ZEISS
11 Parts and Tools
NOTICE
Risk of property damage: Spare parts and consumables
Using spare parts or consumables that are not provided by ZEISS can lead to property damage.
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11.1 Consumables
Required Parts/Tools
Schottky field emitter (gun) by DENKA
Multihole aperture
Anode aperture
Extractor aperture
Anode aluminum seal
Copper seal gun head (single use)
Tip seal for pre-vacuum pump BOC Edwards
XDS 10
Scintillator for SE detector
Ion source (gallium)
With GIS upgrade: Precursors
11.2 Spare Parts
Required Parts/Tools
Chamber door O-ring
Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000
Only genuine spare parts and consumables supplied by ZEISS are to be used in servicing
the microscope.
Contact your ZEISS service representative for information regarding how to order spare
parts and consumables.
Unless otherwise authorized by ZEISS, all spare parts and consumables must be installed by
a ZEISS service representative.
11 Parts and Tools | 11.1 Consumables
Part Number
000000-0302-460
On request
On request
348520-0097-001
348520-0266-001
000000-0546-290
000000-0113-989
348306-8142-000
360100-0000-540
On request
Part Number
000000-0476-960
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