Related Manuals for Varian VHS-4
Summary of Contents for Varian VHS-4
- Page 1 VHS-4, VHS-6 and INSTRUCTION MANUAL VHS-250 Diffusion Pumps Part No. 699901024 Revision A February 2005...
- Page 2 VHS-4, VHS-6 and VHS-250 Diffusion Pumps Copyright 2005 Vacuum Technologies...
- Page 3 VHS-4, VHS-6 and VHS-250 Diffusion Pumps Warranty Products manufactured by Seller are warranted against defects in materials and workmanship for twelve (12) months from date of shipment thereof to Customer, and Seller’s liability under valid warranty claims is limited, at the option of Seller, to repair, replacement, or refund an equitable portion of the purchase price of the Product.
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- Page 5 VHS-4, VHS-6 and VHS-250 Diffusion Pump to which this declaration relates is in conformity with the following standard(s) or other normative documents. auf das sich diese Erklärung bezieht, mit der/den flogenden Norm(en) oder Richtlinie(n) übereinstimmt.
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Page 7: Table Of Contents
Shutdown ..........................2-2 General Maintenance ........................ 3-1 Inspection Requirements ......................3-1 Cleaning ............................ 3-2 VHS-4 and VHS-6 Cold Cap Removal/Installation ..............3-3 VHS-250 Cold Cap Removal/Installation ..................3-4 Jet Assembly Removal/Installation ....................3-5 Heater Replacement ........................3-8 Pump Fluid Charge ........................3-10 Leakage ............................. - Page 8 VHS-4, VHS-6 and VHS-250 Diffusion Pumps This page intentionally left blank.
- Page 9 VHS-4, VHS-6 and VHS-250 Diffusion Pumps Figures VHS-4 Speed and Throughput Curves .................. 1-4 VHS-4 Wiring Information ....................1-4 VHS-6 Speed and Throughput Curves .................. 1-6 VHS-6 Wiring Information ....................1-6 VHS-250 Speed and Throughput Curves ................1-8 VHS-250 Wiring Information ....................1-8 VHS4 and VHS-6 Cold Cap Removal/Installation..............
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- Page 11 VHS-4, VHS-6 and VHS-250 Diffusion Pumps Tables Pump Operational Specifications ..................1-1 VHS-4 Dimensions ......................1-5 VHS-6 Dimensions ......................1-7 VHS-250 Dimensions ......................1-9 Troubleshooting........................4-2 VHS-4 Models ........................5-1 VHS-4 Replacement Parts ....................5-1 VHS-6 Models ........................5-2 VHS-6 Replacement Parts ....................5-3 VHS-250 Models ........................
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Page 13: Instructions For Use
VHS-4, VHS-6 and VHS-250 Diffusion Pumps Preface Instructions for Use This equipment is designed for use by professionals. Read this instruction manual and any other additional information supplied by Vacuum Technologies before operating the equipment. Vacuum Technologies will not be held responsible for any events that occur due... - Page 14 VHS-4, VHS-6 and VHS-250 Diffusion Pumps Safety Diffusion Pump Hazards Designers of systems utilizing diffusion pumps must design out hazards wherever possible. For hazards that cannot be designed out, warnings, procedures, and instructions on proper use and servicing are provided. Please use guards, safety features, and interlocks as recommended.
- Page 15 VHS-4, VHS-6 and VHS-250 Diffusion Pumps General Hazards Hazard Suggested Corrective Action Loss of utility: water and/or electricity Provide sufficient backup water and power supply as necessary to effect a safe shutdown under worst case conditions. Overpressure in foreline Provide an interlock to ensure that the power...
- Page 16 VHS-4, VHS-6 and VHS-250 Diffusion Pumps Explosion Operation of the diffusion pump without continuous evacuation below 0.5 Torr (0.67 mbar) or without coolant, and then introducing a strong oxidizer (such as air), explosive vapors, powders, or materials which may react with pumping fluids in a hot pump (above 300 °F or 150 °C) can cause an explosion.
- Page 17 VHS-4, VHS-6 and VHS-250 Diffusion Pumps Explosive Conditions Prohibited Action Explosion-Causing Condition Do not run pump without cooling water. Overtemperature Do not run pump with low level of pump fluid. Overtemperature Do not run pump without proper backing or holding pump.
- Page 18 VHS-4, VHS-6 and VHS-250 Diffusion Pumps Pressurization Hazards Large vacuum pumps and their components are designed for vacuum service. They are not designed to be pressurized, which can cause them to burst and possibly expel shrapnel at lethal velocities. Serious accidents have been caused by intentional pressurization of vacuum systems and their components.
- Page 19 VHS-4, VHS-6 and VHS-250 Diffusion Pumps Dangerous Substances Chemical Dangers of Acetone and Alcohol Diffusion pumps are typically cleaned with acetone or alcohol. Acetone, alcohol, and most other solvents are irritants, narcotics, and depressants, and/or carcinogenic. Their inhalation and ingestion may produce serious effects. Even absorption through the skin can result in moderate toxicity.
- Page 20 VHS-4, VHS-6 and VHS-250 Diffusion Pumps High Temperatures Hot Surfaces Boiler temperatures reach 530 °F (275 °C) which can cause serious burns. Always ensure that surfaces have cooled to near room temperature before touching them. Hot Cooling Water and Steam The water used to cool the pump can reach scalding temperatures.
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Page 21: Introduction
Section 1. Introduction and Installation 1.1 Introduction Before unpacking and installing a VHS-4, VHS-6 or VHS-250 diffusion pump, thoroughly familiarize yourself with this instruction manual and the diffusion pump operational specifications (Table 1-1). Examine all other technical material supplied in order to gain a better understanding of the operating principles, limitations, correct application, and hazards involved with the operation of this equipment. - Page 22 VHS-6 and VHS-250: 0.25 gpm Pressure drop across coils VHS-4: 4 psi VHS-6 and VHS-250: 15 psi VHS-4: ≥ 10 cfm for maximum throughput Backing Pump Size VHS-6 and VHS-250: 17 cfm for maximum throughput Recommended Jet Assembly 4-stage, self-aligning, stainless steel...
- Page 23 VHS-4, VHS-6 and VHS-250 Diffusion Pumps Table 1-1 Pump Operational Specifications (Continued) Heater circuit resistance (ohms) VHS-4: 1450 watts 120 V – 10 208 V – 29.8 240 V – 39.7 VHS-6 and VHS-250: 2200 watts 120 V – 6.5 208 V –...
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Page 24: Vhs-4 Speed And Throughput Curves
VHS-4, VHS-6 and VHS-250 Diffusion Pumps Figure 1-1 shows the VHS-4 speed and throughput curves. Speed with standard cold cap Speed with extended cold cap 1800 1200 −10 −9 −4 −7 −10 −5 −4 −3 −2 −1 INLET PRESSURE — TORR *Note: Speed curves were generated according to AVS Standards 4.1... -
Page 25: Vhs-4 Dimensions
VHS-4, VHS-6 and VHS-250 Diffusion Pumps Table 1-2 lists the VHS-4 dimensions. Table 1-2 VHS-4 Dimensions Conflat Height 18.05 18.05 18.05 Centerline to Centerline 10.62 10.62 10.62 Flange Face to Flange Face 5.03 5.03 5.03 EIectrlc8I Box Height 8.63 8.63 8.63... -
Page 26: Vhs-6 Speed And Throughput Curves
VHS-4, VHS-6 and VHS-250 Diffusion Pumps Figure 1-3 shows the VHS-6 speed and throughput curves. Figure 1-3 VHS-6 Speed and Throughput Curves Figure 1-4 gives the VHS-6 schematic and wiring information. Figure 1-4 VHS-6 Wiring Information... -
Page 27: Vhs-6 Dimensions
VHS-4, VHS-6 and VHS-250 Diffusion Pumps Table 1-3 lists the VHS-6 dimensions. Table 1-3 VHS-6 Dimensions Conflat Height 21.92 21.92 21.92 Centerline to Centerline 13.38 13.38 13.38 Flange Face to Flange Face 8.62 8.62 8.62 EIectrlc8I Box Height 9.12 9.12 9.12... -
Page 28: Vhs-250 Speed And Throughput Curves
VHS-4, VHS-6 and VHS-250 Diffusion Pumps Figure 1-5 shows the VHS-250 speed and throughput curves. Figure 1-5 VHS-250 Speed and Throughput Curves Figure 1-6 gives the VHS-250 schematic and wiring information. Figure 1-6 VHS-250 Wiring Information... -
Page 29: Vhs-250 Dimensions
VHS-4, VHS-6 and VHS-250 Diffusion Pumps Table 1-4 lists the VHS-250 dimensions. Table 1-4 VHS-250 Dimensions Height 22.79 Centerline to Centerline 13.38 Flange Face to Flange Face 9.56 Electrical Box Height 9.12 Sight Glass, 90° clockwise Degrees from Foreline Electrical Box, 30°... -
Page 30: Installation
VHS-4, VHS-6 and VHS-250 Diffusion Pumps 1.2 Installation Installation consists of: ❑ Section 1.2.2 “Unpacking” ❑ Section 1.2.3 “Pump Oil Installation” ❑ Section 1.2.4 “Vacuum System Connections” on page 1-11 ❑ Section 1.2.5 “Cooling Water Connections” on page 1-11 ❑... -
Page 31: Vacuum System Connections
1. Connect the inlet water fitting (near the inlet flange at the top of the pump) to a continuously running water supply at 0.15 gpm (VHS-4) or .25 gpm (VHS-6 and 250) and at a temperature of 60 to 80 °F. -
Page 32: Electrical Connections
VHS-4, VHS-6 and VHS-250 Diffusion Pumps ❑ The minimum rating of this system should be 85% of the maximum power rating of the diffusion pump. ❑ The Quick Cool Coil feed line, located at the boiler plate, should be controlled by a separate three-way valve (open, closed, and vent to atmosphere). -
Page 33: Thermal Switch
VHS-4, VHS-6 and VHS-250 Diffusion Pumps 1.2.7 Thermal Switch The pump has been fitted with a manually-resettable thermal switch that is preset at the factory. This switch is located in a box near the bottom of the pump and provides protection to the pump in the event of excessive fluid loss, the loss of cooling water, or high inlet pressure. - Page 34 VHS-4, VHS-6 and VHS-250 Diffusion Pumps This page intentionally left blank.
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Page 35: Startup
VHS-4, VHS-6 and VHS-250 Diffusion Pumps Section 2. Operation ❑ Before turning on the heater, ensure there is fluid in the pump. CAUTION Running the heater without fluid can ruin the heater and damage the pump. ❑ Do not air-release the pump while the boiler is hot. Most diffusion pump fluids are heat sensitive and breaks down under these conditions. -
Page 36: Shutdown
VHS-4, VHS-6 and VHS-250 Diffusion Pumps 5. Monitor inlet and foreline pressures. During operation of the diffusion pump: ❑ The gas load at the inlet should not exceed the maximum throughput capability of the pump. ❑ The forepressure should not exceed the specified tolerable forepressure. -
Page 37: General Maintenance
VHS-4, VHS-6 and VHS-250 Diffusion Pumps Section 3. Maintenance and Service 3.1 General Maintenance Diffusion pumps generally require little attention when operated correctly. It is advisable to perform some periodic inspections to ensure trouble-free operation. By performing simple preventive maintenance, costly downtime can be avoided. A day-to-day log of pump and system performance helps indicate the condition of the pump and the need for corrective action. -
Page 38: Cleaning
VHS-4, VHS-6 and VHS-250 Diffusion Pumps ❑ Ensure that the cooling water flow is adequate and unobstructed. In areas where the mineral content of the water is high or where there is considerable sediment, it may be advisable to install water filters. -
Page 39: Vhs-4 And Vhs-6 Cold Cap Removal/Installation
VHS-4, VHS-6 and VHS-250 Diffusion Pumps 3.4 VHS-4 and VHS-6 Cold Cap Removal/Installation To remove the cold cap: 1. Remove the spring (1) (Figure 3-1) attached by round head screw (2), a flat washer (3) and a lock washer (4). The screw types are: ❑... -
Page 40: Vhs-250 Cold Cap Removal/Installation
VHS-4, VHS-6 and VHS-250 Diffusion Pumps 3.5 VHS-250 Cold Cap Removal/Installation To remove the cold cap: 1. Remove the spring (J) attached by the 6-32x round head screw (H), a flat washer and 3/16 a lock washer (Figure 3-2). 2. Loosen the nuts (L) holding the cold cap bracket (E) to the copper bar (C) and remove the cold cap (B) from the top of the jet cap (A). -
Page 41: Jet Assembly Removal/Installation
VHS-4, VHS-6 and VHS-250 Diffusion Pumps 3.6 Jet Assembly Removal/Installation To remove the jet assembly: 1. Remove the cold cap from the pump (Figure 3-3). 2. Unscrew the top cap from the jet assembly. 3. Lift out each section of the jet assembly, being careful not to dent or otherwise damage the jet assembly during disassembly or cleaning. -
Page 42: Vhs-4 Diffusion Pump Jet Assembly
VHS-4, VHS-6 and VHS-250 Diffusion Pumps Jet Cap Jet Plug Inner Rod 2nd Stage Drip Shield 3rd Stage Jet 3rd Stage Drip Shield Jet Tube Assembly Jet Base Ejector 4.00 Flat Splash Baffle Boiler Plate Jam Nut Figure 3-3 VHS-4 Diffusion Pump Jet Assembly... -
Page 43: Vhs-6 And 250 Diffusion Pump Jet Assembly
VHS-4, VHS-6 and VHS-250 Diffusion Pumps Figure 3-4 VHS-6 and 250 Diffusion Pump Jet Assembly... -
Page 44: Heater Replacement
VHS-4, VHS-6 and VHS-250 Diffusion Pumps 3.7 Heater Replacement Refer to Figure 3-5 (VHS-6 and VHS-250) and Figure 3-6 (VHS-4) for this procedure: 1. Turn off the power to the diffusion pump and disconnect the power supply. 2. Remove the heater cover and the insulation from the bottom of the diffusion pump. -
Page 45: Vhs-4 Heater Mounting
VHS-4, VHS-6 and VHS-250 Diffusion Pumps Heater Element 647304205 1450 W, 120 V 647304210 1450 W, 208 V 647304250 1450 W, 240 V Figure 3-6 VHS-4 Heater Mounting... -
Page 46: Pump Fluid Charge
VHS-4, VHS-6 and VHS-250 Diffusion Pumps 3.8 Pump Fluid Charge The recommended fluid charge is: ❑ 300 cc for the VHS-4 ❑ 500 cc for VHS-6 and VHS-240 The fluid charge will gradually be depleted through use, but the pump will continue to operate normally. -
Page 47: Leakage
VHS-4, VHS-6 and VHS-250 Diffusion Pumps Section 4. Troubleshooting 4.1 Leakage Analysis of general operational experience with diffusion pumps indicates that certain locations are more prone to vacuum leaks. The following locations should be checked first if leakage is the suspected cause of poor system performance: ❑... -
Page 48: Poor Pump Or System Performance
VHS-4, VHS-6 and VHS-250 Diffusion Pumps 4.3 Poor Pump or System Performance Before proceeding with a step-by-step troubleshooting program, check the performance and accuracy of the vacuum gauges used on the system. Table 4-1 shows the most frequent faults, their probable causes, and specific repair actions required for each. - Page 49 VHS-4, VHS-6 and VHS-250 Diffusion Pumps Table 4-1 Troubleshooting (Continued) Symptom Probable Cause Repair Action Inlet pressure surges Incorrect heater voltage. Check and correct voltage. Fluid outgassing. Condition pump fluid by operating pump for a few hours. Leak in system ahead of Check and correct.
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Page 51: Vhs-4 Models
VHS-4, VHS-6 and VHS-250 Diffusion Pumps Section 5. Replacement Parts Table 5-1 lists the VHS-4 models. Table 5-2 lists the VHS-4 replacement parts available from Vacuum Technologies. Table 5-1 VHS-4 Models Part Number Flange Type Pump Voltage Conflat Standard cold cap... -
Page 52: Vhs-6 Models
VHS-4, VHS-6 and VHS-250 Diffusion Pumps Table 5-2 VHS-4 Replacement Parts (Continued) 88164301 Heater Clamp Commercial Heater Clamp Nut, -16, Hex, stainless steel 31/48 694492156 Baffle Retaining Ring K0377183 O-Ring Kit includes: ❑ 3 Butyl inlet flange O-ring, Parker No. 2-258 ❑... -
Page 53: Vhs-6 Replacement Parts
VHS-4, VHS-6 and VHS-250 Diffusion Pumps Table 5-4 VHS-6 Replacement Parts Part Number Description 86488301 Standard Cold Cap Assembly F6455301 Extended Cold Cap Assembly F3365301 Jet Assembly F3373301 Splash Baffle L9172301 Foreline Baffle Assembly 642906025 Thermoswitch Kit 699006025 Standoff, ceramic insulating, Cold Cap... -
Page 54: Vhs-250 Models
VHS-4, VHS-6 and VHS-250 Diffusion Pumps Table 5-4 VHS-6 Replacement Parts (Continued) Commercial Washer, flat, no. 6, stainless steel Commercial Washer, lock, no. 6, stainless steel Commercial Stud, no. 8-32 x 1/2, stainless steel Commercial Screw, Socket hd cap, no. 8-32x , stainless steel Table 5-5 lists the VHS-250 models. - Page 55 VHS-4, VHS-6 and VHS-250 Diffusion Pumps Table 5-6 VHS-250 Replacement Parts (Continued) 86088301 Heater Cover Plate L8998001 Heater Insulating Blanket L8997001 Heater Cover K0377178 O-Ring Kit includes: ❑ 3 Butyl inlet flange O-ring, Parker No. 2-332 ❑ 3-Butyl-N foreline flange O-ring, Parker No. 2-379 ❑...
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- Page 57 4. If a product is received at Varian, Inc. in a contaminated condition, the customer is held responsible for all costs incurred to ensure the safe handling of the product, and is liable for any harm or injury to Varian, Inc. employees occurring as a result of exposure to toxic or hazardous materials present in the product.
- Page 58 9001 Request for Return R E G I S T E R E D Health and Safety Certification FAILURE REPORT (Please describe in detail the nature of the malfunction to assist us in performing failure analysis): URBO UMPS AND URBOCONTROLLERS Claimed Defect Position Parameters...
- Page 60 Canada Japan Other Countries Central coordination through: Varian, Inc. Varian, Inc. Varian, Inc. Sumitomo Shibaura Building, 8th Floor Via F.lli Varian 54 121 Hartwell Avenue 4-16-36 Shibaura 10040 Leini, (Torino) Lexington, MA 02421 Minato-ku, Tokyo 108 Italy Japan Tel: (39) 011 997 9 111...