System Configuration - Keithley 7072 Instruction Manual

APPLICATIONS
Table 3.2 Crosspoint Summary for Resistivity Measurements
Voltage
"I
v2
"3
v4
"5
"6
v7
"!?
T
Sample #l
Al B4 E3 F2
A4 Bl E3 F2
A4 83 E2 Fl
A3 B4 E2 Fl
A3 B2 El F4
A2 03 El F4
A2 Bl E4 F3
Al 82 E4 F3
i
Sample #2
A5 B9 El
A8 85 El
A8 81 Eb
Al B8 Eb
Al Bb E5
Ab B7 E5
A6 BS E8
A5 Bb E8
r
Fb
Fb
F5
F5
F8
F8
F7
F7
Crosspoints Closed
-
Sample #3
A9
B12 El1 FlO
Al2 B9 El1 FlO
Al2 Bll El0 F9
All B12 El0 F9
All BlO E9 F12
Al0 Bll E9 F12
A10 B9 El2 Fll
A9 BlO El2 Fll
T
Current Voltage
Between Between
l-2
3-4
2-1 3-4
2-3 4-l
3-2 4-1
3-4 1-2
4-3 1-2
4-1
2-3
l-4
2-3
3.5 SEMICONDUCTOR PARAMETER
ANALYSIS
One or more Model 7072 Semiconductor Matrix Cards can
be used in conjunction with an HP 41458 Semiconductor
Parameter Analyzer (SPA) to provide a versatile switching
system capable of complete DC characterization of
semiconductors. The following paragraphs discuss system
configuration, connections using the 7078~CSHP Cable Set,
and SPA measurement considerations.
3.51 System Configuration
Figure 3-10 shows the general configuration of the SPA
switching system. The components of the system perform
the following functions:
HP 4145B: Has four SMUs (Source/Measure Units), two
voltage sources, and two voltage measurement ports. The
unit can automatically run a variety of tests on
semiconductors and plot data on a built-in CRT.
Model 707 Switching Matrix: Controls the matrix card to
open and close signal paths as required.
Model 7072 Semiconductor Matrix Card: Switches the test
pathways to the device under test. In this particular applica-
tion, three Model 7072 cards provide 3b-pin test capability.
A total of six cards can be installed in a single mainframe,
providing up to 72-pin capability in one mainframe.
System Controller: Controls the SPA and switching matrix
with user-written software. Typical controllers for this
application are HP 9000 Series 200 or 300 (with HP-IB
interface), and IBM PC, AT or compatible computers
(equipped with an IEEE-488 interface).
Test Fixture: Provides the interface between the device
under test and the matrix card. Typically, the test fixture will
be equipped with triax connectors for ease of connections.
3-12