Oxford Instruments PlasmaPro 80 Manuals

Manuals and User Guides for Oxford Instruments PlasmaPro 80. We have 1 Oxford Instruments PlasmaPro 80 manual available for free PDF download: Service Manual

Oxford Instruments PlasmaPro 80 Service Manual

Oxford Instruments PlasmaPro 80 Service Manual (64 pages)

Brand: Oxford Instruments | Category: Laboratory Equipment | Size: 4 MB

Table of Contents

Table of Contents
3
Preface
5
Customer Support and Training
5
Tool Identification
6
Health and Safety Information
6
Intended Users
6
Statement of Intended Use of the Tool
7
Statement of Non-Intended Use of the Tool
7
Hyperlinks
8
Disclaimers
8
Acknowledgements
8
Acronyms, Abbreviations and Special Terms
8
Certification
9
Document History
10
System Description
11
Gas Pod
11
Close-Coupled Gas Pod
11
Automatic Matching Unit
11
Scheduled Maintenance
13
Locking out Tool Services
13
Safety Information
13
Tools and Cleaning Materials
13
Maintenance Access
14
Locking the Chamber Lid
14
Unlocking the Process Chamber Lid
15
Consumable Parts
16
Parts that Are Critical for Operator Safety
17
Maintenance Schedule
19
Maintenance Tasks
22
Recommended Weekly Tasks
22
Inspect the Backing Pump Exhaust Filter
22
Inspect the Oil Filter of the Backing Pump
23
Check the Oil Level in the Backing Pump
23
Recommended Monthly Tasks
24
Check Vacuum O-Rings
24
Visually Inspect the Chamber Exterior
26
Inspect for Coolant Leaks
26
Check the Tool's Safety Interlocks
26
Inspect the Chamber and Lower Electrode
29
Recommended Three Monthly Tasks
30
Inspect the Compressed Air and Nitrogen Systems
30
Clean the Condenser on the Heater/Chiller Unit
30
Defrost the Chiller
31
Check the Re-Circulating Fluid Level
31
Check the Cooling Connections
31
Lubricate the Turbo-Pump Bearings
31
Recommended Six Monthly Tasks
32
Inspect the Capacitance Manometer Gauge
32
Service the Penning Gauge
33
Recommended Yearly Tasks
34
Change the Cooling System Filters
34
Change the Recirculating System Cooling Fluid
35
Run MFC Calibration Checks
35
Change the Gas-Line Filters
35
Check the Backing-Pump Inlet Filter
35
Unscheduled Maintenance Tasks
35
Change the Oil in the Backing Pump
35
Clean the Process Chamber and Lower Electrode
35
Change Gas Bottles
38
Home the AMU Capacitors
38
Adjust the AMU Amplifier Gain Values
40
Adjust AMU Capacitor Park Positions
40
Adjust AMU Capacitor Target Values
41
Drain the Main Cooling Lines
42
Drain the Recirculating System Cooling Lines
43
Change a Viewport
44
Troubleshooting
47
General Troubleshooting Advice
47
Gas Pod Troubleshooting
47
Entire Tool Troubleshooting
48
Common Base Unit Troubleshooting
48
Pumping Module Troubleshooting
49
Recovering from a Vacuum Switch / Low Pressure Switch Alarm
49
General Plasma Problem Troubleshooting
50
AMU Troubleshooting
50
Gas Pod Troubleshooting
52
Process Troubleshooting
52
Partial Process Failure
52
Total Process Failure
53
Datalog Files
53
Decommissioning
55
Health and Safety Considerations
55
Decommissioning the Tool
56
General Considerations for Shutting the Tool down
56
Shutting the Tool down
56
Disconnecting the Services
57
Decontaminating the Tool
58
Dismantling the Tool Components
58
Disposal of the Tool
58
Glossary
61
List of References
61
Acronyms and Abbreviations
62

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