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MEMS Mass flow Meter
MF4600 series
ISO 9001
ISO 14001
GB/T 28001
Please read this manual for ensuring correct use of
this product. Make the manual available for easy access.
User manual
(VA.9)
SIARGO LTD.
SIARGO
Introduction
MF4600 series mass flow meters are made with Siargo's proprietary MEMS sensing
technology. It applies for clean and dry gas metering and control. The meter is designed
with the structure of a rotameter but with the full capability of a digital gas mass flow
metrology and LED display. Both instant and accumulated flowrate can be read and
displayed. The front buttons let user to access and adjust the parameters as well as stored
data. The standard RS485 Modbus enables the remote access and integration.
Features
Direct mass flow measurement with high accuracy
Multiple sensing elements for extended rangeability over 100:1
Easy remote accessible user interface with RS485 Modbus and/or linearized analog data
Bright LED display for instant and accunulated flowrate with on-site access via front buttons
Record flowrate patterns with over range indication
Easy for remote communication and integration
Compatible with traditional rotameter mechanical connections
Flow range and mechanical dimensions can be fully customized
User Manual
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Table of Contents
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Summary of Contents for Siargo MF4600 Series
- Page 1 Introduction MF4600 series MF4600 series mass flow meters are made with Siargo’s proprietary MEMS sensing technology. It applies for clean and dry gas metering and control. The meter is designed with the structure of a rotameter but with the full capability of a digital gas mass flow metrology and LED display.
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Page 2: Specifications
User Manual User Manual SIARGO SIARGO Specifications Flow Characteristics Anglog Output Characteristics Parameters MF4601 MF4603 MF4608 Units 0 ~ 100, 200, 500 sccm Flow Rate (sccm/SLPM) Analog Output (Vdc) 5 . 0 Flow Range 4 . 5 0 ~ 1, 2, 5... -
Page 3: Pressure Drop
User Manual User Manual SIARGO SIARGO Pressure Drop Dimensions FS4601 FS4603 Flow Rate (sccm) Presure Drop (Pa) Flow Rate (SLPM) Presure Drop (kPa) 1300 1850 2000 1800 1600 1400 1200 1000 Mass flow rate (sccm) Mass flow rate (SLPM) FS4608... -
Page 4: Product Selection
Up key Gas (A - air; B - N O; C- CO ; N - N ; O - O ; R - Ar; for other gases, please contact Siargo) LED display Output ( V - Analog, BV - Both analog and RS485,... -
Page 5: Operation
User Manual User Manual SIARGO SIARGO Operation Menu settings Operation Mode The Menu Settings will allow the user to execute keyboard lock/unlock, reset accumulated The meter shall display instant, accumulated and I-LED on II-LED on flowrate, reset offset, set time, response time, instant flow decimal point etc. - Page 6 User Manual User Manual SIARGO SIARGO Decimal setting for instant flowrate MENU SETTING MODE This function allows user to set the decimal point of instant flowrate. Instant Flow Rate Note: (1) When full scale flowrate is 100, 200 or 500 sccm, 0 or 1 decimal can be set.
- Page 7 User Manual User Manual SIARGO SIARGO 2. Communication parameter 4. Function code The UART parameter is shown as below table: MF4600 Modbus Function-code is a subclass of Standard Modbus Function-code. By using these function-code, We can set or read the registers of MF4600.
- Page 8 User Manual User Manual SIARGO SIARGO Flow meter WRITE WRITE 0x0001 0x0016 Address READ READ Description The address of MF4600 in modbus protocol Description The gas correction factor. Note: Need to set write-protect. Value type Value type UINT16 UINT16 Value from 1 to 255 except 157 (0x9d).
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Page 9: Safety And Warranty
201-A/B-90 epoxy. Other wetted materials may be exposed are 84-3J Customer service and Contact wire sealant and FR-4 fiber glass. Siargo shall guarantee its product quality and ensure the quality assurance in its Safety Precautions entire manufacture process. For any questions or technical support, please contact The product is designed for use with general purpose gases such as air and at the following address and we shall response timely.
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