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4.3 Nitrogen Flow/Purity Charts
Purity
80 psig (5.5 bar)
(%N
)
Meter Reading
2
99.5
1.7
99.0
3.2
98.0
5.6
97.0
7.4
96.0
9.1
Table: 3
Purity 80 psig (5.5 bar)
(%N2)
Flow rate
99.5
100 SLPM
99.0
155 SLPM
98.0
240 SLPM
97.0
320 SLPM
96.0
395 SLPM
Table: 4
Purity
80 psig (5.5 bar)
(%N2)
Air
Consumption
99.5
27 SCFM
99.0
29 SCFM
98.0
32 SCFM
97.0
35 SCFM
96.0
39 SCFM
Table: 5
4.4 Pressure Application Adjustments
Use the following procedure for start-up and adjustment of the system. (Note: In elevated
pressure applications, the customer should install a flow controller downstream from the
application, as detailed in the Installation section of this manual.)
a.
Open the (customer installed) inlet air gate valve.
b.
Adjust the (customer installed) inlet air pressure regulator until the Operating Pressure
gage (see figure 1) shows the pressure required to deliver nitrogen at the desired flow
rate (per Tables 3 and 4.)
c.
Turn the flow control valve to its fully open position.
90 psig (6.2 bar)
100 psig (6.9 bar)
Meter Reading
Meter Reading
2
2.3
3.8
4.3
6.2
6.8
8.2
8.9
9.6
90 psig (6.2 bar)
100 psig (6.9 bar)
Flow rate
Flow rate
120 SLPM
140 SLPM
185 SLPM
210 SLPM
280 SLPM
320 SLPM
375 SLPM
415 SLPM
455 SLPM
90 psig (6.2 bar)
100 psig (6.9 bar)
Air Consumption
31 SCFM
35 SCFM
33 SCFM
37 SCFM
37 SCFM
43 SCFM
41 SCFM
46 SCFM
43 SCFM
110 psig (7.6 bar)
Meter Reading
2.7
4.7
7.2
9.0
110 psig (7.6 bar)
157 SLPM
235 SLPM
355 SLPM
455 SLPM
110 psig (7.6 bar)
Air Consumption
Air Consumption
39 SCFM
42 SCFM
47 SCFM
51 SCFM
8
120 psig (8.3bar)
Meter Reading
3.0
5.1
7.6
120 psig (8.3bar)
Flow rate
Flow rate
170 SLPM
260 SLPM
390 SLPM
120 psig (8.3bar)
Air Consumption
42 SCFM
46 SCFM
52 SCFM
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