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PI E-873.1AT User Manual

Digital controller for q-motion piezo inertia drives
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PZ273EN ‒ 8/29/2019
User Manual
E-873.1AT DIGITAL CONTROLLER FOR Q-MOTION® PIEZO INERTIA DRIVES
M O T I O N | P O S I T I O N I N G

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Summary of Contents for PI E-873.1AT

  • Page 1 PZ273EN ‒ 8/29/2019 User Manual E-873.1AT DIGITAL CONTROLLER FOR Q-MOTION® PIEZO INERTIA DRIVES M O T I O N | P O S I T I O N I N G...

  • Page 2: Table Of Contents

    Communication Interfaces................14 4.5.1 Controlling PI Systems..............14 4.5.2 E-873.1AT Interfaces................ 15 Software Overview..................16 Positioner Database..................18 ID Chip Detection..................... 19 Functional Principles of the E-873.1AT............19 4.9.1 Block Diagram.................. 19 4.9.2 Important Firmware Components..........20 4.9.3 Commandable Items............... 22 4.9.4 Operating Modes................25 4.9.5...
  • Page 3 Unpacking / Transportation..................43 Unpacking......................43 Transportation....................43 Installation......................... 44 Mounting the E-873.1AT..................44 Connecting the E-873.1AT to the Protective Earth Conductor..... 45 Connecting the Power Supply to the E-873.1AT........... 46 Connecting the Positioner to the E-873.1AT..........46 Installing the PC Software................46 6.5.1 Installing the PC Software for the First Time.........46...
  • Page 4 CONTENTS PZ273EN ‒ 8/29/2019 E-873.1AT Functions....................72 Protective Functions of the E-873.1AT............72 8.1.1 Protection Against Overheating............72 8.1.2 Behavior with Motion Errors............72 8.1.3 Behavior During System Errors............73 8.1.4 Restoring Operational Readiness........... 73 8.1.5 Commands..................73 8.1.6 Parameters ..................73 Data Recorder....................73 8.2.1...
  • Page 5 CONTENTS PZ273EN ‒ 8/29/2019 8.7.3 Changing Parameter Values............96 8.7.4 Creating or Changing Parameter Sets for Positioners....98 Command Reference....................103 10 Parameter Reference....................163 11 Maintenance......................199 11.1 Cleaning......................199 11.2 Updating the Firmware................. 199 12 Troubleshooting....................... 204 13 Customer Service Department................207 14 Technical Data......................

  • Page 6: Legal Information

    With regard thereto, Physik Instrumente (PI) GmbH & Co. KG reserves all rights. The use of any text, images and drawings is permitted only in part and only when indicating the source.
  • Page 7 1 LEGAL INFORMATION PZ273EN ‒ 8/29/2019 Publisher: Customer service department: Physik Instrumente (PI) GmbH & Co. KG Physik Instrumente (PI) GmbH & Co. KG Auf der Roemerstrasse 1 Auf der Roemerstrasse 1 76228 Karlsruhe 76228 Karlsruhe Germany Germany info@pi.de service@pi.de www.pi.de...

  • Page 8: About This Document

    PZ273EN ‒ 8/29/2019 About this Document Objective and Target Group This user manual contains the information needed for the intended use of the E-873.1AT. Basic knowledge of closed-loop systems, motion control concepts, and applicable safety measures is assumed. Other Applicable Documents The devices and software tools that are mentioned in this documentation are described in separate manuals.

  • Page 9: Symbols Used

    Failure to observe can lead to material damage. ► Action to take to avoid the risk. Information Additional information on the E-873.1AT that can affect your application. Figures For better understandability, the colors, proportions and degree of detail in illustrations can deviate from the actual circumstances.
  • Page 10 2 ABOUT THIS DOCUMENT PZ273EN ‒ 8/29/2019 b) Enter the product number up to the period (e.g., E-873) into the search field. c) Click Start search or press the Enter key. d) If necessary: Click Load more results at the bottom of the list. 4.

  • Page 11: Safety

    ► Add all information from the manufacturer such as supplements or technical notes to the user manual. ► If you give the E-873.1AT to a third party, also include this user manual as well as other relevant information provided by the manufacturer.

  • Page 12: Product Description

    4 PRODUCT DESCRIPTION PZ273EN ‒ 8/29/2019 Product Description Front Panel Figure 1: Front view of the E-873.1AT Element Labeling Type Function Power Toggle switch On/Off switch O: E-873.1AT switched off —: E-873.1AT switched on Display port Serial connection to a serial peripher-...

  • Page 13: Type Plate

    Figure 2: Type plate of the E-873.1AT 1. Data matrix code (example; contains the serial number) 2. Product number (example) 3. Serial number (example), individual for each E-873.1AT Meaning of the position (counting from the left): 1 = internal information,...

  • Page 14: Scope Of Delivery

    Short instructions for digital motor control- lers and drivers 000036360 USB cable (type A to Mini-B) for connection to the PC E-873.CD Product CD for the E-873.1AT with software and user manuals Accessories Product number Description C-815.553 Straight-through network cable for connecting the PC via a TCP/IP net- work C-815.563...

  • Page 15: E-873.1At Interfaces

    4 PRODUCT DESCRIPTION PZ273EN ‒ 8/29/2019 4.5.2 E-873.1AT Interfaces The E-873.1AT can be controlled via the following communication interfaces: M O T I O N | P O S I T I O N I N G...

  • Page 16: Software Overview

    Communication interfaces PC interfaces, via software (p. 16) or PI General Command Set: TCP/IP RS-232 The interface parameters in the E-873.1AT's volatile memory can be queried with the IFC? command and changed with command. The commands are available for IFS? querying and changing the interface parameters in the E-873.1AT's nonvolatile memory.
  • Page 17 (must be ordered sepa- rately from National In- struments). The E-873.1AT NI LabVIEW software of PI is a col- lection of virtual instru- ment drivers (VI drivers) for the E-873.1AT con- troller. These drivers support the GCS.

  • Page 18: Positioner Database

    Positioner Database You can select a parameter set appropriate for your positioner from a positioner database in the PC software from PI. The software transfers the values of the selected parameter set to the volatile or nonvolatile memory of the controller.

  • Page 19: Id Chip Detection

    E-873.1AT when the E-873.1AT is switched on or rebooted. ID Chip Detection PI positioners with DC motor have an ID chip in the connector where the following data is stored as parameters: ■ Information on the positioner: Type, serial number, date of manufacture, version of the hardware ■...

  • Page 20: Important Firmware Components

    The E-873.1AT supports positioners with piezo inertia drive and incremental sensor. 4.9.2 Important Firmware Components The functional units of the E-873.1AT's firmware are described in the following. The firmware can be updated with a tool. The current firmware version can be ascertained with the VER? command.
  • Page 21 Description Parameters Parameters reflect the properties of the positioner connected (e.g., travel range) and specify the behavior of the E-873.1AT (e.g., set- tings for the servo algorithm). The parameters can be divided into the following categories: ■ Protected parameters whose default settings cannot be changed ■...

  • Page 22: Commandable Items

    A startup macro can be defined that runs each time the E-873.1AT is switched on or rebooted. The startup macro simplifies stand-alone operation (operation without a connection to the PC).
  • Page 23 E-873.1AT's firmware. It corresponds to the ax- is of a linear coordinate system. Motion for logical axes is commanded in the firmware of the E-873.1AT (i.e., for the directions of motion of a po- sitioner). The axis identifier can be queried with the...
  • Page 24 Data Recorder (p. 73) Overall system E-873.1AT as an overall system Information on name, serial number, and firmware version of the E-873.1AT can be queried with the command. *IDN? The ready state of the E-873.1AT can be queried with the command.

  • Page 25: Operating Modes

    – for a continuous feed of the runner. The operating voltage is therefore output by the E-873.1AT as a modified sawtooth signal with a maximum frequency of 25 kHz.
  • Page 26 The travel range is only limited by the physical limits of the positioner. Linear mode The drive electronics of the E-873.1AT convert the control value to an analog signal. The output piezo voltage corresponds to 10 times this analog signal. The feed of the rod is generated by the expansion of the piezo actuator caused by the piezo voltage.
  • Page 27 4 PRODUCT DESCRIPTION PZ273EN ‒ 8/29/2019 Parameters Description PIShift Step Size (Phys. Unit) Size of the slow individual steps (0x1F000700) Serves as criterion for switching between the fol- lowing phases of the motion sequence: ■ Fast step mode > slow individual steps: Switching threshold: 4 x parameter value ■...

  • Page 28: Triggering Motion

    Motion is triggered in closed-loop operation either by commands or an HID, e.g., a joystick. HID control is not possible in open-loop operation. The motion status of the axes connected to the E-873.1AT can be queried with the command. Motion triggered by commands can be stopped with the following commands: ■...
  • Page 29 HID's axes. Configures HID control for the axes of the E-873.1AT. The following motion parameters of the E-873.1AT's axes can be controlled via the HID's axes: ■ Absolute target position ■ Relative target position (frequency with which the controlled axis of the mechanics is moved) ■...

  • Page 30: Generation Of Dynamics Profile

    (dynamics profile). The values calculated are called commanded values. The dynamics profile generated by the profile generator of the E-873.1AT depends on the motion variables that are specified by parameters and/or HID.
  • Page 31 ■ Stopping the motion with the #24, STP, commands The profile generator of the E-873.1AT only supports trapezoidal velocity profiles: The axis accelerates linearly (based on the acceleration value specified) until it reaches the specified velocity. It continues to move with this velocity until it decelerates linearly (based on the deceleration value specified) and stops at the specified target position.
  • Page 32 4 PRODUCT DESCRIPTION PZ273EN ‒ 8/29/2019 Figure 4: Basic trapezoidal velocity profile; A = acceleration, D = deceleration, V = velocity If the deceleration has to begin before the axis reaches the specified velocity, the profile will not have a constant velocity portion and the trapezoid becomes a triangle. Figure 5: Basic trapezoidal velocity profile;...
  • Page 33 4 PRODUCT DESCRIPTION PZ273EN ‒ 8/29/2019 Figure 6: Complex trapezoidal profile with parameter changes; A = acceleration; D = deceleration; V1, V2, -V2 = velocities All motion variables can be changed while the axis is in motion. The profile generator will always attempt to stay within the permissible motion limits specified by the motion variables.

  • Page 34: Servo Algorithm And Other Control Value Corrections

    4.9.7 Servo Algorithm and Other Control Value Corrections The control value for the drive electronics integrated in the E-873.1AT and therefore the system's settling behavior is optimized in closed-loop operation by a PID (proportional- integral-differential) servo algorithm. Independent of the servo mode, the control value is also corrected by a notch filter in linear mode.
  • Page 35 ■ D Term (0x3) ■ I-Limit (0x4) ■ D-Term Delay (No. Of Servo Cycles) (0x71) The input of the servo algorithm can be configured for the E-873.1AT with the following parameters: ■ Numerator Of The Servo-Loop Input Factor (0x5A) ■ Denominator Of The Servo-Loop Input Factor (0x5B) The servo-loop input factor decouples the servo control parameters from the encoder resolution.

  • Page 36: On-Target State

    ■ On-target state = true (1): The target position is considered as reached ■ On-target state = false (0): The target position is considered as not reached The E-873.1AT determines the on-target state on the basis of the following criteria: ■ Settling window around the target position (Settling Window (Encoder Counts) parameter (0x36)) ■...

  • Page 37: Reference Switch Detection

    (reference point definition (p. 40)). The following parameters can be used to configure how the E-873.1AT detects the reference switch: ■ Invert Reference? (0x31) ■ Has Reference? (0x14) ■ Reference Signal Type (0x70)

  • Page 38: 4.9.11 Travel Range And Soft Limits

    ■ If the positioner does not have integrated limit switches: Hard stops Settings for the travel range The following parameters of the E-873.1AT reflect the physical travel range of the positioner: ■ Value At Reference Position (Phys. Unit) (0x16) ■ Distance From Negative Limit To Reference Position (Phys. Unit) (0x17) ■...
  • Page 39 4 PRODUCT DESCRIPTION PZ273EN ‒ 8/29/2019 ■ `The limits apply both in closed-loop and open-loop operation. ■ Using these limits is recommended only if open-loop motion is required. For logical reasons, the values are outside the soft limits specified via 0x15 and 0x30. ■...

  • Page 40: 4.9.12 Reference Point Definition

    4 PRODUCT DESCRIPTION PZ273EN ‒ 8/29/2019 4.9.12 Reference Point Definition Whether a reference point definition is necessary for the axis depends on the signal type of the position sensor: ■ Absolute measuring position sensor: Reference point definition is not necessary. ■...
  • Page 41 4 PRODUCT DESCRIPTION PZ273EN ‒ 8/29/2019 The lower the velocity is when approaching the switch, the less the overshoot will be and the higher the repeatability. Therefore, the value of parameter 0x50 should be maximally as great as the value of parameter 0x49, though ideally substantially less. The actual velocities during the reference move are calculated from the values of the following parameters and can be lower than the maximum values: ■...
  • Page 42 4 PRODUCT DESCRIPTION PZ273EN ‒ 8/29/2019 0x47 Reference Travel Default direction for the reference move. Direction 0 Automatic detection 1 Negative direction 2 Positive direction 0x50 Velocity For Reference Maximum velocity for reference moves. Moves (Phys. Unit/s) 0 to value of value 0x49 [phys. units / s] 0x63 Distance Between Gap between internal limit switch and hard stop.

  • Page 43: Unpacking / Transportation

    3. Inspect the contents for signs of damage. If any parts are damaged or missing, contact customer service department (p. 207) immediately. 4. If the E-873.1AT was supplied with ESD protective caps on the connectors: Do not remove the ESD protective caps. 5. Keep all packaging materials in case the product needs to be returned.

  • Page 44: Installation

    High temperatures can overheat the E-873.1AT. ► Install the E-873.1AT with a gap of at least 10 cm to the top and rear panels and at least 5 cm to its sides. If this is not possible, make sure that the surroundings are cooled sufficiently.

  • Page 45: Connecting The E-873.1At To The Protective Earth Conductor

    Mounting the E-873.1AT on a Surface 1. Drill the holes required into the surface. The arrangement of the recesses in the mounting rails of the E-873.1AT can be seen in the figure. 2. Tighten the E-873.1AT to the recesses provided with suitable screws.

  • Page 46: Connecting The Power Supply To The E-873.1At

    Requirements The power supply is not connected to the power socket via the power cord. ✓ The E-873.1AT is installed near the power supply so that the power plug can be quickly ✓ and easily disconnected from the mains. Connect the Power Adapter to the E-873.1AT 1.

  • Page 47: Updating The Pc Software

    2. Start the installation assistant for the custom positioner database by opening the Import_PI_CustomStage.exe file. ➔ The Import PI Custom Stage program is run and the parameter set is imported from the custom positioner database into PIStages3. 3. If a message appears that installation of the custom positioner database failed: Update the PIStages3 positioner database on your PC (p.
  • Page 48 6 INSTALLATION PZ273EN ‒ 8/29/2019 The PI Update Finder is a program which helps you find updates for your PI software. It identifies the PI software installed on your computer and compares it with the software available on the PI server. This comparison is made using the Internet. If more up-to-date software is available on the PI server, the PI Update Finder will offer you a download link which directs you to the relevant software.
  • Page 49 ➔ The directory, and any subdirectories, appear at the end of the list. OK to finalize input of the installation directory. e) Click ➔ If PI software is found in the specified directories, it will by displayed in the table on the initial screen of the PI Update Finder. Find Updates button.
  • Page 50 Updating the PC Software and Positioner Database in Linux Requirements Active connection to the Internet. ✓ You have the user name and password for the E-873.1AT. See the ✓ "E-873_Releasenews_V_x_x_x.pdf" (x_x_x: CD version number) in the main directory or Manuals directory on the product CD.

  • Page 51: Connecting The Pc

    1. Open the website www.pi.ws. 2. Log onto the website: a) Click Login. b) Log in with the user name and password for the E-873.1AT. 3. Search for the product: a) Click Search. b) Enter the product number up to the period (e.g., E-873) or the product family (e.g., PICMA®...

  • Page 52: Integrating Into E-873.1At A Network

    6 INSTALLATION PZ273EN ‒ 8/29/2019 Connecting the E-873.1AT to the PC 1. Connect the cable to the selected communication interface of the E-873.1AT. 2. Connect the cable to an unused port on the PC. 6.6.2 Integrating into E-873.1AT a Network Tools and Accessories ■...

  • Page 53: Startup / Operation

    If the protective earth conductor is missing or not properly connected, risk of dangerous touch voltages on the E-873.1AT in the event of malfunction or failure of the system. If there are touch voltages, touching the E-873.1AT can lead to minor injury due to electric shock.

  • Page 54: Establishing Communication Via Usb

    E-873.1AT. b) In the Baudrate field, set the value that is set for the E-873.1AT. ➔ This adapts the baud rate of the PC to the baud rate of the E-873.1AT. Connect to establish communication. 6. Click ➔ If communication could not be established, look for a solution to the problem in the "Troubleshooting (p.

  • Page 55: Establishing Communication Via Tcp/Ip

    CD. Adapting the TCP/IP Interface Parameters of the E-873.1AT If you need to adapt the interface parameters of the E-873.1AT to use the E-873.1AT in a network, proceed as follows. M O T I O N | P O S I T I O N I N G...
  • Page 56 ➔ The Store interface settings dialog opens. 6. Click Store settings in the Store interface settings dialog. ➔ The dialog closes. The settings were stored in the nonvolatile memory of the E-873.1AT . 7. Close the Configure Interface window. 8. Close the connection with the E-873.1AT by selecting the Connections > Close >...
  • Page 57 E-873 controllers in the same network are displayed in the PI Controllers field. 5. Click the entry for your E-873.1AT found in the list of controllers. This must show the status "listening on port 50000". ■ Do not select a controller that is already connected via TCP/IP (status "connected to ...").

  • Page 58: Starting Motion

    The procedure for PIMikroMove is described in the following. After communication has been established between the E-873.1AT and the PC, PIMikroMove guides you through the configuration of the E-873.1AT for the positioner. It is then possible to run the first motion tests of the positioner.
  • Page 59 ► If the stage is oscillating (unusual operating noise), switch off servo mode or the E-873.1AT immediately. ► Switch servo mode back on only after you have changed the E-873.1AT's notch filter settings and servo control parameters; see "Adjusting the Notch Filter (p.
  • Page 60 E-873.1AT. ➔ The Save all changes permanently? dialog is opened. 3. Specify how you want to load the parameter settings into the E-873.1AT in the Save all changes permanently? dialog box: ■ Temporary load: Click Keep the changes temporarily to load the parameter settings into the volatile memory of the E-873.1AT.
  • Page 61 7 STARTUP / OPERATION PZ273EN ‒ 8/29/2019 4. During the Start up axes step, do a reference move for the axis so that the controller knows the absolute axis position: You have the following options (options not supported by the positioner/controller either doe not exist or cannot be activated): ■...

  • Page 62: Adapting The Dynamic Characteristics Of The System

    Adjusting the Notch Filter The notch filter corrects the control value for the drive of the positioner connected to the E-873.1AT. The corrections by the notch filter take place in closed-loop and open-loop operation. The frequency component in the control value that would cause natural oscillation of the mechanics is reduced by the notch filter.
  • Page 63 ► Set the notch filter before you optimize the servo-control parameters. Recording the step response 1. Open the Data Recorder window in PIMikroMove via the E-873.1AT > Show data recorder menu item. ➔ The Data Recorder window is opened.
  • Page 64 7 STARTUP / OPERATION PZ273EN ‒ 8/29/2019 5. Start the jump in the positive direction as well as the recording by clicking the button in the Data Recorder window. ➔ The axis performs the step and the step response is recorded and displayed graphically. 6.
  • Page 65 7 STARTUP / OPERATION PZ273EN ‒ 8/29/2019 (clicking with the right mouse button in the graphic field returns the view to its original size). a) Display the cursors in the graphical display by clicking the button. b) Activate the cursor movement with the mouse by clicking the button.
  • Page 66 70)". ■ Transfer the current values of the listed parameters from the volatile memory to the nonvolatile memory of the E-873.1AT by clicking Load and Save Parameters -> Save all currently active axis parameters as startup parameters to controller. M O T I O N | P O S I T I O N I N G...

  • Page 67: Optimizing The Servo Control Parameters

    All devices are still ready for operation. ✓ Checking the Servo Control Parameters: Recording the Step Response 1. Open the Data Recorder window in PIMikroMove via the E-873.1AT > Show data recorder menu item. ➔ The Data Recorder window is opened.
  • Page 68 7 STARTUP / OPERATION PZ273EN ‒ 8/29/2019 5. Start the jump in the positive direction as well as the recording by clicking the button in the Data Recorder window. ➔ The axis performs the step and the step response is recorded and displayed graphically. 6.
  • Page 69 70)". ■ Transfer the current values of the listed parameters from the volatile memory to the nonvolatile memory of the E-873.1AT by clicking Load and Save Parameters -> Save all currently active axis parameters as startup parameters to controller. M O T I O N | P O S I T I O N I N G...

  • Page 70: Making Data Backups

    E-873.1AT to a particular positioner. Parameter values saved in a text file on the PC can be loaded back to the E-873.1AT in PIMikroMove or PITerminal. The Send file... button is available for this purpose in the send command window.

  • Page 71: Saving Controller Macros

    ➔ After communication has been established, the main window is opened in PITerminal automatically and commands can then be sent. 2. Query the parameter values that you want backup. ■ If you want to save the parameter values from the volatile memory of the E-873.1AT: Send the SPA? command.

  • Page 72: 873.1At Functions

    The E-873.1AT has functions that are intended to protect it against damage. 8.1.1 Protection Against Overheating If a certain internal temperature is reached, the E-873.1AT reacts as follows to protect the system against damage: ■ The control value is set to zero for the axis concerned.

  • Page 73: Behavior During System Errors

    (parameter 0x1B < > 5) for detecting motion error. Data Recorder The E-873.1AT contains a real-time data recorder. The data recorder can record different variables, e.g., the current position of an axis. The recorded data is stored temporarily in data recorder tables. Each data recorder table contains the data of one data source.

  • Page 74: Setting Up The Data Recorder

    DRC? Data recorder tables with the record option 0 are deactivated, i.e., nothing is recorded. By default, the data recorder tables of the E-873.1AT record the following: ■ Data recorder table 1: Record option 1: Commanded position of the axis ■...

  • Page 75: Reading Out Recorded Data

    Analog Input Signals I/O socket. The number of input lines The analog inputs of the E-873.1AT are available on the available on the E-873.1AT can be queried with the command. The voltage at the...

  • Page 76: Connecting Analog Signal Sources

    PZ273EN ‒ 8/29/2019 8.3.1 Connecting Analog Signal Sources Overview Analog input signals (0 V to + 5 V) can be fed into the E-873.1AT via pins 1, 2, 3, and 4 of the I/O socket. Tools and Accessories ■ Suitable signal source ■...

  • Page 77: Controlling With Hid

    HID control is not possible in open-loop operation (servo mode Off). 8.4.2 HID Control Configuration Control of the axis/axes connected to the E-873.1AT by the HID's axes is configured via the command. The current HID control configuration can be queried with the HIA? command.

  • Page 78: Connecting An Hid

    Connecting an HID to the E-873.1AT 1. If you want to use axis 1 and/or axis 2 of the HID, connect the following to the E-873.1AT's Joystick socket: ■ If you want to operate a C-819.20 joystick with this controller only, connect it directly to the controller.
  • Page 79 1, the name is X. The two buttons of the C-819.20 joystick are available on the E-873.1AT via the identifiers 1 and 2. Current status in the figure: The axis of the joystick is displaced in the positive direction, and button 2 is pressed.
  • Page 80 8 E-873.1AT FUNCTIONS PZ273EN ‒ 8/29/2019 Calibrating HID Axes 1. If necessary, open the window for configuring HID control via the E-873.1AT > Configure controller HIDevice(s)… menu item in PIMikroMove's main window. ➔ The Configure Human Interface Devices window opens.

  • Page 81: Setting Up And Activating Hid Control

    6. Close the Test and Calibrate HIDevice window with Close. 7. Depending on what is next, do the following: ■ If you want to set up and activate HID control for the E-873.1AT directly afterwards, continue as described in "Setting up and Activating HID Control (p.
  • Page 82 3. Click the Apply button in the Configure Human Interface Devices window to activate the settings. 4. Send the settings for setting up HID control to the E-873.1AT by clicking the OK button. ➔ The Configure Human Interface Devices window closes.

  • Page 83: Commands

    8 E-873.1AT FUNCTIONS PZ273EN ‒ 8/29/2019 6. If you want to save the new settings for HID control to the E-873.1AT's nonvolatile memory, continue as described in "Saving the Configuration of HID Control Permanently (p. 83)". Saving the Configuration of the HID Control Permanently Select the E-873.1AT >...

  • Page 84: Recording Macros

    ➔ The macro has been stored in the nonvolatile memory of the E-873.1AT. 4. If you want to check in PITerminal or in the PIMikroMove's Command entry window whether the macro was recorded correctly: a) Query which macros are saved in the E-873.1AT by sending the...

  • Page 85: Running The Macros

    8 E-873.1AT FUNCTIONS PZ273EN ‒ 8/29/2019 5. If you want to check PIMikroMove's Controller macros tab to see whether the macro was recorded correctly: a) Click the Read list of macros from controller icon. b) Mark the macro to be checked in the list on the left-hand side and click the Load selected macro from controller icon.
  • Page 86 Create the global variables again each time that the E-873.1AT is switched on or rebooted, since they are only written to the volatile memory of the E-873.1AT. Record the MOVLR macro by sending:...

  • Page 87: Stopping The Macros

    MAC END MAC DEF startcl When this macro is used, the E-873.1AT's parameter settings should be adapted to the connected positioner in the nonvolatile memory. Alternatively, the parameter settings can also be configured in the volatile memory via the startup macro.

  • Page 88: Saving And Loading Macros

    Select the text files (<macroname>.txt) in the file selection window whose contents you want to load as a macro from the PC to the E-873.1AT. c) Click Open. ➔ For each selected text file (<macroname>.txt), the content is loaded as a macro <macroname>...
  • Page 89 ■ Button 3: Disabling HID control ■ Button 4: Active HID control I/O socket. 1. Connect C-170.PB pushbutton box from PI to the ➔ Digital input lines 1 to 4 are switched to high state as long as the respective button is pressed.
  • Page 90 8 E-873.1AT FUNCTIONS PZ273EN ‒ 8/29/2019 HIA X 1 1 1 HIN X 1 MAC START LOOP MAC END The macro has the following tasks: ■ Switch on the servo mode for axis X. ■ Start a reference move for axis X.

  • Page 91: Commands

    8 E-873.1AT FUNCTIONS PZ273EN ‒ 8/29/2019 MAC BEG button2 MEX DIO? 2 = 0 MVR X -1 WAC ONT? X = 1 MAC END The macro has the following tasks: ■ If button 2 is not pressed: End the execution of BUTTON2 ■...

  • Page 92: Parameters

    8 E-873.1AT FUNCTIONS PZ273EN ‒ 8/29/2019 MAC END Call Macro Function: END MAC ERR? Call Macro Function: ERR? MAC NSTART Call Macro Function: NSTART MAC START Call Macro Function: START MAC? List Macros Stop Macro Execution Due To Condition Page...
  • Page 93 8 E-873.1AT FUNCTIONS PZ273EN ‒ 8/29/2019 <…> Angle brackets indicate an argument of a command, can be an element identifi- er or a command-specific parameter. […] Square brackets indicate an optional entry Braces indicate repeated specifications, i.e., it is possible to access more than {…}...

  • Page 94: Variables

    Note that when braces are omitted for multicharacter variable names, the first character after the “$” is interpreted as the variable name. Adapting Settings The properties of the E-873.1AT and the mechanics connected are stored in the E-873.1AT as parameter values. The parameters can be divided into the following categories: ■...

  • Page 95: Parameter Commands

    The E-873.1AT is configured via parameters, e.g., for adapting to the mechanics. Changing parameter values can cause undesirable results. ► Create a backup copy on the PC before changing the parameter settings of the E-873.1AT. You can then restore the original settings at any time.

  • Page 96: Changing Parameter Values

    8 E-873.1AT FUNCTIONS PZ273EN ‒ 8/29/2019 Parameter values saved in a text file on the PC can be loaded back to the E-873.1AT in Send file... button is available for this purpose in the send PIMikroMove or PITerminal. The command window. Before loading into the E-873.1AT, the individual lines of the text files must be converted into command lines that contain the corresponding SPA or SEP commands.
  • Page 97 E-873.1AT> Show system parameters in the menu. ➔ The list of system-related parameters is displayed. 3. If you want to change the parameter values in the E-873.1AT's volatile memory, you have the following options: Active Value a) Type the new parameter values into the corresponding input field in the column and press the enter key on the PC's keyboard or click the mouse button outside of the input field.

  • Page 98: Creating Or Changing Parameter Sets For Positioners

    PIMikroMove has established communication between the E-873.1AT and the PC. ✓ Creating a Parameter Set for Positioners 1. Select the E-873.1AT > Select connected stages... menu item in the main window of PIMikroMove. ➔ The Start up stages/axes for E-873.1AT window opens and the Select connected stages step is active.
  • Page 99 PZ273EN ‒ 8/29/2019 3. Click Keep the changes temporarily in the Save all changes permanently dialog to load the parameter settings into the volatile memory of the E-873.1AT. ➔ The Start up stages/axes window changes to the Start up axes step.
  • Page 100 Select connected stages step. Changing a Positioner's Parameter Set 1. Select the E-873.1AT > Select connected stages... menu item in the main window of PIMikroMove. ➔ The Start up stages/axes for E-873.1AT window opens and the Select connected stages step is active.
  • Page 101 PZ273EN ‒ 8/29/2019 3. Click Keep the changes temporarily in the Save all changes permanently dialog to load the parameter settings into the volatile memory of the E-873.1AT. ➔ The Start up stages/axes window changes to the Start up axes step.
  • Page 102 8 E-873.1AT FUNCTIONS PZ273EN ‒ 8/29/2019 parameter value in the nonvolatile memory (Startup Value column), the line in the list is highlighted in color. 7. Click Load and Save Parameters > Save parameters to stage database..8. The Save Parameters as User Stage Type dialog opens.

  • Page 103: Command Reference

    9 COMMAND REFERENCE PZ273EN ‒ 8/29/2019 Command Reference Page Stop All Axes Request Status Register Request Motion Status Request Controller Ready Status Query If Macro Is Running Page *IDN? Get Device Information Page Set Closed-Loop Acceleration ACC? Get Closed-Loop Acceleration Add And Save To Variable Page Set Command Level...
  • Page 104 9 COMMAND REFERENCE PZ273EN ‒ 8/29/2019 Page Find Edge Fast Reference Move To Negative Limit Fast Reference Move To Positive Limit Fast Reference Move To Reference Switch FRF? Get Referencing Result Page Go To Home Position Page HAR? Indicate Hard Stops HDR? Get All Data Recorder Options Set HID Default Lookup Table...

  • Page 105: Mvr

    9 COMMAND REFERENCE PZ273EN ‒ 8/29/2019 MAC DEF? Call Macro Function: DEF? MAC DEL Call Macro Function: DEL MAC END Call Macro Function: END MAC ERR? Call Macro Function: ERR? MAC NSTART Call Macro Function: NSTART MAC START Call Macro Function: START MAC? List Macros MAN?
  • Page 106 9 COMMAND REFERENCE PZ273EN ‒ 8/29/2019 Stop All Axes Set Servo Mode SVO? Get Servo Mode Page TAC? Tell Analog Channels TAV? Get Analog Input Voltage TIO? Tell Digital I/O Lines TMN? Get Minimum Commandable Position TMX? Get Maximum Commandable Position TNR? Get Number Of Record Tables Set Trigger Output State...
  • Page 107 9 COMMAND REFERENCE PZ273EN ‒ 8/29/2019 #4 Request Status Register Used in: (25), On-Target State (36) Description: Requests system status information. Long description This command is identical in function to SRG? (p. 153) except that only one character is sent via the interface. Therefore, #4 can also be used when the controller is doing time-consuming tasks.
  • Page 108 9 COMMAND REFERENCE PZ273EN ‒ 8/29/2019 #5 Request Motion Status Used in: Triggering Motion (28) Description: Queries the motion status of the axes. Format: #5 corresponds to the ENQ control character in ISO/IEC 6429. Response: <MotionStatus> <MotionStatus> motion status (HEX) <MotionStatus>...

  • Page 109: #24 Stop All Axes

    9 COMMAND REFERENCE PZ273EN ‒ 8/29/2019 #8 Query If Macro Is Running Used in: (85) Description: Tests if a macro is running on the controller. Format: #8 corresponds to the BS control character in ISO/IEC 6429. Response: <MacroRunning> <MacroRunning> Macro is running (UINT) <MacroRunning>...

  • Page 110: Add Add And Save To Variable

    9 COMMAND REFERENCE PZ273EN ‒ 8/29/2019 ACC Set Closed-Loop Acceleration Used in: (30) Description: Sets acceleration of specified axes. Long description Changes the value of parameter 0xB (p. 172) in the volatile memory. The maximum value that can be set with ACC and is specified by 0x4A (p.

  • Page 111: Cpy Copy Into Variable

    9 COMMAND REFERENCE PZ273EN ‒ 8/29/2019 CCL Set Command Level Used in: (21), Parameter Commands (95) Description: Changes the active command level. Long description The command level determines the availability of commands and write access to system parameters. The active command level is always 0 when the electronics are switched on or rebooted.
  • Page 112 9 COMMAND REFERENCE PZ273EN ‒ 8/29/2019 CST? Get Assignment Of Stages To Axes Used in: (23) Description: Queries the name of the positioner type that is configured for the specified axis. Long description The positioner name is read from parameter 0x3C (p.
  • Page 113 9 COMMAND REFERENCE PZ273EN ‒ 8/29/2019 CTO Set Configuration Of Trigger Output Description: Configures the trigger output conditions for the specified digital out- put line. Long description Available CTO parameters: <CTO - Parameters Possible val- Description Pam> ues for <Val- ue>...
  • Page 114 9 COMMAND REFERENCE PZ273EN ‒ 8/29/2019 <CTO - Parameters Possible val- Description Pam> ues for <Val- ue> The sign of the TriggerStep value determines which mo- tion direction trigger pulses are to be output for. SinglePosition The selected digital output line is active when the axis posi- tion has reached or exceeded the position specified by Trig-...
  • Page 115 9 COMMAND REFERENCE PZ273EN ‒ 8/29/2019 <CTO - Parameters Possible val- Description Pam> ues for <Val- ue> PulseWidth (Integer fac- Factor that determines the tor) pulse width for the Hardware- Trigger mode (TriggerMode 9). Pulse width = 33.3 ns × Pulse- Width Format: CTO{␣<TrigOutID>␣<CTOPam>␣<Value>}...

  • Page 116: Del Delay The Command Interpreter

    9 COMMAND REFERENCE PZ273EN ‒ 8/29/2019 DEC Set Closed-Loop Deceleration Used in: (30) Description: Sets the deceleration for the specified axis. Long description Changes the value of parameter 0xC (p. 172) in the volatile memory. The maximum value that can be set with DEC, is specified by pa- rameter 0x4B (p.
  • Page 117 Does not change the parameter values for the definition of travel range and soft limits. The offset is reset to zero in the following cases: ■ When switching on and rebooting the E-873.1AT: For all axes ■ During reference point definition: For the affected axis Format: DFH[{␣<AxisID>}]...
  • Page 118 9 COMMAND REFERENCE PZ273EN ‒ 8/29/2019 DIO Set Digital Output Lines Description: Switches a digital output line to the specified state. Long description All digital output lines with a bit-mapped hexadecimal number for <OutputOn> can be switched with <DIOID> = 0. TIO? (p.

  • Page 119: Drc Set Data Recorder Configuration

    9 COMMAND REFERENCE PZ273EN ‒ 8/29/2019 DRC Set Data Recorder Configuration Used in: (23), Analog Input Signals (75), Determining the data to be recorded (74) Description: Determines the data source to be used and the data type to be re- corded for a data recorder table.
  • Page 120 9 COMMAND REFERENCE PZ273EN ‒ 8/29/2019 DRC? Get Data Recorder Configuration Used in: Determining the data to be recorded (74) Description: Gets the settings specified with DRC (p. 119). Format: DRC?[{␣<RecTableID>}] Arguments: <RecTableID> Data recorder table If no arguments are specified, the settings for all data recorder ta- bles will be queried.
  • Page 121 9 COMMAND REFERENCE PZ273EN ‒ 8/29/2019 DRT Set Data Recorder Trigger Source Used in: Setting the trigger for recording (74), Starting the Recording (74) Description: Defines a trigger source for the specified data recorder table. Long description Irrespective of the trigger option set, the data recording is always triggered when a step response measurement is carried out with STE (p.
  • Page 122 ID of the trigger source <Value> Depends on the trigger source ERR? Get Error Number Used in: Restoring the E-873.1AT's Operational Readiness (73) Description: Queries the error code of the last error that occurred and resets the error code to 0.
  • Page 123 9 COMMAND REFERENCE PZ273EN ‒ 8/29/2019 FED Find Edge Used in: Motion in closed-loop operation (28) Description: Moves an axis to a specified signal edge. Long description FED does not set a specific position value at the selected edge (in contrast to FNL (p.
  • Page 124 9 COMMAND REFERENCE PZ273EN ‒ 8/29/2019 FNL Fast Reference Move To Negative Limit Used in: Motion in closed-loop operation (28), Reference point definition options (40) Description: Starts a reference move to the negative physical travel range limit respectively to the negative limit switch. Long description FNL sets the current position to the difference between 0x16 (p.
  • Page 125 9 COMMAND REFERENCE PZ273EN ‒ 8/29/2019 FRF Fast Reference Move To Reference Switch Used in: Motion in closed-loop operation (28), Reference point definition options (40) Description: Starts a reference move to the reference switch. Long description FRF sets the current position to the value of 0x16 (p.
  • Page 126 Queries whether the hard stops of the specified axis can be used for reference moves. Long description The E-873.1AT's firmware uses the Use Hard Stops for Referenc- (p. 189) parameter (0x7A) to determine whether the hard stops of the axis can be used for reference moves. Depending on the val- ue of this parameter, the E-873.1AT activates or deactivates refer-...
  • Page 127 9 COMMAND REFERENCE PZ273EN ‒ 8/29/2019 HDR? Get All Data Recorder Options Used in: Reading general information from the data recorder (74) Description: Shows a help text that contains all available information on data re- cording. Long description Shows information on: ■...
  • Page 128 9 COMMAND REFERENCE PZ273EN ‒ 8/29/2019 HDT? Get HID Default Lookup Table Used in: HID Control Configuration (77) Description: Queries the currently assigned lookup table for the specified axis of an HID. Format: HDT?[{␣<HIDeviceID>␣<HIDeviceAxis>}] Arguments: <HIDeviceID> Identifier of an HID connected to the electronics <HIDeviceAxis>...
  • Page 129 9 COMMAND REFERENCE PZ273EN ‒ 8/29/2019 HIA Configure Control Done By HID Axis Used in: HID Control Configuration (77), Motion in closed-loop operation (28) Description: Configures control of electronics' axes via HID axes (HID control). Long description Assigns an HID axis to the specified motion variable. The configuration of the HID control is saved only to the volatile memory (RAM) of the electronics.
  • Page 130 9 COMMAND REFERENCE PZ273EN ‒ 8/29/2019 HIA? Get Configuration Of Control Done By HID Axis Used in: HID Control Configuration (77) Description: Queries an HID's axis assigned to the specified motion variable of the specified motion variable. Format: HIA?[{␣<AxisID>␣<MotionParam>}] Arguments: <AxisID>...
  • Page 131 9 COMMAND REFERENCE PZ273EN ‒ 8/29/2019 HIE? Get Deflection Of HID Axis Used in: HID Control Configuration (77) Description: Queries the current displacement of the specified axis of the speci- fied HID. Format: HIE?[{␣<HIDeviceID>␣<HIDeviceAxis>}] Arguments: <HIDeviceID> Identifier of an HID connected to the electronics <HIDeviceAxis>...
  • Page 132 9 COMMAND REFERENCE PZ273EN ‒ 8/29/2019 HIS? Get Configuration Of HI Device Used in: (23), HID Control Configuration (77) Description: Queries the specified property for the specified operating element of an HID. Format: HIS?[{␣<HIDeviceID>␣<HIDItemID>␣<HIDPropID>}] Arguments: <HIDeviceID> Identifier of an HID connected to the electronics <HIDItemID>...
  • Page 133 9 COMMAND REFERENCE PZ273EN ‒ 8/29/2019 HIT Fill HID Lookup Table Used in: HID Control Configuration (77) Description: Fills the specified lookup table with values. Long description HIT can only be used to fill user-defined tables. Tables with identifier ≤ 100 are predefined and write-protected. The first point of a lookup table corresponds to the maximum axis displacement of the HID in the negative direction;...
  • Page 134 9 COMMAND REFERENCE PZ273EN ‒ 8/29/2019 HLT Halt Motion Smoothly Used in: Triggering Motion (28) Description: Stops motion for the specified axis while considering the maximum set deceleration. Long description Sets the error code to 10. Does not apply to trajectories: HLT also triggers an abrupt stop of motion when a trajectory is being followed.
  • Page 135 9 COMMAND REFERENCE PZ273EN ‒ 8/29/2019 IFC Set Interface Parameters Temporarily Used in: E-873.1AT Interfaces (15) Description: Configures the interface parameters in the volatile memory. Long description The changed interface parameters are active immediately. The PC's interface configuration may also have to be changed and the con- nection to the electronics re-established.
  • Page 136 9 COMMAND REFERENCE PZ273EN ‒ 8/29/2019 IFC? Get Current Interface Parameters Used in: E-873.1AT Interfaces (15) Description: Queries the interface parameter values in the volatile memory. Format: IFC?[{␣<InterfacePam>}] Arguments: <InterfacePam> Interface parameters (STRING) Response: {<InterfacePam>=<PamValue>␊} <InterfacePam> Interface parameters (STRING) <PamValue>...
  • Page 137 9 COMMAND REFERENCE PZ273EN ‒ 8/29/2019 IFS Set Interface Parameters As Default Values Used in: E-873.1AT Interfaces (15) Description: Configures the interface parameters in the nonvolatile memory. Long description The changed interface parameters are active after the next reboot. The PC's interface configuration may also have to be changed.
  • Page 138 9 COMMAND REFERENCE PZ273EN ‒ 8/29/2019 IFS? Get Interface Parameters As Default Values Used in: E-873.1AT Interfaces (15) Description: Queries the values of the interface parameters in the nonvolatile memory. Format: IFS?[{␣<InterfacePam>}] Arguments: <InterfacePam> Interface parameters (STRING) Response: {<InterfacePam>=<PamValue>␊} <InterfacePam>...

  • Page 139: Jrc Jump Relatively Depending On Condition

    9 COMMAND REFERENCE PZ273EN ‒ 8/29/2019 JRC Jump Relatively Depending On Condition Used in: Analog Input Signals (75), Running the Macros (85) Description: Jumps relative to a specified number of program lines within a mac- Long description Jumps irrespective of a specified condition. Can only be used in macros.

  • Page 140: Mac Beg Call Macro Function: Beg

    9 COMMAND REFERENCE PZ273EN ‒ 8/29/2019 MAC Call Macro Function Used in: Motion in closed-loop operation (28) Description: Calls a macro function. Long description Possible macro functions are described separately: MAC BEG (p. 140) ■ MAC DEF (p. 140) ■ MAC DEF? (p.

  • Page 141: Mac Del Call Macro Function: Del

    9 COMMAND REFERENCE PZ273EN ‒ 8/29/2019 MAC DEL Call Macro Function: DEL Used in: (87) Description: Deletes the specified macro. Format: MAC␣DEL␣<MacroName> Arguments: <MacroName> Macro name to be deleted MAC END Call Macro Function: END Used in: (84) Description: Ends macro recording. Format: MAC␣END MAC ERR? Call Macro Function: ERR?
  • Page 142 9 COMMAND REFERENCE PZ273EN ‒ 8/29/2019 MAC START Call Macro Function: START Used in: (85) Description: Runs the specified macro. Format: MAC␣START␣<Macro‐ Name>[␣<String1>[␣<String2>[␣<String3>[␣<String4>]]]] Arguments: <MacroName> Macro name <String1...4> Local variables 1 to 4 Troubleshooting: No local variables specified although local variables are used in the macro MAC? List Macros Used in: (84)

  • Page 143: Mex Stop Macro Execution Due To Condition

    9 COMMAND REFERENCE PZ273EN ‒ 8/29/2019 MEX Stop Macro Execution Due To Condition Used in: Analog Input Signals (75), Stopping the Macros (87) Description: Stops the macro due to a specified condition. Long description If the parser encounters this command, the condition is checked. If the condition is fulfilled at a later time, it is ignored by the parser.
  • Page 144 9 COMMAND REFERENCE PZ273EN ‒ 8/29/2019 MOV Set Target Position Used in: (30), Motion in closed-loop operation (28) Description: Sets the absolute target position for the specified axis. Long description MOV overwrites the last target position received by the electronics. Motion commands from macros and command lines can overwrite each other.
  • Page 145 9 COMMAND REFERENCE PZ273EN ‒ 8/29/2019 MVR Set Target Relative To Current Position Used in: (30), Motion in closed-loop operation (28) Description: Moves the specified axis relative to the last commanded target posi- tion. Long description The new target position is calculated from the sum of the last com- manded target position and <Distance>.
  • Page 146 9 COMMAND REFERENCE PZ273EN ‒ 8/29/2019 OSM Open-Loop Step Moving Used in: Motion in open-loop operation (29) Description: Moves the specified axis by the specified number of steps. Long description The velocity in open-loop step mode is controlled via the step fre- quency (parameter 0x1F000400).
  • Page 147 9 COMMAND REFERENCE PZ273EN ‒ 8/29/2019 POS Set Real Position Used in: Reference point definition options (40) Description: Sets the current position of the axis (does not cause motion). Long description POS can only be used when the reference point definition mode is set to "0"...
  • Page 148 9 COMMAND REFERENCE PZ273EN ‒ 8/29/2019 RMC? List Running Macros Used in: (85) Description: Queries all macros currently running. Format: RMC? Response: {[<MacroName>]␊} <MacroName> Macro name RON Set Reference Mode Used in: Reference point definition options (40) Description: Sets the reference point definition mode of the specified axis. Format: RON{␣<AxisID>␣<ReferenceOn>} Arguments:...
  • Page 149 9 COMMAND REFERENCE PZ273EN ‒ 8/29/2019 RPA Reset Volatile Memory Parameters Used in: Parameter Commands (95) Description: Resets the specified parameter. Long description The parameter value in the volatile memory is overwritten by the value in the nonvolatile memory. RPA resets the parameter for the setting of hardware-specific pa- rameters.
  • Page 150 9 COMMAND REFERENCE PZ273EN ‒ 8/29/2019 SAI Set Current Axis Identifiers Used in: (23) Description: Sets the axis identifier for the specified axis. Long description The new axis identifier is stored in the nonvolatile memory of the electronics. TVI? (p. 158) to query the valid characters for the axis identifier.
  • Page 151 9 COMMAND REFERENCE PZ273EN ‒ 8/29/2019 SEP? Get Non-Volatile Memory Parameters Used in: Parameter Commands (95), Saving Parameter Values in a Text File (96) Description: Queries the value of a parameter in the nonvolatile memory. Long description Up to four parameters can be queried per command. Format: SEP?[{␣<ItemID>␣<PamID>}] Arguments:...
  • Page 152 9 COMMAND REFERENCE PZ273EN ‒ 8/29/2019 SPA? Get Volatile Memory Parameters Used in: Parameter Commands (95), Saving Parameter Values in a Text File (96) Description: Queries the value of a parameter in the volatile memory. Long description Up to four parameters can be queried per command. Format: SPA?[{␣<ItemID>␣<PamID>}] Arguments:...
  • Page 153 9 COMMAND REFERENCE PZ273EN ‒ 8/29/2019 SRG? Query Status Register Value Used in: (25), On-Target State (36) Description: Requests system status information. Format: SRG?{␣<ItemID>␣<RegisterID>} Arguments: <ItemID> Element of the electronics <RegisterID> Register ID Response: {<ItemID>␣<RegisterID>=<Value>␊} <ItemID> Element of the electronics <RegisterID>...
  • Page 154 9 COMMAND REFERENCE PZ273EN ‒ 8/29/2019 SST Set Step Size Description: Sets the distance to be travelled for relative motion that is triggered by an HID. Long description Sets the distance (step size) for motion of the specified axis trig- gered by a manual control unit.
  • Page 155 After the axes are stopped, their target positions are set to their cur- rent positions. Format: SVO Set Servo Mode Used in: (25), Restoring the E-873.1AT's Operational Readiness (73) Description: Sets the servo mode for the specified axis. Long description The target position is set to the current position when switching to closed-loop operation.

  • Page 156: Tac? Tell Analog Channels

    9 COMMAND REFERENCE PZ273EN ‒ 8/29/2019 SVO? Get Servo Mode Used in: (25) Description: Queries the servo mode for the specified axis. Format: SVO?[{␣<AxisID>}] Arguments: <AxisID> Axis ID The value for all axes will be queried if no arguments are specified. Response: {<AxisID>=<ServoState>␊} <AxisID>...
  • Page 157 9 COMMAND REFERENCE PZ273EN ‒ 8/29/2019 TMN? Get Minimum Commandable Position Description: Queries the minimum commandable position. Long description The minimum commandable position is determined by parameter 0x30 (p. 178). Format: TMN?[{␣<AxisID>}] Arguments: <AxisID> Axis ID Response: {<AxisID>=<float>␊} <AxisID> Axis ID <float>...
  • Page 158 9 COMMAND REFERENCE PZ273EN ‒ 8/29/2019 TRO Set Trigger Output State Description: Activates or deactivates the trigger output for a digital output line. Format: TRO{␣<TrigOutID>␣<TrigMode>} Arguments: <TrigOutID> Digital output of the electronics <TrigMode> Trigger output state (UINT) Troubleshooting: Impermissible element identifier TRO? Get Trigger Output State Description: Queries the trigger output state for a a digital output line.
  • Page 159 9 COMMAND REFERENCE PZ273EN ‒ 8/29/2019 VAR Set Variable Value Used in: Running the Macros (85) Description: Sets a variable to a specific value. Long description Local variables can only be set in macros. The variable is only in volatile memory (RAM). Format: VAR␣<Variable>␣<String>...
  • Page 160 9 COMMAND REFERENCE PZ273EN ‒ 8/29/2019 Used in: (30) Description: Gets the commanded velocity. Format: VEL?[{␣<AxisID>}] Arguments: <AxisID> Axis ID The value for all axes will be queried if no arguments are specified. Response: {<AxisID>=<float>␊} <AxisID> Axis ID <float> Velocity in physical units / s (FLOAT) Troubleshooting: Illegal axis identifier VER? Get Versions Of Firmware And Drivers...

  • Page 161: Wac Wait For Condition

    9 COMMAND REFERENCE PZ273EN ‒ 8/29/2019 WAC Wait For Condition Used in: Analog Input Signals (75), Running the Macros (85) Description: Waits until a condition is met. Long description WAC compares a specified value with a queried value according to a specified rule.
  • Page 162 9 COMMAND REFERENCE PZ273EN ‒ 8/29/2019 WPA Save Parameters To Non-Volatile Memory Used in: Parameter Commands (95) Description: Writes the value of a parameter from the volatile memory (RAM) to the nonvolatile memory. Long description WPA can also save parameter-independent settings. The used pass- word determines what is saved with WPA: <Pswd>...

  • Page 163: Parameter Reference

    10 PARAMETER REFERENCE PZ273EN ‒ 8/29/2019 Parameter Reference P term Proportional constant of the PID servo algorithm. Is used for fast correction of the position error. 0 to 32767 I term Integration constant of the PID servo algorithm. Used for reducing static position error. 0 to 32767 D term Differential constant of the PID servo algorithm.
  • Page 164 10 PARAMETER REFERENCE PZ273EN ‒ 8/29/2019 Numerator Of The Numerator of the factor for converting impulses Counts-Per-Physical- to physical units. Unit Factor The factor for the counts per physical unit of length specifies the unit of length for position queries and motion commands in closed-loop operation.
  • Page 165 10 PARAMETER REFERENCE PZ273EN ‒ 8/29/2019 0x17 Distance From Gap between reference switch and negative Negative Limit To travel range limit. Reference Position The current position is set to the difference (Phys. Unit) between the values of parameters 0x16 and 0x17 if the axis has done a reference move to the negative travel range limit.
  • Page 166 10 PARAMETER REFERENCE PZ273EN ‒ 8/29/2019 0x3C Stage Name Positioner name. Default value: NOSTAGE String up to 20 characters 0x3F Settling Time (s) Delay time for setting the on-target state. 0.000 to 1.000 [s] 0x47 Reference Travel Default direction for the reference move. Direction 0 Automatic detection 1 Negative direction...
  • Page 167 10 PARAMETER REFERENCE PZ273EN ‒ 8/29/2019 0x63 Distance Between Gap between internal limit switch and hard stop. Limit And Hard Stop Determines the maximum stopping distance (Phys. Unit) during reference moves. The actual velocities during a reference move are calculated on the basis of this value, the set deceleration (0xC) and set velocities (0x49 and 0x50).
  • Page 168 10 PARAMETER REFERENCE PZ273EN ‒ 8/29/2019 0x3003304 Sensor Digital Offset 1 Offset 1 for correcting the digitized signals of the incremental sensor. 0x3003305 Sensor Digital Phase Phase correction for the signals of the (Deg) incremental sensor. 0x3003306 Sensor Analog Gain Gain value for correcting the analog signals of (dB) the incremental sensor.
  • Page 169 10 PARAMETER REFERENCE PZ273EN ‒ 8/29/2019 0x1F000500 PIShift Charge Cycle Duty cycle of the current source during output of a step. Specified as part of a period which the current source is switched on for. 0 to 1 The value depends on the type of the drive. 0x1F000700 PIShift Step Size Size of the slow individual steps in closed-loop...
  • Page 170 10 PARAMETER REFERENCE PZ273EN ‒ 8/29/2019 0x3 D term Used in: Settings for the servo algorithm (34) Description: Differential constant of the PID servo algorithm. Used for damping rapid control oscillation. The D term can be calculated as a floating average over several ser- vo cycles.
  • Page 171 10 PARAMETER REFERENCE PZ273EN ‒ 8/29/2019 0x5 Kvff Description: Feed-forward control of the commanded velocity. Used for minimizing positioning error. Data type Command level Item type Axis Source of data Positioner database Possible values 0 to 32767 0x8 Maximum Position Error (Phys. Unit) Used in: Behavior with Motion Errors (72) Description: Maximum position error.
  • Page 172 10 PARAMETER REFERENCE PZ273EN ‒ 8/29/2019 0xB Closed-Loop Acceleration (Phys. Unit/s²) Used in: (30) Description: Acceleration with dynamics profile in closed-loop operation. Limited by parameter 0x4A (p. 182). Data type FLOAT Command level Item type Axis Source of data Positioner database Possible values 0 to value of 0x4A [phys.
  • Page 173 10 PARAMETER REFERENCE PZ273EN ‒ 8/29/2019 0xE Numerator Of The Counts-Per-Physical-Unit Factor Description: Numerator of the factor for converting impulses to physical units. The factor for the counts per physical unit of length specifies the unit of length for position queries and motion commands in closed- loop operation.
  • Page 174 10 PARAMETER REFERENCE PZ273EN ‒ 8/29/2019 0x13 Is Rotary Stage? Description: Is this a rotation stage? Is not evaluated by the electronics but instead by the PC software. Data type Command level Item type Axis Source of data Positioner database Possible values 0 Not a rotation stage 1 Rotation stage...
  • Page 175 10 PARAMETER REFERENCE PZ273EN ‒ 8/29/2019 0x15 Maximum Travel In Positive Direction (Phys. Unit) Used in: Settings for the soft limits (38) Description: Soft limit in positive direction, in relation to the zero position. The positive travel range limit cannot be used for reference moves if this value is smaller than the position value for the positive travel range limit (that results from the sum of parameters 0x16 (p.
  • Page 176 10 PARAMETER REFERENCE PZ273EN ‒ 8/29/2019 0x17 Distance From Negative Limit To Reference Position (Phys. Unit) Used in: Settings for the travel range (38) Description: Gap between reference switch and negative travel range limit. The current position is set to the difference between the values of parameters 0x16 (p.
  • Page 177 10 PARAMETER REFERENCE PZ273EN ‒ 8/29/2019 0x1B Profile Mode Description: Type of dynamics profile Data type Command level Item type Axis Source of data Positioner database Possible values Trapezoidal dynamics profile Without dynamics profile 0x2F Distance From Reference Position To Positive Limit (Phys. Unit) Used in: Settings for the travel range (38) Description:...
  • Page 178 10 PARAMETER REFERENCE PZ273EN ‒ 8/29/2019 0x30 Maximum Travel In Negative Direction (Phys. Unit) Used in: Settings for the soft limits (38) Description: Soft limit in a negative direction, in relation to the zero position. The negative travel range limit cannot be used for reference moves if this value is greater than the position value for the negative travel range limit (that results from the difference between parameters 0x16 (p.
  • Page 179 10 PARAMETER REFERENCE PZ273EN ‒ 8/29/2019 0x32 Has No Limit Switches? Used in: Limit Switch Detection (37) Description: Do the mechanics not have limit switches? Activates motion stop at the installed limit switches. Data type Command level Item type Axis Source of data Positioner database Possible values...
  • Page 180 10 PARAMETER REFERENCE PZ273EN ‒ 8/29/2019 0x36 Settling Window (Encoder Counts) Used in: On-Target State (36) Description: Settling window around the target position. Presets the window limits (half of the window width). If the current position exits the settling window, the target position is no longer considered as reached.
  • Page 181 10 PARAMETER REFERENCE PZ273EN ‒ 8/29/2019 0x47 Reference Travel Direction Used in: Reference Move Procedures (40) Description: Default direction for the reference move. Data type Command level Item type Axis Source of data Positioner database Possible values 0 Automatic detection 1 Negative direction 2 Positive direction 0x48 Motor Drive Offset...
  • Page 182 10 PARAMETER REFERENCE PZ273EN ‒ 8/29/2019 0x4A Maximum Closed-Loop Acceleration (Phys. Unit/s²) Used in: (30) 0x4B Maximum Closed-Loop Deceleration (Phys. Unit/s²) Used in: (30) 0x50 Velocity For Reference Moves (Phys. Unit/s) Used in: Reference Move Procedures (40) Description: Maximum velocity for reference moves. Data type FLOAT Command level...
  • Page 183 10 PARAMETER REFERENCE PZ273EN ‒ 8/29/2019 0x5B Denominator Of The Servo-Loop Input Factor Used in: Settings for the servo algorithm (34) Description: Input factor denominator for the servo loop. Data type Command level Item type Axis Source of data Positioner database Possible values Decimal number 0x5C Source Of Reference Signal...
  • Page 184 10 PARAMETER REFERENCE PZ273EN ‒ 8/29/2019 0x5E Source Of Positive Limit Signal Description: Signal source for the positive limit switch. Data type Command level Item type Axis Source of data Positioner database Possible values Decimal number, digital input lines bit-mapped 0x5F Invert Digital Input Used For Negative Limit Description: Inverts the signal logic of the digital inputs that serve as sources of...
  • Page 185 10 PARAMETER REFERENCE PZ273EN ‒ 8/29/2019 0x61 Invert Direction Of Motion For Joystick-Controlled Axis? Used in: HID Control Configuration (77) Description: Inverts the direction of motion for HID-controlled axes. Data type Command level Item type Axis Source of data Positioner database Possible values 0 Direction of motion not inverted (default) 1 Direction of motion inverted...
  • Page 186 10 PARAMETER REFERENCE PZ273EN ‒ 8/29/2019 0x70 Reference Signal Type Used in: Reference Move Procedures (40), Reference point definition options (40), Reference Switch Detection (37) Description: Reference signal type. Data type Command level Item type Axis Source of data Positioner database Possible values Direction-sensing reference switch The signal level changes when passing the reference switch.
  • Page 187 10 PARAMETER REFERENCE PZ273EN ‒ 8/29/2019 0x71 D-Term Delay (No. Of Servo Cycles) Used in: Settings for the servo algorithm (34) Description: D term delay. Determines how many values (i.e., servo cycles) are used for calcu- lating the mean value of the D term. Data type Command level Item type...
  • Page 188 10 PARAMETER REFERENCE PZ273EN ‒ 8/29/2019 0x77 Use Limit Switches Only For Reference Moves? Used in: Limit Switch Detection (37) Description: Should the limit switches only be used for reference moves? Is intended for use with rotation stages. Only evaluated when parameter 0x32 (p.
  • Page 189 10 PARAMETER REFERENCE PZ273EN ‒ 8/29/2019 0x79 Distance For Reference Search (Phys. Unit) Used in: Reference Move Procedures (40) Description: Maximum distance for motion to the index pulse. Data type FLOAT Command level Item type Axis Source of data Positioner database 0x7A Use Hard Stops For Referencing? Used in: Reference point definition options (40) Description:...
  • Page 190 10 PARAMETER REFERENCE PZ273EN ‒ 8/29/2019 0x95 Notch Filter Edge 1 Used in: Settings for the Notch Filter (35) Description: Edge steepness of the first notch filter. The greater the value of this parameter, the narrower the notch filter bandwidth. Data type FLOAT Command level...
  • Page 191 10 PARAMETER REFERENCE PZ273EN ‒ 8/29/2019 0x3003302 Sensor Digital Gain Description: Gain value for correcting the digitized signals of the incremental sensor. Data type FLOAT Command level Item type Axis Source of data ID chip of the mechanics 0x3003303 Sensor Digital Offset 0 (V) Description: Offset 0 for correcting the digitized signals of the incremental sen- sor.
  • Page 192 10 PARAMETER REFERENCE PZ273EN ‒ 8/29/2019 0x3003305 Sensor Digital Phase (Deg) Description: Phase correction for the signals of the incremental sensor. Data type FLOAT Command level Item type Axis Source of data ID chip of the mechanics 0x3003306 Sensor Analog Gain (dB) Description: Gain value for correcting the analog signals of the incremental sen- sor.
  • Page 193 10 PARAMETER REFERENCE PZ273EN ‒ 8/29/2019 0x3003308 Sensor Analog Offset 1 (V) Description: Offset 1 for correcting the analog signals of the incremental sensor. Data type FLOAT Command level Item type Axis Source of data ID chip of the mechanics 0x7000601 Axis Unit Description: Unit symbol.
  • Page 194 10 PARAMETER REFERENCE PZ273EN ‒ 8/29/2019 0xE000200 Servo Update Time Description: Servo cycle time. Data type FLOAT Command level Item type System Source of data PC software commands (SPA (p. 151), SEP (p. 150)) or operating ele- ments 0xF000100 Stage Type Description: Mechanics type.
  • Page 195 10 PARAMETER REFERENCE PZ273EN ‒ 8/29/2019 0xF000300 Stage Assembly Date Description: Manufacturing date of the mechanics. Data type CHAR Command level Item type Axis Source of data ID chip of the mechanics Possible values Date in TTMMJJ format 0xF000400 Stage HW Version Description: Version number of the mechanics hardware.
  • Page 196 10 PARAMETER REFERENCE PZ273EN ‒ 8/29/2019 0x1F000000 PIShift Upper Supply Voltage (V) Used in: (27) Description: Maximum output voltage for piezo inertia drives. Data type FLOAT Command level Item type Axis Source of data Positioner database Possible values The value depends on the type of the drive. 0x1F000100 PIShift Lower Supply Voltage (V) Used in: (27) Description:...
  • Page 197 10 PARAMETER REFERENCE PZ273EN ‒ 8/29/2019 0x1F000300 PIShift Backward Current (A) Used in: (27) Description: Maximum output current for piezo inertia drives during backward motion. Data type FLOAT Command level Item type Axis Source of data Positioner database Possible values The value depends on the type of the drive.
  • Page 198 10 PARAMETER REFERENCE PZ273EN ‒ 8/29/2019 0x1F000701 PIShift Delay (ms) Used in: Motion in closed-loop operation (26) Description: Delay time when switching between two operating modes (e.g., step mode and linear mode). Data type FLOAT Command level Item type Axis Source of data Positioner database Possible values...

  • Page 199: Maintenance

    You have disconnected the E-873.1AT from the power supply. ✓ Other Materials Required ■ Soft, lint-free cloth ■ Mild cleaning agent or disinfectant If you have any questions on the auxiliary materials recommended for the E-873.1AT, contact customer service department (p. 207). NOTICE Short circuits or flashovers! The E-873.1AT contains electrostatically sensitive devices that can be damaged by short...
  • Page 200 4. Set the following in the selection fields: ■ Select the entry for your controller model in the Select Controller field: E-873.1AT. ■ Select the COM port of the PC that is connected to the E-873.1AT in the Select COM port field.
  • Page 201 PZ273EN ‒ 8/29/2019 6. Start the firmware update by clicking on the Start Update button. ➔ The firmware of the E-873.1AT is updated. The update progress is displayed in the message list and by the progress bar. ➔ The update was successful when the...
  • Page 202 11 MAINTENANCE PZ273EN ‒ 8/29/2019 7. Close the "PI Firmware Updater" by clicking the cross in the top right corner of the window. 8. Switch the E-873.1AT off and on again via its toggle switch. ➔ If the firmware update was successful, the E-873.1AT exits the firmware update mode and the STA LED lights up green.
  • Page 203 4. If you have saved controller macros on the PC: Load the controller macros into the E-873.1AT, see "Loading Controller Macros from the PC into the E-873.1AT (p. 71)". M O T I O N | P O S I T I O N I N G...

  • Page 204: Troubleshooting

    (p. 207). Positioner was connected to the switched-on ► Switch the E-873.1AT off and on again, or reboot E-873.1AT the E-873.1AT with the command or with The sensor electronics in the positioner was the corresponding functions of the PC software.
  • Page 205 LF is received. E-873.1AT does not send an error code in the case of incorrect system behavior ► If possible, access the E-873.1AT with one in- The error code was already queried by a dif- stance only.
  • Page 206 The error code ERR? is reset to 0 during the query. LEDs do not light up even though the E-873.1AT is switched on E-873.1AT not connected to the power sup- ► Switch off the E-873.1AT. ply or the the power cord is defective.

  • Page 207: Customer Service Department

    PZ273EN ‒ 8/29/2019 Customer Service Department For enquiries and orders, contact your PI representative or send us an email. If you have any questions concerning your system, provide the following information: ■ Product and serial numbers of all products in the system ■...

  • Page 208: Technical Data

    D-sub 15 (f) I/O lines 4 analog / digital inputs, 4 digital outputs Command set PI General Command Set (GCS) User software PIMikroMove Application programming in- API for C / C++ / C# / VB.NET / MATLAB / Python, drivers for...

  • Page 209: Maximum Ratings

    Maximum current consump- tion 24 V 2.5 A 14.3 Ambient Conditions and Classifications The following ambient conditions and classifications for the E-873.1AT must be observed: Area of application For indoor use only Maximum altitude 2000 m above msl Air pressure 1100 hPa to 0.1 hPa...

  • Page 210: Dimensions

    14.4 Dimensions Figure 16: Dimensions of the E-873.1AT Dimensions in mm. Note that the decimal places are separated by a comma in the drawings. M O T I O N | P O S I T I O N I N G...

  • Page 211: Old Equipment Disposal

    In order to fulfil the responsibility as the product manufacturer, PI undertakes environmentally correct disposal of all PI equipment free of charge, if it was made available to the market after August 13, 2005. Any old PI equipment can be sent free of charge to the following address: Physik Instrumente (PI) GmbH &...

  • Page 212: Appendix

    16 APPENDIX PZ273EN ‒ 8/29/2019 Appendix 16.1 Pin Assignment 16.1.1 Axis Connector Figure 17: D-sub 15 (f) Signal Function REF- Reference switches, differential (-) PIEZO- Motor signal (-) PIEZO+ Motor signal (+) Supply voltage, +5 V PLIM Positive limit switch ID_CHIP Bidirectional: Data line for ID chip ENCA-...

  • Page 213: I/O Connector

    Ground 16.1.3 C-170.IO Cable for Connecting to the I/O Socket Figure 19: C-170.IO cable Wire Color Function on the I/O socket of the E-873.1AT Black Input 1 (analog: 0 to +5V / digital: TTL) white Input 2 (analog: 0 to +5V / digital: TTL)

  • Page 214: Connector

    16 APPENDIX PZ273EN ‒ 8/29/2019 16.1.4 RS-232 Connector Figure 20: RS-232 connector: D-sub 9 (m) Function Not connected RxD (PC to controller) TxD (controller to PC) Not connected Not connected Not connected Not connected Not connected 16.1.5 Power Adapter Connector Figure 21: Power adapter connector: barrel connector socket Signal Function...

  • Page 215: Eu Declaration Of Conformity

    17 EU DECLARATION OF CONFORMITY PZ273EN ‒ 8/29/2019 EU Declaration of Conformity An EU Declaration of Conformity was issued for the E-873.1AT in accordance with the following European directives: ■ Low Voltage Directive ■ EMC Directive ■ RoHS Directive The standards applied for certifying conformity are listed below.
  • Page 216 The calculated values are called "commanded values". Abbreviation for "General Command Set", the command set for electronics from PI. Piezo and servo controllers can be operated together with minimal programming effort thanks to GCS.
  • Page 217 The parameter values in the volatile memory are also referred to as "Active Values" in the PC software from PI. M O T I O N | P O S I T I O N I N G...