About this manual Validity This operating manual is for customers of Pfeiffer Vacuum. It describes the functioning of the designated product and provides the most important information for safe use of the unit. The description follows applicable EU guidelines. All information provided in this operating manual refers to the current state of the product's development.
About this manual 1.2.2 Pictographs Prohibition of an action to avoid any risk of accidents, the disregarding of which may result in serious accidents Warning of a displayed source of danger in connection with operation of the unit or equipment Command to perform an action or task associated with a source of dan- ger, the disregarding of which may result in serious accidents Important information about the product or this document...
Installation and operation of accessories Pfeiffer Vacuum pumps can be equipped with a series of adapted accessories. The in- stallation, operation and maintenance of connected devices are described in detail in the operating instructions of the individual components.
Safety ● Do not loosen any plug connection during operations. ● Wait for the rotor to reach standstill before peforming work on the high vacuum flange. ● Keep leads and cables well away from hot surfaces (> 70 °C). ● Never fill or operate turbopump with cleaning agent. ●...
Safety ● The vacuum pump may only be used to generate a vacuum. ● Only operate the turbopump with an approved backing pump. Improper use Improper use will cause all claims for liability and warranties to be forfeited. Improper use is defined as usage for purposes deviating from those mentioned above, especially: ●...
Transport and storage Transport and storage Transport Reuse the transport container of the vacuum pump. – Transport or ship vacuum pumps in the original packing preferably. Only remove the protective covers from the high vacuum and the fore-vacuum side immediately before connection.
Fig. 1: Example for a rating plate 4.1.3 Scope of delivery ● HiPace 60 P with TC 110 and 24 V DC ± 5 % ● Protective cover for the high vacuum flange and the fore-vacuum flange ● Operating instructions...
Product description Function The turbopump HiPace 60 P forms a complete unit together with the electronic drive unit TC 110. For the voltage supply only Pfeiffer Vacuum power supplies may be used (e.g.TPS or DCU). Fig. 2: View of HiPace 60 P with TC 110...
Product description Range of application The pump HiPace 60 P must be installed and operated under the following ambient con- ditions: Installation location weather protected (indoors) Protection category IP 54 Protection class Ambient temperature +5 °C to +30 °C with convection cooling without gas throughput +5 °C to +35 °C with air cooling...
120 °C. ● The pump may be fastened to the floor only after consultation with Pfeiffer Vacuum. ● It is not allowed to operate the device in systems where impact-like stresses and vi- brations or periodically forces occur.
5.2.2 Use of a splinter shield or protection screen Pfeiffer Vacuum centering rings with splinter shield or protection screen in the high vac- uum flange protect the turbopump against foreign bodies coming from the chamber. Thus, the pumping speed of the pump is reduced.
Installation Mounting orientation When using dry backing pumps, Pfeiffer Vacuum HiPace pumps are designed for instal- lation in any orientation. Support pipes in front of the vacuum pump or remove them. No force from the pipe system may be exerted on the fixed pump.
Only the components listed in the following can be used to fas- ten the turbopumps to the high vacuum flange. The installation elements for turbopumps are special designs by Pfeiffer Vacuum. In all operating conditions, the tensile strength of the flange material must be at least 170 N/mm ...
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Installation Claw and threaded hole und Gewindebohrung Mind that the sealing surfaces are not damaged. 1) Connect the flanges according to the drawing and with the component parts of the mounting kit. 2) Use the required number of 4 claws. 3) Tighten the claws crosswise in three steps.
Installation Connecting the fore-vacuum side Recommendation: As backing pump, use a suitable vacuum pump from the Pfeiffer Vacuum programme. WARNING Damage to health due to poisonous gases Process gases can damage health and contaminate the environment. Safely lead away the gas emission from the backing pump! ...
Detailed description for function, configuration and operation with the respective connec- tion panel are given in the specific operating instructions for the electronic drive unit. 5.6.2 Earthing Pfeiffer Vacuum recommends to connect an appropriate earthing wire to derive applica- tive interferences. Fig. 6: Installing the earthing connection 5.6.3...
Example: Connections on the electronic drive unit TC 110 with adapter TCS 12 Accessory connection on the TC 110 The connection of Pfeiffer Vacuum accessory units to the electronic drive unit TC 110 is only possible by using respective connecting cables or adapters.
Make the settings and control via the interfaces of the electronic drive unit. 5.7.2 Venting valve The Pfeiffer Vacuum venting valve is used for automatic venting in case of shut-down or power failure. The permissible connection pressure is max. 1500 hPa absolute.
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● When operating the pump with more than 50 % of the maximum gas throughput, seal- ing gas must be used to ensure rotor cooling. ● The sealing gas flow rate amounts 7.5 - 9.5 sccm for the HiPace 60 P. Sealing gas supply with control valve 248a Fig.
5.7.4 Water cooling As an option turbopumps HiPace 60 P with TC 110 can be equipped with water cooling. ● In case of increased backing pressure (> 0.1 hPa) and/or operation with high gas throughputs, either air or water cooling may be used.
Pumping of gases with a higher molecular mass in the wrong gas mode can lead to de- struction of the pump. Ensure the gas mode is correctly set. Contact Pfeiffer Vacuum before using gases with a greater molecular mass (> 80). Operation modes The following operation modes are available: ●...
Consider the following manuals for the operation via remote control: ● Operating instructions "Electronic drive unit TC 110" 6.3.3 Operation with DCU or HPU Consider the following manuals for the operation via Pfeiffer Vacuum display and con- trol units: ● Operating instructions "DCU" ● Operating instructions "HPU"...
Operation Monitoring of the operation conditions 6.4.1 Operation display via LED LEDs in the front panel of the electronic drive unit show basic operating conditions of the turbopump. A differentiated malfunction and warning display is possible only for opera- tion with DCU or HPU. Symbol LED status Display Meaning...
– The valve cross section for the venting rate of 15 hPa/s must be adapted to the size of the vacuum chamber. – For small vacuum chambers, use the Pfeiffer Vacuum venting valve. Then vent with an additional venting valve of any desired size.
Decontaminate affected parts before carrying out maintenance work. NOTICE Disclaimer of liability Pfeiffer Vacuum accepts no liability for personal injury or material damage, losses or op- erating malfunctions due to improperly performed maintenance. The liability and war- ranty entitlement expires.
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Maintenance / replacement Fig. 14: Assembly / Disassembly of the operating fluid reservoir End cover 40c O-ring 320 Rubber foot Operating fluid reservoir 305 O-ring Key for end cover (PV M40 813) 40a Poroplast rod Unscrew the rubber feet 320 (4x) from the pump bottom part. ...
Maintenance / replacement Replacing the electronic drive unit NOTICE Damages to the pump and drive Even after the mains power is switched off, the subsequently running pump delivers electric power to the electronic drive unit. There is a danger of electric body contact by premature separating the pump from the electronic drive unit.
Check turbopump for contamination and moisture. Clean the turbopump externally with a lint-free cloth and little industrial alcohol. If necessary, have Pfeiffer Vacuum Service clean the turbopump completely. If necessary, have the bearings replaced. Take into account the total running time.
Reset by switching the mains OFF/ON Reset via pin 6 on the "X3" connection Differentiated malfunction display is possible via DCU or HPU Contact the Pfeiffer Vacuum Service If no display and control unit is available, please contact the Pfeiffer Vacuum Service.
The following steps are necessary to ensure a fast, smooth servicing process: Download the forms "Service Request" and "Declaration on Contamination". Fill out the "Service Request" form and send it by fax or e-mail to your Pfeiffer Vacuum service address.
Spare parts HiPace 60 P 11 Spare parts HiPace 60 P Item Designation Size Order number Notes Pieces Electronic drive unit TC 110 according to the rating plate depends on the connection panel Operating fluid reservoir PM 143 740 -T incl.
Accessories 12 Accessories ® Designation HiPace 60 P with TC 110, DN 63 ISO-K Mounting kit for HiPace 60/80, DN 63 ISO-K, including coated centering PM 016 360 -T ring and bracket screws Mounting kit for HiPace 60/80, DN 63 ISO-K, including coated centering PM 016 361 -T ring, splinter shield and bracket screws Mounting kit for HiPace 60/80, DN 63 ISO-K, including coated centering...
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Designation HiPace 60 P with TC 110, DN 63 ISO-K Air cooling for HiPace 60 P, HiPace 80 and SplitFlow 50/80 with TC 110/ PM Z01 300 Air cooling for HiPace 60/80, SplitFlow 50/80, 230 V PM Z01 343 Air cooling for HiPace 60 P and 80, SplitFlow 50/80, 115 V...
Technical data and dimensions 13 Technical data and dimensions 13.1 General Basic principles for the Technical Data of Pfeiffer Vacuum Turbopumps: Maximum values refer exclusively to the input as a single load. ● Recommendations of PNEUROP committee PN5 ● ISO 21360; 2007: "Vacuum technology - Standard methods for measuring vacuum- pump performance - General description"...
● Machinery 2006/42/EC (Annex II, no. 1 A) ● Electromagnetic Compatibility 2014/30/EU The agent responsible for compiling the technical documentation is Mr. Helmut Bern- hardt, Pfeiffer Vacuum GmbH, Berliner Straße 43, 35614 Aßlar. HiPace 60 P Harmonised standards and national standards and specifications which have been ap-...
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VACUUM SOLUTIONS FROM A SINGLE SOURCE Pfeiffer Vacuum stands for innovative and custom vacuum solutions worldwide, technological perfection, competent advice and reliable service. COMPLETE RANGE OF PRODUCTS From a single component to complex systems: We are the only supplier of vacuum technology that provides a complete product portfolio.
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