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LEYBOLD SCREWLINE SP 630 F Operating Instructions Manual

Dry compressing screw vacuum pump
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SCREWLINE SP 630 F
Dry Compressing Screw Vacuum Pump
ATEX category 2 inside (i) and 3 outside (o)
Operating instructions 300701214_002_C2
Part numbers
117111V11,
117112V11
Original instructions

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Summary of Contents for LEYBOLD SCREWLINE SP 630 F

  • Page 1 SCREWLINE SP 630 F Dry Compressing Screw Vacuum Pump ATEX category 2 inside (i) and 3 outside (o) Operating instructions 300701214_002_C2 Part numbers 117111V11, 117112V11 Original instructions...
  • Page 2 Copyright notice ©Leybold GmbH. All rights reserved. Published: 5/15/2024 Trademark credit Leybold and the Leybold logo are trademarks of Leybold GmbH, Bonner Strasse 498, D-50968 Cologne. Disclaimer The content of this manual may change from time to time without notice.
  • Page 3 7.4.1  Motor protection......47 7.4.2  Star/Delta start-up circuit......49 300701214_002_C2 - © Leybold    3...
  • Page 4 9.8  Function test for the Ignition protection system..80 9.9  Checking the clearance between fan and cover..83 9.10  Inspection of the rotors and the pump housing..84 4    300701214_002_C2 - © Leybold...
  • Page 5 13.1  Table: Accessories......99 13.2  Table: Consumables and Original Parts....99 300701214_002_C2 - © Leybold    5...
  • Page 6 Figure 26. Electrical connections at the purge gas valve..63 Figure 27. Connection of the connector....64 6    300701214_002_C2 - © Leybold...
  • Page 7 Figure 41. Transport and connection components as well as inspection locations on the SP 630 F....100 300701214_002_C2 - © Leybold    7...
  • Page 8 Accessories......99 Table 19: Consumables and original parts....99 8    300701214_002_C2 - © Leybold...
  • Page 9 NOTICE: Information about properties or instructions for an action which, if ignored, will cause damage to the equipment. We reserve the right to change the design and the stated data. The illustrations are not binding. 300701214_002_C2 - © Leybold    9...
  • Page 10 ▪ The competency of the person shall be relevant to the type of protection used for this pump and accessories. When dealing with an explosive atmosphere, knowledge of the applicable guidelines and standards is mandatory. 10    300701214_002_C2 - © Leybold...
  • Page 11 Risk of injury or damage to equipment. Identifies a situation that   could result in an explosion. Warning - Toxic material Risk of injury or damage to the environment. Identifies a source of   toxic gases, liquid or material. 300701214_002_C2 - © Leybold    11...
  • Page 12 Risk of damage to equipment. Specifies a maximum angle that must be maintained to ensure safe lifting of equipment. Warning - Pressurised Risk of injury or damage to equipment. Identifies equipment contain‐ ing pressurised gases or liquids. 12    300701214_002_C2 - © Leybold...
  • Page 13 The discharge line must not be blocked or restricted. Before commissioning the pump, open all shutoff devices or valves in the discharge line. In the case of processes involving much condensate, we recommend the installation of a condensate separator in the discharge line. 300701214_002_C2 - © Leybold    13...
  • Page 14 This equally applies to any emergency shutdowns. After having removed the fault cause, the pump must be switched on manually again. 14    300701214_002_C2 - © Leybold...
  • Page 15 WARNING: CORROSIVE SUBSTANCES Risk of injury or damage to equipment. Identifies the presence of corrosive gases, liquids or materials. WARNING: FLAMMABLE MATERIAL Risk of fire. Identifies possible sources of flammable gases, liquids or materials. 300701214_002_C2 - © Leybold    15...
  • Page 16 Firmly seal off the pump. When shipping the decontaminated pump for servicing please also indicate the type of hazard. For this refer to.Service on page 98 When shipping contaminated pumps which require approval by the authorities, note the applicable regulations regarding packaging and shipping. 16    300701214_002_C2 - © Leybold...
  • Page 17 The intake screen does not replace a filter. Prevent the intake of particles from the side of the process by fitting suitable filters. Upstream filters protect the pump against damage to the pump chamber. 300701214_002_C2 - © Leybold    17...
  • Page 18 15. If condensable vapours have been pumped, the pump should before switching off be purged with an inert gas or air (depending on the specific application) for approximately 15 minutes. This process should also be run before cleaning the pump chamber. 18    300701214_002_C2 - © Leybold...
  • Page 19 For this refer to Switching Off/Shutting down on page Note: Pressures given in bar or mbar are absolute values. If exceptionally a gauge pressure is meant, a "g" is added (bar(g) = bar (gauge) = bar overpressure) 300701214_002_C2 - © Leybold    19...
  • Page 20 Zone 1. Note: The pumps have not been designed to pump liquids. Suitable protection devices must be provided. 20    300701214_002_C2 - © Leybold...
  • Page 21 II 3(3)D Ex tc [Ex ic Dc] IIIB T120 °C Dc (+10 °C ≤ Ta ≤ +40 °C) Do not disconnect under load / Nicht unter Spannung tren‐ nen Clean with a slightly moistened cloth / Nur mit einem feuchten Tuch reinigen 300701214_002_C2 - © Leybold    21...
  • Page 22 40 °C. Ex ec Ex "e" device protection through increased safety Table 2. Relationship between equipment protection levels (EPL) and zones ISO 80079-36 Directive 94/9/EG IEC 60079-10-X Equipment Group Equipment category Zones group Not applicable 22    300701214_002_C2 - © Leybold...
  • Page 23 – Basic method and requirements). Based on this assessment the ignition sources listed in the following were determined which may occur during operation of the screw pump: ▪ Hot surfaces ▪ 300701214_002_C2 - © Leybold    23...
  • Page 24 In those cases where dust deposits form, measures must be introduced to remove these on a regular basis. All electrical components need to be connected in consideration of the standard EN 60079-14. 24    300701214_002_C2 - © Leybold...
  • Page 25 The values output by the temperature sensor are monitored by the ignition source monitoring system (SP-Guard). The outer surface temperature will, owing to the motor coil, attain temperatures below 160 °C. The PTC integrated in the motor coil must be wired accordingly. 300701214_002_C2 - © Leybold    25...
  • Page 26 Operating Instructions of the filter. Chemical reaction Without the introduction of special measures the screw pump must not be used in connection with reactive or corrosive gases which may cause an exothermal chemical reaction. 26    300701214_002_C2 - © Leybold...
  • Page 27 Description 4  Description 4.1  Design and function The SCREWLINE SP 630 F is a dry compressing screw-type vacuum pump capable of a maximum pumping speed of 630 m · h It has been developed specifically for the special requirements of industrial applications. Thus the ruggedness of the pump was a main design criterion.
  • Page 28 In this way the power requirement of the pump is reduced and less heat needs to be dissipated. 28    300701214_002_C2 - © Leybold...
  • Page 29 Figure 1. Principle of operation of a screw pump Casing Direction of rotation of the shafts Discharge side Direction of flow Rotors (screws) Figure 2. Compression principle and the direction of pumping action within a screw pump 300701214_002_C2 - © Leybold    29...
  • Page 30 Description Figure 3. pV diagrams of screw pumps without inner compression with inner compression against the face side of the pump chamber with inner compression along the rotor (SCREWLINE) 30    300701214_002_C2 - © Leybold...
  • Page 31 Temperature sensor in the motor coil °C 155 +5 (PTC) Operating mode S1 (continuous operation) Connecting flanges Intake flange and exhaust flange EN 1092-2 - PN 6 - DN 100 compatible with EN 1092-2 - PN 10 - DN 100 300701214_002_C2 - © Leybold    31...
  • Page 32 (at a supply temperature of 5 to 25 °C ) Cooling air/water (approx. 70% / 30%) (at a supply temperature of 25 to 35 °C) 1) Applies to room temperatures of 20 - 25 °C 32    300701214_002_C2 - © Leybold...
  • Page 33 Type of protection IEC 60259 IP 65 PLC High approx. VCC -1 V PLC output levels PLC Low approx. GND +1 Current, continuous < 40 mA Max. power loss 5 W (all switching outputs added) Current rating 40 mA 300701214_002_C2 - © Leybold    33...
  • Page 34 5 to 6.5 mm Electrical connector Festo G 1/8 - inside thread Connection thread/gas supply resp. 6 mm plug connection Purge gas pressure to be set up 2.5 bar Purge gas volume flow 26 Std. l/min 34    300701214_002_C2 - © Leybold...
  • Page 35 Technical data Figure 5. Pumping speed curve for the SP 630 F at 50 and 60 Hz 300701214_002_C2 - © Leybold    35...
  • Page 36 ▪ The required amount of gear oil (is supplied separately). ▪ ▪ An intake screen preventing the ingress of small objects into the intake ▪ of the pump ▪ 1 crane eye for transporting the pump. ▪ 36    300701214_002_C2 - © Leybold...
  • Page 37 SP-Guard may then be reset to the monitoring mode using the reset key. The service technician has the option of reading the most recently saved measured values from the internal memory of the SP-Guard. This information will help to analyse the reasons for the specific failure. 300701214_002_C2 - © Leybold    37...
  • Page 38 Technical data Figure 7. SP-Guard Display Key for display switchover and reset Connection for the sensor wire Connection for connection cable harness Plug protection Figure 8. Schematic depicting the operating principle of the monitoring system 38    300701214_002_C2 - © Leybold...
  • Page 39 The gas ballast valve is used for the purpose of avoiding condensation within the pump. Purge gas facility Purge gas prevents that process gas escapes via the two shaft seals to the environment and protects components and seals against corrosion. 300701214_002_C2 - © Leybold    39...
  • Page 40 With the purge vent kit installed, the oil collects in an aluminium collecting vessel. Table 10. Available pump versions: overview Part No. Mains frequency Pump versions Water cooled, 117111V11 50 Hz with SP-Guard, 117112V11 60 Hz solenoid gas ballast and purge gas for sealing 40    300701214_002_C2 - © Leybold...
  • Page 41 Do not place the desiccant, without the intake screen, directly into the inlet flange. When shelving the pump for prolonged periods, drain out of the oil from the pump. Package in the pump air-tight in polyethylene foil. 300701214_002_C2 - © Leybold    41...
  • Page 42 For this reason before transporting or storing the pump drain out the water. For this, refer to Switching Off/Shutting down on page 73. 42    300701214_002_C2 - © Leybold...
  • Page 43 Thereafter lock the hexagon nuts at the disc shaped feet against the bottom trough. 7.1.2  Air cooling and pump covers CAUTION: WEAR HEARING PROTECTION Risk of injury. Wear appropriate hearing protection when performing the task. 300701214_002_C2 - © Leybold    43...
  • Page 44 From this side all maintenance and installation work can be done. For installation locations over 3000 m above sea level please consult us. 7.2  Conforming utilisation Refer to Impact of the ATEX Directive on page 20 44    300701214_002_C2 - © Leybold...
  • Page 45 From the side of the system it must be ensured that the screw pump will only pump vapours which do not contain spark initiating solids. Otherwise an additional dust filter having a filter mesh of 40 µm max. must be installed. 300701214_002_C2 - © Leybold    45...
  • Page 46 Emergency shutdown An EMO switch with the corresponding mains power disconnecting facility needs to be provided from the side of the customer’s system so that the screw pump is completely separated from the mains power supply. 46    300701214_002_C2 - © Leybold...
  • Page 47 The number of operating hours of the pump is acquired through the SP- Guard. The local connection conditions will possibly necessitate means for the purpose of reducing the surge currents upon switching the pump on. 300701214_002_C2 - © Leybold    47...
  • Page 48 Installation Figure 10. Examples of motor protection circuits Protection arrangement ▪ Motor protection switch with thermal and solenoid overcurrent release ▪ (class 20). Protection against: ▪ Overload during continuous operation ▪ ▪ Seized rotor ▪ 48    300701214_002_C2 - © Leybold...
  • Page 49 Here also a motor protection switch for heavy run-up (class 20) should be used. 7.4.3  Soft start In order to reduce the current taken up from the mains supply, the supply voltage to the motor may be electronically controlled during the start-up time. 300701214_002_C2 - © Leybold    49...
  • Page 50 The mains supply must match the mains power rating of the motor. In the connection area expect temperatures of up to 90 °C. The connection line must be rated for these temperatures. Figure 12. Voltage/current diagram 50    300701214_002_C2 - © Leybold...
  • Page 51 The direction of rotation should be checked with two persons. Vent in the intake line through correspondingly switched valves. Open the fan housing. Let the pump run up briefly (for approximately 1 second) and then immediately switch it off again. 300701214_002_C2 - © Leybold    51...
  • Page 52 Switching frequency 8 kHz / U/f control method without sine filter. To enable operation with a comparable converter, please observe the following values: 50 Hz 400 V Minimum frequency Nominal frequency Frequency [Hz] Output current [A] 21.7 52    300701214_002_C2 - © Leybold...
  • Page 53 EMC-compliant earth connections of frequency converter and pump. Please also observe the operating instructions for the frequency converter. Figure 15. SP 630 F - Connection of the cooling water SP-Guard Note the lettering Return Supply Quick locks for opening the fan cover 300701214_002_C2 - © Leybold    53...
  • Page 54 Aggressive carbon dioxide None, not detectable Chloride < 100 mg/l Sulphate < 150 mg/l Nitrate ≤ 50 mg/l Iron < 0.2 mg/l Manganese < 0.1 mg/l Ammonium < 1.0 mg/l Free chlorine < 0.2 mg/l 54    300701214_002_C2 - © Leybold...
  • Page 55 The signals from the SP-GUARD need to be processed through a system controller (PLC). At water temperatures over 25 °C the thermostat will no longer be able to maintain a constant oil temperature. Under such circumstances the air cooling share will increase. 300701214_002_C2 - © Leybold    55...
  • Page 56 IEC 60364-4-41 (DIN VDE 0100-410) (PELV/ SELV). In order to protect the 24 V power supply line of the SP-Guard, a suitable line protector must be installed, for example, SITOP SELECT (6EP19612BA00) from the company Siemens. 56    300701214_002_C2 - © Leybold...
  • Page 57 Run to unused terminal Run to unused terminal blue Run to unused terminal black Run to unused terminal violet 0 V (GND for PLC controller) grey/pink Switching output S1 (warning) red/blue Switching output S2 (error) 300701214_002_C2 - © Leybold    57...
  • Page 58 The outputs are protected by means of semiconductor fuses. The failure messaging output S2 is active (low) until being reset. The warning messaging output S1 remains active as long as the warning threshold is exceeded (no saving of the status). 58    300701214_002_C2 - © Leybold...
  • Page 59 °C Warning limit, gas temperature °C Failure limit, gas temperature 7.7  Connecting the Solenoid Gas Ballast Valve Connect the valve as shown in Figure: Gas ballast valve on page 60 . The valve is normally closed. 300701214_002_C2 - © Leybold    59...
  • Page 60 Installation Figure 21. Gas ballast valve Solenoid valve 60    300701214_002_C2 - © Leybold...
  • Page 61 6.75 Nm (60 in-lb). ▪ Use screw to attach the cable plug to the coil. Observe tightening torque ▪ of max. 1.0 Nm (8.8 in-lb). Note: In the case of an ATEX connection, comply with IP 65 requirements. 300701214_002_C2 - © Leybold    61...
  • Page 62 When using nitrogen as the purge gas, sufficient ventilation of the room in which the pump has been installed must be ensured. Otherwise there exists the risk of suffocation due to inadequate oxygen. 62    300701214_002_C2 - © Leybold...
  • Page 63 Pressure connection for purge gas - G 1/8" inside thread, respectively 6 mm plug-in connector. Manual drain for condensate Figure 26. Electrical connections at the purge gas valve Purge gas valve from Festo, IP 65 Electrical connection to be provided from the side of the customer’s system 300701214_002_C2 - © Leybold    63...
  • Page 64 IP 65 requirements. The valve is of the normally closed type. In the control arrangement needs to be implemented such that before switching on the screw pump, the purge gas valve opens as otherwise the SP-Guard will output an error message. 64    300701214_002_C2 - © Leybold...
  • Page 65 Clean the oil fill port and screw the oil fill plug in again using a gasket which is in perfect condition. The oil fill port must be sealed air-tight. For checking the oil level and for changing the oil refer to Checking the oil level on page 76. 300701214_002_C2 - © Leybold    65...
  • Page 66 6. Oil level mark ”Maximum” 7. Oil level mark ”Minimum” Pump not in operation Oil level Pump operating Oil level between maximum (for initial filling) maximum and minimum Pump operating Oil level at mini‐ mum (top up oil!) 66    300701214_002_C2 - © Leybold...
  • Page 67 Figure 30. Unlocking the closure screws and removing the divided cover section Rear cover section Right cover section on the service side Closure screws (9 pieces) Left cover section on the service side Air discharge panel 300701214_002_C2 - © Leybold    67...
  • Page 68 In the case of process interruptions preferably operate the pump with the inlet shut off, since during operation at ultimate pressure power consumption will be minimal. The pump will have attained its operating temperature about 30 minutes after starting. 68    300701214_002_C2 - © Leybold...
  • Page 69 Press the pushbutton - long (3 seconds), and then short twice. A confirmation of the resetting process will be indicated on the display for approximately 5 seconds. 300701214_002_C2 - © Leybold    69...
  • Page 70 If required, a separate filter must be fitted upstream. It must be ensured that the pressure does not exceed P + 200 mbar and that the temperature does not exceed 60 °C. Max. gas ballast consumption is at approximately 26 Std. m 70    300701214_002_C2 - © Leybold...
  • Page 71 SP-Guard was wired in agreement with its conforming utilisation with the motor controller and when processing the signal accordingly. Moreover, a message is indicated on the display. 300701214_002_C2 - © Leybold    71...
  • Page 72 ▪ Cleaning the intake screen ▪ ▪ Checking the dust filter (optional) and cleaning as required ▪ We recommend keeping a log on the regular checks. Stop operating the pump when the SP-Guard displays a warning. 72    300701214_002_C2 - © Leybold...
  • Page 73 Transport and storing on page 41. For this please contact our for advice. Switch off ▪ Power supply for the SP-Guard ▪ ▪ Gas ballast ▪ ▪ Purge gas. ▪ 300701214_002_C2 - © Leybold    73...
  • Page 74 ▪ Again lock the fan cover in place. ▪ If the SP 630 F is stored in an environment which is not free of frost, then the heat exchanger must also be emptied. 74    300701214_002_C2 - © Leybold...
  • Page 75 After having worked on the pump chamber this connection must be checked. For this use a suitable measuring instrument and measure the resistance of the connection which must be less than 100 Ohm. Clean the SP-Guard with a damp cloth only. 300701214_002_C2 - © Leybold    75...
  • Page 76 67. Unscrew the oil drain plug and the oil fill plug and drain out the oil. See Figure: Oil level, oil sight glass and junction box (pump with covers removed) on page 66. 76    300701214_002_C2 - © Leybold...
  • Page 77 Regularly check the oil cooler to see if it has accumulated dirt. The interval between the regular checks will depend on the ambient conditions and the process in each case and needs to be defined based on experience gained during operation. 300701214_002_C2 - © Leybold    77...
  • Page 78 The dust filters which are installed upstream of the pump need to be checked regularly for contamination and cleaned as required. Figure 33. Opened fan cover version with a water cooler Water filter Heat exchanger Closure screw Filter screen O-ring 78    300701214_002_C2 - © Leybold...
  • Page 79 The air filter serves the purpose of filtering dust particles out of the air so that only clean air can enter the pump chamber. The air filter should be subjected to maintenance within regular intervals. 300701214_002_C2 - © Leybold    79...
  • Page 80 SP-Guard. Operation is okay when at vibration values above 100 digits the warning message is output and when in the case of vibration values above 150 digits the pump is shut down via the system control. 80    300701214_002_C2 - © Leybold...
  • Page 81 Figure: Checking fan clearance on page 83. Figure 35. Checking the purge gas flow Purge gas unit with pressure reducer Reference pressure Flow meter with manual control valve 300701214_002_C2 - © Leybold    81...
  • Page 82 Cross a pressure of over +200 mbar can be measured. Alternatively a pressure of +200 mbar (rel.) must be set up at the Cross. During this test, the flow must not exceed 4 Std. l/min. 82    300701214_002_C2 - © Leybold...
  • Page 83 In order to check fan clearance, open the cooler housing and only unscrew the guard. The clearance between fan and feed nozzle must be at least 3 mm measured around the entire circumference. Figure 37. Checking fan clearance 300701214_002_C2 - © Leybold    83...
  • Page 84 To replace, the metal protection mesh with cup must be unscrewed from the pressure reducer. Unscrew the mounting component and detach the used filter cartridge. Fit the parts again with the new filter cartridge. 84    300701214_002_C2 - © Leybold...
  • Page 85 100 Ohm. The electrically conducting parts must be connected to each other. Such connections must be re-established and tested after repair and maintenance work (see Figure: Connecting points for potential equalisation on page 88). 300701214_002_C2 - © Leybold    85...
  • Page 86 Preferably test rivet head, folded edge bottom side at the centre (the connection Air discharge panel for the potential equalisation line is not suited as a test point). Fan box door Cooler discharge pipe next to PE clamp 86    300701214_002_C2 - © Leybold...
  • Page 87 Alternatively: unpainted point on the cover panel. Cover half on discharge See F side, intake flange side Cover half on non-dis‐ See F charge side Bottom trough M 16 hexagon nut, (see figure) 300701214_002_C2 - © Leybold    87...
  • Page 88 V1-V4 V1-V7 V2-V5 V3-V5 V4-V6 V8-V9 9.15  Empty the collecting vessel of the purge vent kit WARNING: TOXIC MATERIAL Risk of injury or damage to the environment. Identifies a source of toxic gases, liquid or material. 88    300701214_002_C2 - © Leybold...
  • Page 89 Again install the collecting vessel in the reverse order. 9.16  Full service Every 40,000 operating hours or every five years (depending which comes first) a full service must be performed. The full service can only be performed by authorised service centres. 300701214_002_C2 - © Leybold    89...
  • Page 90 Check water filter EK 110000813 Clean as required or replace In addition, replace the axial bearings every 18 000 operating hours. This work must be left to personnel specifically trained by us. Required spare parts: EK 110000792 90    300701214_002_C2 - © Leybold...
  • Page 91 Maintenance EK 110000793 EK 110000794 EK 110000813 300701214_002_C2 - © Leybold    91...
  • Page 92 Pump housing temperature Use gas cooling. Maintenance personnel has exceeded the error Check and remedy the combination of the following threshold. causes. Ambient temperature below 40 °C oil temp, exhaust pressure and gas admission temperature too high 92    300701214_002_C2 - © Leybold...
  • Page 93 Motor protection switch incor‐ Correctly set up motor protection switch. Electrician rectly set up. Repair pump. Supply voltage does not Change links according to wiring diagram. match motor specs Defective motor. Service Pump has seized. 300701214_002_C2 - © Leybold    93...
  • Page 94 Leave the pump to run warm (> 1 h). Pumping speed of the Clogged intake screen in the Clean intake screen. pump is too low. intake port. 94    300701214_002_C2 - © Leybold...
  • Page 95 Pump is extremely loud. Bearing damage. Repair pump. Service Thick particle deposits. Clean pump, respectively perform maintenance. Service or trained staff Defective silencer. Repair silencer. High gas throughput with the Install discharge line or silencer. discharge line open, without silencer. 300701214_002_C2 - © Leybold    95...
  • Page 96 No need for action. box. tion. Purge gas gauge does Valve has not switched. Check valve, if required connect correctly. Electrician not indicate any pres‐ Purge gas supply has failed. Ensure a proper purge gas supply. sure. 96    300701214_002_C2 - © Leybold...
  • Page 97 This waste must be disposed of as special waste. European, national and regional regulations concerning waste disposal need to be observed. Waste must only be transported and disposed of by an approved waste disposal vendor. 300701214_002_C2 - © Leybold    97...
  • Page 98 HS1, fill in the electronic HS2 form, print it, sign it, and return the signed copy to us. NOTICE: If we do not receive a completed form, your equipment cannot be serviced. 98    300701214_002_C2 - © Leybold...
  • Page 99 2 O-rings, intake screen including O-rings Maintenance kit Level 3, SP 630 for axial bearing EK110000794 replacement, 2 O-rings, 6 gaskets (Cu), 2 angular ball bear‐ ings Additional spare parts are available from our service offices. 300701214_002_C2 - © Leybold    99...
  • Page 100 Figure 41. Transport and connection components as well as inspection locations on the SP 630 F Intake port Crane eye (ring nut) Inspection opening for the oil Fan housing cooler Oil sight glass Exhaust Arrows = Direction of pumping action 100    300701214_002_C2 - © Leybold...
  • Page 101 Technical documentation for the assessment of electrical and electronic products with respect to the restriction of hazardous substances Documentation officer: Leybold GmbH, Herbert Etges, Bonner Straße 498, D-50968 Köln T: +49(0)221 347 0, F: +49(0)221 347 1250 documentation@leybold.com Cologne, October 23th, 2020...
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  • Page 104 Leybold GmbH Bonner Strasse 498 50968 Cologne GERMANY +49-(0)221-347-0 info@leybold.com Pioneering products. Passionately applied. www.leybold.com...

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