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Summary of Contents for Edwards nXR30i
- Page 1 Dry Vacuum Pumps nXR30i, nXR40i, nXR60i, nXR90i and nXR120i INSTRUCTION MANUAL A90301880_C Original instructions...
- Page 2 Copyright notice ©Edwards Limited 2021. All rights reserved. Trademark credit Edwards and the Edwards logo are trademarks of Edwards Limited, Innovation Drive, Burgess Hill, West Sussex RH15 9TW. Disclaimer The content of this manual may change from time to time without notice. We accept no liability for any errors that may appear in this manual nor do we make any expressed or implied warranties regarding the content.
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Page 3: Table Of Contents
6.7 Operational modes..........34 A90301880_C Page 3 05/2021 - ©Edwards Limited... - Page 4 11.5 Mounting kit........... 48 A90301880_C Page 4 05/2021 - ©Edwards Limited...
- Page 5 Figure 6: nXR30i performance curve........
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Page 6: Safety And Compliance
Information about properties or instructions for an action which, if ignored, will cause damage to the equipment. We reserve the right to change the design and the stated data. The illustrations are not binding. Keep the instructions for future use. A90301880_C Page 6 05/2021 - ©Edwards Limited... -
Page 7: Safety Symbols
Earth point for electrical equipment. WEEE symbol The equipment must be discarded carefully. Obey local and national reg- ulations for disposal of this equipment. Warning - Use protective equipment Use appropriate protective equipment for the task. A90301880_C Page 7 05/2021 - ©Edwards Limited... -
Page 8: General Description
The system is air cooled by a fan installed internally in the pump enclosure. The pump has a thermal protection device that will stop the motor if a thermal overload, for example in high ambient temperature occurs. You must restart the pump after the pump is cooled down. A90301880_C Page 8 05/2021 - ©Edwards Limited... -
Page 9: Figure 1 Nxri Pumps
To use the pump for a gas that is not listed, contact the supplier for advice. Failure to contact the supplier can invalidate the warranty of the pump. Do not use the pump for aggressive or corrosive gases. Figure 1 nXRi pumps A90301880_C Page 9 05/2021 - ©Edwards Limited... -
Page 10: Pump Controller
An auxiliary control connection on the rear panel controls an optional inlet valve. This inlet valve can be operated in parallel with the normal pump output signal. Refer to Figure: nXRi pumps, (7). The valve is usually closed and: A90301880_C Page 10 05/2021 - ©Edwards Limited... -
Page 11: Logic Interface
Screw connection, right angle SACC-M 8MR-4CON-M-SW Solder connection, right angle SACC-M 8MR-4CON-M 2.4 Logic interface The logic interface is designed to support the serial control, the parallel control, monitor and operate through one connector. A90301880_C Page 11 05/2021 - ©Edwards Limited... -
Page 12: Auto-Run
Figure: Interface control panel. ▪ remotely, through serial communications or digital and analogue process control (parallel), via the 15-way D-type interface connector. Refer to Connection for remote control and monitoring on page 24. A90301880_C Page 12 05/2021 - ©Edwards Limited... -
Page 13: Technical Data
Overall dimensions (L x W x H) 478x217x301 494 x 217 x 301 mm Maximum tilt angle for operation ± 5° Maximum tilt angle for transport 30° Nominal rotational speed 15000 rpm Outlet connection NW25 A90301880_C Page 13 05/2021 - ©Edwards Limited... -
Page 14: Performance
< 0.1 Leak tightness (static) mbar l/s < 1x10 * Values for maximum pumping speed are obtained with the inlet strainer. The pumping speed is measured at standard ambient temperature and pressure. At higher A90301880_C Page 14 05/2021 - ©Edwards Limited... -
Page 15: Figure 5 Nxr120I Application Guidelines For Chamber Pump-Down
Measured A-weighted emission sound pres- sure level, L at 15 mbar at inlet 1 m from the 57.0 dB(A) pump in free space Uncertainty, K 2.5 dB(A) Product tested to ISO standard 3744:2010 A90301880_C Page 15 05/2021 - ©Edwards Limited... -
Page 16: Figure 6 Nxr30I Performance Curve
A90301880_C - Technical data Figure 6 nXR30i performance curve 1200 1000 nXR30i 0.01 1000 Pressure (mbar) 1. Pumping speed with gas ballast 1. Pumping speed with gas ballast 2. Pumping speed without gas ballast 2. Pumping speed without gas ballast 3. -
Page 17: Materials Exposed To Gases Pumped
If the application load exceeds the maximum power available, pump rotational speed will be reduced. Refer to Figure: Speed vs Power graph. At lower rotational speeds pumping performance will be A90301880_C Page 17 05/2021 - ©Edwards Limited... -
Page 18: Figure 11 Speed Vs Power Graph
10 A, 250 V a.c. rms 120 V 15 A, 250 V a.c. rms Japan 100 V 15 A, 250 V a.c. rms Figure 11 Speed vs Power graph 200V/100VRMS 190V/95VRMS 180V/90VRMS 1000 1200 Maximum power (W) A90301880_C Page 18 05/2021 - ©Edwards Limited... -
Page 19: Installation
WARNING: DAMAGED PUMP Risk of injury to people or damage to equipment. Do not use the pump if it is damaged. Failure to do so can result in injury to people and/or damage to equipment. A90301880_C Page 19 05/2021 - ©Edwards Limited... -
Page 20: Mechanical Installation
Risk of injury or damage to equipment. Make sure that the maximum angle between the paired slings used to lift the system is 45 degrees. Increased angle could compromise the lifting eye integrity. A90301880_C Page 20 05/2021 - ©Edwards Limited... - Page 21 To move the pump: Use suitable lifting equipment attached to lifting eyebolts (Figure: nXRi pumps, (14)) to move the dry pump system close to its final operating position. Refer to Table: Mechanical data for pump mass. A90301880_C Page 21 05/2021 - ©Edwards Limited...
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Page 22: Leak Test The System
WARNING: ELECTRICAL CONNECTION Risk of electric shock. The electrical installation must be done by a qualified person. Always make the electrical connections to the pump after the pump has been installed on the vacuum system. A90301880_C Page 22 05/2021 - ©Edwards Limited... -
Page 23: Pump Voltage Setting
50/60Hz 100 - 127 V (14A)V 100 - 127 V (14A)V 200-240 V (7A) 200-240 V (7A) 50/60 Hz 50/60 Hz 1. Low voltage 1. Low voltage 2. High voltage 2. High voltage A90301880_C Page 23 05/2021 - ©Edwards Limited... -
Page 24: Connect The Electrical Supply
The pump is also equipped with a front USB port for service purposes using serial communication. This connector cannot be used for pump operation, but for setting and reading parameters and for pump monitoring. A90301880_C Page 24 05/2021 - ©Edwards Limited... -
Page 25: Commission The Pump
After you commission the dry pumping system: to continue to operate the system, refer to Start the pump on page 34. to shut down the system, refer to Shut down the pump on page 35. A90301880_C Page 25 05/2021 - ©Edwards Limited... -
Page 26: Operation
In auto-run mode, the stop button on the user interface panel will override the signal and stop the pump. A90301880_C Page 26 05/2021 - ©Edwards Limited... -
Page 27: Operational Modes
(>8 sec) The pump will restart automatically after the power to-run func- has been restored. tion Start and stop Use the buttons (Figure: Interface control pane) to start and stop the pump. A90301880_C Page 27 05/2021 - ©Edwards Limited... - Page 28 The delay to start is expected to be < 1 minute in the majority of cases but may last longer depending upon the ambient temperature of the cooling air and the initial temperature of the pump module. A90301880_C Page 28 05/2021 - ©Edwards Limited...
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Page 29: Logic Interface Data
▪ 0 to 0.8 V d.c. (l = 0.55 mA ▪ Disable control voltage: high (open) nominal) ▪ 4 to 26.4 V d.c. (internal pull-up to a Thevenin equivalent circuit: 5.3 V and 11 kOhms nominal) A90301880_C Page 29 05/2021 - ©Edwards Limited... - Page 30 Connect to pin 2 (0 V) to enable analogue control input speed control via pin 9. 0 V control reference 0 V reference for all control and status sig- nals listed within this table. A90301880_C Page 30 05/2021 - ©Edwards Limited...
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Page 31: Parallel Control And Monitoring
Connect the control equipment to the control input pins of the logic interface mating half. Refer to Table: Logic interface pins to identify the logic interface connector pins. The control inputs are: ▪ Start ▪ Standby speed ▪ Analogue speed A90301880_C Page 31 05/2021 - ©Edwards Limited... -
Page 32: Analogue Speed Control
6.5 Analogue speed control The analogue speed input is a process control source which enables the nXRi pump to run at variable operating speeds. This speed control source is an alternative to standby speed control. A90301880_C Page 32 05/2021 - ©Edwards Limited... -
Page 33: Figure 14 Logic Interface Connections - Analogue Speed Control
4. Active Voltage range - 5.00 V to 10.00 V (125Hz to 250 Hz) (125Hz to 250 Hz) Note: 0.1 V = 1% of default run speed. Voltages below 5 V will result in a clamped speed of 50% of full speed. A90301880_C Page 33 05/2021 - ©Edwards Limited... -
Page 34: Hardware Configuration
Figure: Interface control panel ▪ use the start/stop control input in parallel control mode ▪ use start command in serial control mode Open the vacuum system isolation valve, if installed. A90301880_C Page 34 05/2021 - ©Edwards Limited... -
Page 35: Shut Down The Pump
The gas ballast should continue to be applied with the pump running, for at least 1 hour after the water vapor source has been removed to enable the pump to dry. A90301880_C Page 35 05/2021 - ©Edwards Limited... -
Page 36: Gas Ballast Operation
The manually operated gas ballast knob can be replaced by a gas ballast adaptor which enables external electrically actuated valves or a controlled gas supply to be used through a 1/4 inch push fit connector. To install the gas ballast adaptor: A90301880_C Page 36 05/2021 - ©Edwards Limited... -
Page 37: Extra Silencer Removal
The mounting frame has two holes and two holes for M8 bolts. These are aligned with the corresponding mounting positions on Edwards leak detector carts (center slot) or turbo carts. Installation instructions:... - Page 38 Use suitable M8 screws to mount mounting frame at the target location. Lift or roll pump on the mounting frame with the pump back side aligned with the mounting frame. Use included screws and washers to fix pump to mounting frame. A90301880_C Page 38 05/2021 - ©Edwards Limited...
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Page 39: Maintenance And Service
Examine the inlet strainer and if necessary, clean it with a cleaning solution suitable for the substances pumped. ▪ Install the inlet strainer before you reconnect the pump to the vacuum system. Refer to Mechanical installation on page 20. A90301880_C Page 39 05/2021 - ©Edwards Limited... -
Page 40: Clean The External Fan Grill
See Table: Service indicator codes for service levels. Table 16 Service indicator codes Service flash code Comments ON 3s/OFF 1s Pump bearing service ON 3s/OFF 3s Pump controller service A90301880_C Page 40 05/2021 - ©Edwards Limited... -
Page 41: Service
7.9 Service It is recommended that the pump should be serviced every 5 years. The pump should then be returned to an Edwards Service Technology Centre. Our products are supported by a world-wide network of Service Technology Centres offering a wide range of options including: ▪... -
Page 42: Fault Finding
The pumping speed is poor or pump down time is too long Cause The pipelines connections are too small in diameter. Remedy Make sure that the pipework has sufficient conductance (user's responsibility) and the pump performance is not compromised. A90301880_C Page 42 05/2021 - ©Edwards Limited... -
Page 43: Alarm Indicator Codes
Self test fault Switch the power to the pump off and on and see whether the error code appears again. If it does, contact us or the supplier. A90301880_C Page 43 05/2021 - ©Edwards Limited... - Page 44 A90301880_C - Fault finding Error flash Error flash Comment Actions position sequence s-s-s-s-s-L Serial control mode in- Re-activate the serial enable and send a serial terlock command to clear the error code. A90301880_C Page 44 05/2021 - ©Edwards Limited...
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Page 45: Storage
Place and secure protective covers over the inlet and outlet ports. Store the pump in a clean and dry condition until required for use. When necessary, prepare and install the pump. Refer to Installation on page 19. A90301880_C Page 45 05/2021 - ©Edwards Limited... -
Page 46: Disposal
ABS and polyamide. Take particular care with: ▪ Fluoroelastomers which may have decomposed as the result of being subjected to high temperatures. ▪ Components which have been contaminated with dangerous process substances. A90301880_C Page 46 05/2021 - ©Edwards Limited... -
Page 47: Accessories
60320 C19 coupler and China GB2099 plug Table 19 Cables Description Item number USB Interface Cable D39801810 nXRi TIC Cable D39803014 Controller Extension Cable 1m D39700835 Controller Extension Cable 2m D39700836 Controller Extension Cable 5m D39700837 A90301880_C Page 47 05/2021 - ©Edwards Limited... -
Page 48: Gas Ballast Adaptor
VIV LINK M8 Connector to valve - Enables the connection be- A50637399 tween VIV valve and the pump through M8 connector. 11.5 Mounting kit Table 23 Mounting kit Description Item number Mounting kit for cart/floor A90590000 A90301880_C Page 48 05/2021 - ©Edwards Limited... - Page 49 T: +42(0) 580 582 728 documentation@edwardsvacuum.com The product specified and listed below A 903 01 983 nXR30i 100-127/200-240V 1ph 50/60 Hz NW25 Inlet nXR40i 100-127/200-240V 1ph 50/60 Hz NW25 Inlet A 904 01 983 A 905 02 983 nXR60i 100-127/200-240V 1ph 50/60 Hz NW40 Inlet...
- Page 50 This declaration of conformity is issued under the sole responsibility of the manufacturer. A 903 01 983 nXR30i 100-127/200-240V 1ph 50/60 Hz NW25 Inlet A 904 01 983 nXR40i 100-127/200-240V 1ph 50/60 Hz NW25 Inlet A 905 02 983...
- Page 51 ADDITIONAL LEGISLATION AND COMPLIANCE INFORMATION EMC (EU, UK): Class B Industrial equipment Caution: This equipment is not intended for use in residential environments and may not provide adequate protection to radio reception in such environments. RoHS (EU, UK): Material Exemption Information This product is compliant with the following Exemptions Annex III: 6(c) Copper alloy containing up to 4% lead by weight...
- Page 52 材料成分声明 China Material Content Declaration 有害物质 Hazardous Substances 部件名称 Part name 六价铬 多溴联苯 多溴二苯醚 铅 汞 镉 Hexavalent Polybrominated Polybrominated Lead Mercury Cadmium Chromium biphenyls diphenyl ethers (Pb) (Hg) (Cd) (Cr VI) (PBB) (PBDE) 铜管管件 Brass pipe fitting 铜接头 Brass connectors O: 表示该有害物质在该部件的所有均质材料中的含量低于...
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