use. Table 5-1 Scheduled Maintenance Description Daily 12 Months Refer to Calibration check Section 5.1 “Daily...

  • Page 98: Daily Maintenance

    Model 990 dCLD II Component Leak Detector 5.1 Daily Maintenance 5.1.1 Sensitivity Check using the Optional Front Control Panel 1. Press the READ STANDARD LEAK button. 2. Compare the value displayed on the HOME screen (Section 4.4, “Touch Panel Home Screen”) to the value of the known calibrated leak displayed on the SYSTEM...

  • Page 99: Recalibrate The Internal Calibrated Leak

    Helium calibrated leaks typically degrade at 3 percent per year. The calibrated leak sup- plied with your 990 dCLD II must be checked at least once a year to ensure it is at the value stated on its tag. Failure to check the leak could result in unreliable testing. You can arrange for testing and re-calibration at a lab of your choice.

  • Page 100: Removing The Spectrometer Tube Assembly

    The spectrometer tube operates at a very high vacuum produced by the high vacuum pump. Service of the spectrometer tube requires that this vacuum be vented to the atmosphere. NOTE Rebuilt spectrometer tubes are available from Varian on an exchange basis. Contact Varian Customer Service at 1-800-8VARIAN (1-800-882-7426) for details.

  • Page 101: Kf-25 Quick Clamp

    Model 990 dCLD II Component Leak Detector ➀ 3. Remove the KF-25 (ISO NW-25) quick clamp to disconnect the spectrometer tube from the Turbo Spec Tube Assembly (Figure 5-2). ➀ Figure 5-2 KF-25 Quick Clamp 4. Lay the spectrometer tube down on a clean non-magnetic surface.

  • Page 102: Slotted Screws That Attach The Magnet Assembly To Spectrometer

    Model 990 dCLD II Component Leak Detector ➀ 5. Remove the 2 slotted screws that mount the spectrometer tube magnet assembly to the spectrometer tube body (Figure 5-4). ➀ Figure 5-4 Slotted Screws that Attach the Magnet Assembly to Spectrometer ➀...

  • Page 103: Removing The Button Tc

    Model 990 dCLD II Component Leak Detector 5.3.2 Removing the Button TC ➀ 1. Remove the 4 slotted screws that hold the button TC header (Figure 5-6). ➀ Figure 5-6 Button TC Assembly ➁ 2. Remove the button TC header (Figure 5-7) by pressing down on the button TC center ➀...

  • Page 104: Removing The Ion Source

    Model 990 dCLD II Component Leak Detector ➀ 3. Remove the button TC carefully and place it sensing wire side up as shown in Figure 5-8, (contact pin side down) on a clean surface. ➀ Figure 5-8 Button TC CAUTION The sensing wire on the bottom side of the TC is approximately 3 mils thick.

  • Page 105: Removing The Ion Source

    Model 990 dCLD II Component Leak Detector ➀ 2. Remove the ion source from the spectrometer tube body (Figure 5-9). ➀ Figure 5-9 Removing the Ion Source NOTE Dark carbon-like deposits around the ion source filament and/ or a rainbow-like discoloration on the inside walls of the ion source cavity indicate that the spectrometer tube has been operated at too high a pressure.

  • Page 106: Ion Source Cavity

    Model 990 dCLD II Component Leak Detector ➀ The ion source cavity (Figure 5-11) contains the ground slit plate ➀ Figure 5-11 Ion Source Cavity 5. Remove the ground slit plate (Figure 5-12) by placing a thin, slotted screwdriver snug into the slot and carefully twisting and prying with the screwdriver.

  • Page 107: Removing The Preamplifier

    Model 990 dCLD II Component Leak Detector 5.3.4 Removing the Preamplifier CAUTION The preamplifier is a static sensitive device. Wear a grounding device while the preamplifier is being handled. 1. Remove the 4 slotted screws that hold the preamplifier header piece, repeating steps 1 and 2 in “Removing the Ion Source”...

  • Page 108: Removing The O-Ring From Magnetic Pole Piece

    Model 990 dCLD II Component Leak Detector 3. Remove the O-ring from the magnetic pole piece and place both the O-ring and the magnetic pole piece on a clean surface (Figure 5-15). Figure 5-15 Removing the O-ring from Magnetic Pole Piece 4.

  • Page 109: Examining And Cleaning The Spectrometer Parts

    Model 990 dCLD II Component Leak Detector 5.3.6 Examining and Cleaning the Spectrometer Parts 1. Using the Scotch-Brite™ pad included with the spectrometer tube cleaning kit, polish away any discolored areas inside the spectrometer tube cavity. 2. Using the Scotch-Brite pad, polish away any discolored areas of the ground slit plate (Figure 5-17).

  • Page 110: Vacusolv Cleaning Wipe

    Model 990 dCLD II Component Leak Detector 4. Using the VacuSolv presaturated cleaning wipes and swabs (Figure 5-19), thoroughly wipe down all surfaces of the spectrometer tube body, magnetic pole pieces, and ground slit plate. Figure 5-19 VacuSolv Cleaning Wipe...

  • Page 111: Reassembly

    Model 990 dCLD II Component Leak Detector 5.3.7 Reassembly 1. Carefully reassemble the spectrometer tube (Figure 5-21) in the reverse order of these instructions. NOTE Refer to Figure 5-21. ➀ The preamplifier assembly has a slot that must be aligned ➁...

  • Page 112: Dual Air Intake Filter Replacement

    Model 990 dCLD II Component Leak Detector 5.4 Dual Air Intake Filter Replacement The air intake filters should be checked at least every 12 months to ensure proper airflow through the control unit. To replace the dual air intake filters: ➀...

  • Page 113: Ion Source Replacement Outside Of Spectrometer Tube Overhaul

    Tools: Slotted screwdriver Parts: Ion Source 1. Turn off the main power switch located on the back of the 990 dCLD II leak detector. 2. Loosen the holding screw to remove the spec tube block connector from the spectrometer assembly.

  • Page 114: Reassembly

    5.6 Manual Tuning To manually tune the 990 dCLD II, the system must be attached to a vacuum system and be running with the setup parameters as described in Section 3.3 “Initial System Parameter Setup” on page 3-7. Note that the actual value of the calibrated leak is not important for the first part of this exercise, only that a maximum value is achieved.

  • Page 115: Example: Setting Repeller Parameter Value Using J12 Diagnostic Port

    Model 990 dCLD II Component Leak Detector 6. When the maximum leak rate is found, enter the same value for the REPELLER but use the INIT-REPELLER<CR> command instead of the PUT-REPELLER <CR> command. See the example in Table 5-4. Table 5-4 Example: Setting REPELLER Parameter Value using J12 Diagnostic Port...

  • Page 116: Manual Tuning Via The Optional Front Control Panel

    14. If the time for the leak rate decay is more than a few seconds, there could be a vacuum leak or the vacuum system might not be fully stabilized. It might be necessary to invoke the ZERO function (step 9) again to re-zero the 990 dCLD II. 5.6.2 Manual Tuning via the Optional Front Control Panel 1.

  • Page 117: Spare Parts List

    Model 990 dCLD II Component Leak Detector 5.7 Spare Parts List Table 5-6 lists some parts available for the 990 dCLD II. To order, contact Vacuum Technologies Customer Service at 1-800-882-7426 or order online at www.evarian.com. Table 5-6 Spare Parts List...
  • Page 118 Model 990 dCLD II Component Leak Detector Table 5-6 Spare Parts List (Continued) Assembly Part Number Front Control Panel Cable, 5 ft. R0634305 Front Control Panel Cable, 10 ft. R0634310 Touch Screen Assembly R1437301 Turbo Controller PCB and Transformer 9699840LL Turbo / Spectube Cable Assembly, 5 ft.

  • Page 119: Section 6. Troubleshooting

    ❑ The power cord is connected. ❑ All cables between the 990 dCLD II control unit, the cal leak valve block, the turbo pump, and the spectrometer tube are properly installed. ❑ All connections between the 990 dCLD II control unit and the testing station are properly installed.

  • Page 120: Symptoms Discussed In This Section

    1. Verify that the power cord is connected. 2. Verify that power is available at the receptacle into which the 990 dCLD II is plugged. 3. Verify that the proper voltage is selected on the rear panel of the 990 dCLD II.

  • Page 121: High Vac Led Does Not Light

    (the HIGH VAC LED is lit). 5. If the LED fails to light, replace the 990 dCLD II control unit to determine if it is at fault. 6. Replace the pump if a new control unit doesn't solve the problem.

  • Page 122: Spec Tube Led Does Not Light Or Stay Lit

    3. Perform a full normal calibration. See Table 2-11 on page 2-15 or Table A-4 on page A-8. If the SPEC TUBE LED still won’t light or stay lit, call Varian Customer Service at 1-800-8VARIAN (1-800-882-7426). 6.2.3.2 Check the Control Unit SPEC TUBE LED...

  • Page 123: No Helium Response

    6. Are the valves in the system operating correctly? Check that the valves are properly oriented and actuating when commanded. 7. With the leak valved off, issue the ZERO command to ZERO the 990 dCLD II. 8. Enter 250 PUT-ION<CR>, 380 PUT-REPELLER, 200 PUT-FOCUS, 400 PUT EMISSION, then ?ALL<CR>.

  • Page 124: Check The Helium Response Using The Optional Front Control Panel Interface

    6. Are the valves in the system operating correctly? Check that the valves are properly oriented and actuating when commanded. 7. With the leak valved off, press the ZERO button to ZERO the 990 dCLD II. 8. Move to the MANUAL TUNING screen, Section 5.6 “Manual Tuning” on page 5-20, and change the ION V value to 250, REPELLER V to 380, VAR FOCUS to 200, EMISSION I to 400 and touch OK.
  • Page 125 If the Ion Source is not shorted: a. Replace the 990 dCLD II control unit to determine if the control unit is defective. b. Finally, replace the turbo spec tube cable to determine if it has failed.

  • Page 126: Station Fails To Pump Down

    If all of the above check out ok, remove the test fixture and check your vacuum system. If station will fails to pump down, call Varian Customer Service at 1-800-8VARIAN (1-800-882-7426).
  • Page 127 Model 990 dCLD II Component Leak Detector For a reference point, if your test process is performed at 100 mTorr, with 500 PPM helium −5 in the air, the indicated leak rate would probably appear as a 3 x 10 atm cc/sec signal.
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  • Page 129: Appendix A. Communications Protocol

    Appendix A. Communications Protocol This appendix defines the technical specifications for the RS-232 protocol to be used with the 990 dCLD II Component Leak Detection System. A.1 Protocol (RS-232) The RS-232 ports operate at 9600 baud, 8 bits, no parity, and one stop bit.

  • Page 130: A-1 Internal Operating Parameters

    Model 990 dCLD II Component Leak Detector Table A-1 through Table A-4 outline the available control and query commands. ❑ Table A-1 lists inquiries that are used to determine internal operating parameters. All inquiries, except VER, begin with and end with <CR>.
  • Page 131 The second line consists of the words: system TC followed by a number of mTorr between 0 and 760000. ?QUICK-CAL A response of 0 indicates NORMAL Calibration by the 990 dCLD II. A response of 1 indicates FAST Calibration by the 990 dCLD II. ?RANGE A three-character (minus followed by two digit) number indicating the exponent of the least sensitive range of detectable leak.
  • Page 132 Model 990 dCLD II Component Leak Detector Table A-1 Internal Operating Parameters (Continued) Inquiry Response ?SETUP Eight lines that report a summary of setup parameters. Each begins with a <CR><LF>. The format is as follows: turbo speed Slow range -05 auto exponent -08 reject 1.0E-05...

  • Page 133: A-2 Non-Volatile Operating Parameters

    Model 990 dCLD II Component Leak Detector The commands listed in Table A-2 are used to set NON-VOLATILE operating parameters. The current value of the operating parameter is changed to the new value. If PARALLEL ENABLE is active, the response is cant<CR><LF>.
  • Page 134 Unacceptable values are not stored. INIT-RANGESTOP A three-character (minus followed by two digits) number indicating the exponent the 990 dCLD II will auto-range down to. Acceptable values are between the TOP range and exponent range values. INIT-REPELLER Preceded by a three-digit number of volts followed by a space, in the range 200 to 450, which sets the repeller voltage of the ion source.

  • Page 135: A-3 Spectrometer Operating Parameters

    Model 990 dCLD II Component Leak Detector The commands listed in Table A-3 are used to cause an immediate change in the spectrom- eter operating parameters. These commands do not change the non-volatile operating parameters. Table A-3 Spectrometer Operating Parameters...

  • Page 136: A-4 Leak Detection Actions

    Model 990 dCLD II Component Leak Detector The commands listed in Table A-4 are used to cause certain leak detection actions. Table A-4 Leak Detection Actions Command Action AUTO Initiates Auto-Ranging mode. Success is indicated by the ok<CR><LF> response. With PARALLEL ENABLE, the response is cant. AUTO is the factory default setting.
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  • Page 145: Customer Accessible Inputs

    Model 990 dCLD II Component Leak Detector B.3 Customer Accessible Inputs and Outputs The Host Serial Port is used to interface the 990 dCLD II to a PLC or computer via an RS-232 connection. Table B-3 provides details of the connection.
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  • Page 147: Appendix C. Introduction To Leak Detection

    Through the use of modern mass spectrometer leak testing techniques, as imple- −9 mented by the 990 dCLD II Helium Leak Detector, leak rates in the 10 std cc/sec range can be reliably detected. The discussion that follows provides a brief summary of specific information pertinent to the overall subject of leak detection.

  • Page 148: Terminology

    Model 990 dCLD II Component Leak Detector C.3 Terminology The following terminology has application throughout this manual: Flow std cc/sec One cubic centimeter of gas per second at a pressure differential of one standard atmosphere (760 torr at 0° C).

  • Page 149: Various Methods Of Testing For Leaks

    Model 990 dCLD II Component Leak Detector C.4 Various Methods of Testing for Leaks There are many methods of testing for leaks in enclosures—either systems or containers. The more commonly used methods along with the range of accuracy provided are listed below: −3...

  • Page 150: Helium Mass Spectrometer Leak Detection (Msld

    Model 990 dCLD II Component Leak Detector C.5 Helium Mass Spectrometer Leak Detection (MSLD) Helium is an excellent trace gas because it is the lightest of the inert gases and as a conse- quence readily penetrates small leaks. In addition, its presence in the atmosphere is minute (5 PPM or 4 millitorr absolute).

  • Page 151: Facts About Leak Rates

    Model 990 dCLD II Component Leak Detector C.5.4 Facts About Leak Rates −5 Visualizing Leaks in std cc/sec: approximately 1 cc/day −7 Everyday Terms std cc/sec: approximately 3 cc/year Audible or Visual Detection by Observer −4 a. Bubbles rising std cc/sec or larger in water −1...

  • Page 152: Test Piece Evacuated (Figure C-1A And Figure C-1B

    Model 990 dCLD II Component Leak Detector C.6.1 Test Piece Evacuated (Figure C-1a and Figure C-1b) The object to be tested is evacuated by the leak detector roughing pump, then valved into the spectrometer vacuum system. The surface of the test object is then probed with a small jet of helium to locate individual leaks, or surrounded by helium (hooded) for an overall leak check.

  • Page 153: Test Piece Already Sealed (Figure

    Model 990 dCLD II Component Leak Detector A sampling probe is connected to the leak detector. The object to be tested is filled with helium at the desired test pressure and the probe is moved over its surface. Some of the helium escaping from a leak is captured through the probe and enters the leak detector, thus locating the leak.

  • Page 154: Mass Spectrometer Leak Detector-Simplified Description

    Model 990 dCLD II Component Leak Detector C.7 Mass Spectrometer Leak Detector—Simplified Description Each Model 990 dCLD II consists basically of an analytical sensing tube called a spectrom- eter tube, electronics to operate the tube, and a vacuum system to maintain a very high vac- uum within this tube (usually less than 0.1 millitorr or about one ten-millionth of ordinary...

  • Page 155: Index

    Model 990 dCLD II Component Leak Detector Index Cleaning Spectrometer 5-15 Analog leak rate output voltage 3-21 Spectrometer tube assembly 5-5 Conversion 3-22, 3-23 Commands 2-15 Analog output Communications Protocol A-1 Linear 3-14 Communications protocol A-1 Logarithmic 3-14 Condition states messages 4-10...
  • Page 156 Model 990 dCLD II Component Leak Detector commands 2-15 J12 diagnostic port Customer Accessible Inputs B-1 Control unit rear panel 1-3 Customer Accessible Outputs B-4 J2 valve logic Customer-supplied pumps 5-1 Control unit rear panel 1-3 J3 Discrete I/O 2-9, 2-10...
  • Page 157 Model 990 dCLD II Component Leak Detector Maintenance 5-1 Output As-required 5-3 J3 Discrete I/O 2-10 Customer-supplied pumps 5-1 J4 BCD 2-11 Daily 5-4 J4 BCD, circuit sketch 2-13 Scheduled 5-3 Output Control Set-Up screen 4-16 Manual Calibration screen 4-18...
  • Page 158 Model 990 dCLD II Component Leak Detector Principles of mass spectrometry C-4 Software version 4-12 Probe to locate leak C-6 Spare parts 5-23 Protocol (RS-232) A-1 SPEC TUBE LED 1-2 Pump comparison table 2-2 SPEC TUBE LED does not light or stay lit 6-4...
  • Page 159 Model 990 dCLD II Component Leak Detector Units Set-Up screen 4-15 Units, selecting Via units set-up screen 4-15 Unpacking 1-1 Using the Optional Front Control Panel Interface 6-6 Vacuum flow C-4 Valve sequence Dual pump 2-5 Single pump 2-4 Split flow 2-6...
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  • Page 162 Canada Japan Other Countries Central coordination through: Varian, Inc. Varian, Inc. Varian, Inc. Sumitomo Shibaura Building, 8th Floor Via F.lli Varian 54 121 Hartwell Avenue 4-16-36 Shibaura 10040 Leini, (Torino) Lexington, MA 02421 Minato-ku, Tokyo 108 Italy Japan Tel: (39) 011 997 9 111...

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