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Summary of Contents for Pfeiffer Vacuum HIPACE 3400 IT
- Page 1 OPERATING INSTRUCTIONS Translation of the Original HIPACE 3400 IT | IUT Turbopump with temperature management system...
- Page 2 Dear Customer, Thank you for choosing a Pfeiffer Vacuum product. Your new turbopump is designed to support you by its performance, its perfect operation and without interfering your individual application. The name Pfeiffer Vacuum stands for high-quality vacuum technology, a comprehensive and complete range of top-quality products and first-class service.
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Page 3: Table Of Contents
Limits of use of product Proper use Foreseeable improper use Personnel qualification 2.7.1 Ensuring personnel qualification 2.7.2 Personnel qualification for maintenance and repair 2.7.3 Advanced training with Pfeiffer Vacuum Product description Function 3.1.1 Cooling 3.1.2 Rotor bearing 3.1.3 Drive Scope of delivery Identifying the product 3.3.1 Product types... - Page 4 Operating modes 6.2.1 Operating without operating unit 6.2.2 Operation via connection "E74" 6.2.3 Operation via multi-function connection "remote" 6.2.4 Operation via Pfeiffer Vacuum control unit 6.2.5 Operation via field bus Switching on the turbopump Operation with TMS 6.4.1 TMS connection 6.4.2 Process description for TMS...
- Page 5 Table of contents 14.2 Technical data 14.3 Dimensions EC Declaration of Conformity UK Declaration of Conformity 5/72...
- Page 6 Characteristic nominal rotation speeds of the turbopumps Tbl. 19: Troubleshooting turbopumps Tbl. 20: Available spare parts Tbl. 21: Accessories Tbl. 22: Conversion table: Pressure units Tbl. 23: Conversion table: Units for gas throughput Tbl. 24: Technical data for HiPace 3400 IT | IUT 6/72...
- Page 7 List of figures Fig. 1: Position of the stickers on the product Fig. 2: Design of the HiPace 3400 IT | IUT turbopump with TC 1200 Fig. 3: Design of TMS box Fig. 4: Slinging points for vertical transport of the turbopump without packaging Fig.
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Page 8: About This Manual
Keep the manual for future consultation. 1.1 Validity These operating instructions are a customer document of Pfeiffer Vacuum. The operating instructions describe the functions of the named product and provide the most important information for the safe use of the device. The description is written in accordance with the valid directives. The information in these operating instructions refers to the product's current development status. -
Page 9: Pictographs
Rating plate Rating plates of individual assemblies are located on the lower D-35614 Asslar part of the turbopump or on the relevant attachments. HiPace 3400 IT Mod. PM P06 544 - - - - - - - - PM 006 336 -T TÜV Rheinland... -
Page 10: Abbreviations
About this manual Warranty seal warranty seal The product is sealed ex factory. Damaging or removing a war- ranty seal results in loss of the warranty. Sealing gas connection note This sticker describes the position for the exclusive sealing gas PURGE connection. -
Page 11: Tbl. 2: Abbreviations Used In This Document
About this manual Abbreviation Meaning in this document Line protection Underwriters Laboratories Miniature circuit breaker NEMA National Electrical Manufacturer Association Protective earth (earthed conductor) [P:xxx] Electronic drive unit control parameters. Printed in bold as a three-digit number in square brackets. Frequently displayed in conjunction with a short description. Example: [P:312] software version RCCB Residual Current Operated Circuit Breaker... -
Page 12: Safety
Safety 2 Safety 2.1 General safety information The following 4 risk levels and 1 information level are taken into account in this document. DANGER Immediately pending danger Indicates an immediately pending danger that will result in death or serious injury if not observed. ►... - Page 13 Safety Risks during installation DANGER Danger to life from electric shock Touching exposed and voltage-bearing elements causes an electric shock. Improper connection of the mains supply leads to the risk of touchable live housing parts. There is a risk to life. ►...
- Page 14 Safety WARNING Risk of serious injury from oscillating, toppling or falling objects Incorrect handling during the mechanical installation leads to a risk of oscillating, toppling or falling heavy loads. There is a risk of crushing and impacts (e.g. on colliding flange connections). There is a risk of injuries to limbs, up to and including bone fractures and head injuries.
- Page 15 Safety Risks during maintenance, decommissioning and disposal WARNING Danger to life from electric shock during maintenance and service work The device is only completely de-energized when the mains plug has been disconnected and the tur- bopump is at a standstill. There is a danger to life from electric shock when making contact with live components.
- Page 16 Safety WARNING Risk of scalding from suddenly escaping hot cooling water The turbopump water connections are open to both sides. When connecting the cooling water supply, there is a risk of scalding from suddenly escaping, hot cooling water at over pressure. ►...
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Page 17: Safety Precautions
► Follow the installation instructions for this turbopump. ► Observe the requirements regarding stability and design of the counter flange. ► Use only original accessories or fixing material approved by Pfeiffer Vacuum for the installation. WARNING Risk of injury caused by the turbopump breaking away with the vibration compensator in the event of a malfunction Sudden jamming of the rotor generates high destructive torques in accordance with ISO 27892. -
Page 18: Limits Of Use Of Product
Safety ► Never put the device into operation with the high vacuum connection open. ► Keep lines and cables away from hot surfaces (> 70°C). ► Never fill or operate the unit with cleaning agents or cleaning agent residues. ► Do not carry out your own conversions or modifications on the unit. ►... -
Page 19: Personnel Qualification
The work described in this document may only be carried out by persons who have appropriate profes- sional qualifications and the necessary experience or who have completed the necessary training as provided by Pfeiffer Vacuum. Training people 1. Train the technical personnel on the product. -
Page 20: Personnel Qualification For Maintenance And Repair
─ Customer with Pfeiffer Vacuum service training ─ Pfeiffer Vacuum service technician 2.7.3 Advanced training with Pfeiffer Vacuum For optimal and trouble-free use of this product, Pfeiffer Vacuum offers a comprehensive range of courses and technical trainings. For more information, please contact Pfeiffer Vacuum technical training. -
Page 21: Product Description
The cooling system ensures safe and sufficient heat dissipation with- out energy loss during the heating process. Fig. 2: Design of the HiPace 3400 IT | IUT turbopump with TC 1200 High vacuum connection, DN 320 ISO-F Protective cap for the high vacuum connec-... -
Page 22: Cooling
ID no. 000021320. 3.3.1 Product types The product designation of Pfeiffer Vacuum turbopumps from the HiPace series is composed of the family name, the size (which is based on the pumping speed of the vacuum pump) and, if required, an additional feature description. -
Page 23: Product Features
T = Temperature management Plus = Low vibration, low magnetic field E = High efficiency H = high compression I = ion implantation Tbl. 4: Product designation of Pfeiffer Vacuum HiPace turbopumps 3.3.2 Product features Feature Version Pump version HV flange... -
Page 24: Transportation And Storage
► Drain off the operating fluid before moving or transporting the vacuum pump. ► Only fill the vacuum pump with operating fluid after mechanical installation. Pfeiffer Vacuum recommends keeping the transport packaging and original protective cov- Safe transport of the product 1. -
Page 25: Transport In Horizontal Space
60° Fig. 4: Slinging points for vertical transport of the turbopump without packaging 1 HiPace 3400 IT HiPace 3400 IUT Instructions for vertical transport 2 eye bolts are included in the shipment and are firmly bolted to the turbopump ex works. -
Page 26: Storage
– Keep the eye bolts for future use. 4.2 Storage We recommend Pfeiffer Vacuum recommends storing the products in their original transport packaging. Storing the turbopump 1. Seal all flange openings with the original protective caps. 2. Seal all other connections (e.g. venting connection) with the corresponding original parts. -
Page 27: Installation
Installation 5 Installation The installation of the turbopump and its fastening is of outstanding importance. The rotor of the turbo- pump revolves at very high speed. In practice it is not possible to exclude the risk of the rotor touching the stator (e.g. due to the penetration of foreign bodies into the high vacuum connection). The kinetic energy released acts on the housing and on the anchoring of the turbopump within fractions of a sec- ond. -
Page 28: Considering Earthquake Protection
● Make sure that all the torques generated if the rotor blocks suddenly, are absorbed by the system on the operator side and the high vacuum connection. ● Only use the approved mounting kits of Pfeiffer Vacuum for the high vacuum connec- tion of the turbopump. -
Page 29: Using Splinter Shield Or Protective Screen
Installation 5.2.3 Using splinter shield or protective screen Pfeiffer Vacuum centering rings with splinter shield or protective screen in the high vacuum flange pro- tect the Turbopump against foreign matter from the vacuum chamber. The pumping speed is reduced according to the passage guide values and the size of the high vacuum flange. -
Page 30: Attach Iso-F Flange To Iso-F
Flange connection ISO-F, hexagon head screw and tapped hole Connection of the hexagon head screw and tapped hole 1. Only use approved mounting kits by Pfeiffer Vacuum for the connection. 2. Attach the turbopump with centering ring to the counter flange according to the figure. -
Page 31: Fig. 11: Flange Connection Iso-F, Hexagon Head Screw And Through Hole
Flange connection ISO-F, hexagon head screw and through hole Connection of the hexagon head screw and through hole 1. Only use approved mounting kits by Pfeiffer Vacuum for the connection. 2. Attach the turbopump with centering ring to the counter flange according to the figure. -
Page 32: Filling The Operating Fluid
► Only fill the turbopump with operating fluid after mechanical installation. ► Fill the turbopump with operating fluid via one of the filler screws marked with an oil can symbol only. ► If in doubt, contact Pfeiffer Vacuum. Required consumables ● Operating fluid F3, 50 ml Required tools ●... -
Page 33: Connecting Fore-Vacuum Side
Use the turbopump only in combination with a suitable backing pump that can deliver up to the required maximum fore-vacuum pressure. To achieve the fore-vacuum pressure, use a suitable vacuum pump or a pumping station from the Pfeiffer Vacuum range. In this case, the backing pump is also controlled directly via the turbopump electronic drive unit interfaces (e.g., relay box or connection cable). -
Page 34: Cooling Water Connection
Installation Fig. 16: Example of fore-vacuum connection on HiPace 3400 IT 1 Turbopump fore-vacuum connection Clamping ring 2 Vacuum components DN 40 ISO-KF Centering ring 3 Backing pump (e.g. two-stage rotary pump) Establish the fore-vacuum connection 1. With rigid pipe connections, include bellows to attenuate external vibrations. -
Page 35: Establishing A Cooling Water Connection With Hose Nozzles
Installation Parameter Cooling water Appearance ● filtered ● mechanically clear ● visually clear ● no turbidity ● no sediment ● free from grease and oil pH value 7 to 9 Carbonate hardness, max. 10 °dH 12.53 °e 17.8 °fH 178 ppm CaC0 Chloride content, max. -
Page 36: Establishing A Cooling Water Connection With Pipe Fittings
2 Cooling water inlet, 1/4" thread Threaded nozzle (2x) Procedure Pfeiffer Vacuum recommends the use of a dirt trap in the supply line. 1. Screw one hose nozzle with sealing ring onto each of the turbopump's cooling water connections. – Tightening torque: max. 15 Nm 2. -
Page 37: Connecting Accessories To Turbopumps With Tms
3 Return line Procedure Pfeiffer Vacuum recommends the use of a dirt trap in the supply line. 1. Debur the internal and external diameter of the pipe on the connection side. 2. Insert the pipe into the pipe fitting up to the limit stop. -
Page 38: Connecting Sealing Gas
► Observe the installation instructions in the operating instructions for the relevant accessory. ► Note the existing configuration of existing connections. ► If configuration is necessary, use a Pfeiffer Vacuum control unit. 5.7 Connecting sealing gas The use of sealing gas serves to protect the turbopump in dusty processes or with excessive gas throughputs. -
Page 39: Installing Miniature Circuit Breaker
Installation Installing the mains disconnection device 1. Install a mains disconnection device as a main switch. 2. Specify the mains disconnection device according to SEMI-S2. 3. Use a circuit breaker with an interrupting capacity of at least 10 kA. 5.8.1 Installing miniature circuit breaker Circuit breaker Tripping characteristic B or C according to IEC 60947-2... -
Page 40: Establishing The Electric Connection
There are two options for the mains connection for the turbopump and the TMS box. ► Make sure that you have the correct supply voltage. ► Order a corresponding power supply cable from the Pfeiffer Vacuum accessories range. ► Assemble your own power supply cable using the HAN 3A connecting sockets from the shipment. -
Page 41: Operation
Simultaneous loading by means of high drive power (gas throughput, fore-vacuum pressure), high heat radiation, or strong magnetic fields results in uncontrolled heating of the rotor and can destroy the vacuum pump. ► Consult Pfeiffer Vacuum before combining varying loads on the vacuum pump. Lower limit val- ues apply. NOTICE... -
Page 42: Operating Modes
Instructions for operation without control panel 1. Use only the approved Pfeiffer Vacuum mating plug with bridges on the connection of the elec- tronic drive unit. 2. Switch on the mains supply of the turbopump only immediately before operation. -
Page 43: Operation Via Field Bus
Operation 6.2.5 Operation via field bus Integrating and operating Pfeiffer Vacuum turbopumps in the customer's field bus system is possible when using an electronic drive unit with a corresponding connection panel. The following are available: ● Profibus ● Profinet ● EtherCAT ●... -
Page 44: Operation With Tms
Operation Fig. 20: Mains power supply 1 TMS box with "ST1" connecting plug Mains cable with socket for electronic drive unit 2 Mains cable with socket to TMS box Electronic drive unit with "AC in" connector Establishing mains connection 1. Make sure that the connection to the operator's network is interrupted or switched off. 2. -
Page 45: Operation Monitoring
6.5.1 Operating mode display via LED LEDs on the electronic drive unit show the basic operating states of the vacuum pump. A differentiated error and warning display is only possible for operation with the Pfeiffer Vacuum control unit or a PC. Symbol... -
Page 46: Switching Off And Venting
► Observe the prescribed maximum pressure rise speed of 15 hPa/s. ► Avoid manual and uncontrolled venting of very low volumes. ► Where necessary, use a venting valve from the Pfeiffer Vacuum range of accessories. Manual venting Manual venting describes the standard process for venting the turbo pumping station. - Page 47 General information for fast venting We recommend fast venting of larger volumes in 4 steps. 1. Use a Pfeiffer Vacuum venting valve for the turbopump, or match the valve cross-section to the size of the recipient and maximum venting rate.
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Page 48: Maintenance
5. Replace the operating fluid at least every 4 years. 6. Have Pfeiffer Vacuum Service replace the rotor bearing of the turbopump at least every 4 years. 7. Perform a pressure test on the cooling water system once every year. -
Page 49: Changing The Operating Fluid
Maintenance 7.3 Changing the operating fluid WARNING Risk of poisoning from contact with harmful substances The operating fluid and parts of the turbopump may contain toxic substances from pumped media. ► Decontaminate affected parts before carrying out maintenance work. ► Prevent health hazards or environmental impacts with adequate safety precautions. ►... -
Page 50: Filling The Operating Fluid
► Only fill the turbopump with operating fluid after mechanical installation. ► Fill the turbopump with operating fluid via one of the filler screws marked with an oil can symbol only. ► If in doubt, contact Pfeiffer Vacuum. Required consumables ● Operating fluid F3, 50 ml Required tools ●... -
Page 51: Replacing The Electronic Drive Unit
Maintenance Fig. 23: The position of the filler screws depends on the mounting orientation. Example: U versions Direction of the high vacuum connection Procedure 1. Unscrew and remove the higher filler screw from the operating fluid pump. 2. Use the syringe and the operating fluid from the turbopump shipment. 3. -
Page 52: Removing Electronic Drive Unit
Maintenance Backing up settings made by the customer The factory operating parameters are always preset in replacement units. All settings made by the customer to the original electronic drive unit are lost when it is replaced. To preserve your custom settings, you have the following options: 1. -
Page 53: Confirming Speed Specification
Tbl. 18: Characteristic nominal rotation speeds of the turbopumps Required aids ● A connected the Pfeiffer Vacuum control unit. ● Knowledge of the configuration and setting of electronic drive unit operating parameters. Adjusting nominal rotation speed confirmation 1. Observe the operating instructions of the control unit. -
Page 54: Replacing The Heating Jacket
Maintenance 7.5 Replacing the heating jacket WARNING Risk of burns on hot surfaces when using additional equipment for heating during operation The use of additional equipment for heating the vacuum pump or for optimizing the process gener- ates very high temperatures on surfaces that can be touched. There is a risk of burning. ►... -
Page 55: Installing A Heating Jacket
Maintenance 7.5.2 Installing a heating jacket Fig. 27: Installing a heating jacket 1 Heating jacket Plug 2 Lashing strap TMS box Installing a heating jacket 1. Fit the new heating jacket around the cylindrical section of the pump housing. 2. Tighten the lashing strap. 3. -
Page 56: Mounting The Pipe Fittings
Maintenance Fig. 28: Dismantling the pipe fittings 1 Marking on the pipe Lock nut 2 Marking on the lock nut Connector body 3 Marking on the connector body Dismantling the pipe fitting Swagelok pipe fittings can be repeatedly dismantled and remounted. 1. -
Page 57: Decommissioning
2. Clean the turbopump exterior with a lint-free cloth and a little isopropanol. 3. If necessary, arrange for Pfeiffer Vacuum Service to completely clean the turbopump. 4. Observe the total running time of the turbopump and if necessary, arrange for Pfeiffer Vac- uum Service to replace the bearing. -
Page 58: Recycling And Disposal
● Help to reduce the wastage of natural resources. ● Prevent contamination. 9.1 General disposal information Pfeiffer Vacuum products contain materials that you must recycle. ► Dispose of our products according to the following: – Iron – Aluminium –... -
Page 59: Malfunctions
► Follow the installation instructions for this turbopump. ► Observe the requirements regarding stability and design of the counter flange. ► Use only original accessories or fixing material approved by Pfeiffer Vacuum for the installation. WARNING Risk of injury caused by the turbopump breaking away with the vibration compensator in the event of a malfunction Sudden jamming of the rotor generates high destructive torques in accordance with ISO 27892. - Page 60 ● Electronic drive unit de- ● Replace the electronic drive unit. fective ● Contact Pfeiffer Vacuum Service. Turbopump will not start up; green ● For operation without ● Connect the connections according to the elec- LED on the electronic drive unit is control unit: Pins 1-3, tronic drive unit connection diagram.
- Page 61 RS-485 to 0 = off and then 1 = On and Malfunc- tion acknowledgment. ● Carry out a differentiated malfunction analysis with a control unit. ● Contact Pfeiffer Vacuum Service. Cooling water has soaked the in- ● Leakage in cooling water ● Remove the heating plug from the TMS box.
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Page 62: Service Solutions By Pfeiffer Vacuum
We are always focused on perfecting our core competence – servicing of vacuum components. Once you have purchased a product from Pfeiffer Vacuum, our service is far from over. This is often exactly where service begins. Obviously, in proven Pfeiffer Vacuum quality. - Page 63 Service solutions by Pfeiffer Vacuum 5. Prepare the product for transport in accordance with the provisions in the contamination declaration. a) Neutralize the product with nitrogen or dry air. b) Seal all openings with blind flanges, so that they are airtight.
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Page 64: Spare Parts
Spare parts 12 Spare parts Fig. 30: Spare parts HiPace 3400 IT | IUT Position Designation Size Order number Remark Pieces Electronic drive unit TC 1200 refer to the rating plate depending on the connection panel E74 plug P 4723 110... -
Page 65: Accessories
Optionally with splinter shield or protective screen. Power supply packs and display units Power supply packs for optimal voltage supply of Pfeiffer Vacuum products are characterized by their compact size and adapted power supply with maximum reliability. Display and operating units are used to check and adjust operating parameters. -
Page 66: Tbl. 21: Accessories
Accessories Description Order number Relay box, shielded, for backing pumps, 1-phase motor 7 A for TC 400/1200, TM PM 071 284 -X 700 and TCP 350, M12 Relay box, shielded, for backing pumps, 1-phase motor 20 A for TC 400/1200, TM PM 071 285 -X 700 and TCP 350, M12 TIC 010, adapter for two sensors... -
Page 67: Technical Data And Dimensions
Technical data and dimensions 14 Technical data and dimensions 14.1 General This section describes the basis for the technical data of Pfeiffer Vacuum turbopumps. Technical data Maximum values refer exclusively to the input as a single load. ● Specifications according to PNEUROP committee PN5 ●... - Page 68 Technical data and dimensions Type designation HiPace® 3400 IT HiPace® 3400 IUT Run-up time 8.6 min 8.6 min Pumping speed for Ar 2900 l/s 2900 l/s Pumping speed for H 2900 l/s 2900 l/s Pumping speed for He 3200 l/s 3200 l/s Pumping speed for N 3200 l/s...
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Page 69: Fig. 31: Hipace 3400 It | Tc 1200 Dn 320 Iso-F
Technical data for HiPace 3400 IT | IUT 14.3 Dimensions DN 320 ISO-F Fig. 31: HiPace 3400 IT | TC 1200 DN 320 ISO-F Dimensions in mm DN 320 ISO-F Fig. 32: HiPace 3400 IUT | TC 1200 DN 320 ISO-F... - Page 70 DIN EN 61010-1 : 2020 DIN EN IEC 63000 : 2019 The authorized representative for the compilation of technical documents is Mr. Tobias Stoll, Pfeiffer Vacuum GmbH, Berliner Straße 43, 35614 Asslar, Germany. Signature: Pfeiffer Vacuum GmbH Berliner Straße 43...
- Page 71 ISO 21360-4:2018 IEC 61010-1+A1:2010 IEC 63000:2018 The manufacturer's authorized representative in the United Kingdom and the authorized agent for compiling the technical documentation is Pfeiffer Vacuum Ltd, 16 Plover Close, In- terchange Park, MK169PS Newport Pagnell. Signature: Pfeiffer Vacuum GmbH Berliner Straße 43...
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