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Varian 959D Operation Manual

Dry leak detector
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Model 959D
OPERATIONS MANUAL
Dry Leak Detector
Manual No. 699909745
Revision A
September 2002

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Summary of Contents for Varian 959D

  • Page 1 Model 959D OPERATIONS MANUAL Dry Leak Detector Manual No. 699909745 Revision A September 2002...
  • Page 2 Helium Mass Spectrometer Dry Leak Detector Contra-Flow, MacroTorr, and TriScroll are trademarks of Varian Vacuum Technologies. Apiezon is a registered trademark of M&I Materials Ltd.; Alconox is a registered trademark of Alconox, Inc.; Loctite and PST are registered trademarks of Loctite Corporation.; Scotch-Brite is a trademark of 3M.
  • Page 3 959D Leak Detector Preface Warranty Products manufactured by Seller are warranted against defects in materials and workmanship for twelve (12) months from date of shipment thereof to Customer, and Seller’s liability under valid warranty claims is limited, at the option of Seller, to repair, to replace, or refund of an equitable portion of the purchase price of the Product.

  • Page 4: Hazard And Safety Information

    This product must only be operated and maintained by trained personnel. Every operator or service person must read and thoroughly understand operation/maintenance manuals and any additional information provided by Varian Vacuum Technologies. All warnings and cautions should be read carefully and strictly observed.
  • Page 5 959D Leak Detector Solvents The mechanical components of leak detectors are typically CAUTION cleaned with alcohol, methanol, or other solvents. When heated, sprayed, or exposed to high-temperature equipment, these solvents become flammable and explosive, causing serious injury or death. Do not use these solvents near a high-temperature source.
  • Page 6 CAUTION ventilation holes at the front, back, and bottom of the equipment enclosure. Power and Static Disconnect power from the 959D before performing any WARNING maintenance procedure that requires physically disconnecting any part of the system. Many components of the 959D are static-sensitive devices.
  • Page 7 Normally, it is unnecessary to use vacuum grease. However, if it NOTE must be used, avoid silicone types, and use it sparingly. ® Apiezon L grease (Varian Vacuum Technologies p/n 695400004) is recommended.
  • Page 8 959D Leak Detector O-ring Care When removing, checking, or replacing O-rings, keep in mind the following: Varian Vacuum Technologies recommends replacing all NOTE O-rings during routine maintenance or during any maintenance procedure requiring that O-rings be removed. Remove O-rings carefully with your fingers. Do not use metal CAUTION tools for this task.
  • Page 9 959D Leak Detector Spectrometer Tube The spectrometer tube operates at a very high vacuum CAUTION produced by the high vacuum pump. Service of the spectrometer tube requires that this vacuum be vented to the atmosphere. Do not use grease or other substance on O-rings that will come CAUTION in contact with the spectrometer tube.

  • Page 10: Varian Services

    959D Leak Detector Varian Services The following are just a few of the many services that Varian offers its customers. Please see our catalog, or contact us to learn of other services that are available. Contact Varian Vacuum Technologies Customer Service at 1-800-8VARIAN for details.

  • Page 11: Table Of Contents

    Section 1. Introduction ........................1-1 1.1 General Description ......................1-1 1.2 Unpacking ..........................1-3 1.2.1 Unpacking Instructions....................1-3 1.2.2 Removing the 959D from the Skid ................1-4 1.3 Preparation for Operation ....................1-5 1.4 Installation..........................1-5 1.4.1 Electrical Connections....................1-5 1.4.2 Gas Requirements ......................
  • Page 12 959D Leak Detector 2.7 Residual Background Check....................2-17 2.7.1 Measuring the Background ..................2-17 2.7.2 Zero the Background ....................2-18 2.8 Shutdown and Restart Procedures ..................2-18 2.8.1 Standby........................2-18 2.8.2 Shutdown ........................2-18 2.8.3 Starting After Short-term Shutdown (Standby) ............2-19 2.8.4 Temporary Power Loss .....................
  • Page 13 Rear Panel Circuit Breakers ....................1-6 959D Front View ......................... 1-7 Vacuum System........................ 1-10 Primary (left) and Secondary (right) Controls ..............2-1 959D Primary Controls and Indicators ................2-2 Opening the Access Panel....................2-3 Secondary Controls and Indicators..................2-4 959D Rear Panel Components ................... 2-5 Vacuum Test Port .......................
  • Page 14 List of Tables Table Title Page Helium Sensitivity Ranges and MDL ................. 1-8 Valve Operating States ....................1-11 959D Operating Specifications ..................1-13 Scheduled Maintenance ....................3-3 As-required Maintenance....................3-3 959D Replacement Parts....................3-19 959D Accessories ......................3-19 Decimal Notation .......................A-2...

  • Page 15: Section 1. Introduction

    The use of this feature depends upon your test method and test conditions. For example, using the helium spray test method in a poorly ventilated area would likely require the use of the nitrogen purge. The 959D can detect leaks from as −4 −10...
  • Page 16 959D Leak Detector Figure 1-1 Model 959D Leak Detector...

  • Page 17: Unpacking

    ❑ This Operations Manual. ❑ 959D mounted on the top shelf of the cart with its power cable (120 VAC or 220 ❑ VAC as ordered) connected to a main power strip, located on the bottom shelf of the cart.

  • Page 18: Removing The 959D From The Skid

    959D Leak Detector 1.2.2 Removing the 959D from the Skid There are two methods for removing the 959D from the skid. Both methods require two people. The 959D is heavy and can cause personal injury if not WARNING handled carefully when removing it from the skid.

  • Page 19: Preparation For Operation

    220 VAC, 50/60 Hz, 10 Amps ❑ The 959D cart has a power strip equipped with a single 3-prong cable that attaches to an appropriate power line. The TriScroll roughing pump does not have a power on-off switch; it turns on when the leak detector is powered up from the AC input power strip located on the cart.

  • Page 20: Gas Requirements

    Plug the AC power cable into the receptacle. 1.4.2 Gas Requirements 1.4.2.1 Helium For testing products or leak checking with the 959D, use welding grade helium in a stan- dard cylinder with a pressure regulating valve. 1.4.2.2 Nitrogen (optional) Use 99.9% pure N for the purge operation as described in Section 2.6 “Nitrogen Purge...

  • Page 21: Clean Room Use Of The Leak Detector

    1.5 Vacuum System Description A front view of the 959D is shown in Figure 1-3. The test port connects to the equipment to be tested. A front panel user interface displays the test port pressure and leak rate of the test object.

  • Page 22: Measurement System

    959D Leak Detector 1.5.1 Measurement System The 959D utilizes a Contra-Flow™ vacuum system design that allows testing at high test point pressures. The vacuum system connects to the unit to be tested at the test port, maintains the required vacuum in the spectrometer tube, and removes helium after a test.
  • Page 23 A Leak Rate-Meter or a Chart Recorder for connection to the ❑ Recorder output, at rear of the 959D to monitor the results of leak tests. The remote device should have a impedance > 500 kΩ and in a voltage range from 0 to −5 VDC. The mating plug is not supplied.

  • Page 24: Internal Valving

    Figure 1-4 Vacuum System 1.6.1 Direct Operation of the Valves The 959D valve system allows for evacuation, testing, and venting the object to be tested. The main electronics are responsible for automatically sequencing the testing operation as described in the next section. The front panel operating buttons display the current leak detector mode as well as function as operation buttons.

  • Page 25: Automatic Valve Operation For Large Volume Leak Checks

    1.6.2 Automatic Valve Operation for Large Volume Leak Checks The 959D valve control system allows large volumes to be pumped without damaging the leak detector. If the leak detector is not advanced to Test or the test port pressure is above 250 mTorr, the system automatically switches between Start mode and Hold mode every three minutes.
  • Page 26 959D Leak Detector The 959D enclosure houses four circuit boards: Display board The display board controls the bar graph displays and associated drivers. Main Electronics The main electronics board operates and controls the board spectrometer tube. Logic board The logic board controls the front panel operation buttons.

  • Page 27: Specifications

    959D Leak Detector 1.7 Specifications Operating specifications for the 959D are listed in Table 1-3. For detailed specifications for the V70 or V70D high vacuum NOTE pumps, TriScroll pump, or other optional equipment, refer to their manuals. Table 1-3 959D Operating Specifications...
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  • Page 29: Section 2. Operation

    959D Leak Detector Section 2. Operation This section contains instructions for operating the 959D Leak Detector in its test cycle. The test cycle utilizes a connection between the test object and the leak detector so that helium passing through a leak in the object can be detected. It is good practice to tune and cali- brate the leak detector at the beginning of each day's testing.

  • Page 30: Primary Controls And Indicators

    The leak detector moves into HOLD if spectrometer tube pressure is exces- sive or if there is an ion source fila- ment failure. Figure 2-2 959D Primary Controls and Indicators ➃ VENT button Lights when pressed to vent the test port to atmosphere.

  • Page 31: Secondary Controls And Indicators

    1-8 list the range values. 2.1.2 Secondary Controls and Indicators The secondary controls are on the front of the 959D behind a keyed access panel. The par- tially open panel is shown in Figure 2-3. Figure 2-3 Opening the Access Panel The secondary control panel is shown in detail in Figure 2-4 on page 2-4.
  • Page 32 ➆ Adjusts amplifier gain to make the leak rate reading agree with a calibrated leak. ➇ MAIN POWER Main power control for the 959D. ➈ READY/TURBO LED that indicates the Turbo or Macro- Torr pump is at full operational speed.

  • Page 33: Rear Panel Components

    959D Leak Detector 2.1.3 Rear Panel Components Rear panel components are shown in Figure 2-5. Figure 2-5 959D Rear Panel Components ➀ Exhaust fans Two exhaust fans cool the high vacuum pump and internal elec- tronic assemblies. ➁ Speaker A grid-covered speaker amplifies an audible signal present during leak testing.

  • Page 34: Connecting To The Test Port

    The unit under test or the associated vacuum system to be monitored is connected to the test port at the top of the 959D (Figure 2-6). Information regarding the various leak detection methods is given in Appendix A “Introduction to Leak Detection” on page A-1.

  • Page 35: 959D Startup Procedure

    You may have to repeat step 5 until the FIL light stays on. If the filament will not light after repeated attempts, the ion source may have to be replaced. Qualitative analysis can begin immediately. Allow 1/2-hour warm-up time to perform calibration and qualitative analysis. To calibrate the 959D, see Section 2.5 “Calibration and Tuning” on page 2-11.

  • Page 36: Changing The Audible Threshold

    Allow one-half hour for the pumps to warm up completely and for the leak detector to stabi- lize. Before starting a leak test, verify that the 959D has been recently tuned and calibrated as instructed in Section 2.2 “959D Startup Procedure”. The primary testing controls are shown in Figure 2-7.
  • Page 37 The HOLD button illuminates for 30 seconds alternating with the START button every three minutes if the test port pressure fails to drop below 250 mTorr. If the HI VAC OK or the FIL LED turn off, contact Varian NOTE Vacuum Technologies Customer Service at 1-800-8VARIAN.

  • Page 38: Out-Of-Range Situations

    959D Leak Detector 2.4.2 Out-of-Range Situations The testing range of the 959D is set by the RANGE switch and the leak rate within the set range is displayed as a 0 to 10 vertical illumination on the primary front control panel of Figure 2-2.

  • Page 39: Calibration And Tuning

    Verify that startup has taken place, that the pumps are up to speed, and that the leak detec- tor is ready to test (Section 2.2 “959D Startup Procedure” on page 2-7). Both primary and secondary controls are used in this procedure. Refer to Figure 2-2 on page 2-2 and Figure 2-4 on page 2-4.
  • Page 40 If the leak rate drops to zero, go on to step 9. ❑ If the leak rate does not drop to zero, the 959D is not detecting helium. ❑ Go to Section 2.5.3 “Tuning the Spectrometer Tube Using a Calibrated Leak for Tuning to He”.

  • Page 41: Use Of A Capillary Type Calibrated Leak For Tuning To He

    When tuning is done carefully, the day-to-day changes will be very small and subsequent calibration may require only slight adjustment of the CAL control. The 959D should be warmed up before you attempt to tune the spectrometer tube. The controls referred to in the following procedure are shown in Figure 2-2 on page 2-2 and Figure 2-4 on page 2-4.

  • Page 42: Tuning The Spectrometer Tube Using A Tuning Leak

    2-4. 1. Verify that start up has taken place, that the pumps are up to speed, and that the leak detector is ready to test (see Section 2.2 “959D Startup Procedure” on page 2-7). 2. Press VENT. 3. Set RESIDUAL BACKGROUND to RUN.
  • Page 43 A change in one adjustment may affect the others. Therefore, it may be necessary to repeat step 9 through step 12 until no significant change occurs in the leak rate reading. The 959D is now tuned to helium. When performed correctly, day-to-day changes are very small, and daily adjustment may not be required.

  • Page 44: Nitrogen Purge Option

    959D Leak Detector 2.6 Nitrogen Purge Option A continuous purge of the 959D roughing pump and the associated vacuum system in the leak detector with laboratory grade nitrogen will assure that residual helium levels do not raise the system background to unacceptable levels. The N...

  • Page 45: Residual Background Check

    If the background reading is unstable or cannot be zeroed, or CAUTION the UNDER light is on after the unit was zeroed in the check position, leak-check the system. Contact Varian Vacuum Technologies Customer Service at 1-800-8VARIAN for assistance. 2-17...

  • Page 46: Zero The Background

    If the leak detector is to be moved to a remote location, perform a complete ❑ shutdown procedure. 2.8.1 Standby Perform this procedure to shut down the 959D for a period of up to 8 hours. 1. Plug the test port. 2. Press the VENT button. 3. Leave the switch in the ON/AUTO position.

  • Page 47: Starting After Short-Term Shutdown (Standby)

    959D Leak Detector 2.8.3 Starting After Short-term Shutdown (Standby) No special steps are required for preparing the leak detector for operation when the green FIL. indicator is illuminated and the system pressure is in the green band in the vertical dis- play.
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  • Page 49: Section 3. Maintenance And Parts Replacements

    959D Leak Detector Section 3. Maintenance and Parts Replacements The 959D requires periodic maintenance to assure continued reliable operation and accurate measurements. After prolonged use, the leak detector accumulates contaminants from even the cleanest of products tested. These contaminants eventually impair operation.

  • Page 50: O-Rings

    O-rings “shiny” dry. 3.1.5 Cleaning Kit The Varian Component and Spectrometer Tube Cleaning Kit, p/n 670029096, is recommended for cleaning the spectrometer tube components, as well as for the fine cleaning of other parts in the leak detector’s vacuum system such as valves and fittings.

  • Page 51: Maintenance Schedules

    959D Leak Detector 3.1.6 Maintenance Schedules Refer to Table 3-1 and Table 3-2 for maintenance schedules. Table 3-1 Scheduled Maintenance Description Daily 12 Months Refer to Calibration check Section 2.5 “Calibration and Tuning” on page 2-11 Spectrometer tube overhaul 12 months or less Section 3.4 “Cleaning or...

  • Page 52: Cleaning The Test Port

    3. Remove the test port compression ring and O-ring from the top of the test port. Figure 3-1 Removing the Test Port Compression Ring and O-ring 4. Examine the O-ring, and clean or replace it as necessary. Varian recommends replacing all O-rings during routine NOTE maintenance or during any maintenance procedure requiring that O-rings be removed.

  • Page 53: Removing The Cover

    The following set of procedures covers both replacement with new components, and cleaning of the existing items. Although O-rings can be effectively cleaned, Varian recommends that all O-rings be replaced whenever they have been removed from a vacuum sealed system.

  • Page 54: Removing The Ion Source

    Press the VENT button. ❑ Turn off the MAIN POWER switch on the front panel. ❑ Disconnect power from the 959D before performing any WARNING maintenance procedure that requires physically disconnecting any part of the system. Turn off the power switch on the AC power strip located at the bottom of the cart.
  • Page 55 959D Leak Detector 4. Loosen the wing nut and remove the NW-25 clamp that holds the spectrometer tube onto the turbo pump (Figure 3-4). NW-25 Clamp Position wingnut upward when reassembling. Figure 3-4 Wing Nut and Clamp 5. Lift the entire spectrometer tube assembly off the turbo pump and out of the chassis as shown in Figure 3-5.
  • Page 56 959D Leak Detector 6. Remove the O-ring and centering ring (Figure 3-6) and place them on a clean non-magnetic surface. Figure 3-6 Spectrometer Tube O-ring and Centering Ring 7. Remove the 4 screws that hold the ion source flange cap (Figure 3-7).
  • Page 57 959D Leak Detector 8. Remove the ion source flange cap by pressing down on the ion source center post lifting the flange cap up and off the ion source as shown in the images of Figure 3-8. Press here on Center Post...

  • Page 58: Examining The Ion Source

    If either item is discolored or dirty, it can be cleaned or it may have to be replaced if VacuSolve will not effectively remove the offending material. VacuSolv is included in the Varian Vacuum Technologies’ NOTE Component and Spectrometer Tube Cleaning Kit (p/n 670029096).
  • Page 59 If the ground slit plate or ion source cavity walls are lightly discolored, remove the ❑ plate and clean using the following steps, or replace it (see Section 3.4.4 “Installing the Ion Source” on page 3-14). If the ground slit plate is highly discolored, contact Varian Vacuum Technologies ❑ Customer Service at 1-800-8VARIAN. 3-11...

  • Page 60: Cleaning The Ground Slit Plate

    959D Leak Detector 3.4.3 Cleaning the Ground Slit Plate Wear protective gloves for this procedure. NOTE 1. Remove the ground slit plate (Figure 3-12) by placing a thin, slotted screwdriver snug into the slot and carefully twisting and prying with the screwdriver.
  • Page 61 959D Leak Detector ™ 3. Use a Scotch-Brite pad to polish away any discolored areas of the ground slit plate (Figure 3-13). Figure 3-13 Cleaning the Ground Slit Plate The ground slit plate is very thin. Take care not to bend or CAUTION scratch it during cleaning.

  • Page 62: Installing The Ion Source

    959D Leak Detector 6. Inspect the preamplifier as part of a spectrometer tube cleaning procedure. This procedure is contained in Section 3.4.5 “Cleaning the Preamplifier Cavity” on page 3-17. 7. If you do not remove the preamplifier, allow all parts associated with the ion source to air dry thoroughly.
  • Page 63 959D Leak Detector 3. Check that the ground slit plate is firmly seated in the ion source cavity. If it is not, remove it and, using a screwdriver, bend the prongs out slightly and place the ground slit plate into the cavity again.
  • Page 64 959D Leak Detector 5. Holding the ion source by the connector pins, and the O-ring if necessary, insert the ion source into the cavity so that its alignment pin falls in the center of the hole in the cavity (Figure 3-16).

  • Page 65: Cleaning The Preamplifier Cavity

    959D Leak Detector 3.4.5 Cleaning the Preamplifier Cavity Wear a ground strap while handling the preamplifier. The CAUTION preamplifier is a static-sensitive device. 1. Remove the four screws that hold the preamplifier flange cap. 2. Remove the preamplifier flange cap by pressing down on the preamplifier center post and lifting the flange cap up and off of the preamplifier.

  • Page 66: Installing The Spectrometer Tube

    959D Leak Detector 3.4.7 Installing the Spectrometer Tube 1. Wipe the centering ring using a VacuSolv wipe (Figure 3-18). Figure 3-18 Spectrometer Tube O-ring and Centering Ring 2. Wipe the O-ring with a clean, lint-free cloth and place it onto the centering ring.

  • Page 67: Replacement Parts

    V70D Turbo Pump Exchange Program Call Varian V70LP Turbo Pump Exchange Program Call Varian 3.6 Accessories Refer to Table 3-4 for Model 959D Dry Leak Detector accessories. Table 3-4 959D Accessories Part Part Number − Calibrated Leak-Helium reservoir Refillable Leak 10 atm cc/sec range F8473301 −...
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  • Page 69: Appendix A. Introduction To Leak Detection

    Using the modern mass spectrometer leak testing techniques implemented by the Varian −10 Vacuum Technologies 959D Helium Leak Detector, leak rates in the 10 atm cc/sec range can be reliably detected.

  • Page 70: Terminology

    959D Leak Detector A.3 Terminology The following terminology has application throughout this manual: Flow atm cc/sec One cubic centimeter of gas per second at a pressure differential of one standard atmosphere (760 torr at 0 °C). atm cc/sec One cubic centimeter of gas per second at ambient atmospheric pressure and temperature (used interchangeably with atm cc/sec because the difference is insignificant for leak testing purposes).

  • Page 71: Leak Detection Methods

    959D Leak Detector A.4 Leak Detection Methods There are many methods of testing for leaks in enclosures, systems or containers. The more commonly used methods and their accuracy ranges are listed below: −3 Water Immersion This method is good to approximately 10...

  • Page 72: Helium Mass Spectrometer Leak Detection (Msld

    959D Leak Detector A.5 Helium Mass Spectrometer Leak Detection (MSLD) Helium is an excellent trace gas because it is the lightest of the inert gases and as a conse- quence readily penetrates small leaks. In addition, its presence in the atmosphere is minute (5 PPM or 4 milliTorr absolute).

  • Page 73: Facts About Leak Rates

    959D Leak Detector A.5.4 Facts About Leak Rates −5 Visualizing Leaks in atm cc/sec: approximately 1 cc/day Everyday Terms −7 atm cc/sec: approximately 3 cc/year Audible or Visual Detection by Observer −4 a. Bubbles rising atm cc/sec or larger in water −1...

  • Page 74: Using Helium For Leak Detection

    959D Leak Detector A.6 Using Helium for Leak Detection Most leak detection methods depend on the use of a tracer gas passing through the leak and being detected on the other side (for example, visual detection of air bubbles in water).

  • Page 75: Test Piece Pressurized

    959D Leak Detector A.6.2 Test Piece Pressurized Figure A-3 is an illustration of a Detector Probe used to locate a leak in a pressurized test piece. Figure A-3 Test Piece Pressurized: Detector Probe Used to Locate Leak A sampling probe is connected to the leak detector. The object to be tested is filled with helium at the desired test pressure and the probe is moved over its surface.

  • Page 76: Mass Spectrometer Leak Detector

    A.7 Mass Spectrometer Leak Detector The 959D consists of an analytical sensing tube called a spectrometer tube, electronics to operate the tube, and a vacuum system to maintain a very high vacuum within this tube (usually less than 0.1 milliTorr or about one ten-millionth of ordinary atmospheric pressure).
  • Page 77 959D Leak Detector Test pieces are generally rough pumped (or, if pressurized, the chamber in which they are to be tested is rough pumped) by a mechanical vacuum pump before they are connected to the spectrometer tube (Figure A-5). This prevents overloading the vacuum pumping system.
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  • Page 79: Index

    959D Leak Detector Index Accessories 3-19 Leak detection methods A-6 Audio settings 2-8 Already sealed A-7 Evacuated A-6 Pressurized A-7 Background check 2-17 Leak rate A-5, A-6 Leak test methods Dye penetrant A-3 Calculating leak rate A-6 Halogen A-3 Calibrated leak 2-11, 2-13...
  • Page 80 Vacuum flow A-4 Spectrometer tube 3-18 Vacuum systems A-1 Removal ground slit plate 3-12 Removal of cover 3-5 Removing the 959D from the skid 1-4 Reorder parts 3-19 Replace Preamplifier 3-17 Residual background check 2-17 Restart procedures 2-18 Running a test 2-8...
  • Page 82 Tel: (39) 011 997 9111 Tel: (39) 011 997 9111 Fax: (39) 011 997 9350 Brazil Fax: (39) 011 997 9350 Varian Industria e Comercio Ltda. Japan Avenida Dr. Cardoso de Mello 1644 Internet Users: Varian Vacuum Technologies Vila Olimpia Customer Service &...

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