Related Manuals for Varian VHS-6
Summary of Contents for Varian VHS-6
- Page 1 Varian Vacuum Technologies 121 Hartwell Avenue Lexington, MA 02421-3133 VHS-6 (781) 861-7200 (800) 8-VARIAN Diffusion Pump Instruction Manual Manual No. 6999-01-022 Revision E July 2000...
- Page 2 Fax: (61) 2 9452 2600 Hong Kong Spain Tel: (852) 26206173 Brazil Varian Iberica Fax: (852) 26206338 Varian Industria e Comercio Ltda. Avda Pedro Diez 25 India Avenida Dr. Cardoso de Mello 1644 28019 Madrid Vila Olimpia Varian India PVT LTD...
- Page 3 Varian Associates for repair and/or replacement. Except as stated herein, Seller makes no warranty, express or implied (either in fact or by operation of law), statutory or otherwise;...
- Page 4 Observe all WARNINGS and CAUTIONS to minimize the serious hazards involved. It is the sole responsibility of users of Varian equipment to comply with all local, state, and federal safety requirements (laws and regulations) applicable to their system. Employ the services of an industrial hygienist and/or a qualified chemical safety engineer in order to ensure safe installation and use.
- Page 5 SAFE INCORPORATION OF VARIAN DIFFUSION PUMPS INTO VACUUM SYSTEMS IS THE RESPONSIBILITY OF THE SYSTEMS DESIGNER. TAKE APPROPRIATE ACTION THROUGH REDUNDANCY, AND/OR OTHER SAFEGUARDS TO PROTECT PERSONNEL AND PROPERTY FROM THE HAZARDS DESCRIBED BELOW AND IN THE INSTALLATION, OPERATION, AND MAINTENANCE INSTRUCTION MANUAL.
- Page 6 THE INSTALLATION, OPERATION, AND/OR SERVICING OR DIFFUSION PUMPS INVOLVES ONE OR MORE OF THE FOLLOWING HAZARDS, ANY ONE OF WHICH, IN THE ABSENCE OF SAFE OPERATING PRACTICES AND PRECAUTIONS, COULD POTENTIALLY RESULT IN DEATH OR SERIOUS HARM TO PERSONNEL. Hazard Suggested Corrective Action Loss of utility: water and/or electricity Provide sufficient water and backup power to effect a safe shutdown under worst case conditions.
- Page 7 Hazard Suggested Corrective Action Explosion Integrate pressure relief valves in all systems using pumps 10 inches or larger in diameter. Do not use or recommend the use of hydrocarbon-based pumping oils. a. Explosion – Operation of the diffusion pump without prior and continuous evacuation (below 0.5 Torr (66.5 Pa)) or coolant and introducing a strong oxidizer (such as air) or explosive vapors or powders or materials which may react with pumping fluids into a hot (above 300°F or 150°C) pump can cause an explosion.
- Page 8 Prohibited Action Explosion-Causing Condition Open drain or fill plug while pump is Overpressure plus strong oxidizer under vacuum, especially when it is hot Contaminate pump with explosive vapors, Lower explosive threshold of gas mixtures powders, or reactive materials Remove, defeat, or override safety counter- Overtemperature, overpressure, more measures such as pressure and thermal combustible mixtures...
- Page 9 d. Poisonous and/or Corrosive Compounds – When pumping poisonous, reactive, and/or corrosive gas, vapors, or chemicals, even proper operation and regeneration will not always ensure that all hazardous materials have been totally removed. If hazardous gas, vapors, chemicals, or combustible mixtures are pumped, sufficient quantities may exist during operation or remain after regeneration to cause severe injury or death.
- Page 10 i. Cold Coolant – Liquid nitrogen, a cryogenic liquid, is used in traps. If it is splashed on body tissues or eyes, it can cause severe frostbite or blindness. The extremely low temperature of liquified nitro- gen can cause skin damage similar to high temperature burns. Contact with the cold gas evolving from the liquid may produce the same effect.
- Page 11 WARNING _____________ Varian has no control over the types of gases passing through this pump. These are entirely under the control of the process user and/or the hardware systems integrator. Frequently, process gases are toxic, flammable, corrosive, explosive, or otherwise reactive.
- Page 12 WARNING _____________ When lifting some Varian diffusion pumps, use power-assisted equip- ment and trained moving/installation personnel to avoid dropping, slip- ping, and/or overturning the pump and severely injuring personnel. Check weight of equipment before lifting and do not stand under equip- ment being moved.
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Page 13: Table Of Contents
Table of Contents Section Page Section I – Installation ............Specifications . -
Page 14: Section I - Installation
SECTION I INSTALLATION Before unpacking and installing the VHS-6 Diffusion Pump, the user should thoroughly familiarize himself with this instruction manual and the diffusion pump specifications (see Table 1). He should also examine all other technical material supplied in order to gain a better understanding of the oper- ating principles, limitations, correct application, and the hazards involved with the use of this equip- ment. -
Page 15: Installation
1-2-1 Unpacking Inspect the pump to ensure that no damage has occurred during shipping. Do not discard any evidence of rough handling; any damage should be reported to the carrier and to Varian with- out delay. Diffusion pumps are factory-packed to permit prolonged storage in suitably protected areas without special precautions. -
Page 16: Vacuum System Connections
Installation 1-2-3 Vacuum System Connections The diffusion pump must be installed with the body vertical and plumb. Check to ensure that the pump inlet mating flange on the system is horizontal within ± one degree. The boiler plate must be horizontal to prevent uneven fluid level. Failure to meet this requirement could result in overheating of the diffusion pump boiler plate. -
Page 17: Electrical Connections
Installation 1-2-5 Electrical Connections The diffusion pump has been designed to operate at a specific voltage. The voltage is specified on the label that is mounted on the side of the pump. Verify the heater rating by measuring the resistance of the heater circuit (line-to-line) and comparing it to the values in Table 1-1, Specifications. -
Page 18: Section Ii - Operation
switch. This should be done only after the root cause of a problem has been determined and the appropriate corrective action taken. SECTION II CAUTION ________ Damage to Pump Do not turn on the heater without fluid in the pump. This may ruin the heaters and damage the pump. -
Page 19: Shutdown Procedure
Operation SHUTDOWN PROCEDURE Turn off the power to the diffusion pump. Continue to back the diffusion pump with the appro- priate mechanical pump. Allow cooling water to flow through the diffusion pump until the pump body temperature, located just above the boiler plate, has cooled to a temperature of approximately 130°F. -
Page 20: Section Iii - Maintenance And Service
After isolating the backing pump, the diffusion pump may be vented to atmosphere. If faster cooling is desired, the pump can be cooled using the quick cool coil at the bottom of the diffusion pump. Follow the instructions in para. 1-3-3 for proper setup of the quick cool coil line. -
Page 21: Cold Cap Removal/Installation
Maintenance and Service Unbolt the inlet flange and foreline connections. Remove the pump from the system. Drain the diffusion pump of all fluid. Remove all O-rings, the cold cap assembly, the jet assembly, and the foreline baffle from the pump. Thoroughly clean the diffusion pump body interior and the jet assembly using acetone followed by an isopropyl alcohol rinse. -
Page 22: Jet Assembly Removal/Installation
Maintenance and Service Figure 3-1 Cold Cap Removal/Installation Install the spring (1) attached by the screw, (2) and washers (3 and 4). Torque the sccrew to 10 to 12 inch lbs. JET ASSEMBLY REMOVAL/INSTALLATION To remove the jet assembly, proceed as follows. Remove the cold cap from the pump. -
Page 23: Heater Replacement
Replace the heater insulation and the cover. ADDING PUMP FLUID The recommended fluid charge for the VHS-6 diffusion pump is 500 cc. The fluid charge will gradually be depleted through use, but the pump will continue to operate normally. When the charge is reduced to approximately 60 percent of the initial fill amount, the boiler plate temperature may begin to rise. -
Page 24: Section Iv - Troubleshooting
SECTION IV TROUBLESHOOTING LEAKAGE Analysis of general operational experience with diffusion pumps indicates that certain locations are more prone to vacuum leaks. The following locations should be checked first if leakage is the sus- pected cause of poor system performance. Inlet and foreline connections Drain and fill plugs Other compression fittings, such as high-vacuum gauges in the system... - Page 25 Troubleshooting Table 4-1 Troubleshooting Fault Probable Cause Corrective Action Poor system pressure Leaks in system, virtual or real Locate and repair. High process gas load Measure gas load, eliminate cause. System dirty Clean system to reduce outgassing. Poor ultimate pressure Contaminated pump fluid Examine, clean pump,replace fluid.
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Page 26: Section V - Replacement Parts
SECTION V REPLACEMENT PARTS The following parts are available from Varian; please call the 800 number listed inside the front cover of this manual. Table 5-1 Troubleshooting Part Number Description 86101301 Standard Cold Cap Assembly F6455301 Extended Cold Cap Assembly... - Page 27 Replacement Parts...
- Page 28 Replacement Parts...
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Page 29: Replacement Parts
Replacement Parts VHS-6 ConFlat 21.92 21.92 557 21.92 A Height 13.38 13.38 340 13.38 B Centerline to Centerline 8.62 8.62 8.62 C Flange Face to Flange Face 9.12 9.12 9.12 D Electrical Box Height 90° 90° 90° E Sight Glass,... - Page 30 Replacement Parts 1 Torr - 133 Pa VHS-6 Speed and Throughput Curves Note: Speed curves were generated according to AVS Standard 4.1...