Varian 947 Manuals

Manuals and User Guides for Varian 947. We have 4 Varian 947 manuals available for free PDF download: Operation And Service Manual, Instruction Manual

Varian 947 Operation And Service Manual (242 pages)

Leak Detectors

Brand: Varian | Category: Security Sensors | Size: 5 MB

Table of Contents
3
Declaration of Conformity

13
Warranty

14
- Warranty Replacement and Adjustment
  14
Garantie

15
- Ersatz und Einstellung unter Garantie
  15
Factory Calibration Data

17
- List of Options or Accessories Included with System
  17
- Hazard and Safety Information
  18
  - Solvents
    19
  - Equipment, General
    20
  - Power and Static
    21
  - Vacuum Equipment and Cleanliness
    22
  - O-Ring Care
    23
  - Spectrometer Tube
    24
  - Pumps
    24
- Contacting Varian Vacuum Technologies
  25
- Varian Services
  25
- Informationen über Gefahren und Sicherheit
  26
  - Lösungsmittel
    27
  - Maschinen, Allgemein
    28
  - Strom und Statik
    29
  - Vakuumgeräte und Sauberkeit
    31
  - Pflege von O-Ringen
    32
  - Spektrometerrohr
    33
  - Pumpen
    33
- Dienstleistungen von Varian
  34
- Kontaktieren von Varian Vacuum Technologies
  34
- Leak Detector
  36
- Figure Description
  
  37
- Leak Detector
  37
Section 1. Introduction to Models 947, 948 and 960 Leak Detectors

38
- Platform Electronics
  38
- Front Panel Controls and Indicators
  40
- Inner Door Instruction Label
  43
- Rear Panel Power Connection and Circuit Breakers
  44
- Service pendant
  45
- Installation Preparation
  46
  - Power
    46
  - Liquid Nitrogen (Models 948/960 Only)
    47
  - Oil-Sealed Vacuum Pumps
    47
  - Special Installation Requirements
    47
  - Installation Services
    47
- Storage
  48
- Optional Rear Panel Interface Connections
  48
- Lecksucher
  50
- Lecksucher
  51
Einführung in die Lecksucher, Modell 947, 948 und 960

52
Section 2. Leak Detector Integration

65
- Physical Considerations
  65
- Common Configuration
  65
- Flow Diagram
  66
- Ablaufdiagramm
  67
Table Description

68
- Valve Operation
  68
- Flow Diagram
  69
- Ablaufdiagramm
  70
- Flow Diagram
  71
- Flow Diagram
  72
  - Electronic Considerations for the Optional Rear Panel Interface
    73
    
    Discrete I/O J120 Inputs
    73
    
    BCD J121 Outputs
    74
    
    Host Serial Port J123 Pinouts
    75
  - Optional Interface Connections
    76
    
    Grounding and Isolation
    76
    
    Discrete I/O
    77
    
    Setup
    77
  - Operation Using the Optional Rear Panel Interface
    79
    
    Parallel Enable
    79
Section 3. Operation

81
- Front Panel LED Indicators and Controls
  81
- Initial System Parameter Setup
  83
  - Parameters and Operating Modes
    83
- Start-Up
  89
  - Startup Procedure
    90
- Calibration and Sensitivity Checks
  91
  - Calibration and Sensitivity Checks
    92
- Operating Procedures
  94
  - Auto Ranging
    94
  - Manual Ranging
    95
- Standby
  96
- Shutdown
  97
- Using the pendant for Parameter Setup
  97
- Optional Discrete I/O
  98
Betrieb

99
- LED-Anzeigen und Steuerelemente auf der Fronttafel
  100
- Erste Einstellung der Systemparameter
  102
  - Parameter und Betriebsmod
    102
- Inbetriebnahme
  108
  - Anleitungen zur Inbetriebnahme
    110
- Kalibrierungs- und Empfindlichkeitsprüfungen
  111
- Kalibrierungs- und Empfindlichkeitsprüfungen
  112
- Betriebsverfahren
  114
  - Automatische Bereichseinstellung
    114
- Position des Schalters AUTO/MAN MODE
  115
  - Manuelle Bereichseinstellung
    116
  - Bereitschaft
    117
  - Abschalten
    117
  - Parametereinstellung mit der Hängebedienungstafel
    118
  - Optionale Diskrete E/A
    119
Section 4. Maintenance

121
- Scheduled Maintenance
  123
- As-Required Maintenance
  124
  - Daily Maintenance
    125
    
    Calibration Check
    125
    
    Leak Checking
    125
    
    General Suggestions for Leak Checking
    126
  - Yearly Maintenance
    127
    
    Re-Calibrate the Internal Calibrated Leak
    127
    
    Removing the Internal Calibrated Leak
    127
    
    Replacing the Calibrated Leak
    127
    
    Replacing the Internal Calibrated Leak
    129
    
    Liquid Nitrogen Cold Trap (Models 948/960 Only)
    130
    
    Flüssigstickstoff-Kühlfalle (nur Modele 948/960)
    131
    
    Spectrometer Tube Overhaul
    132
    
    Removal of the Spectrometer Tube and Preamplifier
    133
- Spectrometer Tube Removal
  134
  - Disassembly of the Spectrometer Tube and Preamplifier
    135
- Spectrometer Tube Disassembly
  136
  - Spectrometer Tube Cleaning
    137
  - Reassembly of the Spectrometer Tube and Preamplifier
    137
- Spectrometer Tube Reassembly
  138
- Spectrometer Tube Reassembly (Magnet Assembly)
  140
Section 5. Troubleshooting

161
- Error Condition Codes
  162
- Troubleshooting Symptoms and Solutions
  163
- Fehlerzustandscodes
  165
- Symptome und Lösungen bei der Fehlersuche
  166
Appendix A. Service pendant Keypad Functions

169
- Using the Service pendant
  170
- Glossary of Function Keys
  171
- Glossary of Input and Data Keys
  171
Appendix B. Parts Replacement

177
- Removing the Covers
  177
  - Opening the Turret
    178
    
    Removing the Service pendant Shelf
    178
  - Removing the Top Panel
    179
  - Replacing All Panels and Covers
    180
    
    Replacing the Service pendant Shelf
    180
    
    Replacing the Top Panel
    181
- Replacing the Ion Source
  182
- Replacing the Turbo Pump
  185
  - Turbo Pump
    185
    
    Removing the Turbo Pump
    186
    
    B-8 the Turbo Power Connection
    187
    
    Examining and Cleaning Centering Rings, O-Rings and Manifold
    188
    
    Replacing the Turbo Pump
    188
    
    Connecting the Turbo Pump to the SVBA
    189
- Replacing the Rough Pump
  191
  - Wet Systems
    191
    
    Removing the Wet System Rough Pump
    192
    
    Examining and Cleaning Centering Rings, O-Rings and Manifold
    193
    
    Replacing the Wet System Rough Pump
    193
    
    Re-Installing the Wet System Rough Pump
    194
  - Dry Systems
    196
    
    Removing the Dry System Rough Pump
    196
    
    Examining and Cleaning Centering Rings, O-Rings and Manifold
    197
    
    Re-Installing the Dry System Rough Pump
    197
    
    Replacing the Dry System Rough Pump
    197
- Replacing the Forepump
  198
  - Wet
    198
    
    Removing the Wet System Forepump
    199
    
    Examining and Cleaning Centering Rings, O-Rings and Manifold
    200
    
    Re-Installing the Wet System Forepump
    200
    
    Replacing the Wet System Forepump
    200
  - Dry System
    202
    
    Removing the Dry System Forepump
    202
    
    Removing the Isolation Valve from the Forepump
    202
    
    Examining and Cleaning Centering Rings, O-Rings and Manifold
    203
    
    Removing the Exhaust Fitting
    203
    
    Removing the Nitrogen Purge Connection from Pump
    203
    
    Removing the Pump from the Cabinet
    203
    
    Replacing the Dry System Forepump
    203
    
    Connecting the Nitrogen Purge Pump
    204
    
    Re-Installing the Dry System Forepump
    204
    
    Replacing the Isolation Valve
    204
    
    Completing Mounting the Pump to the Cabinet Floor
    205
    
    Replacing the Exhaust Fitting
    205
Appendix C. Communications Protocol

207
- Protocol
  207
Appendix D. Inputs and Outputs

215
- Service Serial Interface (J1
  215
- Optional Rear Panel Interface
  215
Technische Daten für 947/948

227
Appendix E. 947/948 Specifications

227
Appendix E. 947/948 Specifications

227
Appendix F. Accessories

227
Appendix G. Leak Detection Theory

229
- Leak Testing-Why Is It Needed
  229
- Classes of Leak Detection
  229
- Terminology
  230
- Various Methods of Testing for Leaks
  231
- Helium Mass Spectrometer Leak Detection (MSLD
  232
  - Principles of Mass Spectrometry
    232
  - Application as a Leak Detector
    232
  - The Nature of Flow in a Vacuum
    232
  - Facts about Leak Rates
    232
- Leak Detection Methods
  233
  - Test Piece Evacuated
    234
  - Test Piece Pressurized
    234
  - Test Piece Already Sealed
    235
- Mass Spectrometer Leak Detector-Simplified Description
  236
- G.7 Mass Spectrometer Leak Detector—Simplified Description
  236
Index

237

Varian 947 Operation And Service Manual (230 pages)

Leak Detectors

Brand: Varian | Category: Security Sensors | Size: 6 MB

Table of Contents
3
Declaration of Conformity
13
Warranty
15
Warranty Replacement and Adjustment
15
Warranty
16
Warranty Replacement and Adjustment
16
Factory Calibration Data
17
List of Options or Accessories Included with System
17
Hazard and Safety Information
18
Solvents
19
Equipment, General
20
Power and Static
20
Vacuum Equipment and Cleanliness
22
O-Ring Care
22
Spectrometer Tube
23
Pumps
23
Varian Services
24
Contacting Varian Vacuum Technologies
24
Hazard and Safety Information
25
Solvents
26
Equipment, General
27
Power and Static
27
Vacuum Equipment and Cleanliness
29
O-Ring Care
29
Spectrometer Tube
30
Pumps
30
Varian Services
31
Contacting Varian Vacuum Technologies
31
Platform Electronics
36
Unpacking the 947/948/960
36
Unpacking Instructions
36
Removing the 947/948/960 from the Skid
37
Removing Loose Packing from Interior of 947/948/960
38
Front Panel Controls and Indicators
38
Inner Door Instruction Label
40
Rear Panel Power Connection and Circuit Breakers
41
Service pendant
42
Installation Preparation
43
Power
43
Liquid Nitrogen (Models 948/960 Only)
44
Oil-Sealed Vacuum Pumps
44
Special Installation Requirements
44
Installation Services
44
Storage
45
Optional Rear Panel Interface Connections
45
Platform Electronics
49
Unpacking the 947/948/960
49
Unpacking Instructions
49
Removing the 947/948/960 from the Skid
50
Removing Loose Packing from Interior of 947/948/960
51
Front Panel Controls and Indicators
51
Inner Door Instruction Label
53
Rear Panel Power Connection and Circuit Breakers
54
Service pendant
55
Installation Preparation
56
Power
56
Liquid Nitrogen (Models 948/960 Only)
57
Oil-Sealed Vacuum Pumps
57
Special Installation Requirements
57
Installation Services
57
Storage
58
Optional Rear Panel Interface Connections
58
Section 2. Leak Detector Integration
59
Physical Considerations
59
Common Configuration
59
Electronic Considerations for the Optional Rear Panel Interface
67
Discrete I/O J120 Inputs
67
BCD J121 Outputs
68
Host Serial Port J123 Pinouts
69
Optional Interface Connections
70
Grounding and Isolation
70
Setup
71
Discrete I/O
71
Operation Using the Optional Rear Panel Interface
73
Parallel Enable
73
Section 3. Operation
75
Front Panel LED Indicators and Controls
75
Initial System Parameter Setup
77
Parameters and Operating Modes
77
Start-Up
82
Startup Procedure
84
Calibration and Sensitivity Checks
85
Operating Procedures
87
Auto Ranging
88
Manual Ranging
89
Standby
90
Shutdown
90
Using the pendant for Parameter Setup
91
Optional Discrete I/O
92
Operation
93
Front Panel LED Indicators and Controls
93
Initial System Parameter Setup
95
Parameters and Operating Modes
95
Start-Up
100
Startup Procedure
102
Calibration and Sensitivity Checks
103
Calibration and Sensitivity Checks
104
Operating Procedures
105
Auto Ranging
106
Manual Ranging
107
Standby
108
Shutdown
108
Using the pendant for Parameter Setup
109
Optional Discrete I/O
110
Section 4. Maintenance
111
Daily Maintenance
115
Calibration Check
115
Leak Checking
115
General Suggestions for Leak Checking
116
Yearly Maintenance
117
Replacing the Calibrated Leak
117
Re-Calibrate the Internal Calibrated Leak
117
Removing the Internal Calibrated Leak
117
Replacing the Internal Calibrated Leak
119
Liquid Nitrogen Cold Trap (Models 948/960 Only)
120
Liquid Nitrogen Cold Trap (Models 948/960 Only)
121
Spectrometer Tube Overhaul
122
Removal of the Spectrometer Tube and Preamplifier
123
Disassembly of the Spectrometer Tube and Preamplifier
125
Spectrometer Tube Cleaning
127
Reassembly of the Spectrometer Tube and Preamplifier
127
Reinstallation of the Spectrometer Tube
130
Air Filter
131
Spectrometer Tube Exchange
132
Removing and Replacing both the Spectrometer Tube Assembly and Preamplifier
132
Reinstalling the Spectrometer Tube
132
TC1 and TC2 Gauge Replacement and Calibration
134
Replacement of the TC1 Gauge in the Main Valve Block Assembly
134
Replacement of the TC2 Gauge in the Service Block Assembly
136
Thermocouple Gauge Calibration Procedures
138
System Pressure Gauge (TC2) Calibration
138
Vacuum (Low Pressure) Calibration
138
Atmospheric Calibration
139
Test Port Pressure Gauge (TC1) Calibration
140
Vacuum (Low Pressure) Calibration
140
Atmospheric Calibration
141
Rough Pump and Forepump Oil Level Check (Oil-Sealed Mechanical Pumps)
142
Condition of Oil (Oil-Sealed Mechanical Pumps)
143
Cleaning the Test Port
143
Removing the Test Port
143
Examining and Cleaning the Test Port
144
Replacing the Test Port
145
Spare Parts
145
Exchange Assemblies
145
Replacement Parts
146
Section 5. Troubleshooting
149
Error Condition Codes
150
Troubleshooting Symptoms and Solutions
151
Error Condition Codes
153
Troubleshooting Symptoms and Solutions
154
Appendix A. Service pendant Keypad Functions
157
Keypad Functions
157
Using the Service pendant
158
Glossary of Function Keys
159
Glossary of Input and Data Keys
160
Appendix B. Parts Replacement
165
Removing the Covers
165
Opening the Turret
166
Removing the Service pendant Shelf
166
Removing the Top Panel
167
Replacing All Panels and Covers
168
Replacing the Service pendant Shelf
168
Replacing the Top Panel
169
Replacing the Ion Source
170
Replacing the Turbo Pump
173
Turbo Pump
173
Removing the Turbo Pump
174
Replacing the Turbo Pump
176
Examining and Cleaning Centering Rings, O-Rings and Manifold
176
Connecting the Turbo Pump to the SVBA
177
Replacing the Rough Pump
179
Wet Systems
179
Removing the Wet System Rough Pump
180
Replacing the Wet System Rough Pump
181
Examining and Cleaning Centering Rings, O-Rings and Manifold
181
Re-Installing the Wet System Rough Pump
182
Dry Systems
184
Removing the Dry System Rough Pump
184
Replacing the Dry System Rough Pump
185
Examining and Cleaning Centering Rings, O-Rings and Manifold
185
Re-Installing the Dry System Rough Pump
185
Replacing the Forepump
186
Wet
186
Removing the Wet System Forepump
187
Replacing the Wet System Forepump
188
Examining and Cleaning Centering Rings, O-Rings and Manifold
188
Re-Installing the Wet System Forepump
188
Dry System
190
Removing the Dry System Forepump
190
Removing the Isolation Valve from the Forepump
190
Removing the Nitrogen Purge Connection from Pump
191
Removing the Exhaust Fitting
191
Removing the Pump from the Cabinet
191
Replacing the Dry System Forepump
191
Examining and Cleaning Centering Rings, O-Rings and Manifold
191
Re-Installing the Dry System Forepump
192
Connecting the Nitrogen Purge Pump
192
Replacing the Isolation Valve
192
Replacing the Exhaust Fitting
193
Completing Mounting the Pump to the Cabinet Floor
193
Appendix C. Communications Protocol
195
Protocol
195
Appendix D. Inputs and Outputs
203
Service Serial Interface (J1
203
Optional Rear Panel Interface
203
Discrete I/O Parallel Interface (J120
203
BCD Discrete Output Parallel Interface (J121
205
Interface (J122) for Optional Universal Remote Control
206
Host Serial Port (J123
206
Appendix F. Accessories
215
Appendix G. Leak Detection Theory
217
Leak Testing-Why Is It Needed
217
Classes of Leak Detection
217
Terminology
218
Various Methods of Testing for Leaks
219
Helium Mass Spectrometer Leak Detection (MSLD
220
Principles of Mass Spectrometry
220
Application as a Leak Detector
220
The Nature of Flow in a Vacuum
220
Facts about Leak Rates
221
Leak Detection Methods
221
Test Piece Evacuated
222
Test Piece Pressurized
222
Test Piece Already Sealed
223
Mass Spectrometer Leak Detector-Simplified Description
224

Varian 947 Operation And Service Manual (176 pages)

Leak Detectors

Brand: Varian | Category: Security Sensors | Size: 5 MB

Table of Contents
3
Declaration of Conformity
13
Warranty
14
- Warranty Replacement and Adjustment
  14
Factory Calibration Data
15
- List of Options or Accessories Included with System
  15
- Hazard and Safety Information
  16
  - Solvents
    17
  - Equipment, General
    18
  - Power and Static
    18
  - Vacuum Equipment and Cleanliness
    20
  - O-Ring Care
    20
  - Spectrometer Tube
    21
  - Pumps
    21
- Varian Services
  22
- Contacting Varian Vacuum Technologies
  22
- Platform Electronics
  26
- Front Panel Controls and Indicators
  28
- Inner Door Instruction Label
  30
- Rear Panel Power Connection and Circuit Breakers
  31
- Service pendant
  32
- Installation Preparation
  33
  - Power
    33
  - Liquid Nitrogen (Models 948/960 Only)
    34
  - Oil-Sealed Vacuum Pumps
    34
  - Special Installation Requirements
    34
  - Installation Services
    34
- Storage
  35
- Optional Rear Panel Interface Connections
  35
Section 2. Leak Detector Integration
37
- Physical Considerations
  37
- Common Configuration
  37
- Electronic Considerations for the Optional Rear Panel Interface
  42
  - Discrete I/O J120 Inputs
    42
  - BCD J121 Outputs
    43
  - Host Serial Port J123 Pinouts
    44
- Optional Interface Connections
  45
  - Grounding and Isolation
    45
  - Setup
    46
  - Discrete I/O
    46
- Operation Using the Optional Rear Panel Interface
  48
  - Parallel Enable
    48
Section 3. Operation
49
- Front Panel LED Indicators and Controls
  49
- Initial System Parameter Setup
  51
  - Parameters and Operating Modes
    51
- Start-Up
  56
  - Startup Procedure
    58
- Calibration and Sensitivity Checks
  59
  - Calibration and Sensitivity Checks
    60
- Operating Procedures
  61
  - Auto Ranging
    62
  - Manual Ranging
    63
- Standby
  64
- Shutdown
  64
- Using the pendant for Parameter Setup
  65
- Optional Discrete I/O
  66
Section 4. Maintenance
67
Section 5. Troubleshooting
103
- Error Condition Codes
  104
- Troubleshooting Symptoms and Solutions
  105
Appendix A. Service pendant Keypad Functions
107
- Keypad Functions
  107
  - Using the Service pendant
    108
- Glossary of Function Keys
  109
- Glossary of Input and Data Keys
  110
Appendix B. Parts Replacement
115
- Removing the Covers
  115
  - Opening the Turret
    116
    
    Removing the Service pendant Shelf
    116
- Removing the Top Panel
  117
- Replacing All Panels and Covers
  118
  - Replacing the Service pendant Shelf
    118
  - Replacing the Top Panel
    119
Replacing the Ion Source
120
Replacing the Turbo Pump
123
- Turbo Pump
  123
  - Removing the Turbo Pump
    124
  - Replacing the Turbo Pump
    126
    
    Examining and Cleaning Centering Rings, O-Rings and Manifold
    126
    
    Connecting the Turbo Pump to the SVBA
    127
Replacing the Rough Pump
129
- Wet Systems
  129
  - Removing the Wet System Rough Pump
    130
    
    Examining and Cleaning Centering Rings, O-Rings and Manifold
    131
    
    Replacing the Wet System Rough Pump
    131
    
    Re-Installing the Wet System Rough Pump
    132
- Dry Systems
  134
  - Removing the Dry System Rough Pump
    134
  - Replacing the Dry System Rough Pump
    135
    
    Examining and Cleaning Centering Rings, O-Rings and Manifold
    135
    
    Re-Installing the Dry System Rough Pump
    135
Replacing the Forepump
136
- Wet
  136
  - Removing the Wet System Forepump
    137
  - Replacing the Wet System Forepump
    138
    
    Examining and Cleaning Centering Rings, O-Rings and Manifold
    138
    
    Re-Installing the Wet System Forepump
    138
- Dry System
  140
  - Removing the Dry System Forepump
    140
    
    Removing the Isolation Valve from the Forepump
    140
    
    Examining and Cleaning Centering Rings, O-Rings and Manifold
    141
    
    Removing the Exhaust Fitting
    141
    
    Removing the Nitrogen Purge Connection from Pump
    141
    
    Removing the Pump from the Cabinet
    141
    
    Replacing the Dry System Forepump
    141
    
    Connecting the Nitrogen Purge Pump
    142
    
    Re-Installing the Dry System Forepump
    142
    
    Replacing the Isolation Valve
    142
    
    Completing Mounting the Pump to the Cabinet Floor
    143
    
    Replacing the Exhaust Fitting
    143
Appendix C. Communications Protocol
145
- Protocol
  145
Appendix D. Inputs and Outputs
153
- Service Serial Interface (J1
  153
- Optional Rear Panel Interface
  153
Appendix F. Accessories
161
Appendix G. Leak Detection Theory
163
- Leak Testing-Why Is It Needed
  163
- Classes of Leak Detection
  163
- Terminology
  164
- Various Methods of Testing for Leaks
  165
- Helium Mass Spectrometer Leak Detection (MSLD
  166
  - Principles of Mass Spectrometry
    166
  - Application as a Leak Detector
    166
  - The Nature of Flow in a Vacuum
    166
  - Facts about Leak Rates
    167
- Leak Detection Methods
  167
  - Test Piece Evacuated
    168
  - Test Piece Pressurized
    168
  - Test Piece Already Sealed
    169
- Mass Spectrometer Leak Detector-Simplified Description
  170
- G.7 Mass Spectrometer Leak Detector—Simplified Description
  170

Varian 947 Instruction Manual (16 pages)

Service Pendant Hand-Held Terminal

Brand: Varian | Category: Touch terminals | Size: 0 MB

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Varian 947 Operation And Service Manual (242 pages)

Table of Contents

Declaration of Conformity

Warranty

Garantie

Factory Calibration Data

Figure Description

Section 1. Introduction to Models 947, 948 and 960 Leak Detectors

Einführung in die Lecksucher, Modell 947, 948 und 960

Section 2. Leak Detector Integration

Table Description

Section 3. Operation

Betrieb

Section 4. Maintenance

Section 5. Troubleshooting

Appendix A. Service pendant Keypad Functions

Appendix B. Parts Replacement

Appendix C. Communications Protocol

Appendix D. Inputs and Outputs

Technische Daten für 947/948

Appendix E. 947/948 Specifications

Appendix E. 947/948 Specifications

Appendix F. Accessories

Appendix G. Leak Detection Theory

Index

Varian 947 Operation And Service Manual (230 pages)

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Varian 947 Operation And Service Manual (176 pages)

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Varian 947 Instruction Manual (16 pages)

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