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High Purity Chemical Valve
Space saving, compact type is available.
Space saving, compact type is available.
Compact type is introduced as a new series to complement
conventional Series LVC with integral fittings.
Select a series according to the flow rate and
installation requirements.
Mounting base dimensions conform to SEMI
Standard, F65-1101. (Except for LVD10)
Actuator section
Body
Integral fittings construction
®
HYPER FITTING
‚
Series LQ1 is used.
Integral tubing (construction)
Piping from 4 directions are possible.
(Made to Order)
r
e
q
w
Integral clean one-touch fitting construction
(Series KP is used.)
Can select female thread (M5 x 0.8).
Compact Type
Series
Dimension across inlet/
Dimension across inlet/
outlet ports: Reduced by up to
outlet ports: Reduced by up to
LVD
LVC
Class2
Class3
LVD20
LVC30
LVC20
A
54.5
54.5
79
B
79
67
106
A
CAT.ES70-24
-UK
LVD
29
29
%
%
B
(mm)
Class4
Class5
LVD30
LVD40
LVD50
LVC40
LVC50
79.5
96
82
129
105.5
83
131
93
154
114
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Related Manuals for SMC Networks LVD Series
Summary of Contents for SMC Networks LVD Series
- Page 1 CAT.ES70-24 High Purity Chemical Valve Compact Type Space saving, compact type is available. Space saving, compact type is available. Compact type is introduced as a new series to complement conventional Series LVC with integral fittings. Select a series according to the flow rate and installation requirements.
- Page 2 Guide ring Eliminates lateral motion of the poppet which reduces internal leakage. Piston damper Absorbs piston momentum to minimize Diaphragm impact-induced particle generation. (PTFE) Special diaphragm construction ensures Buffer gentle opening and closing that prevents the formation of micro-bubbles. Protects diaphragm from deformation Minimal residual liquid and damage due to back pressure.
- Page 3 Integral Fitting Type (Hyper Fittings) Series How to Order LVD 1 0 Body class Option Symbol Body class Orifice dia. None ø2 Valve type With flow rate adjustment ø4 With by-pass N.C. ø8 With flow rate adjustment & by-pass N.O. ø10 Note) Refer to “Variations”...
- Page 4 Series Standard Specifications Model LVD10 LVD20 LVD30 LVD40 LVD50 Metric 3, 4 4, 6 6, 8, 10 10, 12 12, 19 Tubing O.D. Inch 1/8, 3/16, 1/4 1/4, 3/8 3/8, 1/2 1/2, 3/4 Orifice diameter ø2 ø4 ø8 ø10 ø16 Av x 10 31.2 45.6...
- Page 5 Series Integral Fitting Type (Hyper Fittings) Construction Standard type N.O. type Double acting type N.C. type With reducer With flow rate adjustment With by-pass Parts list Description Material Actuator section Body Diaphragm PTFE End plate Insert bushing Collar Flow rate adjuster section...
- Page 6 Series Dimensions Basic type Pilot port threaded type one-touch fitting Sensor (Breathing port) 4-ø Dimensions (mm) Model ø4 LVD1 -S 11.5 22.5 (5/32") LVD2 -S 54.4 28.5 ø6 31.5 LVD3 -S 79.5 17.5 45.5 14.5 ø6 LVD4 -S 14.5 ø6 LVD5 -S 105.5 17.5...
- Page 7 Series Integral Fitting Type (Hyper Fittings) With flow rate adjustment Dimensions (mm) Model LVD1 -S LVD2 -S 11.5 LVD3 -S LVD4 -S LVD5 -S 29.5 (Max. With by-pass Dimensions (mm) Model LVD2 -S LVD3 -S 17.5 LVD4 -S LVD5 -S With flow rate adjustment &...
- Page 8 Tube Extensions Series How to Order LVD 2 0 Body class Option Symbol Body class Orifice dia. None With flow rate adjustment ø4 ø8 Note) Refer to “Variations” in the table below for option combinations. ø10 ø16 Valve type Material Actuator section Symbol Body...
- Page 9 Series High Purity Chemical Valve (Compact Type) Standard Specifications Model LVD20 LVD30 LVD40 LVD50 Metric Tubing O.D. Inch Orifice diameter ø4 ø8 ø10 ø16 Av x 10 31.2 45.6 Flow characteristics 0.35 Withstand pressure (MPa) Operating pressure (MPa) 0 to 0.5 0 to 0.3 <A B flow>...
- Page 10 Series Dimensions Basic type Pilot port threaded type one-touch fitting Breathing port With flow rate adjustment 4-ø Dimensions (mm) Model LVD2 -T LVD3 -T LVD4 -T LVD5 -T 29.5 Dimensions (mm) Model LVD2 -T 14.5 ø6 31.5 LVD3 -T 79.5 17.5 42.5 17.5...
- Page 11 Series Fittings and Special Tools Fittings Changing tubing sizes The tubing size can be changed within the same body class (body size) by replacing the nut and insert bushing. Part composition Component parts Tubing O.D. Body Metric sizes Inch sizes Insert Collar (Insert assembly) class...
- Page 12 Series Special Tools How to order fitting jigs LQ G J Insert pin material Option (L/M type only) Resin Symbol Option Stainless steel (J/K type ony) None Insert pin/Holder type With Metric size bracket Inch size Note 1) Compatible pins and holders are included with all sizes.
- Page 13 Series High Purity Chemical Valve (Compact Type) Special Tools Dimensions LQ-GJ LQ-GK (Max. 50) SET POS. LQ-GM LQ-GL (Max. 91) (Max. 91) SET POS. SET POS.
- Page 14 Series Fitting Assembly Procedure Assemble fittings following the procedure shown below. J type J type fitting assembly procedure Pull out the lever pin q. Rotate the lever assembly w to align the holes on the lever assembly w and y Tubing !1 Holder assembly replacement screw the base e.
- Page 15 Series High Purity Chemical Valve (Compact Type) Fitting Assembly Procedure Assemble fittings following the procedure shown below. L type L/M type fitting assembly procedure r Tubing t Fitting nut Turn the lever q and move to SET POS. u Knob w Insert pin assembly Place the insert bushing e on the insert pin e Insert bushing assembly w.
- Page 16 Applicable Fluids Material and fluid compatibility check list for High Purity Chemical Valves Chemical Compatibility Note 1, 2) Acetone Note 2) Ammonium hydroxide Note 1, 2) Isobutyl alcohol Note 1, 2) Isopropyl alcohol Hydrochloric acid Ozone (dry) Hydrogen peroxide Concentration 5% or less, 50°C or less Note 1, 2) Ethyl acetate Note 1, 2)
- Page 17 Series Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage. These instructions indicate the level of potential hazard by labels of "Caution", "Warning" or "Danger". To ensure safety, be sure to observe ISO 4414 Note 1) , JIS B 8370 Note 2)
- Page 18 Series High Purity Chemical Valve, Compact Type Precautions 1 Be sure to read before handling. Design & Selection Design & Selection Piping Warning Caution 1. Confirm the specifications. 1. Preparation before piping Give careful consideration to operating conditions such as the Before piping is connected, it should be thoroughly blown out application, fluid and environment, and use within the opera- with air (flushing) or washed to remove chips, cutting oil and...
- Page 19 Series High Purity Chemical Valve, Compact Type Precautions 2 Be sure to read before handling. Installation and Removal of Tubing for Pilot Port Section Installation and Removal of Tubing for Pilot Port Section Operating Environment Operating Environment Caution Warning 1. Installation of tubing 1.
- Page 20 Series High Purity Chemical Valve, Compact Type Precautions 3 Be sure to read before handling. Precautions on Usage Precautions on Usage Warning Caution 1. Operate within the ranges of the maximum 4. To adjust the flow rate for the series LVD operating pressure and back pressure.
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