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Summary of Contents for Pfeiffer Vacuum PMP06021
- Page 1 OPERATING INSTRUCTIONS Translation of the Original HIPACE 1200 Turbopump...
- Page 2 Dear Customer, Thank you for choosing a Pfeiffer Vacuum product. Your new turbopump is designed to support you by its performance, its perfect operation and without interfering your individual application. The name Pfeiffer Vacuum stands for high-quality vacuum technology, a comprehensive and complete range of top-quality products and first-class service.
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Page 3: Table Of Contents
Limits of use of the product Proper use Foreseeable improper use Personnel qualification 2.7.1 Ensuring personnel qualification 2.7.2 Personnel qualification for maintenance and repair 2.7.3 Advanced training with Pfeiffer Vacuum Product description Function 3.1.1 Cooling 3.1.2 Rotor bearing 3.1.3 Drive... - Page 4 Operating modes 6.2.1 Operation without operating unit 6.2.2 Operation via connection "E74" 6.2.3 Operation via multi-function connection "remote" 6.2.4 Operation via Pfeiffer Vacuum display and control unit 6.2.5 Operation via field bus Switching on the turbopump Operation monitoring 6.4.1 Operating mode display via LED 6.4.2 Temperature monitoring...
- Page 5 Stickers on the product Tbl. 2: Abbreviations used in this document Tbl. 3: Permissible ambient conditions Tbl. 4: Product designation of Pfeiffer Vacuum HiPace turbopumps Tbl. 5: Turbopump features Tbl. 6: Delivered drive power depending on the supplied mains voltage Tbl. 7:...
- Page 6 List of figures List of figures Fig. 1: Position of the labels on the product Fig. 2: Design HiPace 1200 standard and U version Fig. 3: Slinging points for vertical transport of the turbopump without packaging Fig. 4: Slinging points for horizontal transport of the turbopump without packaging Fig.
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Page 7: About This Manual
Keep the manual for future consultation. 1.1 Validity This operating instructions is a customer document of Pfeiffer Vacuum. The operating instructions de- scribe the functions of the named product and provide the most important information for the safe use of the device. The description is written in accordance with the valid directives. The information in this op- erating instructions refers to the product's current development status. -
Page 8: Conventions
About this manual 1.3 Conventions 1.3.1 Instructions in the text Usage instructions in the document follow a general structure that is complete in itself. The required ac- tion is indicated by an individual step or multi-part action steps. Individual action step A horizontal, solid triangle indicates the only step in an action. ►... -
Page 9: Abbreviations
About this manual Operating fluid filler screw This sticker describes the position of the respective filler screw for operating fluid. Protection class This sticker describes protection class 1 for the product. The posi- tioning indicates the position for the ground connection. Cooling water connection COOLING WATER IN This sticker indicates the position and conditions for the cooling... -
Page 10: Trademark Proof
About this manual Abbreviation Meaning in this document Diameter value (in mm) Display Control Unit (Pfeiffer Vacuum display and control unit). Nominal diameter as size description Emergency Stop Rotation speed value of a vacuum pump (frequency, in rpm or Hz) Handheld Programming Unit. -
Page 11: Safety
Safety 2 Safety 2.1 General safety information The following 4 risk levels and 1 information level are taken into account in this document. DANGER Immediately pending danger Indicates an immediately pending danger that will result in death or serious injury if not observed. ►... - Page 12 ► Take suitable safety precautions on-site for the compensation of the occurring torques. ► Before installing a vibration compensator, you must first of all contact Pfeiffer Vacuum. WARNING Danger to life from poisoning where toxic process media leak from damaged connections Sudden twisting of the turbopump in the event of a fault causes fittings to accelerate.
- Page 13 Safety WARNING Risk of cuts on moving, sharp-edged parts when reaching into the open high vacuum flange With the high vacuum flange open, access to sharp-edged parts is possible. A manual rotation of the rotor increases the danger situation. There is the risk of cuts, up to the separation of body parts (e.g. fingertips).
- Page 14 Safety Risks during operation WARNING Danger of cut injuries from unexpected start up. The use of mating plugs of the electronic drive unit (accessories) enables the automatic run-up of the vacuum pump as soon the power is turned on. Attaching mating plugs before or during the installa- tion leads to the movement of parts hence the risk of cut injuries by sharp-edged in the exposed high vacuum flange.
- Page 15 Safety WARNING Risk of poisoning from contact with harmful substances The operating fluid and parts of the turbopump may contain toxic substances from pumped media. ► Decontaminate affected parts before carrying out maintenance work. ► Prevent health hazards or environmental impacts with adequate safety precautions. ►...
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Page 16: Safety Precautions
► Follow the installation instructions for this turbopump. ► Observe the requirements regarding stability and design of the counter flange. ► Use only original accessories or fixing material approved by Pfeiffer Vacuum for the installation. WARNING Risk of injury caused by the turbopump breaking away with the vibration compensator in the event of a malfunction Sudden jamming of the rotor generates high destructive torques in accordance with ISO 27892. -
Page 17: Limits Of Use Of The Product
Safety ► Never put the device into operation with the high vacuum connection open. ► Keep lines and cables away from hot surfaces (> 70°C). ► Never fill or operate the unit with cleaning agents or cleaning agent residues. ► Do not carry out your own conversions or modifications on the unit. ►... -
Page 18: Personnel Qualification
Such training must ensure that individuals are capable of carrying out the required activi- ties and work steps safely and properly. 2.7.2 Personnel qualification for maintenance and repair Advanced training courses Pfeiffer Vacuum offers advanced training courses to maintenance levels 2 and 3. 18/74... -
Page 19: Advanced Training With Pfeiffer Vacuum
─ Customer with Pfeiffer Vacuum service training ─ Pfeiffer Vacuum service technician 2.7.3 Advanced training with Pfeiffer Vacuum For optimal and trouble-free use of this product, Pfeiffer Vacuum offers a comprehensive range of courses and technical trainings. For more information, please contact Pfeiffer Vacuum technical training. -
Page 20: Product Description
Product description 3 Product description 3.1 Function The turbopump forms a compact unit with the electronic drive unit. The integrated power supply pack acts as a voltage supply. Fig. 2: Design HiPace 1200 standard and U version 1 High vacuum connection Protective cover for the high vacuum flange 2 Fore-vacuum connection, DN 40 ISO-KF Operating fluid pump 3 Cooling water connection, outlet... -
Page 21: Identifying The Product
ID no. 000021320. 3.3.1 Product types The product designation of Pfeiffer Vacuum turbopumps from the HiPace series is composed of the family name, the size (which is based on the pumping speed of the vacuum pump) and, if required, an additional feature description. -
Page 22: Transportation And Storage
► Drain off the operating fluid before moving or transporting the vacuum pump. ► Only fill the vacuum pump with operating fluid after mechanical installation. Pfeiffer Vacuum recommends keeping the transport packaging and original protective cov- General information regarding safe transport 1. -
Page 23: Transport In Horizontal Space
Transportation and Storage 60° 60° Fig. 3: Slinging points for vertical transport of the turbopump without packaging Instructions for vertical transport 2 eye bolts are included in the shipment and are firmly bolted to the turbopump ex works. 1. Transport the turbopump in its permissible position only. 2. -
Page 24: Storage
– Keep the eye bolt for future use. 4.2 Storage We recommend Pfeiffer Vacuum recommends storing the products in their original transport packaging. Storing the turbopump 1. Seal all flange openings with the original protective caps. 2. Seal all other connections (e.g. venting connection) with the corresponding original parts. -
Page 25: Installation
Installation 5 Installation The installation of the turbopump and its fastening is of outstanding importance. The rotor of the turbo- pump revolves at very high speed. In practice it is not possible to exclude the risk of the rotor touching the stator (e.g. due to the penetration of foreign bodies into the high vacuum connection). The kinetic energy released acts on the housing and on the anchoring of the turbopump within fractions of a sec- ond. -
Page 26: Connecting The High Vacuum Side
22.5 W Tbl. 7: Requirements for the dimensioning of customer-specific high vacuum connection Important information for correct installation ► Only use the approved mounting kits of Pfeiffer Vacuum for the high vacuum connection of the turbopump. 5.2.2 Considering earthquake protection NOTICE... -
Page 27: Using A Splinter Shield Or Protective Screen
5.2.3 Using a splinter shield or protective screen Pfeiffer Vacuum centering rings with splinter shield or protective screen in the high vacuum flange pro- tect the Turbopump against foreign matter from the vacuum chamber. The puming speed of the pump is reduced according to the passage guide values and the size of the high vacuum flange. -
Page 28: Mounting Orientations
Installation 5.2.5 Mounting orientations NOTICE Destruction of the vacuum pump due to failure to observe the type-specific spatial position Impermissible spatial positions lead to pollution of the vacuum pump by operating fluid. There is a risk of pollution of the process vacuum and damage to the vacuum pump up to and including its de- struction. -
Page 29: Attaching Iso-K Flange Onto Iso-K
Flange connection ISO-K to ISO-F, bracket screws Connection with bracket screw 1. For the connection of the turbopump, use only the approved mounting kits from Pfeiffer Vacuum. 2. Connect the flange with the components of the mounting kit according to the figure. -
Page 30: Fig. 10: Flange Connection Iso-K To Iso-F, Hexagon Head Screw And Tapped Hole
Flange connection ISO-K to ISO-F, hexagon head screw and tapped hole Connection of the hexagon head screw and tapped hole 1. For the connection of the turbopump, use only the approved mounting kits from Pfeiffer Vacuum. 2. Place the collar flange over the high vacuum flange of the turbopump. -
Page 31: Attaching Iso-F Flange To Iso-F
Connection of the hexagon head screw and tapped hole 1. For the connection of the turbopump, use only the approved mounting kits from Pfeiffer Vacuum. 2. Attach the turbopump with centering ring to the counter flange according to the figure. -
Page 32: Attaching Cf Flange To Cf-F
Connection of the stud screw and tapped hole 1. For the connection of the turbopump, use only the approved mounting kits from Pfeiffer Vacuum. 2. Screw in the stud screws with the shorter end in the tapped holes on the counter flange. -
Page 33: Fig. 18: Flange Connection Cf-F, Stud Screw And Tapped Hole
Connection of the hexagon head screw and through holes 1. For the connection of the turbopump, use only the approved mounting kits from Pfeiffer Vacuum. 2. If used: Insert the protective screen or splinter shield with clamping lugs downwards in the turbo- pump high vacuum flange. -
Page 34: Filling The Operating Fluid
► Only fill the turbopump with operating fluid after mechanical installation. ► Fill the turbopump with operating fluid via one of the filler screws marked with an oil can symbol only. ► If in doubt, contact Pfeiffer Vacuum. Required consumables ● Operating fluid F3, 50 ml Required tools ●... -
Page 35: Connecting The Fore-Vacuum Side
Use the turbopump only in combination with a suitable backing pump that can deliver up to the required maximum fore-vacuum pressure. To achieve the fore-vacuum pressure, use a suitable vacuum pump or a pumping station from the Pfeiffer Vacuum range. In this case, the backing pump is also controlled directly via the turbopump electronic drive unit interfaces (e.g., relay box or connection cable). -
Page 36: Connecting The Cooling Water Supply
1. With rigid pipe connections, include bellows to attenuate external vibrations. 2. Install a fore-vacuum connection with small flange components, e.g. connection elements and pipe components DN 40 ISO-KF from the Pfeiffer Vacuum Components Shop. 3. Implement measures to counteract the backflow of operating fluids or condensate from the fore- vacuum area. -
Page 37: Connecting Accessories
Cooling water inlet, 1/4" thread 4 Return line Procedure Pfeiffer Vacuum recommends the use of a dirt trap in the supply line. 1. Screw one hose nozzle with sealing ring onto each of the turbopump's cooling water connections. – Tightening torque: max. 15 Nm 2. -
Page 38: Connecting Sealing Gas
2. Note the existing configuration of existing connections and control lines. 3. Connect only matching accessory devices to the electronic drive unit. 4. Use the Y-distributor from the Pfeiffer Vacuum range of accessories if you want to connect 3 or 4 devices. -
Page 39: Grounding The Vacuum Pump
Installation Installing the mains disconnection device 1. Install a mains disconnection device as a main switch. 2. Specify the mains disconnection device according to SEMI-S2. 3. Use a circuit breaker with an interrupting capacity of at least 10 kA. 5.8.2 Grounding the vacuum pump Required aids ●... -
Page 40: Tbl. 12: Terminal Lay-Out Of The Power Supply Connector
There are 2 options for configuring the mains connection for the turbopump. ► Make sure that you have the correct supply voltage. ► Order a corresponding mains connection cable from the Pfeiffer Vacuum accessories range. ► Assemble your own mains connection cable using the HAN 3A connecting socket from the ship- ment. -
Page 41: Operation
Simultaneous loading by means of high drive power (gas throughput, fore-vacuum pressure), high heat radiation, or strong magnetic fields results in uncontrolled heating of the rotor and can destroy the vacuum pump. ► Consult Pfeiffer Vacuum before combining varying loads on the vacuum pump. Lower limit val- ues apply. NOTICE... -
Page 42: Operating Modes
Instructions for operation without control panel 1. Use only the approved Pfeiffer Vacuum mating plug with bridges on the connection of the elec- tronic drive unit. 2. Switch on the mains supply of the turbopump only immediately before operation. -
Page 43: Switching On The Turbopump
6.4.1 Operating mode display via LED LEDs on the electronic drive unit show the basic operating states of the vacuum pump. A differentiated error and warning display is only possible for operation with the Pfeiffer Vacuum display and control unit or a PC. -
Page 44: Temperature Monitoring
Operation Symbol LED status Display Meaning Currentless On, flashing "pumping station OFF", rotation speed ≤ 60 rpm Green On, inverse flashing "pumping station ON", set rotation speed not reached On, constant "pumping station ON", set rotation speed reached On, flashing "pumping station OFF", speed >... -
Page 45: Tbl. 15: Factory Settings For Delayed Venting In Turbopumps
General information for fast venting We recommend fast venting of larger volumes in 4 steps. 1. Use a Pfeiffer Vacuum venting valve for the turbopump, or match the valve cross-section to the size of the recipient and maximum venting rate. -
Page 46: Maintenance
5. Replace the operating fluid at least every 4 years. 6. Have Pfeiffer Vacuum Service replace the rotor bearing of the turbopump at least every 4 years. 7. Consult with Pfeiffer Vacuum Service about shorter maintenance intervals for extreme loads or im- pure processes. -
Page 47: Changing The Operating Fluid
Maintenance 7.3 Changing the operating fluid WARNING Risk of poisoning from contact with harmful substances The operating fluid and parts of the turbopump may contain toxic substances from pumped media. ► Decontaminate affected parts before carrying out maintenance work. ► Prevent health hazards or environmental impacts with adequate safety precautions. ►... -
Page 48: Filling The Operating Fluid
► Only fill the turbopump with operating fluid after mechanical installation. ► Fill the turbopump with operating fluid via one of the filler screws marked with an oil can symbol only. ► If in doubt, contact Pfeiffer Vacuum. Required consumables ● Operating fluid F3, 50 ml Required tools ●... -
Page 49: Replacing The Electronic Drive Unit
Maintenance Fig. 27: The position of the filler screws depends on the mounting orientation. Example: U versions Direction of the high vacuum connection Procedure 1. Unscrew and remove the higher filler screw from the operating fluid pump. 2. Use the syringe and the operating fluid from the turbopump shipment. 3. -
Page 50: Removing Electronic Drive Unit
Maintenance Backing up settings made by the customer The factory operating parameters are always preset in replacement units. All settings made by the customer to the original electronic drive unit are lost when it is replaced. To preserve your custom settings, you have the following options: 1. -
Page 51: Installing The Electronic Drive Unit
Maintenance 7.4.2 Installing the electronic drive unit Required tools ● Allen key, size 3 ● Calibrated torque wrench (tightening factor ≤ 1.6) Fig. 29: Fitting the electronic drive unit 1 Electronic drive unit TC 1200 O-ring 2 Connecting plug Straight edge of the operating fluid pump Installing the electronic drive unit 1. -
Page 52: Confirming The Speed Specification
Tbl. 16: Characteristic nominal rotation speeds of the turbopumps Required aids ● A connected Pfeiffer Vacuum display and control unit. ● Knowledge of the configuration and setting of electronic drive unit operating parameters. Adjusting the nominal rotation speed confirmation 1. Observe the display and control unit operating instructions. -
Page 53: Decommissioning
Procedures for recommissioning the turbopump 1. Check the turbopump for pollution and moisture. 2. Clean the turbopump exterior with a lint-free cloth and a little isopropanol. 3. If necessary, arrange for Pfeiffer Vacuum Service to completely clean the turbopump. 53/74... - Page 54 Decommissioning 4. Observe the total running time of the turbopump and if necessary, arrange for Pfeiffer Vac- uum Service to replace the bearing. 5. Change the turbopump's operating fluid. 6. Install the turbopump according to these instructions (see chapter “Installation”, page 25).
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Page 55: Recycling And Disposal
9.1 General disposal information Pfeiffer Vacuum products contain materials that you must recycle. ► Dispose of our products according to the following: – Iron –... -
Page 56: Malfunctions
► Follow the installation instructions for this turbopump. ► Observe the requirements regarding stability and design of the counter flange. ► Use only original accessories or fixing material approved by Pfeiffer Vacuum for the installation. WARNING Risk of injury caused by the turbopump breaking away with the vibration compensator in the event of a malfunction Sudden jamming of the rotor generates high destructive torques in accordance with ISO 27892. - Page 57 ● Reduce the process gas load. ● Rotor not running ● Check the turbopump for noise development smoothly, defective bear- ● Contact Pfeiffer Vacuum Service. ● Run-up time setpoint ad- ● Extend the run-up time setpoint [P:700] via a dis- justed too low play and control unit.
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Page 58: Service Solutions By Pfeiffer Vacuum
We are always focused on perfecting our core competence – servicing of vacuum components. Once you have purchased a product from Pfeiffer Vacuum, our service is far from over. This is often exactly where service begins. Obviously, in proven Pfeiffer Vacuum quality. - Page 59 Service solutions by Pfeiffer Vacuum 5. Prepare the product for transport in accordance with the provisions in the contamination declaration. a) Neutralize the product with nitrogen or dry air. b) Seal all openings with blind flanges, so that they are airtight.
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Page 60: Spare Parts
Spare parts 12 Spare parts Fig. 31: Spare parts HiPace 1200 Position Designation Size Order number Note Pieces Electronic drive unit TC 1200 refer to the rating plate depending on the connection panel "remote" mating plug PM 061 378 -X with solder tags Supply socket HAN 3 PM 061 200 -T... -
Page 61: Accessories
Optionally with splinter shield or protective screen. Power supply packs and display units Power supply packs for optimal voltage supply of Pfeiffer Vacuum products are characterized by their compact size and adapted power supply with maximum reliability. Display and operating units are used to check and adjust operating parameters. - Page 62 Accessories Benennung Bestellnummer Mounting kit for DN 200 ISO-K to ISO-F, with collar flange, coated centering PM 016 962 -T ring with protection screen, hexagon bolts Mounting kit for DN 200 ISO-K to ISO-F, with collar flange, coated centering PM 016 965 -T ring, stud screws Mounting kit for DN 200 ISO-K to ISO-F, with collar flange, coated centering PM 016 966 -T...
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Page 63: Tbl. 19: Accessories
Accessories Benennung Bestellnummer Sealing gas throttle for HiPace 1200–2300, 52.5 ± 7.5 sccm PM Z01 325 Relay box, shielded, for backing pumps, 1-phase 7 A for TC 400/1200, TM 700 PM 071 284 -X and TCP 350, M12 Relay box, shielded, for backing pumps, 1-phase 20 A for TC 400/1200, TM PM 071 285 -X 700 and TCP 350, M12 TIC 010, adapter for two sensors... -
Page 64: Technical Data And Dimensions
Technical data and dimensions 14 Technical data and dimensions 14.1 General This section describes the basis for the technical data of Pfeiffer Vacuum turbopumps. Technical data Maximum values refer exclusively to the input as a single load. ● Specifications according to PNEUROP committee PN5 ●... - Page 65 Technical data and dimensions Selection field HiPace® 1200 with HiPace® 1200 with HiPace® 1200 with TC 1200, DN 200 TC 1200, DN 200 TC 1200, DN 200 ISO-K ISO-F CF-F Pumping speed for He 1300 l/s 1300 l/s 1300 l/s Pumping speed for N 1250 l/s 1250 l/s...
- Page 66 Technical data and dimensions Selection field HiPace® 1200 with HiPace® 1200 with HiPace® 1200 with TC 1200, DN 200 TC 1200, DN 200 TC 1200, DN 200 ISO-K ISO-F CF-F Mounting orientation 0° (HV flange top) – 0° (HV flange top) – 0°...
- Page 67 Technical data and dimensions Selection field HiPace® 1200 U HiPace® 1200 U HiPace® 1200 U with TC 1200, DN with TC 1200, DN with TC 1200, DN 200 ISO-K 200 ISO-F 200 CF-F Mains connection: voltage 100 – 120/200 – 240 100 –...
- Page 68 Technical data and dimensions Selection field HiPace® 1200 C HiPace® 1200 C HiPace® 1200 C with TC 1200, DN with TC 1200, DN with TC 1200, DN 200 ISO-K, corro- 200 ISO-F, corro- 200 CF-F, corro- sive sive sive Performance curve in gas 650/30240 W/min 650/30240 W/min 650/30240 W/min...
- Page 69 Technical data and dimensions Selection field HiPace® 1200 UC HiPace® 1200 UC HiPace® 1200 UC with TC 1200, DN with TC 1200, DN with TC 1200, DN 200 ISO-K, corro- 200 ISO-F, corro- 200 CF-F, corro- sive sive sive Gas throughput at final rota- >...
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Page 70: Dimensions
Technical data and dimensions 14.3 Dimensions Dimensions in mm DN 200 ISO-K G 1/4 G 1/8 G 1/8 DN 40 ISO-KF Fig. 32: Dimensions HiPace 1200 and HiPace 1200 C | DN 200 ISO-K DN 200 ISO-K G 1/4 G 1/8 G 1/8 DN 40 ISO-KF Fig. -
Page 71: Fig. 35: Dimensions Hipace 1200 U And Hipace 1200 U C | Dn 200 Iso-K
Technical data and dimensions DN 40 ISO-KF G 1/4 G 1/8 G 1/8 DN 200 ISO-K Fig. 35: Dimensions HiPace 1200 U and HiPace 1200 U C | DN 200 ISO-K DN 40 ISO-KF G 1/8 G 1/4 G 1/8 DN 200 ISO-F Fig. -
Page 72: Declaration Of Conformity
DIN EN 61010-1: 2011 DIN EN 61326-1: 2013 DIN EN 62061: 2013 The authorized representative for the compilation of technical documents is Mr. Tobias Stoll, Pfeiffer Vacuum GmbH, Berliner Straße 43, 35614 Asslar, Germany. Signature: Pfeiffer Vacuum GmbH Berliner Straße 43... - Page 73 73/74...
- Page 74 Notizen / Notes:...
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