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For ConFlat flange connections we recommend
using Varian hardware. Other hardware can be
used if it satisfies to this specifications:
− stainless steel screws
− minimum strength point of 500 N/mm
− length: 63.5 mm (2.5 inches).
To facilitate assembly and dismantling, apply Fel-
pro C-100 high temperature lubricant to the screw
threads protruding from the flange and between
the nuts and flange.
! ! ! !
Exercise care when tightening nuts and bolts to
avoid creating dents in the envelope as this may
cause the pump rotor to lock.
Connection B - FORE-VACUUM PUMP
A flange KF 40 NW is available to connect the Tur-
bopump to the fore-vacuum pump. A hose or vac-
uum approved pipe can be used. If a rigid pipe is
used, any vibration generated by the mechanical
pump must be eliminated through the use of bel-
lows.
NOTE
The Turbo pump is characterized by its high com-
pression ratio also for oil vapors. When using a
mechanical oil-sealed pump, it is advisable to in-
stall a suitable trap between the turbopump and the
fore-vacuum pump in order to prevent oil back-
streaming.
2
CAUTION
Connection C - ELECTRICAL
The turbopump is connected to the controller
through an 8-pin connector. Pins B, C and D are
the 3-phase supply to the motor, pins A and F are
connected to the upper bearing temperature sen-
sor, pins A and G are connected to the lower bear-
ing temperature sensor and pin E is connected to
the pump ground; pin H is not connected.
If one temperature sensor is disconnected, the
pump will not start. To prevent damage to the
pump when the temperature exceeds 60° C, the
sensor automatically cuts out the power supply.
33
TECHNICAL INFORMATION
87-900-969-01
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