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Summary of Contents for LEYBOLD DIP 3 000
- Page 1 Oil Diffusion Pumps DIP 3 000 DIP 8 000 DIP 12 000 Operating Instructions GA04106_002_C6 Part Nos. 222 10 /TE /Vxxx 222 20 /TE /Vxxx 222 25 /TE /Vxxx 500 371 /591 /649 /670 /729 501 122 /940 502 281 /286...
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Page 2: Table Of Contents
Conforming Utilisation 3.1.1 Non-conforming Utilisation 3.1.2 Risk of Damaging the Pump Ambient Conditions High-vacuum Connection Forevacuum Connection Coolant Connections 3.5.1 Water Quality Electrical Connections 3.6.1 Connecting the Heaters 3.6.2 Connecting Monitoring Components (optional) Pump Fluid GA04106_002_C6 - 10/2021 - © Leybold... - Page 3 Assembling the Pump 5.6.5 Cleaning the Cooling Coils Replacing the Heating Cartridges Troubleshooting Wearing Parts and Original Spare Parts Waste Disposal Appendix EU Declaration of Conformity EC Declaration of Incorporation Original installation and operating instructions. GA04106_002_C6 - 10/2021 - © Leybold...
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Page 4: Safety Information
Instructions and follow the information so as to ensure optimum and safe working right from the start. The Leybold DIP pumps have been designed for safe and efficient operation when used properly and in accordance with these Operating Instructions. It is... -
Page 5: Explanation Of Safety Symbols
Explanation of Safety Symbols General warning sign Warning - automatic start-up! Warning - slipping hazard! Warning - electrical voltage! Warning - toxic substances! Warning - hot surface! Warning - explosive substances! General mandatory sign GA04106_002_C6 - 10/2021 - © Leybold... -
Page 6: Mechanical Hazards
If the boiler overheats due to too little or no oil or too little cooling water flow, the boiler can implode. The water cooling system may not be interrupted in the case of a mal- function. Observe the installation regulations. GA04106_002_C6 - 10/2021 - © Leybold... -
Page 7: Electrical Hazards
There are hazardous voltages present on the mains cables (danger to life). Before carrying out maintenance or service work on the product, take it off the mains supply. After mains power off, wait for 5 minutes! GA04106_002_C6 - 10/2021 - © Leybold... -
Page 8: Thermal Hazards
Only open fluid drain port or inlet port if the pump is vented and is cooled down to room temperature. Let cooling water pipes cool down before removing and then shut off the feed line. Wear suitable protective equipment. GA04106_002_C6 - 10/2021 - © Leybold... -
Page 9: Danger Through Substances And Materials That Are Transported, Used Or Expelled By The Vacuum Pump
Wear appropriate protective cloth- ing (gloves, goggles, respiratory protection, personal protective equip- ment). Avoid body contact with plant oil, process residues and contaminated surfaces. Perform maintenance in preferably clean, dry and well-venti- lated rooms. GA04106_002_C6 - 10/2021 - © Leybold... - Page 10 Wear appropriate protective clothing (gloves, goggles, respiratory pro- tection, personal protective equipment). Avoid body contact with plant oil, process residues and contaminated surfaces. Perform maintenance in preferably clean, dry and well-venti- lated rooms. Do not smoke with PFPE on your fingers. GA04106_002_C6 - 10/2021 - © Leybold...
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Page 11: Description
The sensor has to be installed into the system control by the customer so NOTICE that it will safely switch off the power. The heating cartridges can be easily replaced when required. It is not neces- Heating cartridges sary to dismantle the pump to do so. GA04106_002_C6 - 10/2021 - © Leybold... -
Page 12: Supplied Equipment
O-ring and outer ring for the forevacuum flange. The high-vacuum and forevacuum flanges are closed with shipping flanges and claws. The insides of the pumps have been cleaned; they are evacuated prior to shipment. GA04106_002_C6 - 10/2021 - © Leybold... -
Page 13: Technical Data
EPO / main switch. 6) The control unit is designed and manufactured to comply with a degree of contamination 2 and an overvoltage category 2. Leybold recommends to connect an existing neutral conductor. GA04106_002_C6 - 10/2021 - © Leybold... - Page 14 100 ISO-K – – – – – – – Number (d – – – 250.5 375.5 alpha 45° 30° 30° alpha 20° 45° 45° alpha – 30° 30° alpha – 15° 15° with plug GA04106_002_C6 - 10/2021 - © Leybold...
- Page 15 Description Fig. 3a Dimensional drawing for the DIP variant with plug GA04106_002_C6 - 10/2021 - © Leybold...
- Page 16 Description Fig. 3b Dimensional drawing for the DIP variant with junction box GA04106_002_C6 - 10/2021 - © Leybold...
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Page 17: Ordering Information
– – 500001230 Gas cooler 85417V000 85417V000 85418V000 Water-flow monitor 500006623 “Anti-Seize” E06025124 Thermostatic safety switch 122 84 Contact thermometer 218 81 Thermoelement Pt 100 sensor E06025124 Pump fluid (see below) GA04106_002_C6 - 10/2021 - © Leybold... -
Page 18: Survey Of Pump Fluids
Description Survey of Pump Fluids Prior to using PFPE (Leybonol LVO 400 or LVO 410) consult with Leybold. NOTICE Mineral oils/ LEYBONOL Silicone oils Technical data LVO 500 LVO 521 Vapor pressure at 20 °C mbar 1 · 10 3.0 · 10 Relative molecular mass g ·... -
Page 19: Transport And Storing
Remove the shipping flange and the transport securing device (white cube). Keep the closure plug and the securing device for storage or transport reasons. The ambient temperature range of -20 to +70 °C must not be exceeded during transport and storing. GA04106_002_C6 - 10/2021 - © Leybold... - Page 20 590 x 560 x 820 50 / 39 240, 240, 350 DIP 8 000 800x 710 x 1110 140 / 78 610, 320, 320 DIP 12 000 950 x 810 x 1280 185 / 115 350, 350, 650 GA04106_002_C6 - 10/2021 - © Leybold...
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Page 21: Installation
They are employed in high-vacuum technology to evacuate vacuum cham- bers. In the case of inflammable and explosive gases, please discuss with Leybold beforehand. The pumps are suitable for the pumping of gas mixtures containing oxygen concentrations of <... -
Page 22: Ambient Conditions
Humidity: 85 % Altitude of installation site < 1500 m (NHN) With using the optional Energy Efficiency Control the aforementioned values change accordingly to: Temperature: 5 – 40 °C max. altitude 1000 m (NHN) GA04106_002_C6 - 10/2021 - © Leybold... -
Page 23: High-Vacuum Connection
When deviating too far from the vertical installation orientation (>1°), there NOTICE is the risk that the heating cartridges will run dry thereby damaging the pump. GA04106_002_C6 - 10/2021 - © Leybold... -
Page 24: Forevacuum Connection
The diameter of the forevacuum line should be at least as large as the fore- vacuum flange nominal diameter; the line should be as short as possible in order to achieve the maximum conductance value. GA04106_002_C6 - 10/2021 - © Leybold... -
Page 25: Coolant Connections
The DIP 3000 to 12 000 have two coolant circuits which can be connected in series. 1. Cold cap baffle: coolant inlet and outlet: (5/6) 2. Pump: coolant inlet: (5/7) Coolant outlet: (5/2) Important is that the coolant flow has to enter the cold cap baffle first. GA04106_002_C6 - 10/2021 - © Leybold... -
Page 26: Water Quality
If there is the danger of frost, you may use a water glycol mixture of up to 30 %. DS water can be used for cooling the pump, if the pH value corresponds to the range indicated above. GA04106_002_C6 - 10/2021 - © Leybold... -
Page 27: Electrical Connections
The components must be connected correctly and properly. Electrical safety examinations, in particular the insulation and protective grounding conductor examination, must be carried out. GA04106_002_C6 - 10/2021 - © Leybold... - Page 28 Take note of the installation instructions for the replacement and connec- tion of the heater cartridge. Check stock before changing/inserting (measured value: 49 to 55 ohms) and degas if necessary. In case of standstill, check heater cartridge after one year. GA04106_002_C6 - 10/2021 - © Leybold...
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Page 29: Connecting The Heaters
400 V, 3-phase, 50/60 Hz (e.g. 230 V (±10 %), 3-phase or 460 V (±10 %), 3-phase), then the pump will have to be rewired internally. Kindly inquire at the factory for details. Leybold recommends to connect an existing neutral conductor to the NOTICE zero point! As there is a symmetrical load during normal operation and thus no com- pensating currents are present, a connection is not absolutely necessary. - Page 30 The parameters which affect dimensioning include current load, ambient temperature, how the cable is laid and type of cable and conductors. Local codes shall be observed when sizing the connection cable. GA04106_002_C6 - 10/2021 - © Leybold...
- Page 31 The supply voltage must correspond to the limits specified. The insulation for the lines from the junction boxes to the fuse boxes shall be resistant to temperatures of up to 200 °C. GA04106_002_C6 - 10/2021 - © Leybold...
- Page 32 Electrical junction box DIP 8000/12000 Versorgungsspannung Oil temperature Temperaturschalter Thermal switch Mains voltage Temperatur Öl Pt 100 Pt 100 Pumpe Pump Ableitstrom > 10 mA Leakage current > 10 mA Fig. 7a Electrical junction box GA04106_002_C6 - 10/2021 - © Leybold...
- Page 33 <100 °C vapour >220 °C valve 13 14 15 16 19 20 Note: The customer is recommended to integrate Output 7/8 into the system control. Fig. 7b Versions of electrical connections (DIP 8000 & 12000) GA04106_002_C6 - 10/2021 - © Leybold...
- Page 34 Feed cable connection Flow control sensor connection Sensor feedthrough L1, L2, L3 connections (X1 block) USB / Ethernet connection L+ and M- (X2 block) Heater circuit breakers Ground connection Fig. 7c Control cabinet layout GA04106_002_C6 - 10/2021 - © Leybold...
- Page 35 An Ein 4 Kühlwasserventil COM Relais Ausgang cooling water valve O/P4-5 Kühlwasserventil Relais Ausgang cooling water valve O/P5 Ethernet Ethernet Ethernet Spannungsversorgung Versorgungsspannung Power supply Spannungsversorgung Versorgungsspannung Power supply Schutzerde Fig. 7d Terminal assignment GA04106_002_C6 - 10/2021 - © Leybold...
- Page 36 Heating cartridge H e i z p at r o ne Min. & max. oil level Mi n . / Ma x . Fig. 8 Thermostat to protect the pump Schutz der Pumpe against overheating GA04106_002_C6 - 10/2021 - © Leybold...
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Page 37: Safety Interlock
Attach the ground conductor in the supply lead to the central grounding point on the backing plate (PE bus). Then connect the supply line with the system control unit in order to ensure that this protective interlock is set up properly. GA04106_002_C6 - 10/2021 - © Leybold... -
Page 38: Connecting Monitoring Components (Optional)
If coolant circulation fails the flow monitor can, for example, be used to drive a relay which will switch off the pump heating, activate an alarm system or carry out another suitable switching function. The minimum coolant volumes are given in Section 1.3, “Technical Data”. GA04106_002_C6 - 10/2021 - © Leybold... -
Page 39: Pump Fluid
The quantities of fluid required will be found in Section 1.3, “Technical Data”, but may vary slightly due to the pump’s design. Always fill in oil up to the max. mark of the oil level eye. GA04106_002_C6 - 10/2021 - © Leybold... - Page 40 Operating the pump for long periods with an oil level too low (at or below the min. mark) will lead to problems with replacing the heater cartridges and may damage the pump. GA04106_002_C6 - 10/2021 - © Leybold...
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Page 41: Operation
Operation Media Compatibility The pump is not suitable for handling oxygen above normal atmospheric concentration. Kindly contact the manufacturer whenever gases with high hydrogen content are to be pumped (cf. Section 3.1, Conforming Utilization). GA04106_002_C6 - 10/2021 - © Leybold... - Page 42 V2 + V4 are closed, DIP remains evacuated Valve V4 closes Valve V2 closes Forevacuum pumps P1, P2, (P3) are switched-off End of process Fig. 10 Schematic for commissioning and operational sequences of a DIP pump system GA04106_002_C6 - 10/2021 - © Leybold...
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Page 43: Start-Up
DIP. This will then result in premature ageing of the oil and a significantly increased oil loss. Open the valve slowly to reduce flow disturbances within the pump as well as oil losses. GA04106_002_C6 - 10/2021 - © Leybold... -
Page 44: Operation
Burning of fingers, hands, arms on hot surfaces up to +140°C. Hazard of burns with open covers. Handle the pump only in ventilated and cooled down condition. Wear suit- able protective equipment. Take note of the cooling time after switching off. GA04106_002_C6 - 10/2021 - © Leybold... -
Page 45: Dip With Eec
For chang- ing the value press the Enter button again. Use the Up-/Down-Arrow buttons repeatedly, to change the value of the set-point. To set the new value, press the Enter button again. GA04106_002_C6 - 10/2021 - © Leybold... -
Page 46: Changing The Control Unit's Display
Independent of the displayed dia- gram all the relevant process values for oil temp, heater temp, and heater power are shown. Fig. 10c Service Monitor Fig. 10d Bar Diagram Fig. 10e Graphic Diagram Fig. 10f Numeric Diagram GA04106_002_C6 - 10/2021 - © Leybold... -
Page 47: Safety System
The USB interface is on the control unit’s rear side (inside the switching cabinet). Changes of parameters and values in configuration mode not described in these Operating Instructions are not recommended and will void the war- ranty. GA04106_002_C6 - 10/2021 - © Leybold... - Page 48 Repeatedly press the Page button, to return to the initial screen and to log out. NOTICE Logging out correctly via „Logged out“ matters, as otherwise the control unit will not function properly. After having logged out, the control unit’s display will show the selected lan- guage. GA04106_002_C6 - 10/2021 - © Leybold...
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Page 49: Notes
- pu mp in g sp e ed a nd e nd p re s sure bei ng i n the s pecifi ed r ange and - the e ne rgy yi e ld b e i ng op ti mi zed . Fig. 10h Fine-tuning the oil temperature GA04106_002_C6 - 10/2021 - © Leybold... -
Page 50: Modbus
(in seconds) for the Modbus input channels. If no value is written within the specified period, the value of this channel is set to -9999.0 with a „No Data“ status. Entering „0“ turns off the timeout function when there is no communication / transmission. GA04106_002_C6 - 10/2021 - © Leybold... -
Page 51: Modbus Addresses
Oil temp <100 °C Channel 1 Alarm 1 Status alarm status uInt8 Oil temp >200 °C Channel 1 Alarm 2 Status alarm status uInt8 Heater temperature Channel 2 Alarm 2 Status alarm status uInt8 GA04106_002_C6 - 10/2021 - © Leybold... -
Page 52: Web Server
„Security“ is set to „Yes“. Password Enter your own password. This password is required for logging onto the Web Server. Default = „admin“. The username will only be dis- played when „Security“ is set to „Yes“. GA04106_002_C6 - 10/2021 - © Leybold... - Page 53 DIP pump; cf. Section 3.6.1 “Electrical connection at the thermostat”. If you have optionally installed a thermostatic safety switch and/or a coolant flow monitor unit these will also switch off. GA04106_002_C6 - 10/2021 - © Leybold...
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Page 54: Regular Checks
Cleaning the heat 1 year Use a commercial high-pressure conducting plates cleaner, 4 bar overpressure max. of the heater cartridges Cooling water flow 1 year If required clean the cooling coils 5.6.5 GA04106_002_C6 - 10/2021 - © Leybold... -
Page 55: Switching Off/Shutting Down
Close the forevacuum valve V2. Shut off the coolant supply. Switch off and vent the forevacuum pump. For systems without EEC additionally carry out a temperature measurement. Contact Leybold for an optional dial-type thermometer. GA04106_002_C6 - 10/2021 - © Leybold... - Page 56 If the pump or individual electrical components of the pump have been replaced, an electrical test in accordance with DIN EN 60204 must be carried out. Conformity with the technical documentation (consistency of the protec- tive conductor system, functional test) must be checked. GA04106_002_C6 - 10/2021 - © Leybold...
- Page 57 Pumps having a filling of PFPE should be sealed off in a gas-tight manner and vented with nitrogen. GA04106_002_C6 - 10/2021 - © Leybold...
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Page 58: Maintenance
There are hazardous voltages present on the mains cables (danger to life). Before carrying out maintenance or service work on the product, take it off the mains supply. After mains power off, wait for 5 minutes! GA04106_002_C6 - 10/2021 - © Leybold... -
Page 59: Leybold Service
This form is available from Form www.leybold.com/ -> Downloads -> Downloads Documents. Attach the form to the equipment or enclose it with the equipment. This statement detailing the type of contamination is required to satisfy legal requirements and for the protection of our employees. -
Page 60: Topping Up Pump Fluid
Only open fluid drain port or inlet port if the pump is vented and is cooled down to room temperature. Let cooling water pipes cool down before removing and then shut off the feed line. Wear suitable protective equipment. GA04106_002_C6 - 10/2021 - © Leybold... - Page 61 Open the inlet port (12/1) and fill in the pump fluid ensuring that the maxi- mum mark is not exceeded. We recommend that you replace the gasket at the inlet port (15/43). Close the inlet port. GA04106_002_C6 - 10/2021 - © Leybold...
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Page 62: Exchanging The Pump Fluid
PFPE is so contaminated that it must be changed. Prior to using PFPE (Leybonol LVO 400 or LVO 410) consult with Leybold. NOTICE Switch the pump off, wait for it to cool down and vent. -
Page 63: Changing The Lvo Type
New pump fluid must be degassed before its first use. This process takes NOTICE >1 hour. Depending on the pump fluid‘s quality and the care taken while cleaning the relevant pump‘s parts, this time may be extended. GA04106_002_C6 - 10/2021 - © Leybold... -
Page 64: Cleaning The Pump
Moreover, they must be cleaned when filling in a different grade of pump fluid. The pump will have to be dismantled to do so. 5.6.1 Dismantle Pump Disconnect the power supply and coolant circuit (see Section 4.4, “Switch ing off”). GA04106_002_C6 - 10/2021 - © Leybold... -
Page 65: General Cleaning
Oil glass frames of different pumps must not be swapped, as pumps may NOTICE be configured for individual filling levels. If arrows are present on the cover frame, these must point downwards. GA04106_002_C6 - 10/2021 - © Leybold... -
Page 66: Assembling The Pump
Take note of the installation instructions for the replacement and connec- tion of the heater cartridge. Check stock before changing/inserting (measured value: 49 to 55 ohms) and degas if necessary. In case of standstill, check heater cartridge after one year. GA04106_002_C6 - 10/2021 - © Leybold... - Page 67 ± 0 , 2 ± 0, 2 D I P 1 2 0 0 0 1, 0 1 ,2 2, 5 3 , 0 Fig. 13 Nozzle assembly for the DIP 12 000; other models are similar GA04106_002_C6 - 10/2021 - © Leybold...
- Page 68 Subsequent assembly is in the reverse order to that described above. The inside of the heater well must not be damaged. Notify our Customer Service Department if the heater well should suffer serious damage. GA04106_002_C6 - 10/2021 - © Leybold...
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Page 69: Item Description
Therefore, turn on new pumps and pumps after successful servicing of the heater cartridges only in well-venti- lated areas. Avoid direct contact with the smoke or gases that can develop during start-up. GA04106_002_C6 - 10/2021 - © Leybold... - Page 70 High-vacuum connection flange Installation location for dial-type thermometer or Pt100 Fluid fill level sight glass with pump fluid inlet and outlet ports Fig. 15a Overall view of the DIP 12 000; other models are similar GA04106_002_C6 - 10/2021 - © Leybold...
- Page 71 Fluid fill level sight glass baffle Pump fluid outlet port DN 16 Section Z Attachment, cold cap baffle Pump fluid inlet port DN 40 Fig. 15b Overall view of the DIP 20 000; other models are similar GA04106_002_C6 - 10/2021 - © Leybold...
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Page 72: Troubleshooting
Connect the pump correctly. Maint. personnel standing flat and level. Gas throughput too high. Check the process. Operator/ High pump fluid Maint. personnel loss High-vacuum valve leaky. Clean or repair the valve. Maint. personnel GA04106_002_C6 - 10/2021 - © Leybold... -
Page 73: Wearing Parts And Original Spare Parts
6526781 DN 63 ISO-K new design Forevacuum baffle DN 100 6526782 DN 100 ISO-K new design Nozzle assembly, complete ø237x442 Al 20005438 Nozzle assembly, complete ø365x620; Al 500001189 Nozzle assembly, complete ø472x790; Al E20005442 GA04106_002_C6 - 10/2021 - © Leybold... - Page 74 ... Fig. 7b Cabinet fan 24V E6533050 Solid state relay with cooling body E6533049 Eurotherm Nanodac / 24 VDC E6532118 Heater circuit breaker 6.3 A E6509414 Heater circuit breaker 6.3 A (20 pcs.) ES6509414 GA04106_002_C6 - 10/2021 - © Leybold...
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Page 75: Waste Disposal
Contamination mental influences. In this case the equipment must be decontaminated in accordance with the relevant regulations. Leybold offers this service at fixed prices. Further details are available on request. Danger as a result of contact with toxic decay/reaction products of... - Page 76 The owners of used fluid are responsible for its proper disposal. Spent fluid from vacuum pumps may not be mixed with other substances. Spent fluids from vacuum pumps (Leybold’s petroleum-based oils) which are contaminated only as a result of normal wear and tear due to the effects of atmospheric oxygen, elevated temperature and mechanical strain can be dis- posed of in the same way as used motor oils.
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Page 77: Appendix
External voltage / potential-free contacts Orange Protective earth Green / Yellow All wires not signed in the: Main circuit 1.5 mm² / AWG 16 Control circuit 1.0 mm² / AWG 18 Core type to be used: Standard GA04106_002_C6 - 10/2021 - © Leybold... - Page 78 Appendix GA04106_002_C6 - 10/2021 - © Leybold...
- Page 79 GA04106_002_C6 - 10/2021 - © Leybold...
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Page 80: Ec Declaration Of Incorporation
EC Declaration of Incorporation Leybold GmbH Bonner Strasse 498 50968 Cologne GERMANY T: +49-(0)221-347-0 info@leybold.com www.leybold.com...
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