Related Manuals for Varian VHS-10
Summary of Contents for Varian VHS-10
- Page 1 Varian Vacuum Technologies 121 Hartwell Avenue VHS-10 Lexington, MA 02421-3133 & (781) 861-7200 (800) 8-VARIAN VHS-400 Diffusion Pumps Instruction Manual Manual No. 6999-01-023 Revision H October 2000...
- Page 2 Fax: (886) 2 6989678 Tel: (86) 10 6209 1394 Tel: (91) 11 561 1442 Fax: (86) 10 6209 1735 Fax: (91) 11 552 4317 Representatives in most countries Internet Users customer service@vpl.varian.com Also see Varian's Home Page at: www.vvp.varian.com Updated 1/16/98 J. Walden...
- Page 3 WARRANTY Products manufactured by Seller are warranted against defects in materials and workmanship for twelve (12) months from date of shipment thereof to Customer, and Seller's liability under valid war- ranty claims is limited, at the option of Seller, to repair, replacement, or refund of an equitable portion of the purchase price of the Product.
- Page 4 Observe all WARNINGS and CAUTIONS to minimize the serious hazards involved. It is the sole responsibility of users of Varian equipment to comply with all local, state, and federal safety requirements (laws and regulations) applicable to their system. Employ the services of an industrial hygienist and/or a qualified chemical safety engineer in order to ensure safe installation and use.
- Page 5 SAFE INCORPORATION OF VARIAN DIFFUSION PUMPS INTO VACUUM SYSTEMS IS THE RESPONSIBILITY OF THE SYSTEMS DESIGNER. TAKE APPROPRIATE ACTION THROUGH REDUNDANCY, AND/OR OTHER SAFEGUARDS TO PROTECT PERSONNEL AND PROPERTY FROM THE HAZARDS DESCRIBED BELOW AND IN THE INSTALLATION, OPERATION, AND MAINTENANCE INSTRUCTION MANUAL.
- Page 6 THE INSTALLATION, OPERATION, AND/OR SERVICING OR DIFFUSION PUMPS INVOLVES ONE OR MORE OF THE FOLLOWING HAZARDS, ANY ONE OF WHICH, IN THE ABSENCE OF SAFE OPERATING PRACTICES AND PRECAUTIONS, COULD POTENTIALLY RESULT IN DEATH OR SERIOUS HARM TO PERSONNEL. Hazard Suggested Corrective Action Loss of utility: water and/or electricity Provide sufficient water and backup power to effect a safe shutdown under worst case conditions.
- Page 7 Hazard Suggested Corrective Action Explosion Integrate pressure relief valves in all systems using pumps 10 inches or larger in diameter. Do not use or recommend the use of hydrocarbon-based pumping oils. a. Explosion – Operation of the diffusion pump without prior and continuous evacuation (below 0.5 Torr (66.5 Pa)) or coolant and introducing a strong oxidizer (such as air) or explosive vapors or powders or materials which may react with pumping fluids into a hot (above 300°F or 150°C) pump can cause an explosion.
- Page 8 Prohibited Action Explosion-Causing Condition Open drain or fill plug while pump is Overpressure plus strong oxidizer under vacuum, especially when it is hot Contaminate pump with explosive vapors, Lower explosive threshold of gas mixtures powders, or reactive materials Remove, defeat, or override safety counter- Overtemperature, overpressure, more measures such as pressure and thermal combustible mixtures...
- Page 9 d. Poisonous and/or Corrosive Compounds – When pumping poisonous, reactive, and/or corrosive gas, vapors, or chemicals, even proper operation and regeneration will not always ensure that all hazardous materials have been totally removed. If hazardous gas, vapors, chemicals, or combustible mixtures are pumped, sufficient quantities may exist during operation or remain after regeneration to cause severe injury or death.
- Page 10 i. Cold Coolant – Liquid nitrogen, a cryogenic liquid, is used in traps. If it is splashed on body tissues or eyes, it can cause severe frostbite or blindness. The extremely low temperature of liquified nitro- gen can cause skin damage similar to high temperature burns. Contact with the cold gas evolving from the liquid may produce the same effect.
- Page 11 WARNING _____________ Varian has no control over the types of gases passing through this pump. These are entirely under the control of the process user and/or the hardware systems integrator. Frequently, process gases are toxic, flammable, corrosive, explosive, or otherwise reactive.
- Page 12 WARNING _____________ When lifting some Varian diffusion pumps, use power-assisted equip- ment and trained moving/installation personnel to avoid dropping, slip- ping, and/or overturning the pump and severely injuring personnel. Check weight of equipment before lifting and do not stand under equip- ment being moved.
-
Page 14: Table Of Contents
Jet Assembly, VHS-10 and VHS-400 Pumps ........ -
Page 15: Section I - Specifications And Installation
SPECIFICATIONS Table 1-1 lists the specifications for the VHS-10 pump; Table 1-2 lists the specifictions for the VHS-400 pump. Table 1-1. VHS-10 Pump Specifications... - Page 16 Specifications and Installation Table 1-1. VHS-10 Pump Specifications (Cont'd) Foreline Baffle Stacked, self-aligning half moon Cold Cap Nickel-plated Copper Water Connections ⁄ Thermal Switches Manual reset at 300°F Heater circuit resistance (ohms) 4400 watts 5100 watts ____________________ ____________________ L1-L2 L2-L3...
-
Page 17: Installation
1-2-1 Unpacking Inspect the pump to ensure that no damage has occurred during shipping. Do not discard any evidence of rough handling; any damage should be reported to the carrier and to Varian without delay. Diffusion pumps are factory-packed to permit prolonged storage in suitably protected areas without special precautions. - Page 18 Specifications and Installation 1-2-2 Pump Oil Installation The recommended oil charge for the VHS-10 and the VHS-400 diffusion pumps is 1000 cc. The oil is normally poured into the pump inlet or the foreline or by removing the fill plug and pouring it into the fill and drain assembly.
- Page 19 Specifications and Installation The exit water temperature should not exceed 120°F. The outlet or discharge (nearest the foreline) should be connected to an open drain. If the diffusion pump is being cooled by a recirculating water system, the system must be capable of adequate cooling and heat exchange to ensure a continuous inlet temperature of 60 to 80°F.
- Page 20 Specifications and Installation Connect the leads of the thermal switch in series with the coil of the heater power supply. In the event of overtemperature, the thermal switch will open and shut off the power to the pump. The thermal switch may be reset by pressing the button located at the center of the thermal switch.
-
Page 21: Section Ii - Operation
SECTION II OPERATION CAUTION ________ Damage to Pump Do not turn on the heater without fluid in the pump. This may ruin the heaters and damage the pump. Damage to Pump Fluid • Do not air-release the pump while the boiler is hot. Most diffusion pump fluids are heat-sensitive and will break down under these conditions. -
Page 22: Shutdown Procedure
Operation SHUTDOWN PROCEDURE Turn off the power to the diffusion pump. Continue to back the diffusion pump with the appro- priate mechanical pump. Allow cooling water to flow through the diffusion pump until the pump body temperature, located just above the boiler plate, has cooled to a temperature of 130°F. After isolating the backing pump, the diffusion pump may be vented to atmosphere. -
Page 23: Section Iii - Maintenance And Service
SECTION III MAINTENANCE AND SERVICE GENERAL Diffusion pumps generally require little attention when operated correctly. It is advisable to perform some periodic inspections to ensure trouble-free operation. By performing simple preventive mainte- nance, costly downtime can be avoided. A day-to-day log of pump and system performance will help indicate the condition of the pump and the need for corrective action. -
Page 24: Cold Cap Removal/Installation
Maintenance and Service Thoroughly clean the diffusion pump body interior and the jet assembly using acetone followed by an isopropyl alcohol rinse. Dry the pump and the jet assembly with clean, dry, oil-free compressed air. Install the foreline baffle, the jet assembly, and the cold cap assembly in the pump body. Check that the ejector nozzle is properly aligned with the foreline. -
Page 25: Jet Assembly, Vhs-10 And Vhs-400 Pumps
Maintenance and Service Figure 3-1 Jet Assembly, VHS-10 and VHS-400 Pumps... -
Page 26: Heater Replacement
Replace the heater insulation and the cover. ADDING PUMP FLUID The recommended fluid charge for the VHS-10 and the VHS-400 diffusion pumps is 1000 cc. The fluid charge will gradually be depleted through use, but the pump will continue to operate normally. -
Page 27: Heater Connections, Vhs-10 And Vhs-400 Pumps
Maintenance and Service Figure 3-2 Heater Connections, VHS-10 and VHS-400 Pumps Loosen and remove the fill plug located at the top of the sight glass assembly. Add pump fluid until the fluid level is even with the FULL/COLD mark on the oil level indicator. - Page 28 Maintenance and Service...
-
Page 29: Section Iv - Troubleshooting
SECTION IV TROUBLESHOOTING LEAKAGE Analysis of general operational experience with diffusion pumps indicates that certain locations are more prone to vacuum leaks. The following locations should be checked first if leakage is the suspected cause of poor system performance. Inlet and foreline connections Drain and fill plugs Other compression fittings, such as high-vacuum gauges in the system Threaded connections, such as foreline gauge... - Page 30 Troubleshooting Table 4-1 Troubleshooting Fault Probable Cause Corrective Action Poor system pressure Leaks in system, virtual or real Locate and repair. High process gas load Measure gas load, eliminate cause. System dirty Clean system to reduce outgassing. Poor ultimate pressure Contaminated pump fluid Examine and replace.
-
Page 31: Section V - Replacement Parts
SECTION V REPLACEMENT PARTS The following is a list of replacement parts for the Varian VHS 10 and VHS 400 Diffusion Pumps. Table 5-1 Replacement Parts Part Number Description F0429301 Standard Cold Cap Assembly, VHS-10 only K4823301 Standard Cold Cap Assembly, VHS-400 only... -
Page 32: Replacement Parts
Replacement Parts Table 5-1 Replacement Parts (Cont’d) Part Number Description K0377169 O-ring kit; includes: (VHS-400 only) 1 Butyl inlet O-ring, Parker No. 2-385 1 Buna-N foreline O-ring, Parker No. 2-338 10 Viton fill and drain O-rings (old style fill and drain assy), Parker No. 2-112 10 Viton fill and drain O-rings (new style fill and drain assy), Parker No. -
Page 33: Replacement Parts
Replacement Parts Figure 5-1 Wiring Diagram, VHS-400 Diffusion Pump... -
Page 34: Vhs-10 And Vhs-400 Dimension Diagram
2.93 2.91 2.91 2.91 Thickness 0.50 0.47 0.81 0.50 0.47 Bolt Circle 4.75 4.03 4.75 Number of Holes Hole Size 0.75 0.33 0.75 O-ring Groove ID 3.06 3.06 O-ring Groove Width 0.30 0.30 Figure 5-2 VHS-10 and VHS-400 Dimension Diagram... -
Page 35: Vhs-10 Pump Performance Curves
Replacement Parts Figure 5-3 VHS-10 Pump Performance Curves Figure 5-4 VHS-400 Pump Performance Curves NOTE ________ Speed curves were generated according to AVS Standard 4.1... -
Page 36: Fill And Drain Assemblies
Replacement Parts Old Style – Typical New Style – Typical Figure 5-5 Fill and Drain Assemblies...
Need help?
Do you have a question about the VHS-10 and is the answer not in the manual?
Questions and answers