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Only the trained or qualified personnel shall be allowed to perform product services. Use with caution! Be cautious for the electrical safety, even it operates at a low voltage, any electrical shock might lead to some unexpected damages. The gas to be measured should be clean and free of particles. Do not apply this meter for liquid medium. Do not apply for any unknown or non‐specified gases that may damage the product. For remote data, please be sure the meter is properly configured. www.Siargo.com MF4700 User Manual 2 | P a g e ...
9 5.5.2. Communication parameters ...................... 1 9 5.5.3. Frame ............................ 2 0 5.5.4. Function codes .......................... 2 0 5.5.5. Registers ............................ 21 5.6 Analog output (0.5 ~ 4.5Vdc) ...................... 24 6. Product selection and order information............ 2 5 6.1 Product selection .......................... 25 6.2 Order contact and customer support .................... 25 www.Siargo.com MF4700 User Manual 3 | P a g e ...
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Precautions for the best performance of the product .............. 27 8.2.1. Comparison with a third party reference meter ................ 27 8.2.2. Particle contamination and fluidic cleanness ................ 2 8 8.2.3. Apply to a different gas medium .................... 2 8 9. Troubleshooting .................. 29 10. Warranty and Liability ................ 3 0 11. Service contact .................. 3 2 Appendix I: Product evaluation kit .............. 3 3 Appendix II: Document history ............... 3 4 www.Siargo.com MF4700 User Manual 4 | P a g e ...
1. Overview All contact information can be found at the end of this manual. This manual provides essential information for the operation of the MF4700 series of gas mass flow meters for general‐purpose gas flow monitor and control applications. The product performance, maintenance, and trouble‐shooting as well as the information for product order, technical support, and repair are also included. MF4700 mass flow meters are designed for general purpose precise industrial gas processing monitor, or control. The meter series cover a wide dynamic flow range with a working pressure rating of up to 1.0 MPa, and a temperature ranging from ‐10 to 55°C. The meters are operated with Siargo’s proprietary MEMS calorimetric mass flow sensors together with the smart control electronics. The sensor surface is passivated with silicon nitride ceramic materials together with a water/oil proof nano‐coating for performance and reliability. The meter body is made of either aluminum alloy or stainless steel that is available for applications of most of the gases. www.Siargo.com MF4700 User Manual 5 | P a g e ...
2. Receipt / unpack of the products Upon receipt of the products, please check the packing box before the dismantlement of the packing materials. Ensure no damages during shipping. If any abnormality is observed, please contact and notify the carrier who shipped the product and inform the distributors or sales representatives if the order is not placed directly with the manufacturer, otherwise, the manufacturer should be informed as well. For any further actions, please refer to the return and repair section in this manual. If the packing box is intact, proceed to open the packing box, and you shall find the product (either the meter with LED display or the meter without display per your actual order). The power adapter and/or data cable as shown below may also be found according to your actual order. Figure 2.1: MF4700 flow meter Figure 2.2: FS4700 flow meter Figure 2.3: data cable Please check immediately for the integrity of the product as well as the power and data cable, if any abnormal is identified, please notify the distributor/sales representative or manufacturer as soon as you can. If any defects are confirmed, an exchange shall be arranged immediately via the original sales channel. (Note: the LED display shall not be lighted until the power cable is plugged in). This user manual shall also either be included in the packing box or via an online request for an electronic version. In most cases, this manual shall be made available to the customer before the actual order. The standard cable has an AMPMODU MTE (5 positions) compatible connector with a length of 0.5 meters. www.Siargo.com MF4700 User Manual 6 | P a g e ...
Table 3.1: MF4700 pin/wire assignments. Wire Color Definition 1 Blue RS485B 2 Green Analog output 3 Red Power supply, 8 ~ 24Vdc 4 Black Ground 5 Yellow RS485A The standard cable has an AMPMODU MTE (5 positions) compatible connector with a length of 0.5 meters. Figure 3.2: MF4700 connection and cable www.Siargo.com MF4700 User Manual 7 | P a g e ...
Please make sure the data cable meets industrial standards with proper shielding. g) Once the external power is successfully connected, the LED should be lighted up with the proper information displayed works correctly. h) Slowly open the valve(s) of the gas supply if any, upstream or downstream, or both of the pipeline. And then slowly open the valve of the meter, the meter should then start to measure the flow in the pipeline. Note: because the meter has a large dynamical measurement range, it www.Siargo.com MF4700 User Manual 10 | P a g e ...
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could be normal if you see the small instant flow rate even if there is no flow in the pipeline. If the value consistently present, double‐check the pipe leakage and then reset the offset if you are sure there is no leakage or flow. h) This will conclude the installation. Cautions a) Don't alter any parts of the product. b) Ensure the electrical connection is properly done per the instructions. c) Make sure no mechanical stresses in the connections. d) The strong electromagnetic interference sources close by or any mechanical shocks at the pipeline may also create malfunctioning of the product. e) Slowly open/close valves to prevent abrupt pulse flow impact. www.Siargo.com MF4700 User Manual 11 | P a g e ...
Although this product complies with the CE‐required EMC regulations, it also requires the product to be used according to the standard electrical device practice. Before connecting the meter with external DC power or an AC‐DC adapter, make sure the supply voltage is within the range of the specified ones in Section 7. Be cautious that the standard electrical device precautions such as EDS (electrostatic discharge) and DC voltage are observed. Excessive electrostatic discharge may damage the product. The manufacturer‐supplied power and data cable have a locking fixture. Lock the cable and make sure it is properly engaging and will not be accidentally got unplugged. Half‐duplex RS485 Modbus is used for digital data communication. Make sure the wires are properly connected at the receiver side. www.Siargo.com MF4700 User Manual 12 | P a g e ...
(SL), and the maximum can be 9,999,999.9 SL, or “normal cubic meters” (Nm ), and the maximum can be 999,999.99 Nm . The first four digits of the accumulated flow rate are indicated by the “I” LED light, and the last four digits are represented when the “II” LED light is on. The “I” and “II” LED lights will be automatically switched when the accumulated flow rate is displayed. The accumulated flow rate will be automatically saved every three minutes. At the time of the power failure or cut‐off, the value will be representing the latest saved ones. www.Siargo.com MF4700 User Manual 13 | P a g e ...
5.4.2. MENU function input sequence At the flow measurement (main) display, press the three MEMU keys, it will allow the user to perform a variety of settings of the product. The following graph details the key sequence for each function, and some detailed explanations are followed after the graphic presentation. Figure 5.2: MF4700 menu flow chart www.Siargo.com MF4700 User Manual 14 | P a g e ...
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Available: 0 ~ 110, means of 0% ~ 110% 6. 0 … 110 full scale. Default value is 100, means of 100% full scale. Set the lower flow rate alarm Available: 0 ~ 110, means of 0% ~ 110% 7. 0 … 110 full scale. Default value is 0, means of 0% full scale. 8. 0 / 1 / 2 / 3 Set the display decimal Set the communication baud rate Available: 48, 96, 192, 384, means of baud 9. 48/ 96/192/384 rate 4800, 9600, 19200, 38400. Default value is 384, means of baud rate 38400. Set the GCF (gas conversion factor) Available: 10 ~ 999, means of GCF = 100 ~ A. 10 … 999 9990. Default value is 100, means of GCF = 1000. Set the accumulated flow rate unit. scc or SL (instant flow rate unit is b. 0 / 1 sccm); SL or Nm (instant flow rate unit is SLPM). Note: During this process, the meter will continue to measure the flow without being interrupted. www.Siargo.com MF4700 User Manual 15 | P a g e ...
Use this function with caution and make sure there is no flow when executing this function, otherwise, it may incur some additional errors to the measurement. 3) Set the Modbus address of the meter Use this function to set the RS485 Modbus address of the meter. This setting can also be done via the RS485 communication. 4) Set the response time Use this function to change the response time of the meter. The default one is 10 msec. Increasing the response time will allow more data average and output a stabler flow rate if the actual flow rate may have some undesired fluctuation. www.Siargo.com MF4700 User Manual 16 | P a g e ...
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This function allows the user to set a minimum flow rate below which an alarm will be triggered with a flashing screen. 8) Set the display decimal The user can use this function to alter the default one decimal display. Options are listed below for each flow range: Table 5.2: decimal options Flow range Decimal options 0 ~ 100, 200, 500 sccm 0, 1 0 ~ 1, 2, 5 SLPM 0, 1, 2, 3 0 ~ 10, 20, 50 SLPM 0, 1, 2 0 ~ 100, 200, 300, 500, 800 SLPM 0, 1 0 ~ 1000 SLPM 0 9) Set the communication baud rate This function allows a MENU entry of the RS485 communication baud rate. www.Siargo.com MF4700 User Manual 17 | P a g e ...
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The default value of the GCF is 1000 (1.000). For example, if one wants to alter the standard temperature to 0°C, the factor can be calculated using the gas equation: PV/T = constant: GCF = 1000 x V(new) / V (20°C) = T (o°C) / T (20°C) = 1000 x 273 / 293 = 932 Then the gas conversion factor would be 932. In some cases, the actual system may have a constant deviation from that at the calibration, this GCF can also be used to adjust. For additional information, please contact the manufacturer. 11) Set the accumulated flow rate unit. When instant flow rate unit is sccm, accumulated flow rate unit can be set to scc or SL; When instant flow rate unit is SLPM, accumulated flow rate unit can be set to SL or Nm . www.Siargo.com MF4700 User Manual 18 | P a g e ...
Refer to Table 3.2 for cable connection. 5.5.1. Hardware connection The RS485 hardware layer is TIA/EIA‐485‐A, as illustrated below. In this configuration, the product (MF4700) is a slave. Figure 5.3: RS485 hardware 5.5.2. Communication parameters The PC UART communication parameters are listed in table 5.3. Table 5.3: PC UART communication parameters Protocol Parameters RTU Baud rate (Bits per second) 38400 bps Start bits 1 Data bits 8 Stop bits 1 Even/Odd parity None Bits period 104.2 µsec Bytes period 1.1458 msec Maximum data length 20 Maximum nodes 247 www.Siargo.com MF4700 User Manual 19 | P a g e ...
The Modbus function codes applied for the product are the sub‐class of the standard Modbus function‐codes. These codes are used to set or read the registers of the product: Table 5.5: function codes Code Name Functions 0x03 Read register Read register(s) 0x06 Set single register Write one single 16‐bit register 0x10 Set multiple registers Write multiple registers www.Siargo.com MF4700 User Manual 20 | P a g e ...
Disable a specific parameter entry (W) 0x0014 40021 (0x0014) The detailed information of each register is described below: Y: enabled; N: disabled Write Y Address 0x0001 Read Y Description Address of the product Value type UINT 16 Values from 1 to 255 except for 157 (0x9d). Notes 0 is the broadcast address. Write N Flow rate 0x0002 ~ 0x00o3 Read Y Description Current flow rate Value type UINT 16 Flow rate = [value (0x0002) * 65536 + value (ox0003)] / 1000 e.g.: for a flow rate of 123.456 SLPM, the user will read “1 (0x0001)” from Notes register 0x0002 and “57920 (0xE240)” from register 0x0003, therefore Current flow rate = (1 * 65536 + 57920) / 1000 = 123.456 www.Siargo.com MF4700 User Manual 21 | P a g e ...
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“245(0x00F5)” from register 0x0006. Then, the totalizer or accumulated flow rate = ((0 + 3452) * 1000 + 245) / 1000 = 3452.245. Write Y Baud rate 0x0015 Read Y Description Communication baud rate Value type UINT 16 Value=0: 4800; 1: 9600; 2: 19200; 3: 38400. Notes The default value is 3. Write Y Gas conversion factor 0x0016 Read Y Description Gas conversion factor Value type UINT 16 The value is 1000 times the calculated value. The value is used to change the reference conditions, adjust the system deviation, and calibrations for Notes different gases. It is recommended that write protection should be applied after this value is changed. www.Siargo.com MF4700 User Manual 22 | P a g e ...
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Write Y Offset reset 0x0027 Read N Description Reset or calibrate the offset Value type UINT 16, fixed value 0xAA55 Send the fixed value 0xAA55 to register 0x0027. Notes Please make sure there is no flow before executing this command. Write Y Write protection 0x0014 Read N Description Write protection of a specific value Value type UINT 16, a fixed value of oxAA55 This function disables the write‐protected register and allows you to modify the corresponding register’s value. For example, to change the gas conversion factor, the user needs to send 0xAA55 to the register 0x0016, and then the Notes write function will be enabled (write protection is disabled). After the write execution is completed, the firmware will automatically re‐enable the write protection. www.Siargo.com MF4700 User Manual 23 | P a g e ...
The product offers a voltage analog output of the instant flow rate. Refer to Table 3.2 for the wire connection for this output. The meter is calibrated to 110% of the specified full‐scale flow rate. The typical analog output is indicated below. This over range applies to both analog and digital output. Table 5.7: MF4700 analog output Analog output Flow rate (Vdc) 0.00 0.50 10 % F.S. 0.90 20 % F.S. 1.30 40 % F.S. 2.10 50 % F.S. 2.50 70 % F.S. 3.30 90 % F.S. 4.10 100 % F.S. 4.50 110 % F.S. 4.90 120 % F.S. 4.90 Figure 5.4: MF4700 analog output www.Siargo.com MF4700 User Manual 24 | P a g e ...
0 ~ 100, 200, 300 0 ~ 200, 500 MF4719 19.0 N6 ‐ NPT 3/4”, B6 ‐ BSPT 3/4” 0 ~ 500, 800, 1000 0 ~ 1000, 2000 6.2 Order contact and customer support The sales offices and the sales distributors/representatives are listed at the end of this document. For small quantities, the order can be placed either through the Siargo website: www.siargo.com or the sales office. For large quantities, please contact the sales office, distributors, or sales representatives. Siargo is making every effort to ensure the quality of the products. In case of questions and/or product supports, please contact the customer service listed at the end of the document. www.Siargo.com MF4700 User Manual 25 | P a g e ...
20°C, 101.325 kPa, air Fluid compatibility Non‐corrosive CE EN61326‐1; ‐2; ‐3 MF/FS4701 MF/FS4703 MF/FS4708 MF4712 MF4719 Maximum overflow 6 30 200 600 2000 SLPM Maximum flow 1 4 30 100 300 SLPM/sec change Note: 1. For other features or specifications not listed, please contact the manufacturer. www.Siargo.com MF4700 User Manual 26 | P a g e ...
Another key point to compare the different flow meter is that as long as the fluidic flow is a continuous flow without pulsation, then the fluidic dynamic will have the system following the Bernoulli equation: www.Siargo.com MF4700 User Manual 27 | P a g e ...
Therefore, measurement by the meter for a gas medium other than the calibration gas would bear larger measurement errors, particularly at the low Reynold number range where the laminar flow has a sensitive flow profile. www.Siargo.com MF4700 User Manual 28 | P a g e ...
Cable connection incorrect Check cable No signal / display No flow or clogging Check flow and contamination Power regulator failure Return to factory Sensor failure Return to factory Large errors or unexpected Particles, fluid type Check system flow rate Erroneous or large noise Vibration, unstable flow Check system Valve not work Wire connection, valve Return to factory Offset unstable Circuitry instability Check system, power off No digital interface Wrong address, software Check commands, connection No wireless, BT cannot pair Wrong model, data jam Check model, power off/on www.Siargo.com MF4700 User Manual 29 | P a g e ...
Siargo makes no warranty, representation, or guarantee and shall not assume any liability regarding the suitability of the products described in this manual for any purposes that are not specified in this manual. The users shall be held for full responsibility for validating the performance and suitability of the products for their particular design and applications. For any of the misusage of the products out of the scope described herein, the user shall indemnify and hold Siargo and its officers, employees, subsidiaries, affiliates, and sales channels harmless against all claims, costs, damages, and expense or reasonable attorney fee from direct or indirect sources. Siargo makes no other warranty, express or implied, and assumes no liability for any special or incidental damage or charges, including but not limited to any damages or charges due to installation, ...
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(2) Products that have been subject to chemical attacks, including exposure to corrosive substances or contaminants. In the case of battery usage, long term discharge or leakage induced damages; (3) Products that have been opened or dismantled for whatever reasons; (4) Products that have been subject to working conditions beyond the technical specification as described by this manual or related datasheet published by the manufacturer; (5) Any damages incurred by the incorrect usage of the products; (6) Siargo does not provide any warranty on finished goods manufactured by others. Only the original manufacturer's warranty applies; (7) Products that are re‐sold by unauthorized dealers or any third parties. www.Siargo.com MF4700 User Manual 31 | P a g e ...
11. Service contact Siargo Ltd. is making every effort to ensure the quality of the products. In case of questions, and or product supports, please contact customer service at the address listed below. We will respond to your request in a timely fashion and will work with you toward your complete satisfaction. Customer service and all orders should be addressed to Siargo Ltd. 3100 De La Cruz Boulevard, Suite 210, Santa Clara, California 95054, USA Phone: +01(408)969‐0368 Email: info@Siargo.com For orders, please provide an accurate and full postal address. Siargo will not ship to P.O. Boxes or via a third party. For further information and updates, please visit www.Siargo.com. www.Siargo.com MF4700 User Manual 32 | P a g e ...
The USB Cable to connect cable connected to the PC is also included. to the product For most of the product, the power from the PC via the USB cable will be sufficient to power the sensor product, no external power will be USB cable to required. However, for multiple sensors in serial, connect to PC the power via the USB cable may not be enough, an external power adapter with 8 ~ 24Vdc will External power be required. adapter (optional) www.Siargo.com MF4700 User Manual 33 | P a g e ...
Appendix II: Document history Revision B.2 (June 2021) Corrections. Revision B.1 (March 2021) Reformat, corrections, add the evaluation kit. Revision A.2 (July 2019): Update the MENU key functions. www.Siargo.com MF4700 User Manual 34 | P a g e ...
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