Varian Turbo-V250SF Instruction Manual
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Varian Turbo-V250SF Instruction Manual

969-9009 series 969-9010 series
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Turbo-V250SF
969-9009 series
969-9010 series
87-900-881-01(B)
APRIL 2002
pumps
MANUALE DI ISTRUZIONI
BEDIENUNGSHANDBUCH
NOTICE DE MODE D'EMPLOI
MANUAL DE INSTRUCCIONES
MANUAL DE INSTRUÇÕES
BEDRIJFSHANDLEIDING
INSTRUKSTIONSBOG
BRUKSANVISNING
INSTRUKSJON MANUAL
OHJEKÄSIKIRJA
ODHGIES CRHSEWS
INSTRUCTION MANUAL

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Summary of Contents for Varian Turbo-V250SF

  • Page 1 MANUALE DI ISTRUZIONI Turbo-V250SF BEDIENUNGSHANDBUCH pumps NOTICE DE MODE D’EMPLOI MANUAL DE INSTRUCCIONES MANUAL DE INSTRUÇÕES BEDRIJFSHANDLEIDING 969-9009 series INSTRUKSTIONSBOG 969-9010 series BRUKSANVISNING INSTRUKSJON MANUAL OHJEKÄSIKIRJA ODHGIES CRHSEWS INSTRUCTION MANUAL 87-900-881-01(B) APRIL 2002...
  • Page 2 Turbo-V 250SF...

  • Page 5: Table Of Contents

    ISTRUZIONI PER L’USO ....................1 GEBRAUCHSANLEITUNG ....................3 MODE D’EMPLOI ........................ 5 INSTRUCCIONES DE USO ....................7 INSTRUÇÕES PARA O USO....................9 GEBRUIKSAANWIJZINGEN..................... 11 BRUGSANVISNING ......................13 BRUKSANVISNING ......................15 BRUKERVEILEDNING ...................... 17 KÄYTTÖOHJEET ......................19 PDHGIES CRHSEWS ......................21 INSTRUCTIONS FOR USE....................

  • Page 6: Istruzioni Per L'uso

    "Technical Information" per ulteriori dettagli. Le pompe turbomolecolari della serie Turbo-V 250SF devono NOTA essere utilizzate solo con uno degli appositi controllori Varian Le note contengono informazioni importanti estrapolate dal (serie 969-9423, 969-9504, 969-9523, 969-9425 e 969-9866) e testo.
  • Page 7 Per il pompaggio di gas aggressivi utilizzare solo le versioni speciali della pompa Turbo-V250SF. Tali pompe sono dotate di una apposita porta attraverso la quale è necessario fornire alla La turbopompa con flangia di ingresso ISO deve essere fissata pompa un flusso di gas inerte compreso tra 0,4 e 1 mbar l/s.

  • Page 8: Gebrauchsanleitung

    ßem Gebrauch durch ungeschultes Personal, nicht autorisier- ten Eingriffen und Mißachtung der einheimischen, hier zur Geltung kommenden Bestimmungen übernimmt die Firma Varian keinerlei Haftung. Bei den Pumpen der Serie Turbo-V 250SF handelt es sich um Turbomolekularpumpen für Hoch- und Ultrahochvakuuman- wendungen.
  • Page 9 Klemmschellen an die Vakuumkammer an- geschlossen werden. In der nachstehenden Tabelle sind die Anzahl der jeweils erforderlichen Klemmschellen sowie der jewei- Bei einem Defekt kann der Varian Service oder der " advanced lige Anzugsmoment angegeben. exchange service" in Anspruch genommen werden.

  • Page 10: Mode D'emploi

    Varian, avant d'utiliser l'appareil. Varian décline par conséquent toute responsabilité en cas d'inobservation totale ou partielle des instructions données, d'utilisation incorrecte de la part d'un personnel non formé, d'opérations non autorisées ou d'un emploi contraire...
  • Page 11 “Technical Information”). ENTRETIEN La turbopompe devra être installée en position verticale ou en Les pompes de la série Turbo-V250SF ne requièrent aucun position retournée avec une inclinaison maximum de 10° par entretien particulier. Toute intervention doit être effectuée par rapport à...

  • Page 12: Instrucciones De Uso

    Varian antes de utilizar el equipo. Varian se considera libre de cualquier responsabilidad debida al incumplimiento total o parcial de las instrucciones, al uso poco...
  • Page 13 MANTENIMIENTO Varian (serie 969-9423, 969-9504, 969-9523, 969-9425 ó 969- 9866) y se conectarán a una bomba primaria (véase esquema Las bombas de la serie Turbo-V250SF no necesitan ningún en “Technical Information”). tipo de mantenimiento. Cualquier operación tendrá que ser La turbobomba se puede instalar en cualquier posición. Fijar la realizada por personal autorizado.

  • Page 14: Instruções Para O Uso

    Varian antes de usar a aparelhagem. A Varian não se responsabiliza pela eventual inobservância total ou parcial das instruções, pelo uso indevido por parte de pessoas não treinadas, por operações não autorizadas ou pelo uso contrário às normas...
  • Page 15 (série 969-9423, 969-9504, 969-9523, 969-9425 ou MANUTENÇÃO 969-9866) e devem ser ligadas a uma bomba primária (ver As bombas da série Turbo-V250SF não requerem qualquer esquema em "Technical Information"). manutenção. Qualquer operação deve ser efectuada por A turbobomba pode ser instalada em qualquer posição. Fixar a pessoal autorizado.

  • Page 16: Gebruiksaanwijzingen

    Varian verstrekte informatie door te lezen alvorens het apparaat in gebruik te nemen. Varian acht zich niet aansprakelijk voor de gevolgen van het niet of gedeeltelijk in acht nemen van de aanwijzingen, onoordeelkundig gebruik...
  • Page 17 (zie schema in “Technical Information”). ONDERHOUD De turbopomp kan in alle standen worden geïnstalleerd. De pompen van de serie Turbo-V250SF zijn onderhoudsvrij. Bevestig de turbopomp in een stabiele positie en verbind de Eventuele werkzaamheden moeten door bevoegd personeel inlaatflens van de turbopomp met een vaste contraflens die worden uitgevoerd.

  • Page 18: Brugsanvisning

    Brugeren bedes læse denne håndbog samt enhver yderligere vejledning, Varian har leveret, inden udstyret tages i brug. Varian er ikke ansvarlig, hvis vejledningen ikke er nøje fulgt, eller hvis den kun er delvist fulgt, og heller ikke hvis udstyret anvendes forkert af ukvalificeret personale, hvis der foretages uautoriserede indgreb på...
  • Page 19 Turbomolekulærpumperne i V 250SF serien må kun anvendes strømning skal ligge mellem 0.4 og 1 mbar l/s. med en af de særlige Varian kontrolapparater (serie 969-9423, 969-9504, 969-9523, 969-9425 eller 969-9866) og skal forbindes med en primær pumpe (se skemaet i "Technical VEDLIGEHOLDELSE Information").

  • Page 20: Bruksanvisning

    Användaren bör läsa denna bruksanvisning, samt övrig dokumentation från Varian före användning av utrustningen. Varian tar inget ansvar för skador helt eller delvis till följd av åsidosättande av instruktionerna, olämplig användning av person utan tillräcklig kunskap, obehörigt bruk av utrustningen eller hantering som strider mot gällande lokala föreskrifter.
  • Page 21 Denna pumptyp är försedd med ett specialuttag dit ett ädelgasflöde mellan 0.4 och 1 mbar l/s skall anslutas. Turbomolekylärpumparna i serien V 250SF måste användas med en särskild styrenhet från Varian (serie 969-9423, 969- UNDERHÅLL 9504, 969-9523, 969-9425, eller 969-9866), och anslutas till en Pumparna i Turbo-V 250SF-serien är underhållsfria.

  • Page 22: Brukerveiledning

    Dette utstyret er beregnet til bruk av profesjonelle brukere. Brukeren bør lese denne brukerveiledningen og all annen informasjon fra Varian før utstyret tas i bruk. Varian kan ikke holdes ansvarlig for hendelser som skjer på grunn av manglende oppfølging av disse instruksjonene, selv delvis, feilaktig bruk av utrent personell, ikke autoriserte endringer av utstyret eller handlinger som på...
  • Page 23 0.4 og 1 mbar l/s. Turbo-V 250SF serien turbo-molekulære pumper må kun brukes med en av de spesielle Varian kontrollere (969-9423, 969-9504, 969-9523, 969-9425 eller 969-9866), og må koples VEDLIKEHOLD til hovedpumpen (se skjema i "Teknisk informasjon").

  • Page 24: Käyttöohjeet

    YLEISIÄ TIETOJA Tämä laite on tarkoitettu ammattimaiseen käyttöön. Ennen laitteen käyttöönottoa tulee käyttäjän lukea huolellisesti mukana seuraava käyttöohje sekä kaikki muu Varianin toimittama lisätieto. Varian ei ota vastuuta seurauksista, jotka johtuvat laitteen käyttöohjeiden täydestä tai osittaisesta laiminlyönnistä, ammattitaidottoman henkilön virheellisestä laitteen käytöstä,...
  • Page 25 Sarjan 250SF turbomolekyylipumppuja tulee käyttää ainoastaan niihin sopivien varian valvojien kanssa (sarja 969- 9423, 969-9504, 969-9523, 969-9425 tai 969-9866) ja niiden HUOLTO täytyy olla yhdistettyinä pääpumppuun (katso kaaviota osasta Sarjan Turbo-V 250SF pumput eivät vaadi lainkaan huoltoa. "Technical Information").

  • Page 26: Pdhgies Crhsews

    £llh prÒsqeth plhrofor∂a pou d∂nei h Varian, prin apÒ th crhsimopo∂hsh thj suskeuÿj. H Varian den f◊rei kamm∂a euqÚnh Òson afor£ thn olikÿ ÿ merikÿ aq◊thsh twn odhgièn, thn akat£llhlh crÿsh ek m◊rouj anekpa∂deutou proswpikoÚ, auqa∂retej epemb£seij ÿ crÿsh pou den sumfwne∂...
  • Page 27 FLANTZA TUPOS MEGGENHS ZEUGOS Se per∂ptwsh bl£bhj mpore∂te na apeuqunqe∂te sto service thj BIDWMATOS Varian ÿ sto “Varian advanced exchange service”, pou saj d∂nei th ISO 100 22 Nm Diplÿ m◊ggenh dunatÒthta na antikatastÿsete thn calasm◊nh antl∂a me m∂a el∂kwsh M10...

  • Page 28: Instructions For Use

    This equipment is destined for use by professionals. The user should read this instruction manual and any other additional information supplied by Varian before operating the equipment. Varian will not be held responsible for any events occurring due to non-compliance, even partial, with these instructions, improper...
  • Page 29 For pumping aggressive gases, use the specially designed a vibration damper or flexible metallic bellows are used on versions of the Turbo-V250SF pump. These pumps are fitted the inlet port, make sure that the pump is fixed to the base.

  • Page 30: Technical Information

    During normal operation, the motor functions with a DESCRIPTION OF THE TURBOPUMP power feed at 58 Vac three-phase at 933 Hz. To The Turbo-V250SF pump is available in two ver- reduce losses during start-up to a minimum, the sions. The difference between the two versions lies frequency increases according to a ramp with a purely in the high vacuum connection.

  • Page 31: Technical Specification

    TECHNICAL INFORMATION TECHNICAL SPECIFICATION Dimensions: inches [mm] Operating ambient + 5° C to + 35° C Pumping speed (l/s) Main port: Side port: temperature : 250 l/s : 10 l/s He: 220 l/s He: 10 l/s Coolant water flow: 30 l/h (0.13 GPM) : 200 l/s : 8 l/s temperature: + 10°...
  • Page 32 TECHNICAL INFORMATION Graph of nitrogen pumping speed against inlet pressure Graph of compression ratio against foreline pressure Graph of nitrogen throughput against inlet pressure using the recommended mechanical forevacuum pump 87-900-881-01(B)

  • Page 33: Inlet Screen Installation

    TECHNICAL INFORMATION INLET SCREEN INSTALLATION Overall dimensions with the protection screen fitted The inlet screens mod. 969-9302 prevents the on pump series 969-9009 (with ISO 100 flange). blades of the pump from being damaged by debris greater than 0.7 mm diameter. The inlet screen, however, does reduce the pump- ing speed by about 10%.

  • Page 34: Water Cooling Kit Installation

    TECHNICAL INFORMATION WATER COOLING KIT INSTALLATION The metallic model is assembled as shown in the figure. Two types of water cooling kits are available to be mounted when the pump is used under heavy load conditions or when air cooling is insufficient. The two model part numbers are: 969-9337 (metal- lic model), and 969-9347 (plastic model).
  • Page 35 TECHNICAL INFORMATION BASE FIXING KIT INSTALLATION For the feet to the pump by tightening the previ- The kit mod. 969-9326 enables the pump to be ously inserted grub screws with the Allen key. fixed at the base. Open the package containing the feet and respec- tive screws.
  • Page 36 TECHNICAL INFORMATION AIR COOLING KIT INSTALLATION SIDE MOUNTING Two fan kits are available for air cooling the pump, when natural air convenction is insufficient. Specification for small fan (mod. 969-9310): − air flow: 9 l/s (10 CFM) − input voltage: 24 Vdc −...
  • Page 37 TECHNICAL INFORMATION VENT VALVE INSTALLATION Screw the vent valve into the pump. The vent valve mod. 969-9833 enables undesired venting of the pump during a temporary power fail- ure (5 sec maximum) to be avoided, and enables an automatic vent operation. Tighten the valve using a 16 mm hexagonal span- ner.
  • Page 38 − model 969-9342 for ISO 100 flange; − model 969-9332 for CFF 6” flange. They typically reduce the vibration transmitted from the Turbo-V250SF pump to the system by a factor of 20. Please refer to the relevant instruction manual. The vent device mod. 969-9831 allows to avoid undesired venting of the pump during a temporary power failure (adjustable time up to 36 min.), and...

  • Page 39: Typical Connections

    Varian hardware. High Vacuum Flange Connection To facilitate assembly and dismantling, apply Fel- To connect the Turbo-V250SF pump to the ISO pro C-100 high temperature lubricant to the screw inlet flange, remove the outer ring and position the threads protruding from the flange and between centering ring as shown in the figure.

  • Page 40: Fore-Vacuum Pump Connection

    Fore-vacuum Pump Connection Please contact Varian for informations. A flange KF 16 NW is available to connect the Turbo-V250SF to the fore-vacuum pump. A hose or vacuum approved pipe can be used. If a rigid ! ! ! ! pipe is used, any vibration generated by the me-...

  • Page 41: Pump Used In Presence Of Magnetic Fields

    Forepump MDP 30, 120 V 949-9451 Forepump MDP 30, 220 V 949-9452 For a complete overview of Varian's extensive product lines, please refer to the Varian catalog. 87-900-881-01(B)
  • Page 42 NOTE: If a product is received at Varian which is contaminated with a toxic or hazardous material that was not disclosed, the customer will be held responsible for all costs incurred to ensure the safe handling of the product, and is liable for any harm or injury to Varian employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product.
  • Page 43 Request for Return FAILURE REPORT TURBO PUMPS and TURBOCONTROLLERS POSITION PARAMETERS Power: Rotational Speed: Does not start Noise Vertical Current: Inlet Pressure: Does not spin freely Vibrations Horizontal Temp 1: Foreline Pressure: Does not reach full speed Leak Upside-down Mechanical Contact Overtemperature Other: Temp 2:...
  • Page 44 Tel: (39) 011 997 9111 Tel: (39) 011 997 9111 Fax: (39) 011 997 9350 Brazil Fax: (39) 011 997 9350 Varian Industria e Comercio Ltda. Japan Avenida Dr. Cardoso de Mello 1644 Internet Users: Varian Vacuum Technologies Vila Olimpia Customer Service &...

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