Siargo MF5000 Series User Manual

Siargo MF5000 Series User Manual

Mems mass flow meter
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Model MF5000
SIARGO MEMS FLOW SENSOR PRODUCTS
MEMS Mass Flow Meter
VB.4
© 2012 Siargo Ltd.

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Summary of Contents for Siargo MF5000 Series

  • Page 1 Model MF5000 SIARGO MEMS FLOW SENSOR PRODUCTS MEMS Mass Flow Meter VB.4 © 2012 Siargo Ltd.
  • Page 2: Restriction On Use

    Do not use this product in any environments where human safety may be at risk. Only a qualified person from Siargo or a person who is accredited by Siargo can perform troubleshooting services to the product, Siargo is otherwise not liable for any consequences thereafter.
  • Page 3: Table Of Contents

    MF5000 Series User Manual (VB.4) Contents RESTRICTION ON USE SAFETY PRECAUSION Contents 1 Overview 1.1 Siargo's MEMS Thermal Mass Flow Sensor Technology Working Principle 1.3 Volume Flow vs. Mass Flow 2 Models and Selection 2.1 Product Selection 2.2 Physical Dimensions 2.3 Specifications 2.4 Flow Range...
  • Page 4: Overview

    It also enhances the reliability by avoiding the direct contact among the sensors and the flow media. Also, Siargo's sensor design makes it easy to package the sensor in a variety of ways, which significantly expands the applications of the technology.
  • Page 5: Models And Selection

    For further information, please contact manufacturer. The meters are made by referencing to: ISO14511; Gas (A-air; N-nitrogen; O-oxygen; R-argon; C-carbon dioxide; E-helium; H- hydrogen; for other gases, please contact Siargo) Display* (D-with LCD display ; N-without display) Output (A-4~20mA; B-RS485; D-pulse, Options:B,AB,BD,ABD) Maximum working pressure (XXMPa.
  • Page 6: Flow Range

    MF5000 Series User Manual (VB.4) Communication 4~20mA/RS485/Pulse Mechanical Connection NPT; Display Mass flow, accumulated mass flow; Calibration Air 20 C, 101.325 kPa ( other gases upon request); 2.4 Flow Range Flow Range* Model Connection sccm SCMH SLPM SCFM 1/8" 0.15~15...
  • Page 7: Cautions For The Installation

    Wait for about 30 sec, close all of the valves, initializing the meter using the Siargo Gas Meter User Interface software or the handheld device (provided separately, please contact manufacturer for details), to reset the offset.
  • Page 8: 20Ma Output

    For updates of the product certification information, please contact manufacturer or visit www.Siargo.com. Use for other gases such as extreme corrosive and toxic may cause the product malfunctioning or even severe damages. The product sealing is ensured to work under working pressure of 1.
  • Page 9: Warranty

    Siargo more than 365 days after a cause of action has accrued. The products returned under warranty to Siargo shall be at user or purchaser's risk of loss, and will be returned, if at all, at Siargo's risk of loss.
  • Page 10 Contact Europe: Siargo Ltd. IDENTIC Stefanie Trojan 2041 Mi ssion Co llege Bl vd, St e 250 Röhlichstraße 19 Sa nta Cl ara, CA 95054 US A 68723 Oftersheim - Germany Tel:+1(408)969-0368 Tel: +49-(0)6202-923778 Em ail: Info@Si argo.com Mobil: +49-(0)151-19674551 Ht tp: //ww w.

This manual is also suitable for:

Mf5003Mf5006Mf5008Mf5012Mf5019

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