PI PiezoWalk E-712 User Manual
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PI PiezoWalk E-712 User Manual

Digital piezo controller system for piezowalk drives
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User Manual
E712T0010, valid for E-712.N1, E-712.1AM, E-712.1AN, .2AN, .3AN
CMo, BRo, 10/31/2024
PiezoWalk® Description
E-712 Digital Piezo Controller System for PiezoWalk® Drives
E-712.1AM digital controller for NEXLINE® nanopositioning linear drives with incremental encoder shown as an exemplary hardware configuration.
Physik Instrumente (PI) SE & Co. KG, Auf der Römerstraße 1, 76228 Karlsruhe, Germany
Phone +49 721 4846-0, fax +49 721 4846-1019, e-mail info@pi.ws,
www.pi.ws

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Summary of Contents for PI PiezoWalk E-712

  • Page 1 E-712.1AM digital controller for NEXLINE® nanopositioning linear drives with incremental encoder shown as an exemplary hardware configuration. Physik Instrumente (PI) SE & Co. KG, Auf der Römerstraße 1, 76228 Karlsruhe, Germany Phone +49 721 4846-0, fax +49 721 4846-1019, e-mail info@pi.ws,...

  • Page 2: Table Of Contents

    7.3 Configuration Example ........................30 Parameters ............................33 © 2024 Physik Instrumente (PI) SE & Co. KG, Karlsruhe, Germany. The text, photographs, and drawings in this manual are protected by copyright. With regard thereto, Physik Instrumente (PI) SE & Co. KG retains all the rights.

  • Page 3: Introduction

    For descriptions, specifications and pin assignments of the hardware components of your E-711/E-712 system for PiezoWalk® drives see the E-712 User Manual. Physik Instrumente (PI) SE & Co. KG, Auf der Römerstraße 1, 76228 Karlsruhe, Germany page 3 / 40 Phone +49 721 4846-0, fax +49 721 4846-1019, e-mail info@pi.ws,...

  • Page 4: Firmware Update

    For initial installation of the PC software and installation of updates see the E-712 User Manual (PZ195E). 2 Safety Precautions CAUTION Incorrect parameter values may lead to improper operation or damage to your hardware. PI strongly recommends to change the preset parameter values only after consultation with the PI customer service department.

  • Page 5: Special Characteristics Of Nexline® Drives

    Fig. 2: NEXLINE ® drive with 2 piezo drive modules, performing stepping motion Physik Instrumente (PI) SE & Co. KG, Auf der Römerstraße 1, 76228 Karlsruhe, Germany page 5 / 40 Phone +49 721 4846-0, fax +49 721 4846-1019, e-mail info@pi.ws, www.pi.ws...

  • Page 6: Special Characteristics Of Nexact® Drives

     PiezoWalk Clamp Channel 1, parameter ID 0x09000200 d22 = C2  PiezoWalk Clamp Channel 2, parameter ID 0x09000201 Physik Instrumente (PI) SE & Co. KG, Auf der Römerstraße 1, 76228 Karlsruhe, Germany page 6 / 40 Phone +49 721 4846-0, fax +49 721 4846-1019, e-mail info@pi.ws,...

  • Page 7: Special Characteristics Of Picmawalk Drives

    711/E-712 digital multi-channel piezo controller system, PICMAWalk drives are controlled in the same way as NEXACT® drives. The only difference is the voltage range. Physik Instrumente (PI) SE & Co. KG, Auf der Römerstraße 1, 76228 Karlsruhe, Germany page 7 / 40 Phone +49 721 4846-0, fax +49 721 4846-1019, e-mail info@pi.ws,...

  • Page 8: Driving Modes-Overview

    Fig. 4: Full-step motion, shown with a NEXLINE® drive Physik Instrumente (PI) SE & Co. KG, Auf der Römerstraße 1, 76228 Karlsruhe, Germany page 8 / 40 Phone +49 721 4846-0, fax +49 721 4846-1019, e-mail info@pi.ws,...
  • Page 9 Fig. 6: One step cycle for a NEXLINE® drive in full-step mode; shearing and clamping voltages and motion over time Physik Instrumente (PI) SE & Co. KG, Auf der Römerstraße 1, 76228 Karlsruhe, Germany page 9 / 40 Phone +49 721 4846-0, fax +49 721 4846-1019, e-mail info@pi.ws,...

  • Page 10: Nanostepping Mode

    Fig. 7: One step cycle in nanostepping mode; shearing and clamping voltages and motion over time Physik Instrumente (PI) SE & Co. KG, Auf der Römerstraße 1, 76228 Karlsruhe, Germany page 10 / 40 Phone +49 721 4846-0, fax +49 721 4846-1019, e-mail info@pi.ws,...

  • Page 11: Analog Mode

    If the PiezoWalk Driving Mode parameter is set to nanostepping mode (1), analog mode motion is not used in closed-loop operation. Physik Instrumente (PI) SE & Co. KG, Auf der Römerstraße 1, 76228 Karlsruhe, Germany page 11 / 40 Phone +49 721 4846-0, fax +49 721 4846-1019, e-mail info@pi.ws,...

  • Page 12: Relax State And Relax Procedure

    During the iterative relax procedure, the servo mode is switched between closed-loop and open-loop operation. The procedure ends in open-loop operation. Physik Instrumente (PI) SE & Co. KG, Auf der Römerstraße 1, 76228 Karlsruhe, Germany page 12 / 40 Phone +49 721 4846-0, fax +49 721 4846-1019, e-mail info@pi.ws,...
  • Page 13 Via the Special Relax Type parameter (ID 0x07031100), you can specify that this motion is executed in closed-loop nanostepping mode instead. Physik Instrumente (PI) SE & Co. KG, Auf der Römerstraße 1, 76228 Karlsruhe, Germany page 13 / 40 Phone +49 721 4846-0, fax +49 721 4846-1019, e-mail info@pi.ws,...
  • Page 14 Driving Mode parameter). Switch off closed-loop operation; this automatically triggers the simple relax procedure. Physik Instrumente (PI) SE & Co. KG, Auf der Römerstraße 1, 76228 Karlsruhe, Germany page 14 / 40 Phone +49 721 4846-0, fax +49 721 4846-1019, e-mail info@pi.ws,...

  • Page 15: Creep Reduction Procedure For Nexline® Drives

    (orange) of axis 1, piezo output voltage of channel 1 (pink). The axis position shows an unwanted change over time due to the creep of the piezo actuators. Physik Instrumente (PI) SE & Co. KG, Auf der Römerstraße 1, 76228 Karlsruhe, Germany page 15 / 40 Phone +49 721 4846-0, fax +49 721 4846-1019, e-mail info@pi.ws,...
  • Page 16 Fig. 12: Iterative relax procedure with creep reduction. The current position of the axis no longer shows any unwanted change over time. Physik Instrumente (PI) SE & Co. KG, Auf der Römerstraße 1, 76228 Karlsruhe, Germany page 16 / 40 Phone +49 721 4846-0, fax +49 721 4846-1019, e-mail info@pi.ws,...

  • Page 17: Axes And Channels

    PiezoWalk channel. The current voltage output of a piezo amplifier channel can be read with the VOL? command. Physik Instrumente (PI) SE & Co. KG, Auf der Römerstraße 1, 76228 Karlsruhe, Germany page 17 / 40 Phone +49 721 4846-0, fax +49 721 4846-1019, e-mail info@pi.ws,...

  • Page 18: Sensor Channels

    PiezoWalk® drive. Normally, your E-711/E-712 system comes preconfigured. CAUTION Incorrect parameter values may lead to improper operation or damage to your hardware. PI strongly recommends to change the preset parameter values only after consultation with the PI customer service department.
  • Page 19 Increasing voltage will cause positive displacement of the shearing component pair that is in contact with the runner and hence motion in positive direction. Physik Instrumente (PI) SE & Co. KG, Auf der Römerstraße 1, 76228 Karlsruhe, Germany page 19 / 40 Phone +49 721 4846-0, fax +49 721 4846-1019, e-mail info@pi.ws,...
  • Page 20 Piezo amplifier channel 2 is assigned to the second pair of shearing components  Physik Instrumente (PI) SE & Co. KG, Auf der Römerstraße 1, 76228 Karlsruhe, Germany page 20 / 40 Phone +49 721 4846-0, fax +49 721 4846-1019, e-mail info@pi.ws,...

  • Page 21: Operation

    (ID 0x07001A00) which can be changed with the SPA or SEP commands. You can change the driving mode while the PiezoWalk® drive is moving. Physik Instrumente (PI) SE & Co. KG, Auf der Römerstraße 1, 76228 Karlsruhe, Germany page 21 / 40 Phone +49 721 4846-0, fax +49 721 4846-1019, e-mail info@pi.ws,...

  • Page 22: How To Command Motion

    E-711/E-712 system cool down. If necessary, switch the E-711/E-712 system off and on again. Physik Instrumente (PI) SE & Co. KG, Auf der Römerstraße 1, 76228 Karlsruhe, Germany page 22 / 40 Phone +49 721 4846-0, fax +49 721 4846-1019, e-mail info@pi.ws,...

  • Page 23: Configuration

    7.2 Parameter Adjustment Normally, your E-711/E-712 system comes preconfigured. CAUTION Incorrect parameter values may lead to improper operation or damage to your hardware. PI strongly recommends to change the preset parameter values only after consultation with the PI customer service department.

  • Page 24: Parameters For Piezowalk® Drive Performance

    Fig. 15: Parameters for PiezoWalk® drive performance; a NEXACT® drive is connected to PiezoWalk channel 2 Physik Instrumente (PI) SE & Co. KG, Auf der Römerstraße 1, 76228 Karlsruhe, Germany page 24 / 40 Phone +49 721 4846-0, fax +49 721 4846-1019, e-mail info@pi.ws,...
  • Page 25 5. Make a note of the current position (x ) of the PiezoWalk® drive Physik Instrumente (PI) SE & Co. KG, Auf der Römerstraße 1, 76228 Karlsruhe, Germany page 25 / 40 Phone +49 721 4846-0, fax +49 721 4846-1019, e-mail info@pi.ws,...
  • Page 26 It is not recommended to change the value of the PiezoWalk Min Step Cycle Time parameter. Normally, this value is preset according to the electrical and mechanical restrictions of the system. Physik Instrumente (PI) SE & Co. KG, Auf der Römerstraße 1, 76228 Karlsruhe, Germany page 26 / 40 Phone +49 721 4846-0, fax +49 721 4846-1019, e-mail info@pi.ws,...
  • Page 27 Driving phase phase Fig. 16: Recovery and driving phases in nanostepping mode Physik Instrumente (PI) SE & Co. KG, Auf der Römerstraße 1, 76228 Karlsruhe, Germany page 27 / 40 Phone +49 721 4846-0, fax +49 721 4846-1019, e-mail info@pi.ws,...
  • Page 28 ⋅ actuator This current limits the velocity of a PiezoWalk® drive. Physik Instrumente (PI) SE & Co. KG, Auf der Römerstraße 1, 76228 Karlsruhe, Germany page 28 / 40 Phone +49 721 4846-0, fax +49 721 4846-1019, e-mail info@pi.ws, www.pi.ws...

  • Page 29: Piezowalk® Linearization Parameters

    PiezoWalk® drive reaches the given limit (Soft Voltage Low Limit, ID 0x0c000000, and Soft Voltage High Limit, ID 0x0c000001). Therefore the ON Target Tolerance value must be smaller than the Physik Instrumente (PI) SE & Co. KG, Auf der Römerstraße 1, 76228 Karlsruhe, Germany page 29 / 40 Phone +49 721 4846-0, fax +49 721 4846-1019, e-mail info@pi.ws,...

  • Page 30: Configuration Example

    For the PiezoWalk channel, linearizing the shearing segments of the piezo actuators is not necessary  Physik Instrumente (PI) SE & Co. KG, Auf der Römerstraße 1, 76228 Karlsruhe, Germany page 30 / 40 Phone +49 721 4846-0, fax +49 721 4846-1019, e-mail info@pi.ws,...
  • Page 31 To set up the E-711/E-712 system, you can type the appropriate commands in a terminal program, or use the Device Parameter Configuration window of PIMikroMove, with the PiezoWalk 1 and Axis Definition 1 parameter groups selected. The commands to be typed when using a terminal program (e.g. PI Terminal) are listed below. Terminal command Comment...
  • Page 32 7.16 ms = 179 * t WPA 100 Save all parameter settings to non-volatile memory Physik Instrumente (PI) SE & Co. KG, Auf der Römerstraße 1, 76228 Karlsruhe, Germany page 32 / 40 Phone +49 721 4846-0, fax +49 721 4846-1019, e-mail info@pi.ws,...

  • Page 33: Parameters

    See p. 12 for details. Physik Instrumente (PI) SE & Co. KG, Auf der Römerstraße 1, 76228 Karlsruhe, Germany page 33 / 40 Phone +49 721 4846-0, fax +49 721 4846-1019, e-mail info@pi.ws,...
  • Page 34 Channel Correction 5 0x07001605 PiezoWalk FLOAT PiezoWalk Backward Channel Correction 6 Physik Instrumente (PI) SE & Co. KG, Auf der Römerstraße 1, 76228 Karlsruhe, Germany page 34 / 40 Phone +49 721 4846-0, fax +49 721 4846-1019, e-mail info@pi.ws, www.pi.ws...
  • Page 35 OSM, measure the position difference and divide it by the number of steps. Physik Instrumente (PI) SE & Co. KG, Auf der Römerstraße 1, 76228 Karlsruhe, Germany page 35 / 40 Phone +49 721 4846-0, fax +49 721 4846-1019, e-mail info@pi.ws,...
  • Page 36 In open-loop operation, the maximum velocity can be limited by the PiezoWalk Physik Instrumente (PI) SE & Co. KG, Auf der Römerstraße 1, 76228 Karlsruhe, Germany page 36 / 40 Phone +49 721 4846-0, fax +49 721 4846-1019, e-mail info@pi.ws,...
  • Page 37 Physik Instrumente (PI) SE & Co. KG, Auf der Römerstraße 1, 76228 Karlsruhe, Germany page 37 / 40 Phone +49 721 4846-0, fax +49 721 4846-1019, e-mail info@pi.ws,...
  • Page 38 2 = velocity control for PiezoWalk® drives, use OSM and SVA in open-loop operation Physik Instrumente (PI) SE & Co. KG, Auf der Römerstraße 1, 76228 Karlsruhe, Germany page 38 / 40 Phone +49 721 4846-0, fax +49 721 4846-1019, e-mail info@pi.ws,...
  • Page 39 PiezoWalk® drive Physik Instrumente (PI) SE & Co. KG, Auf der Römerstraße 1, 76228 Karlsruhe, Germany page 39 / 40 Phone +49 721 4846-0, fax +49 721 4846-1019, e-mail info@pi.ws,...
  • Page 40 The value depends on several configuration settings for PiezoWalk channels. Physik Instrumente (PI) SE & Co. KG, Auf der Römerstraße 1, 76228 Karlsruhe, Germany page 40 / 40 Phone +49 721 4846-0, fax +49 721 4846-1019, e-mail info@pi.ws, www.pi.ws...

This manual is also suitable for:

Piezowalk e-712.n1Piezowalk e-712.1amPiezowalk e-712.1anPiezowalk e-712.2anPiezowalk e-712.3an

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