Varian TriScroll 600 series Manual
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Varian TriScroll 600 series Manual

Triscroll 600 series dry scroll vacuum pump
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TriScroll
Series
Dry Scroll
Vacuum Pump
Manual No. 699904310
Revision G
December 2004
600
TM
vacuum technologies
TIP SEAL REPLACEMENT
MANUAL

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Summary of Contents for Varian TriScroll 600 series

  • Page 1 vacuum technologies TriScroll TIP SEAL REPLACEMENT MANUAL Series Dry Scroll Vacuum Pump Manual No. 699904310 Revision G December 2004...
  • Page 2 ™ TriScroll 600 Series Dry Scroll Vacuum Pump TriScroll is a trademark of Vacuum Technologies. Loctite and PST are registered trademarks of Loctite Corporation. Krytox, Teflon and Viton are registered trademarks of E. I. du Pont de Nemours and Company. Copyright 2004 Vacuum Technologies...

  • Page 3: Table Of Contents

    TriScroll 600 Dry Scroll Vacuum Pump Table of Contents Preface ........vi Safety Considerations .
  • Page 4 TriScroll 600 Dry Scroll Vacuum Pump This page intentionally left blank.
  • Page 5 Declaration of ConformityDeclaration of Declaration of Conformity Konformitätserklärung Déclaration de Conformité Declaración de Conformidad Verklaring de Overeenstemming Dichiarazione di Conformità Varian, Inc. Vacuum Technologies Nous Nosotros 121 Hartwell Avenue Lexington, MA, 02421-3133 USA declare under our sole responsibility that the product, erklären, in alleniniger Verantwortung, daß...

  • Page 6: Preface

    TriScroll 600 Dry Scroll Vacuum Pump Preface This manual provides the information you need to successfully perform tip seal replacement on your Vacuum Technologies TriScroll Dry Vacuum Pump. Tip seal replacement is generally is recommended when the pump base pressure has risen to an unacceptably high level for your application.
  • Page 7 TriScroll 600 Dry Scroll Vacuum Pump All warnings and cautions must be read carefully, fully understood, and strictly observed. Consult local, state/province, and national agencies regarding specific requirements and regulations. Address any safety, operation, and/or maintenance questions to the nearest Vacuum Technologies location. WARNING Disconnect power from the TriScroll 600 before performing any maintenance procedure.

  • Page 8: Related Triscroll Manuals

    TriScroll 600 Dry Scroll Vacuum Pump Related TriScroll Manuals Manuals related to the installation and operation, pump module replacement, and major maintenance for the TriScroll 600 series pumps are listed in the following table: Title Applicable TriScroll Model Part Number...

  • Page 9: Factory Service Options

    TriScroll 600 Dry Scroll Vacuum Pump Factory Service Options Vacuum Technologies offers factory-rebuild service or advance exchange of complete TriScroll Pumps or TriScroll Pump Modules. Contact your nearest Vacuum Technologies sales office for price and availability information. Select your preferred service option from the table below. Factory Service Options Part Number Advance Exchange TriScroll 600 Single Phase...
  • Page 10 TriScroll 600 Dry Scroll Vacuum Pump This page intentionally left blank.

  • Page 11: Tip Seal Replacement

    Tip Seal Replacement General Information Vacuum Technologies TriScroll 600 series pumps will provide years of trouble-free service if maintenance procedures and intervals are observed. Bearing grease replenishment and tip seal replacement is recommended when the pump base pressure rises to an unacceptably high level for your application.
  • Page 12 TriScroll 600 Dry Scroll Vacuum Pump Tip Seal Replacement Kit 2-273 2-127 Tip Seal Krytox GPL 224 Grease...
  • Page 13 TriScroll 600 Dry Scroll Vacuum Pump Tip Seal Tool Kit Chisel Metric Hex Key...

  • Page 14: Triscroll 600 Disassembly

    TriScroll 600 Dry Scroll Vacuum Pump TriScroll 600 Disassembly Remove the Intake Fitting 1. Remove the two M5x16 screws from the intake assembly. 2. Remove the intake assembly from the top of the pump. 3. Remove and discard the O-ring from the groove on the underside of the intake fitting.

  • Page 15: Remove The Outboard Housing

    TriScroll 600 Dry Scroll Vacuum Pump TriScroll 600 Disassembly (Continued) Remove the Outboard Housing 1. Remove the three M5x16 screws that attach the cowling to the module. 2. Remove the cowling. 3. Remove the six M6x55 screws that attach the outboard housing to inboard housing. 4.
  • Page 16 TriScroll 600 Dry Scroll Vacuum Pump TriScroll 600 Disassembly (Continued) 5. Remove and discard the O-ring. 6. Remove and discard the tip seals from the outboard housing.

  • Page 17: Remove The Inboard Housing And Orbiting Plate Assembly

    TriScroll 600 Dry Scroll Vacuum Pump TriScroll 600 Disassembly (Continued) Remove the Inboard Housing and Orbiting Plate Assembly 1. Remove the four M5x15 screws that attach the inboard housing to the frame. 2. Remove the inboard housing from the frame. Locate the rubber spider that mounts between the motor shaft coupling and the inboard housing assembly.

  • Page 18: Disassemble The Inboard Housing And The Orbiting Plate Assembly

    TriScroll 600 Dry Scroll Vacuum Pump TriScroll 600 Disassembly (Continued) Disassemble the Inboard Housing and the Orbiting Plate Assembly 1. Remove the M8x12 screw and washer that attaches the counterweight to the inboard housing. Counterweight 2. Lift the counterweight off of the inboard housing.
  • Page 19 TriScroll 600 Dry Scroll Vacuum Pump TriScroll 600 Disassembly (Continued) 3. Remove the inboard housing from the crankshaft and orbiting plate. 4. Remove and discard the tip seals from the inboard housing.
  • Page 20 TriScroll 600 Dry Scroll Vacuum Pump TriScroll 600 Disassembly (Continued) 5. Remove and discard the tip seals from both sides of the orbiting plate.

  • Page 21: Scroll Cleaning

    TriScroll 600 Dry Scroll Vacuum Pump TriScroll 600 Disassembly (Continued) Scroll Cleaning 1. Carefully scrape with a chisel to loosen the tip seal dust from the: Orbiting plate ❑ Inboard housing ❑ Outboard housing ❑ CAUTION Do not scratch or gouge any surface.

  • Page 22: Triscroll 600 Reassembly

    TriScroll 600 Dry Scroll Vacuum Pump TriScroll 600 Reassembly 1. Insert the new tip seal into the scroll tip grooves on the inboard housing side of the orbiting plate. 2. Cut the seal to the correct length at the end of each groove.
  • Page 23 TriScroll 600 Dry Scroll Vacuum Pump TriScroll 600 Reassembly (Continued) 5. Place the scroll in the vertical position and reinstall the inboard housing onto the crankshaft. Placing the scroll in the vertical position keeps the tip seals from falling out of the grooves during reassembly.
  • Page 24 TriScroll 600 Dry Scroll Vacuum Pump TriScroll 600 Reassembly (Continued) 10. Install the rubber spider into motor shaft coupling. Rubber spider installed 11. Align the motor coupling to properly mate with the fan hub coupling. 12. Install the inboard housing onto the frame.
  • Page 25 TriScroll 600 Dry Scroll Vacuum Pump TriScroll 600 Reassembly (Continued) 13. Secure the inboard housing assembly to the frame using the four M5x15 screws. 14. Insert the tip seal into the scroll tip grooves on the orbiting plate. 15. Cut the seal to the correct length at the end of each groove.
  • Page 26 TriScroll 600 Dry Scroll Vacuum Pump TriScroll 600 Reassembly (Continued) 16. Squeeze a dot of Krytox GPL 224 grease into each of the three needle bearings. 17. Smear grease over the needles. 18. Coat the lips of all three seals with grease. 19.
  • Page 27 TriScroll 600 Dry Scroll Vacuum Pump TriScroll 600 Reassembly (Continued) 20. Insert the tip seals into the grooves on the outboard housing. 21. Cut the seal to the correct length at the end of each groove. Leave a gap of 1/8" (3mm) from the outer end to allow for thermal growth.
  • Page 28 TriScroll 600 Dry Scroll Vacuum Pump TriScroll 600 Reassembly (Continued) 24. Install the cowling over the pump module. 25. Secure with the three M5x16 screws.
  • Page 29 TriScroll 600 Dry Scroll Vacuum Pump TriScroll 600 Reassembly (Continued) 26. Lightly grease the new 2-127 O-ring and insert it into the groove on the intake fitting. 27. Place the intake fitting assembly into the outboard housing. 28. Secure the fitting with the two M5x16 screws.

  • Page 30: Put The Pump Back Into Service

    TriScroll 600 Dry Scroll Vacuum Pump TriScroll 600 Reassembly (Continued) This figure illustrates a fully reassembled TriScroll 600 Series Pump. Put the Pump Back into Service The TriScroll 600 pump can be placed into service immediately after maintenance is complete.
  • Page 31 4. If a product is received at Varian, Inc. in a contaminated condition, the customer is held responsible for all costs incurred to ensure the safe handling of the product, and is liable for any harm or injury to Varian, Inc. employees occurring as a result of exposure to toxic or hazardous materials present in the product.
  • Page 32 9001 Request for Return R E G I S T E R E D Health and Safety Certification FAILURE REPORT (Please describe in detail the nature of the malfunction to assist us in performing failure analysis): URBO UMPS AND URBOCONTROLLERS Claimed Defect Position Parameters...
  • Page 34 Canada Japan Other Countries Central coordination through: Varian, Inc. Varian, Inc. Varian, Inc. Sumitomo Shibaura Building, 8th Floor Via F.lli Varian 54 121 Hartwell Avenue 4-16-36 Shibaura 10040 Leini, (Torino) Lexington, MA 02421 Minato-ku, Tokyo 108 Italy Japan Tel: (39) 011 997 9 111...

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