Siemens SIMATIC ET 200SP Equipment Manual page 42

Applications of the F-I/O module
5.3 Application 2: Safety mode SIL3/Cat.3/PLe
Figure 5-4 Two one-channel sensors connected via two channels, internal and external sensor supply
WARNING
To achieve SIL3/Cat.3/PLe using this wiring, you must use a qualified sensor.
Digital input module F-DI 8x24VDC HF (6ES7136-6BA01-0CA0)
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Equipment Manual, 10/2021, A5E50578307-AA