PI M-414 Series User Manual
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PI M-414 Series User Manual

Linear translation stages
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MP 73E User Manual
M-403Linear Translation Stages
Release: 2.0.1 Date: 25.04.2007
This document describes the
following product(s):
■
M-403.xDG
Linear Translation Stage, DC-Motor
■
M-403.xPD
Linear Translation Stage, ActiveDrive™
■
M-403.x2S
Linear Translation Stage, Stepper Motor
© Physik Instrumente (PI) GmbH & Co. KG
Auf der Römerstr. 1 ⋅ 76228 Karlsruhe, Germany
Tel. +49 721 4846-0 ⋅ Fax: +49 721 4846-299
info@pi.ws ⋅ www.pi.ws

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  • Page 1 M-403.xPD Linear Translation Stage, ActiveDrive™ ■ M-403.x2S Linear Translation Stage, Stepper Motor © Physik Instrumente (PI) GmbH & Co. KG Auf der Römerstr. 1 ⋅ 76228 Karlsruhe, Germany Tel. +49 721 4846-0 ⋅ Fax: +49 721 4846-299 info@pi.ws ⋅ www.pi.ws...
  • Page 2 Physik Instrumente (PI) GmbH & Co. KG is the owner of the following company names and trademarks: PI®, ActiveDrive™, Mercury™, Mercury™ Step The following designations are protected company names or registered trademarks of third parties: Windows Copyright 1999–2007 by Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, Germany.
  • Page 3 The motion controller and the software tools which might be mentioned in this documentation are described in their own manuals. All documents are available as PDF files via download from the PI Website (www.pi.ws (http://www.pi.ws)) or on a product CD. For updated releases contact your Physik...

  • Page 4: Table Of Contents

    Contents Introduction Product Description................3 Prescribed Use..................4 Safety Instructions................5 Model Survey ..................6 Unpacking ................... 7 Additional Components ............... 7 Start-Up Mechanical Mounting ................9 Moving the Stage ................11 Operational Considerations PWM Amplifiers................. 13 Limit Switches ................... 13 Reference Switch ................
  • Page 5 6.4.3 2-Phase Stepper Motor ..............28 Appendix Related Products................29 Motor Controller Details ..............30 7.2.1 Stepper motor controllers ..............30 7.2.2 DC Motor Controllers................30 Glossary of Terms Index...

  • Page 6: Introduction

    The stages can carry up to 20 kg and push/pull up to 50 N. Three Motor Drive Options M-403.xPD versions feature the high-performance ActiveDrive™ system. The ActiveDrive™ design, developed by PI, features a high-efficiency PWM (pulse width modulation) servo-amplifier mounted side-by-side with the DC motor and offers several advantages: ■...

  • Page 7: Prescribed Use

    The positioners may only be used for applications suitably in accordance with the device specifications. Respect the safety instructions given in this User Manual. The operator is responsible for the correct installation and operation of the M-403. www.pi.ws M-403 MP 73E Release 2.0.1 Page 4...

  • Page 8: Safety Instructions

    Always keep the User Manual safe and close to the described device. In case of loss or damage to the instructions, please order a new copy from your PI distributor or download one from www.pi.ws (http://www.pi.ws). Also keep and add all further information (e.g. extended instructions or Technical Notes) to the User Manual.

  • Page 9: Model Survey

    The travel range differences and their encoding in the model number are as follows (here the “xx” in the model number stands for the drive-type code): Models M-403.1xx M-403.2xx M-403.4xx M-403.6xx M-403.8xx Travel range in www.pi.ws M-403 MP 73E Release 2.0.1 Page 6...

  • Page 10: Unpacking

    Depending on your application, you might need the following accessories (p. 23) for use with the M-403 Linear Positioning Stage : ■ M-403.AP1: Adapter plate for mounting stages with PI standard hole pattern on M-403 stages, www.pi.ws M-403 MP 73E Release 2.0.1...
  • Page 11 M-403.AP2: Z-axis adapter plate for vertical mount of M-403 stages on M-403 stages, ■ M-403.AP3: Universal adapter plate for mounting M-403 stages on stages with PI standard hole pattern. Contact your PI sales engineer or write info@pi.ws if you need additional components. www.pi.ws M-403 MP 73E Release 2.0.1 Page 8...

  • Page 12: Start-Up

    You have best access to the M6 mounting holes, when the platform is at its central reference switch (for reaching the reference position see the User Manual of the motor controller used). www.pi.ws M-403 MP 73E Release 2.0.1 Page 9...
  • Page 13 M-403 stage (see Fig. below). Figure 4: Z-axis mounting To mount a stage with PI standard hole pattern on an M-403 stage, the M-403.AP1 adapter plate is required. To mount a M-403 stage upon a stage with PI standard hole pattern, the M-403.AP3 adapter plate is required.

  • Page 14: Moving The Stage

    If using any PWM stages read the section about PWM amplifiers (p. 13) carefully. To operate a stage, proceed as follows: Install/connect the controller following the instructions in the controller manual. If you are going to use a host computer, install the www.pi.ws M-403 MP 73E Release 2.0.1 Page 11...
  • Page 15 NOTE Most standard controllers and / or software from PI use a DAT file which contains information on all standard micropositioners and installs automatically with the host software. This file, called pistages.dat, also includes an initial set of PID servo-control parameters for each stage type.

  • Page 16: Operational Considerations

    Sink / Source capab. 20 mA at 18°C Signal logic (stepper motors) active low; normal operation: high, limit sensor reached: low Signal logic (DC-motors): active-high; normal motor operation: low, limit sensor reached: high www.pi.ws M-403 MP 73E Release 2.0.1 Page 13...

  • Page 17: Reference Switch

    This manual includes a list of suitable controllers. Host PC Most controllers from PI are in turn controlled by a host PC provided by the user. The controller is either installed directly in the PC (e.g. C-843 PCI board) or connected to it over a communications interface.
  • Page 18 Operational Considerations PI provides software and/or drivers that run on the host PC to control the system. Typically, there will be a control program with a graphic user interface for testing and simple operation, and, in addition, DLL, COM and/or LabView drivers for users who wish to use custom software.

  • Page 19: Troubleshooting

    ■ Clean the spindle and add new lubricant. Wrong command or wrong syntax: ■ Check the error code (with PI-GCS command set, use ERR?; see controller and software manuals for the error code explanations). Positioner is not referenced: ■ In the GCS command set, some closed-loop motion commands are not executed if the mechanics has not been referenced—(ERR?
  • Page 20 Turn off the motor. If possible, you may push the positioner out of the end zone manually. ■ The end of the leadscrew has an Allan wrench socket so it can be cranked manually. www.pi.ws M-403 MP 73E Release 2.0.1 Page 17...

  • Page 21: Customer Service

    Troubleshooting Customer Service Still having problems? Call your PI representative or write to info@pi.ws; please have the following information about your system ready: ■ Product codes and serial numbers of all products in the system ■ Current firmware version of the controller (if present) ■...

  • Page 22: Maintenance

    The time interval depends of the degree of contamination and can vary from 100 to 800 operating hours. www.pi.ws M-403 MP 73E Release 2.0.1 Page 19...

  • Page 23: Technical Data

    Min. incremental motion 0.25 µm typ. Backlash µm typ. Unidirectional repeatability µm typ. Pitch µrad typ. over 100 µrad typ. over 100 Max. velocity mm/s Origin repeatability µm typ. Mechanical properties Spindle pitch mm/U www.pi.ws M-403 MP 73E Release 2.0.1 Page 20...
  • Page 24 * ** 2-phase stepper motor, 24 V chopper voltage, max. 0.8 A/phase, 400 full steps/rev., motor resolution with C-663 stepper motor controller **Load: Max. normal load capacity: Centered, vertical load (horizontal installation of the stage). Max. recommended velocity www.pi.ws M-403 MP 73E Release 2.0.1 Page 21...

  • Page 25: Range And Transmission Ratio Values

    4 cts/µm M-403.2PD 200,000 M-403.4PD 400,000 M-403.6PD 600,000 M-403.8PD 800,000 M-403.1DG 1,422,222 56,88889 cts/µm M-403.2DG 2,844,444 M-403.4DG 5,688,888 M-403.6DG 8,533,332 M-403.8DG 11,377,776 Dimensions Dimensions in mm, decimal places separated by commas in drawings www.pi.ws M-403 MP 73E Release 2.0.1 Page 22...

  • Page 26: M-403.Xxx

    Technical Data 6.3.1 M-403.xxx Figure 6: M-403 www.pi.ws M-403 MP 73E Release 2.0.1 Page 23...

  • Page 27: Accessory Adapter Plates

    Technical Data 6.3.2 Accessory Adapter Plates M-403.AP1 Adapter plate for mounting stages with PI standard hole pattern on M-403 stages Figure 7: M-403.AP1 adapter plate with PI standard hole pattern www.pi.ws M-403 MP 73E Release 2.0.1 Page 24...
  • Page 28 Technical Data M-403.AP2 Z-axis adapter plate for vertical mount of M-403 stages on M-403 stages Figure 8: M-403.AP2 Z-axis adapter plate www.pi.ws M-403 MP 73E Release 2.0.1 Page 25...
  • Page 29 Technical Data M-403.AP3 Universal adapter plate for mounting M-403 stages on stages with PI standard hole pattern Figure 9: Universal adapter plate www.pi.ws M-403 MP 73E Release 2.0.1 Page 26...

  • Page 30: Pin Assignments

    B (-) output encoder signal B-dash, TTL * Polarity determines direction of motion: if MOT+ > MOT- motion is in the positive direction, i.e. away from the end where the motor is mounted. www.pi.ws M-403 MP 73E Release 2.0.1 Page 27...

  • Page 31: Dc-Motor Activedrive™ (Pwm)

    +5V supply from controller PLIM output positive limit signal (active low), TTL ground (power) REFS output reference signal, TTL NLIM output negative limit signal (active low), TTL www.pi.ws M-403 MP 73E Release 2.0.1 Page 28...

  • Page 32: Appendix

    Appendix Appendix Related Products With the M-403/M-413 linear stage series PI offers a flexible and cost-effective product line for cost-sensitive applications, The flexibility in travel range (25 to 300 mm) and motorization (stepper motors, gearbox and ActiveDrive™ direct-drive DC motors) provides a broad range of solutions for standard micropositioning tasks.

  • Page 33: Motor Controller Details

    PC NOTE Most standard controllers and / or software from PI use a DAT file which contains information on all standard micropositioners and installs www.pi.ws M-403 MP 73E Release 2.0.1...
  • Page 34 Appropriate PID-Parameters for M-403.xDG Parameter Recommended Minimum Value Maximum Value Value p-term i-term d-term i-limit 2000 2000 velocity [cts/s] 112,000 143,000 velocity [mm/s] acceleration [cts/s²] 1,000,000 5,600 2,000,000 acceleration [mm/s²] www.pi.ws M-403 MP 73E Release 2.0.1 Page 31...
  • Page 35 * Higher velocities up to 100,000 cts/s (25 mm/s) are possible, but not recommended for continuous operation due to frictional heat generation in the spindle system. Setting velocity limit to 0 has the obvious effect of preventing all motion with no error indications. www.pi.ws M-403 MP 73E Release 2.0.1 Page 32...

  • Page 36: Glossary Of Terms

    Glossary of Terms ActiveDrive™ DC Motor Some of the advantages of DC-motor drives are good dynamic performance, fast response, high torque at low rpm, low heat dissipation and low vibration. The cost of a high-performance amplifier, however, is generally higher than that for a stepper motor.
  • Page 37 (PZTs) and PZT flexure stages (see the "PZT Flexure NanoPositioners" and "PZT Actuators" sections of the PI Catalog for details) such as those integrated in PI's M-511.HD and M-714 Hybrid Drive stages. Pulse Width Modulation (PWM) The PWM mode is a highly effective method of transmitting electrical energy at a variable rate by varying the width of pulses in a train rather than the amplitude of an analog signal.
  • Page 38 Stepper Motor An electric motor providing motion in discrete angular steps, without the need of position sensor or servo-loop. Compared to closed-loop DC motors of the same size, stepper motors provide poorer dynamic performance and dissipate more heat, especially in steady state operation. Their advantages lie in long lifetime and simple control electronics.

  • Page 40: Index

    Model Survey • i Motor Controller Details • 6 Index Motor Controllers • 2 Moving the Stage • 2 Operational Considerations • 2 2-Phase Stepper Motor • 6 Pin Assignments • 5 Accessory Adapter Plates • 2, 5 Prescribed Use • i ActiveDrive™...

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