Siargo FS34100 User Manual

Mems mass flow sensors

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FS34100 User Manual
VA.0.01
MEMS mass flow sensors
©2022 Siargo Ltd.

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Summary of Contents for Siargo FS34100

  • Page 1 FS34100 User Manual VA.0.01 MEMS mass flow sensors ©2022 Siargo Ltd.
  • Page 2 Santa Clara, CA 95054 Tel: +1(408)969.0368 Email: info@siargo.com © Copyright 2022 by Siargo Ltd. Siargo Ltd. and its subsidiaries reserve the right to change the specifications and/or descriptions without prior notice. For further information and updates, please visit: www.Siargo.com www.Siargo.com FS34100 User Manual...
  • Page 3 Do not apply for any unknown or non-specified gases that may damage the product. x For remote data, please be sure the meter is properly configured. www.Siargo.com FS34100 User Manual P a g e...
  • Page 4: Table Of Contents

    8.2 Precautions for the best performance of the product ..........20 8.2.1. Comparison with a third-party reference meter ............... 20 8.2.2. Particle contamination and fluidic cleanness ..............21 8.2.3. Apply to a different gas medium ..................21 www.Siargo.com FS34100 User Manual P a g e...
  • Page 5 9. Troubleshooting ..................22 10. Warranty and Liability ................23 11. Service/order contact and other information ..........25 Appendix I: Product evaluation kit ..............26 Appendix II: Document history ............... 27 www.Siargo.com FS34100 User Manual P a g e...
  • Page 6: Overview

    All contact information can be found at the end of this manual. This manual provides essential information for the operation of the FS34100 series of gas mass flow sensors, which is an OEM version of FS4100, for general-purpose gas flow monitor and control applications with the full-scale mass flow rate from 2 to 50 SLPM, and both analog and digital outputs.
  • Page 7: Receipt / Unpack Of The Products

    If the packing box is intact, proceed to open the packing box, and you shall find the product. The power and data cable as shown below may also be found according to the same packing materials. Figure 2.1: FS34100 flow meter Figure 2.2: data cable...
  • Page 8: Knowing The Products

    Exchangeable connector Flow direction Electrical interface, AMP MTE, 5 positions Meter body Figure 3.1: FS34100 parts description 3.2 Power and data cable description Table 3.1: FS34100 (OEM) pin/wire assignments. Wire Color Definition Blue RS485B (-) Green Power supply, 8~24Vdc Analog output, 0.5 ~ 4.5Vdc...
  • Page 9: Mechanical Dimensions

    3.3 Mechanical dimensions Figure 3.3: FS34100 dimensions with BSPT (R1/4”) connectors Figure 3.4: FS34100 dimensions with one-touch connectors Note: * Other threads or compressive types can be customized. ** The mounting screw length <4mm (08) and <9mm (03); and the suggested mounting torque <0.25 Nm.
  • Page 10: Installation

    Note: because the meter has a large dynamical measurement range, it could be normal if you see the small instant www.Siargo.com FS34100 User Manual P a g e...
  • Page 11 The strong electromagnetic interference sources close by or any mechanical shocks at the pipeline may also create malfunctioning of the product. e) Slowly open/close valves at the gas supply piping to prevent abrupt pulse flow impact. www.Siargo.com FS34100 User Manual 10 | P a g e...
  • Page 12: Operation

    Before starting to use this product, check the product specifications that can be found in this manual or the basic information from the datasheet at the company’s website www.Siargo.com. The detailed product technical specifications can be found in Section 7. For a specific application, the pressure rating must not be higher than the system pressure to be measured, and the flow range should also be within the specified ones.
  • Page 13: Rs485 Modbus Communication Protocol

    Refer to Table 3.2 for cable connection. 5.4.1 Hardware connection The RS485 hardware layer is TIA/EIA-485-A, as illustrated below. In this configuration, the product (FS34100) is a slave. Figure 5.1: RS485 hardware 5.4.2 Communication parameters The PC UART communication parameters are listed in table 5.1.
  • Page 14: Frame

    Note: At the time of shipping, the write protection function is enabled except for address and baud rate. Once the user completes the register value change, the write protection will be automatically enabled once again to prevent incidental data loss. www.Siargo.com FS34100 User Manual 13 | P a g e...
  • Page 15 , the user will read Notes “0 (0x0000)” from register 0x0004; “3452(0x0D7C)” from register 0x0005, and “245(0x00F5)” from register 0x0006. Then, the totalizer or accumulated flow rate = ((0 + 3452)*1000 + 245)/1000=3452.245. www.Siargo.com FS34100 User Manual 14 | P a g e...
  • Page 16 Reset or calibrate the offset Value type UINT 16, fixed value 0xAA55 Send the fixed value 0xAA55 to register 0x0027. Notes Please make sure there is no flow before executing this command. www.Siargo.com FS34100 User Manual 15 | P a g e...
  • Page 17: Analog Output (0.5 ~ 4.5Vdc)

    The meter is calibrated to 110% of the specified full-scale flow rate. The typical analog output is indicated below. This over range applies to both analog and digital output. Table 5.5: FS34100 analog output Analog output...
  • Page 18: Pressure Loss

    Flow rate Pressure loss (SLPM) (Pa / PSI) 0 / o 6 / 0.001 15 / 0.002 30 / 0.004 55 / 0.008 95 / 0.014 Figure 5.4: FS34103 pressure loss www.Siargo.com FS34100 User Manual 17 | P a g e...
  • Page 19: Product Selection

    Maximum full scale flow rate (for the value refer to the table below). If the unit is not SLPM or sccm, the unit needs to be specified here. DN (pipe diameter: 03 or 08) www.Siargo.com FS34100 User Manual 18 | P a g e...
  • Page 20: Technical Specifications

    AMPMODU MTE 5 positions Mechanical connection BSPT; One-touch or customized Protection IP40 Storage temperature -20 ~ 70 °C Reference conditions 20°C, 101.325 kPa, air Fluid compatibility Non-corrosive EN61000-2; -3; -4 RoHS/REACH Certified www.Siargo.com FS34100 User Manual 19 | P a g e...
  • Page 21: Technical Notes For The Product Performance

    Another key point to comparing the different flow meters is that as long as the fluidic flow is a continuous flow without pulsation, then the fluidic dynamic will have the system following the Bernoulli equation: www.Siargo.com FS34100 User Manual 20 | P a g e...
  • Page 22: Particle Contamination And Fluidic Cleanness

    Reynold number range where the laminar flow has a sensitive flow profile. www.Siargo.com FS34100 User Manual 21 | P a g e...
  • Page 23: Troubleshooting

    Vibration, unstable flow Check system Valve not work Wire connection, valve Return to factory Offset unstable Circuitry instability Check system, power off No digital interface Wrong address, software Check commands, connection www.Siargo.com FS34100 User Manual 22 | P a g e...
  • Page 24: Warranty And Liability

    The products returned under warranty to Siargo shall be at the user or purchaser's risk of loss and will be returned, if at all, at Siargo's risk of loss. Purchasers or users are deemed to have accepted this limitation of warranty and liability, which contains the complete and exclusive limited warranty of Siargo.
  • Page 25 (5) Any damages incurred by the incorrect usage of the products; (6) Siargo does not provide any warranty on finished goods manufactured by others. Only the original manufacturer's warranty applies;...
  • Page 26: Service/Order Contact And Other Information

    11.Service/order contact and other information Siargo Ltd. is making every effort to ensure the quality of the products. In case of questions and or product support, please contact your direct sales, or in case you need additional assistance, please contact customer service at the address listed below. We will respond to your request in a timely fashion and work with you toward your complete satisfaction.
  • Page 27: Appendix I: Product Evaluation Kit

    Appendix I: Product evaluation kit Siargo offers a product evaluation kit, including a digital data converter, USB data cable, and User Application software, that allows the user to evaluate the product performance on a Microsoft Windows-based computer. For some simple applications with digital data transfer, this kit could serve the purpose.
  • Page 28: Appendix Ii: Document History

    Appendix II: Document history Revision A.0.01 (July 2022) ¾ Update service and sales contact. Revision A.0 (August 2021) ¾ First release. www.Siargo.com FS34100 User Manual 27 | P a g e...

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