Service Manual PlasmaPro ® Contents Section Page PREFACE.............................. 5 Customer support and training ......................5 Tool identification ..........................6 Health and safety information ......................6 Intended users ............................. 6 Statement of intended use of the tool....................7 Statement of non-intended use of the tool..................7 Hyperlinks.............................
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Service Manual PlasmaPro ® Contents (continued) Section Page 2.8.4.1 Inspect the capacitance manometer gauge..............32 2.8.4.2 Service the Penning gauge..................33 2.8.5 Recommended yearly tasks ................... 34 2.8.5.1 Change the cooling system filters................34 2.8.5.2 Change the recirculating system cooling fluid ............35 2.8.5.3 Run MFC calibration checks..................
Customer support and training Oxford Instruments Plasma Technology has global customer support facilities that provide a coordinated response to customer’s queries. All queries are recorded on our support database and are dealt with as quickly as possible. If we are not able to answer the query immediately, we will contact you promptly.
PlasmaPro must have received adequate training on its safe and effective use before ® attempting to work with the equipment. Please contact Oxford Instruments Plasma Technology for information on training requirements and training courses that are available. OIPT_PP80_Ser_418529 Templ. 02.05...
If any user of the tool has not been directly trained by Oxford Instruments Plasma Technology, ensure that they understand the safety issues associated with the tool, and that they consult relevant personnel for guidance when operating the tool.
Click a link to go directly to the linked item. Disclaimers Oxford Instruments Plasma Technology assumes no liability for use of this document if any unauthorised changes to the content or format have been made. Every care has been taken to ensure that the information in this document is accurate. However, Oxford Instruments Plasma Technology assumes no responsibility or liability for errors, inaccuracies or omissions that may occur herein.
Service Manual PlasmaPro ® Certification Below is a copy of the formal certification document for this PlasmaPro ® Original Instructions Page 9 OIPT_PP80_Ser_418529 Templ. 02.05 Apr 2021...
Service Manual PlasmaPro ® SYSTEM DESCRIPTION Refer to the PlasmaPro Operators Manual for an overall description of the tool. This ® chapter contains more detailed information that is required for servicing the tool. Gas pod 1.1.1 Close-coupled gas pod The close-coupled gas pod contains four gas lines for non-hazardous gases only. Automatic matching unit The tool may contain one or two automatic matching units (AMUs).
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Oxford Instruments does not recommend live working on the tool, (Type 4) maintenance. If live working cannot be avoided, it must only be completed by suitably qualified and trained staff.
Service Manual PlasmaPro ® Table 2-2 Suggested cleaning materials Item Suggested Use Lint-free wipes General cleaning activities. Abrasive pads For cleaning stubborn deposits, especially from vacuum components. Abrasive pads must be used with care, as they can scratch or damage surfaces. After using abrasive pads, clean the relevant area using lint-free wipes to remove residues.
Service Manual PlasmaPro ® Push the process chamber lid back by approximately 30° until it locks in position. Figure 2-2 Plan view of tool showing lid locking position 2.4.2 Unlocking the process chamber lid The process chamber lid must be unlocked for normal operation of the tool. Push the process chamber lid forwards by approximately 30°...
Service Manual PlasmaPro ® Consumable parts Table 2-3 lists the consumable parts on the PlasmaPro tool. ® Table 2-3 PlasmaPro consumable parts ® Part Number Description 94-G-SEL-O-V-829C O-ring, BS829, VIT, 3.53 x 47.62 mm 94-G-SEL-O-V-146C O-ring, BS146, VIT, 2.62 x 66.35 mm 94-G-SEL-O-V-362C O-ring, BS362, VIT, 5.34 x 158.12 mm 94-G-SEL-O-V-381C...
Service Manual PlasmaPro ® Parts that are critical for operator safety This section lists parts of the tool that are critical for personal safety. Table 2-5 lists the action that must be performed to ensure each part is correctly maintained. If a part must be inspected or exchanged regularly, a link is provided to the relevant procedure.
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Service Manual PlasmaPro ® Table 2-6 Failure interval data for safety critical part Part Number Description Mean Number Expected Life Minimum Minimum of Cycles to Exceed this Lifetime in Lifetime in Before Failure Number of Years Years Cycles 94-G-NGP80-CMP UV filter 94-G-SEL-O-C-211C 3.53 x 20.22 mm O-ring The rate of deterioration of O-rings depends on many factors.
Some scheduled maintenance tasks must only be performed by personnel with maintenance expertise and training. Instructions for performing these tasks are beyond the scope of this manual. These tasks must be performed by Oxford Instruments Plasma Technology personnel or by suitably trained maintenance personnel.
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Service Manual PlasmaPro ® Table 2-9 Recommended monthly maintenance Module Task Personnel Reference Solid Waste Vacuum system Check vacuum O-rings. Engineer Section 2.8.2.1 Contaminated O- rings and wipes Record vacuum pressure for set gas flows. Operator None Process chamber Inspect and clean the interior. Engineer Section 2.8.2.5 Contaminated...
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Service Manual PlasmaPro ® Table 2-11 Recommended six monthly maintenance Module Task Personnel Reference Solid Waste Vacuum system Inspect the CM gauge. Engineer Section 2.8.4.1 Contaminated wipes Service the Penning gauge. Engineer Section 2.8.4.2 Contaminated wipes and metal parts of the gauges Table 2-12 Recommended yearly maintenance...
Service Manual PlasmaPro ® Table 2-13 Maintenance tasks that depend on tool usage Module Task Reference Comment Solid Waste Cooling system Drain the main lines. Section 2.8.6.8 Wipes Drain the re-circulating Section 2.8.6.9 Wipes system cooling lines. Process chamber Change a view port Section 2.8.6.10 Contaminated wipes...
Service Manual PlasmaPro ® Dispose of all discarded materials in an appropriate manner. 2.8.1.2 Inspect the oil filter of the backing pump This section only applies to tools fitted with a backing pump oil filtration system. Tools and equipment The following items are required to perform this task: Filter cartridge ...
Service Manual PlasmaPro ® Procedure Referring to the manufacturer’s instructions, check the oil level in the backing pump. If the oil level is low, vent the process chamber and switch off the vacuum pumps. TOXIC OR CORROSIVE MATERIALS. Used vacuum pump oil may contain toxic or corrosive substances. Wear suitable personal protective clothing when changing vacuum pump oil.
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Service Manual PlasmaPro ® Open the process chamber lid. Lock the process chamber lid (see Section 2.4.1). Wear suitable personal protective equipment. Visually inspect the two chamber lid O-rings for signs of wear, damage or contamination (see Figure 2-3). These are safety critical parts. Visually inspect the gas feed O-ring for signs of wear, damage or contamination.
Service Manual PlasmaPro ® Return the tool to service Unlock and close the process chamber lid (see Section 2.4.2). Evacuate the process chamber. Cycle purge the chamber a few times to remove any solvent residues from the chamber. Check the tool base pressure. If the base pressure is too high, repeat the cycle purge steps.
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Service Manual PlasmaPro ® Check the emergency stop and power-up circuits. These circuits remove power from the tool in an emergency. Check the chamber lid safety switch. This circuit enables the tool’s vacuum pumping system. Check the process chamber vacuum switch. ...
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Service Manual PlasmaPro ® Close the lid and check that the mimic on the process module page shows that the lid is now closed. Figure 2-5 Chamber lid is closed Test the process chamber vacuum switch Start up the tool. Vent the process chamber.
Service Manual PlasmaPro ® The pump sequence starts and the Status panel displays the progress of the operation, see Figure 2-7. Figure 2-7 Progress panel Check that the chamber pump and turbo pump start, the foreline valve opens and the APC opens. This is shown by the chamber pump, APC and pumping line changing colour to light blue, see Figure 2-8.
Service Manual PlasmaPro ® HOT SURFACES Close contact with hot surfaces can cause serious injury and burns. Allow sufficient time for the heated lower electrode to cool to room temperature before carrying out maintenance. WARNING Open the process chamber lid. Lock the process chamber lid (see Section 2.4.1).
Correct any faults found. Start up the tool. 2.8.3.6 Lubricate the turbo-pump bearings Contact Oxford Instruments Plasma Technology to organise servicing of the turbo pump. Original Instructions Page 31 OIPT_PP80_Ser_418529 Templ. 02.05...
Service Manual PlasmaPro ® 2.8.4 Recommended six monthly tasks 2.8.4.1 Inspect the capacitance manometer gauge Tools and equipment The following items are required to perform this task: Replacement KF16 O-ring Lint-free cleaning wipes A suitable cleaning fluid (e.g. isopropyl alcohol) ...
Service Manual PlasmaPro ® Gently clean the outside of the vacuum fitting with lint-free wipes and a suitable cleaning fluid. Do NOT attempt to clean the inside of the vacuum fitting. The manufacturer does not recommend cleaning the inside of the gauge, as this can cause permanent damage to it.
Service Manual PlasmaPro ® Disconnect the electrical connector from the gauge. Figure 2-10 Penning gauge Disconnect the gauge vacuum fitting. TOXIC SUBSTANCE Methanol is a toxic substance. Exposure to methanol liquid or vapour can cause severe injury or death. Wear appropriate personal protective equipment when using methanol.
Wear personal protective equipment as necessary. WARNING The gas lines may contain toxic or corrosive gas. Contact with such gas can cause death or serious injury. This task must only be performed by Oxford Instruments Plasma Technology personnel or suitably trained maintenance personnel. 2.8.5.5 Check the backing-pump inlet filter Refer to the manufacturer’s manual for information on checking the backing pump inlet...
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Service Manual PlasmaPro ® Procedure Consider loading a dummy wafer or aluminium plate onto the lower electrode to protect it from the cleaning plasma. Close the chamber lid and run a suitable cleaning recipe. Run the cleaning recipe for at least 30 minutes and then inspect the interior of the process chamber again (see Section 2.8.2.5).
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Service Manual PlasmaPro ® Clean the chamber walls and lower electrode using dry lint-free wipes. Figure 2-12 shows the electrode being cleaned. Figure 2-12 Cleaning the lower electrode Clean stubborn deposits from the inside of the process chamber using a suitable abrasive pad (e.g.
Service Manual PlasmaPro ® 11 Clean the machined surface that the lid seals against, using a dry wipe moistened with IPA. Figure 2-13 Cleaning the sealing surface 12 Unlock the process chamber lid (see Section 2.4.2). 13 Shut the chamber lid and evacuate the process chamber. 14 Dispose of any used gloves and wipes.
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Service Manual PlasmaPro ® Tools and equipment No tools and equipment are required to perform this task. Procedure Access the process module page on PTIQ. Click on the icon representing the AMU to be tuned to open the device panel. Figure 2-14 Typical AMU device panel (Cobra tool shown) Click Settings.
Service Manual PlasmaPro ® Click Motor Control. The AMU Motor Control panel opens. Figure 2-16 AMU Motor Control panel Tick Manual for each capacitor on the Motor Control panel. If the capacitor motors are rotating, this action stops them at their present positions. Click Home for each capacitor.
Service Manual PlasmaPro ® There are a number of methods of altering the park position: a) Click Revert to revert back to the factory settings. b) Click Record Park to set the park position to the current position of the capacitor.
Service Manual PlasmaPro ® Adjust the C1 target value to achieve the Magnitude value determined by manually matching the plasma. Adjust the C2 target value to achieve the Phase value determined by manually matching the plasma. Store this set of AMU parameters by clicking on the Save button. 2.8.6.8 Drain the main cooling lines Certain maintenance and repair tasks require the main cooling lines to be opened.
Service Manual PlasmaPro ® 10 Repeat this cycle of turning the gas on and off a few times. 11 Turn off the compressed air or nitrogen supply. 12 Re-connect all the coolant pipes, but do not turn the coolant valves back on. 2.8.6.9 Drain the recirculating system cooling lines Certain maintenance and repair tasks require the recirculating system cooling lines to be...
Service Manual PlasmaPro ® 12 Re-connect all the coolant pipes, but do not turn the coolant valves back on. 13 Inspect the re-circulating fluid and re-use it if its quality is acceptable. 2.8.6.10 Change a viewport You only need to change a viewport if it becomes damaged. Viewports contain protection against RF radiation and ultraviolet light.
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Service Manual PlasmaPro ® Remove the 4 M6 screws that secure the viewport to the process chamber (item 1 Figure 2-17). Figure 2-17 Viewport Remove the UV and RF filter (item 2 in Figure 2-17). Remove the glass window (item 4) and gasket (item 3). Remove the O-ring and carrier (item 5).
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Service Manual PlasmaPro ® 12 Refit the UV and RF filter (item 2) with the mesh side on the outside of the process chamber (see Figure 2-17). Only fit the correct part. 13 Refit the 4 M6 screws that secure the viewport to the process chamber (item 1). 14 Start up the tool.
Service Manual PlasmaPro ® TROUBLESHOOTING This chapter provides information for troubleshooting faults on the PlasmaPro ® TOOL HAZARDS The tool contains several potential hazards. Before troubleshooting on the tool, ensure that all personnel who will be involved have read and understood the health and safety section WARNING of this manual.
Service Manual PlasmaPro ® Entire tool troubleshooting Table 3-1 Tool troubleshooting Symptom Possible Faults and Checks Action The tool does not turn on An EMO button is latched in. Check the EMO buttons. when the main isolator is One or more input phases is missing. Check the three Main Input Live turned on.
Service Manual PlasmaPro ® Pumping module troubleshooting This section contains several tables to cover the various configurations that may be present. Table 3-3 contains troubleshooting information for the pumping module. Table 3-3 Pumping module troubleshooting Symptom Possible Faults and Checks Action Backing pump is not running.
Service Manual PlasmaPro ® General plasma problem troubleshooting This section describes general plasma problems that may occur with any process specific module (PSM). Table 3-4 General plasma problems Symptom Possible Faults and Checks Action The plasma does not strike. The tool has not reached its base pressure. Investigate and rectify the cause.
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Service Manual PlasmaPro ® Table 3-5 AMU troubleshooting information Symptom Possible Faults and Checks Action The magnitude and phase The capacitor park positions are too far from the Referring to Section 2.8.6.6, adjust the capacitors drive to their final match position. capacitor park positions.
Service Manual PlasmaPro ® Gas pod troubleshooting Table 3-6 Gas pod troubleshooting Symptom Possible Faults and Checks Action No pressure rise in the Process chamber is not under vacuum. Evacuate the process chamber. chamber when any gas is The compressed air supply has failed. Check the CDA supply to the gas pod.
Service Manual PlasmaPro ® Table 3-7 Possible causes of partial process failure Possible Cause Recommended Actions A faulty MFC. Check the calibration of the MFCs (see Operator Manual The process pressure is incorrect or Fault-find the APC, MFCs and pumping system. is varying.
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Service Manual PlasmaPro ® DECOMMISSIONING This chapter provides guidance on decommissioning all variants of the PlasmaPro ® tool prior to moving it to another location or disposing of it. The chapter also provides guidance on tool disposal. The guidance contained within this chapter is of a general nature. You must customise the exact detail of any decommission procedure to suit your site and installation.
Service Manual PlasmaPro ® Decommissioning the tool 4.2.1 General considerations for shutting the tool down The method used for shutting the tool down will vary depending on whether the tool is to be moved and re-installed, stored, or disposed of. In general the following items must be considered: The length of time the tool is to be shut down.
Service Manual PlasmaPro ® Operate the valve to vent trapped compressed air from the tool. AIR DUMP Turn off and lockout the main tool isolator. 4.2.3 Disconnecting the services Ensure that all covers and panels are fitted to the tool. Attach notices to the tool indicating that the tool is not ready for service.
Dismantling the tool components It is the customer’s responsibility to ensure that all items are removed, transported and stored in a safe manner. Oxford Instruments Plasma Technology supplies support frames for certain items, but is the customer’s responsibility to ensure the frames are adequate for the action that is to be performed.
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Service Manual PlasmaPro ® Dispose of the remainder of the tool in accordance with local and national safety and environmental regulations. Table 4-2 Information to aid recycling or disposal of tool components Assembly Materials of Construction Likely to be Contaminated Process chamber Aluminium Process chamber furniture...
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Service Manual PlasmaPro ® GLOSSARY This glossary explains the acronyms, abbreviations and special terms used in this Instructions for Use Manual. The entries are presented in alphanumeric order. The glossary includes a list of references to the documents referred to in this manual. List of references SEMI S2 Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment.
Service Manual PlasmaPro ® Acronyms and abbreviations Automatic matching unit. Automatic pressure controller. BCGA British Compressed Gases Association. Controller area network (a computer network protocol and bus standard). Common base unit. Clean dry air (compressed air). Conformance Europe (a conformity mark that certifies a product has met European Union health, safety, and environmental requirements.
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Service Manual PlasmaPro ® Other equipment manufacturer. Optical emission spectroscopy. OIPT Oxford Instruments Plasma Technology. PDL PCB The AMU control board (PDL is a legacy term). Plasma etch. PECVD Plasma enhanced chemical vapour deposition. Perfluoroalkoxy polymer. PFPE Perfluorinated polyether. Proportional integral derivative (a type of electronic control loop).
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