Semiconductor Manufacturing Equipment - Omron G9SX User Manual

1-3 Semiconductor Manufacturing Equipment

When the Emergency Stop Switch is pressed, all of the equipment stops.
When the processing section cover is opened, the processing section and conveyor section stop.
When the conveyor section cover is opened, only the conveyor section stops.
(3) Conveyor
section cover
(1) Emergency Stop
Switch
Operation Example
(1) The Emergency Stop (2) The processing section
Switch is pressed.
Stop Stop Stop
Segment A Segment B Segment C
Required Units
Unit
G9SX-BC
G9SX-AD
(2) Processing
section cover
(3) The conveyor section
cover is opened.
cover is opened.
Stop Stop
Segment A Segment B Segment C Segment A
Qty.
1
2
1. Partial control of machine
(2) Processing section cover
(1) Emergency Stop
Switch
Basic Unit
G9SX-BC
Logical AND
connection
Segment B
Segment A
Stop
Segment B Segment C
Safety input to be applied
Emergency Stop Switch
Safety Door Switches (Set of two)
(3) Conveyor section cover
Safety Door Safety Door
Switch Switch
Advanced Unit Advanced Unit
G9SX-AD G9SX-AD
Logical AND
connection
Segment C
Page
39
40
USER'S GUIDE
G9SX
15