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SECTION 3
Applications
3.1 INTRODUCTION
This section covers typical applications
for the Model 7072
Semiconductor
Matrix card and is organized
as follows:
3.2
3.3
3d
3.5
-
CV Measurements:
Outlines
the test configuration
and procedure
for making
quasistatic
and high-
frequency
CV measurements.
Semiconductor
Test Matrix:
Details a semiconductor
test matrix that can be used to perform a variety of
different
tests on semiconductors
such as FETs.
Resistivity
Measurements:
Covers
methods
to
measure the resistivity
of semiconductor
samples us-
ing the van der Pauw method.
Semiconductor
Parameter Analysis:
Discusses using
the Model
7072 in conjunction
with
an HP 41458
Semiconductor
Parameter Analyzer.
3.2 CV MEASUREMENTS
The Model 7072 can be used in conjunction
the Keithley
Model
590 CV Analyzer,
and the Keithley
Model
595
Quasistatic
CV Meter to perform
quasistatic
and high-
frequency
CV (capacitance vs. voltage) tests on semicon-
ductors. The resulting CV curves can be used to calculate
important
semiconductor
parameters such as doping pro-
file, band bending,
and mobile ion concentration.
3.2.1 Stand Alone System
Configuration
The stand alone system shown in Figure 3-l can be used
to make CV measurements without
the aid of a computer.
System components
perform the following
functions.
Model 590 CV Analyzer:
Measures CV data at lOOkHz and
lMHz
and sends the resulting
data to the plotter
for
graphing.
Model 595 Quasistatic CV Meter: Measures quasistatic CV
data and sends the data to the plotter for graphing in real
time.
Model 707 Switching
Matrix:
Controls the semiconduc-
tor matrix card to close and open the desired crosspoints
at the proper time.
Model
7072 Semiconductor
Matrix
Card: Switches
the
signal pathways to the six wafers under test.
HP-GL Plotter: Plots CV and other curves directly from
the Models 590 and 595.
3.2.2 Computerized
System
Configuration
Figure 3-2 shows a computerized
version of the CV matrix
test system. The addition
of a computer
allows greater
system versatility
and easier instrument
control.
Also,
analysis functions
such as doping profile and ion concen-
tration can be added to the software to expand CV analysis
capabilities.
3-3
I
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