Related Manuals for Siargo MF4003
Summary of Contents for Siargo MF4003
- Page 1 Model MF4000 SIARGO MEMS FLOW SENSOR PRODUCTS MEMS Mass Flow Meters VB.4 Sold in North America by: Servoflo Corporation 75 Allen Street Lexington, MA 02421 Tel: 781-862-9572 www.servoflo.com / info@servoflo.com © 2014 Siargo Ltd.
- Page 2 Suite 250 Santa Clara, CA 95054 Tel: +1(408)969.0368 Email: info@siargo.com © Copyright 2014 by Siargo Ltd. Siargo Ltd. and its subsidiaries reserve the rights to change the specifications and/or descriptions without prior notice. For further information and updates, please visit: www.Siargo.com...
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Page 3: Table Of Contents
Display refresh setting Maximum / minimum flow rate record clearing System default retrieval Decimal setting Safety and Maintenance....................Wetted materials and compatibility Safety precautions Customer Service and Order..................... Appendix RS232 Communication Protocol............... Siargo MEMS Mass Flow Meters Siargo Ltd. Page 1... -
Page 4: Features
Aeration cable Gas generated plasma monitor Vacuum applications Preservation of oxygen devices Anesthesia Ventilator Ventilation equipment detection devices Other industrial applications such as welding Siargo MEMS Mass Flow Meters Siargo Ltd. Page 2... -
Page 5: Working Principle And Package
Output Interface Converter Power Module EEPROM Display and Key High-Speed 8-Bit 5V Power Supply Driver Select Microcontroller Driving Circuit 4-digit display Buffer Amplifier Filter MEMS Converter Sensor Chip Signal Conditioning Circuit Siargo MEMS Mass Flow Meters Siargo Ltd. Page 3... -
Page 6: The Meters
Keyboard 3 keys Pins Out 5 Pins, NS-TECH CD R-5 Calibration Air @ 20°C,101.325kPa Package Polycarbonate 55 (with BSPT 1/4 (R 1/4) connection) Weight 74(with O4,O8 connection), 71(with O6 connection) Description Siargo MEMS Mass Flow Meters Siargo Ltd. Page 4... -
Page 7: Dimensions
* Max. flow rate number only, for example, 5 meaning full scale flow rate of 5 SLPM. For CO and N O, selectable: 2, 3 or 4 SLPM (without 5 SLPM) for MF4003; 10, 20, 30 or 40 SLPM (without 50 SLPM) for MF4008;... -
Page 8: Installation And User Interface
The flow rate unit is SLPM. 3. When the flow rate exceeds the maximum allowable flow rate, I-LED will blink. 4. When the flow rate exceeds the minimum allowable flow rate, II-LED will blink. Siargo MEMS Mass Flow Meters Siargo Ltd. Page 6... -
Page 9: Flow Accumulation Mode
NOTE: Before performing automatic offset calibration, please ensure that the gas in the pipe is static, i.e., at zero flow. Otherwise, it may cause inaccuracy during the measurement. Siargo MEMS Mass Flow Meters Siargo Ltd. Page 7... -
Page 10: Keyboard Lock
7.on(Blink) Push Push Push No decimal Push Push Push Decimal digits =1 Decimal digits =2 Decimal digits =3 digits 8. 1(Blink) 8. 2(Blink) 8. 3(Blink) 8. 0(Blink) Push Push Push Push Siargo MEMS Mass Flow Meters Siargo Ltd. Page 8... -
Page 11: Response Time Setting
The electronic sealing is provided by RTV (room temperature vulcanizing) silicone sealant WR-704 composed of HOCH3 (SiO) nCH3H. Siargo MEMS Mass Flow Meters Siargo Ltd. Page 9... -
Page 12: Safety Precautions
All maintenance of the meter should be done by trained and certified personnel by Siargo, Ltd. products. Customer Service and Order Siargo Ltd. -
Page 13: Appendix Rs232 Communication Protocol
10msec (which can be Data link layer protocol used for the master to judge the overtime). Both the master and slave (MF4000) have the same Siargo MEMS Mass Flow Meters Siargo Ltd. Page 11... - Page 14 9D 78 01 STATE CRC 0D 1 byte. Reset all the parameters to default (Automatic) Description 1, Reset the default response time (10msec); 2, Reset the default GDCF (1000); 3, Reset the default offset. Siargo MEMS Mass Flow Meters Siargo Ltd. Page 12...
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