Related Manuals for Siargo FS5001L
Summary of Contents for Siargo FS5001L
- Page 1 FS5001L User Manual VC.0.01 MEMS Mass flow sensors for manifold installation ©2022 Siargo Ltd.
- Page 2 Copyright 2022 and Liability Disclaimer Siargo Ltd. and its subsidiaries reserve the right to change the specifications and/or descriptions without prior notice. Siargo and its subsidiaries shall not assume any inaccuracy or errors in this manual. For further information and updates, please visit www.Siargo.com.
- Page 3 Do not apply for any unknown or non-specified gases that may damage the product. www.Siargo.com FS5001L User Manual...
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Page 4: Table Of Contents
8.2.3 Excessive humidity or condensation ................16 8.2.4 Metrology verification ....................16 9. Warranty and Liability ................17 10. Service contact and information ...............19 Appendix I: Sensor evaluation kit ..............20 Appendix II: Document history ............... 21 www.Siargo.com FS5001L User Manual... -
Page 5: Overview
1. Overview All contact information can be found at the end of this manual. This manual provides essential information for the FS5001L series of mass flow sensors for process control and instrumentation including gas chromatography applications. The product performance, maintenance, and troubleshooting, as well as the information for product order, technical support, and repair, are also included. -
Page 6: Receipt / Unpack Of The Products
FS5001L Power and data cable (optional) Figure 2.1: FS5001L flow sensor and accessories Please check immediately for the integrity of the product and the power and data cable; if any abnormality is identified, please notify the distributor/sales representative or manufacturer as soon as you can. -
Page 7: Knowing The Products
DO NOT connect or disconnect the sensor cable when power is on!! It will damage the electronic chipsets inside the sensor module! Note: 1. Power supply: The FS5001L requires a power supply of 8 ~ 24 Vdc. No particular requirements for the external power supply, but standard industrial power cautions should be applied. -
Page 8: Mechanical Dimensions
3.3 Mechanical dimensions Figure 3.3: FS5001L: 0…6 SLPM model mechanical dimensions. Figure 3.4: FS5001L: 0…15SLPM model mechanical dimensions. www.Siargo.com FS5001L User Manual... -
Page 9: Installation
Figure 3.5: The mechanical dimensions for FS5001L with optional Φ4 mm one-touch connection block. 4. Installation Do not open or alter any part of the product, which would lead to malfunction and irrecoverable damage. For the installation, make sure the leakage proof of the connections and all electrical precautions are applied. -
Page 10: Basic Operation
C address is set to Bit 7 ~ Bit 1. E.g. if the I C address is 1 (0000 001x), the write address will be 0x02 (0000 0010) and the read address will be 0x03 (0000 0011). 3. The write protection is a one-time effective function. www.Siargo.com FS5001L User Manual... -
Page 11: I 2 C Interface Read/Write Sequences
5.3 I C interface read/write sequences www.Siargo.com FS5001L User Manual... -
Page 12: Product Selection
Gas: A – air; C – CO2; E – He; H – H2; N – N2; O – O2; R – Ar. For other gases, please contact the manufacturer. Output: V – analog; EV – I C and analog. Full scale flow rate: 200, 500, 1000, 2000, 4000, 6000, 10000, and 15000 sccm. www.Siargo.com FS5001L User Manual... -
Page 13: Product Performance
RoHS; REACH IEC 61000-4-2; 4-8 Note: 1. Allow the product to warm up for 60 seconds for the best performance. 2. Response time shown is the default. It can be programmed to the fastest <2 msec. www.Siargo.com FS5001L User Manual... -
Page 14: Typical (Analog) Output
Figure 7.2: Upper row: from left to right, for models of full scale up to 1000 sccm; and of full scale from 2000 to 6000 sccm. Lower row: models of full scale from 10000 to 15000 sccm (10 to 15SLPM). www.Siargo.com FS5001L User Manual... -
Page 15: Technical Notes For The Product Performance
Unlike some other products on market, the design of the sensor has a built-in pressure balancer that prevents membrane deformation due to altitude changes. Therefore, the sensor is intrinsically insensitive to altitude change-induced errors. The specified altitude in Sec 7.1 has been fully tested. www.Siargo.com FS5001L User Manual... -
Page 16: Excessive Humidity Or Condensation
If such cases are present, please contact the manufacturer for further solutions. For temperature and humidity measurement, because of the small package space, the response of the humidity could be slower than specified. For additional information, please contact the manufacturer. www.Siargo.com FS5001L User Manual... -
Page 17: Warranty And Liability
The products returned under warranty to Siargo shall be at the user or purchaser's risk of loss and will be returned, if at all, at Siargo's risk of loss. Purchasers or users are deemed to have accepted this limitation of warranty and liability, which contains the complete and exclusive limited warranty of Siargo. - Page 18 (5) Any damages incurred by the incorrect usage of the products; (6) Siargo does not provide any warranty on finished goods manufactured by others. Only the original manufacturer's warranty applies;...
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Page 19: Service Contact And Information
10.Service contact and information Siargo Ltd. is making every effort to ensure the quality of the products. In case of questions and or product support, please contact your direct sales, or in case you need additional assistance, please contact customer service at the address listed below. We will respond to your request in a timely fashion and work with you toward your complete satisfaction. -
Page 20: Appendix I: Sensor Evaluation Kit
Appendix I: Sensor evaluation kit Siargo offers a sensor evaluation kit, including a digital data converter, USB data cable, and User Application software, that allows the user to evaluate the product performance on a Microsoft Windows-based computer. The user can read and visualize the flow rate of the product, obtain the totalized values, and save the data for further analysis. -
Page 21: Appendix Ii: Document History
¾ Corrected the mechanical dimensions to 40.6 x 36.3 x 15.7 mm ¾ Revised the I C command description; ¾ Revised the wetted materials. Revision A.1 (December 2017): ¾ Added the I C commands of response time. www.Siargo.com FS5001L User Manual...
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