Olympus AL120-12 Series Maintenance Manual
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Olympus AL120-12 Series Maintenance Manual

Olympus AL120-12 Series Maintenance Manual

300mm semiconductor wafer loader
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Thank you for purchasing the Olympus AL120 Series Wafer Loader.
In order to fully utilize its performance and secure safety, please read this manual before operation.
Please also keep it at hand during operation as well as for future reference.
This manual is exclusively for maintenance service engineer.
Please also keep it at hand during operation as well as for future reference.
Maintenance Manual
AL120-12
300mm Semiconductor Wafer Loader
Series
Wafer Loader
AL120-LMB12-LP3
AL120-LMB12-F
Wafer Loader Accessory
AL120-VS12
AL120-RC
AM5060-01

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  • Page 1 AL120-VS12 AL120-RC Thank you for purchasing the Olympus AL120 Series Wafer Loader. In order to fully utilize its performance and secure safety, please read this manual before operation. Please also keep it at hand during operation as well as for future reference.
  • Page 2 This page intentionally left blank.
  • Page 3 Introduction Operation/Maintenance Manual i Introduction Option Microscope MX61L MX63L Wafer Loader AL120-LMB12-F AL120-LMB12-LP3 Vacuum Stage AL120-VS12 Option Remote Controller AL120-RC AL120 Series Lineup This product is an auto loader to transfer the wafer from the cassette to the microscope. The macro observation is available while transferring wafers.
  • Page 4 2. Safety Precautions ＣＡＵＴＩＯＮ Always use the power cord provided by Olympus. If no power cord is provided , please select the power cord by referring to the section “PROPER SELECTION OF THE POWER SUPPLY CORD” at the end of this chapter. If the proper power cord is not used, Olympus can no longer warrant the electrical safety performance of the equipment.
  • Page 5 Safety Precautions or the buffer tank is not provided with this product. If you need them, contact Olympus. 11. Be careful, if you transfer the wafer in the down-flow status that may allow the wafer to sway, the risk may be caused in transferring the wafer.
  • Page 6 Introduction Operation/Maintenance Manual /Safety Precautions AL120-LMB12-F installation space Unit:mm Stage movement range installation space AL120-LMB12-F extermal view,eye point and center of gravity Unit:mm Eye Point Center of gravity Center of gravity Page...
  • Page 7 Introduction/ Operation/Maintenance Manual Safety Precautions AL120-LMB12-LP3 installation space Unit:mm Stage movement range installation space AL120-LMB12-LP3 extermal view,eye point and center of gravity Unit:mm Center of gravity Center of gravity Eye Point Page...
  • Page 8 Introduction Operation/Maintenance Manual /Safety Precautions Earthquake Protection Please fix the equipment to the supporting floor so as not to be moved by unexpected force such as an earthquake using stoppers or equivalent means as per the requirements. Quakeproof fixed parts (Option) Material: Stainless Steel Plate Thickness: 9mm Fixing bolts: M10...
  • Page 9 Each arm of this device is electric drive. The whole device movement is attention not to put a hand and a face in a device. If these symbols become dirty or peel off, contact your nearest OLYMPUS distributor for exchange and servicing.
  • Page 10 1. Never disassemble the loader unnecessarily. This could affect the performance and function of the loader. 2. Contact your nearest OLYMPUS distributor if you need MSDS. 3. Confirm and observe your local municipal ordinances or regulations when you dispose of the loader.
  • Page 11 1. Confirm the following points before operating the loader. (1) Vacuum supply pressure: -67KPa to -80KPa When there are not a vacuum gauge and a regulator, please contact it to the OLYMPUS distributor. (2) Clean dry air supply pressure : 0.5MPa to 0.6MPa. [AL120-LMB12-LP3] (3) Make sure that there are no wafers or tools inside the wafer loader 2.
  • Page 12 (1) This device may not cause harmful interference, and (2) this device must accept any interference received, including interference that may cause undesired operation. Responsible Party Name: Olympus Scientific Solutions Americas Corp. Address: 48 Woerd Ave Waltham, MA 02453, U.S.A.
  • Page 13 Introduction/ Operation/Maintenance Manual Conformity Standards Page i-11...
  • Page 14 Introduction Operation/Maintenance Manual /Conformity Standards i-12 Page...

  • Page 15: Table Of Contents

    Maintenance Manual Table of Contents 1 Nomenclature 1-1 Wafer Loader Main Body ······················································ 1-１ 1-1-1 AL120-LMB12-F ··········································································· 1-１ 1-1-2 AL120-LMB12-LP3 ········································································ 1-2 1-1-3 B ][AL120-LMB12-F] ······························· 1-3 ACK PART ISCONNECTOR 1-1-4 B ][AL120-LMB12-LP3] ··························· 1-3 ACK PART ISCONNECTOR 1-1-5 O ··········································································...
  • Page 16 Maintenance Manual Table of Contents This page intentionally left blank. Page...

  • Page 17: Nomenclature

    Nomenclature Operation/Maintenance Manual 1 Nomenclature 1-1 Wafer Loader Main Body AL120-LMB12-F 1-1-1 Cover Warning label A-arm Stage operation permission LED F1-arm F2-arm Macro table Notch alignment sensor L-arm Hand guard Back Macro tilt angle control buttons Warning label Operation Panel Cassette base Joystick Lock ring...

  • Page 18: Al120-Lmb12-Lp3

    Nomenclature/ Operation/Maintenance Manual Wafer Loader Main Body AL120-LMB12-LP3 1-1-2 FOUP Opener FOUP opener operation LED Opening permission LED of the window Inspection view window Hand guard Page...

  • Page 19: Back Part [Main Disconnector][Al120-Lmb12-F]

    Nomenclature/ Operation/Maintenance Manual Wafer Loader Main Body 1-1-3 Back part [Main Disconnector][AL120-LMB12-F] Stage Vacuum tube connector Circuit Breakers Vacuum tube receptacle AC line receptacle（Main Disconnector） 1-1-4 Back part [Main Disconnector][AL120-LMB12-LP3] Clean dry air tube receptacle Stage Vacuum tube connector Circuit Breakers Vacuum tube receptacle AC line receptacle（Main Disconnector）...

  • Page 20: Operation Panel

    Nomenclature/ Operation/Maintenance Manual 1-1-5 Operation Panel 4-way button Menu buttons Wafer unload Wafer No. button selector buttons Start button Quit button Pause button Observation setting buttons LED display Inspection Wafer alignment mode button position control Inspection time control Option button Top macro spin speed control Top macro spin...

  • Page 21: Remote Controller (Option)

    Nomenclature Operation/Maintenance Manual /Remote Controller (Option) 1-2 Remote Controller (Option) Remote controller: AL120-RC Registration setting button (Macro) Registration setting button (Micro) Start button Wafer unload button Page...
  • Page 22 Nomenclature/ Operation/Maintenance Manual Remote Controller (Option) Vacuum Stage Vacuum stage: AL120-VS12 Coarse adjustment grip Wafer rotating knob Y fine travel knob X fine travel knob Clutch lever Stage sensor plate Vacuum table Page...

  • Page 23: Adjustments

    Maintenance manual Adjustments 2 Adjustments 2-1 Registration of Inspection Wafer by Type The loader requires adjustments when the cassette is changed or the thickness of the wafers to be inspected is changed. If the loader is used without any adjustment to the proper state, it may give damage ＣＡＵＴＩＯＮ...
  • Page 24 Adjustments Maintenance manual ④ After settings are completed, press the [M1] button <Save> and store setting, press the [Quit] button to terminate Test 24. 3) Wafer mapping parameter setting registration Using Test 11, set the wafer mapping parameters according to the cassette state and the wafer thickness. ①...
  • Page 25 Maintenance manual Adjustments 4) Checking the wafer mapping parameters Check the wafer mapping parameters setting state using Test 12. ① From the submenu on the liquid crystal panel, M1:Mapping auto adjust execute [M2] <Mapping result display>. M2:Mapping result display M3:Input parameter Press the [M2] button <Disp>.
  • Page 26 Adjustments Maintenance manual 5) A-arm height (arm insertion and removal height) setting registration Items to prepare The cassette and wafers to be registered Specify the A-arm height by using Test 12. ① Press the Wafer No. selector button [12], then press the [Start] button. M1:Wafer position setting ②...
  • Page 27 Maintenance manual Adjustments Check the states of the 2nd and 25th wafers in the same way. ⑫ Termination of adjustment test mode Turn the main switch OFF to terminate test mode. Page...

  • Page 28: Adjusting The Vacuum Switches

    Adjustments Maintenance manual Adjusting the Vacuum Switches 2-2 Adjusting the Vacuum Switches The vacuum switches are set for normal operation at a vacuum pressure level of -67KPa to -80KPa. The vacuum switches must be readjusted if the vacuum pressure is outside the range of -67KPa to-80KPa. When the vacuum pressure is above -80KPa, the wafer may be bent on the wafer ＣＡＵＴＩＯＮ...

  • Page 29: Test Programs

    Maintenance Manual Test Programs 3 Test Programs Test programs are used to check and adjust the functions of each unit. Before initiating these programs, pay special attention to interference with the other units and make sure that there are no wafers left over from previous operations. 1 How to Use the Programs Turn the main switch OFF.

  • Page 30: To Open The Door Of The Foup Opener Of Al120-Lmb12-Lp3

    Test Programs Maintenance Manual 2 To open the door of the FOUP opener of AL120-LMB12-LP3 With door of the FOUP opener closed, when the observation window makes its window open then close, the board on the operation panel is reset automatically. In need of operation with the observation window open for solenoid valves check and sensors check etc, make sure to close the door of the FOPU opener before operation.

  • Page 31: Test Names And Functions

    Maintenance Manual Test Programs 3 Test Names and Functions Test names and test functions are shown in Tables 2-1 and 2-2, respectively. Table 2-1: Test Programs Button No. Test Name Wafer mapping sensor movement check *Applicable to AL120-LMB12-F FOUP-OPENER movement check *Applicable to AL120-LMB12-LP3 A-arm vertical movement check A-arm horizontal movement check...
  • Page 32 Test Programs Maintenance Manual Table 2-2: Test Functions Test No./ Function Outline Test Name <Wafer mapping sensor movement check> No.1 This program can be used to check and adjust the height of the wafer sensor. Wafer Press the [Start] button. mapping Select the item to adjust using the menu buttons on the liquid crystal panel.
  • Page 33 Maintenance Manual Test Programs Test No./ Function Outline Test Name [M1]：FOUP Clamp, Dock, Door vacuum, Door Clamp <Menu1> This program can be used to check the operations of FOUP Clamp, Dock, Door vacuum and Door Clamp. Press the [Start] button. Select the item to adjust using the menu buttons on the liquid crystal panel.
  • Page 34 Test Programs Maintenance Manual Test No./ Function Outline Test Name [M4]：FOUP Clamp <FOUP Door latch movement check> If the loader has not been initialized, initialization starts. ①FOUP Clamp ②FOUP Dock position ③FOUP Door Clamp ④FOUP Door Unclamp The loader then repeats steps ③ to ④. ・...
  • Page 35 Maintenance Manual Test Programs Test No./ Function Outline Test Name [M3]：Z-axis (vertical) movement <Z axis movement check> If the loader has not been initialized, initialization starts. ① FOUP Door open. ② Press the interlock switch and the [Start] button. ③ FOUP Door lower limit position. ④FOUP Door upper limit position. The loader then repeats steps ③...
  • Page 36 Test Programs Maintenance Manual Test No./ Function Outline Test Name • Press the [Start] button to pause the operation at the break point. • The speed can be changed during the pause. • When an error occurs, the loader displays the same error code as in the regular operation, and then stops.
  • Page 37 Maintenance Manual Test Programs Test No./ Function Outline Test Name <A-arm side-to-side movement check> No. 4 This program can be used to check the A-arm side-to-side movement. A-arm Press the [Start] button. side-to-side movement If the loader has not been initialized, initialization starts. check ①Right side (+4mm) ②Origin ③Left side ④OriginThe loader then repeats steps ①...
  • Page 38 Test Programs Maintenance Manual <Macro table vertical movement check> No. 5 This program can be used to check the vertical movement of the Top Macro inspection table. Macro table vertical Press the [Start] button. movement Select the operation speed using the menu buttons on the liquid crystal panel. check [M1]: High speed <Fast speed>...
  • Page 39 Maintenance Manual Test Programs <L-arm rotation check> No. 7 This program can be used to check the L-arm rotation. L-arm rotation Press the [Start] button. If the loader has not been initialized, initialization starts. check Select the operation speed using the menu buttons on the liquid crystal panel. [M1]: High speed <Fast speed>...
  • Page 40 Test Programs Maintenance Manual Do not continue the operation for longer than 5 minutes. ＣＡＵＴＩＯＮ Wait for longer than one minute before restarting the operation. <F-arm horizontal movement check> No. 9 This program can be used to check the F-arm horizontal movement. F-arm horizontal Press the [Start] button.
  • Page 41 Maintenance Manual Test Programs [M2]：Move continuously at the same height as that in normal transfer after the F-arm is raised <Normal height> Press the [Start] button. Select the operation speed using the menu buttons on the liquid crystal panel. [M1]: High speed <Fast speed> [M2]: Medium speed <Middle speed> [M3]: Low speed <Slow speed>...
  • Page 42 Test Programs Maintenance Manual The centering sensor detection state is indicated by the LED ON/OFF state of the Wafer No. selector button. #1 centering sensor detection ON:OFF #2 centering sensor detection ON:OFF #3 centering sensor detection ON:OFF #4 centering sensor detection ON:OFF •...
  • Page 43 Maintenance Manual Test Programs <Mapping parameter check> No. 11 This program can be used to adjust the mapping sensor. Wafer mapping Press the [Start] button, and select the item to adjust by using the menu buttons on the liquid crystal sensor panel.
  • Page 44 Test Programs Maintenance Manual [M3]: Manual input of mapping parameters <Input parameter> This program can be used to modify mapping parameters. Using the 4-way button, select the number of the wafer type to modify from the list of wafer type numbers displayed on the liquid crystal panel, and then press the [Start] button.
  • Page 45 Maintenance Manual Test Programs <Mapping parameter check> No. 11 This program can be used to check and adjust the mapping. FOUP Opener Press the [Start] button, and select the item to adjust by using the menu buttons on the liquid crystal mapping panel.
  • Page 46 Test Programs Maintenance Manual [M3]: Manual input of mapping parameters <Input parameter> This program can be used to modify mapping parameters. Using the 4-way button, select the number of the wafer type to modify from the list of wafer type numbers displayed on the liquid crystal panel, and then press the [Start] button.
  • Page 47 Maintenance Manual Test Programs <A-arm insertion height check> No. 12 This program can be used to check and adjust the A-arm insertion height. A-arm insertion Press the [Start] button. height check Select the item to adjust using the menu buttons on the liquid crystal panel. and vertical [M1]：Check the empty arm insertion height and the vacuum fine-adjustment value <A-arm insertion movement...
  • Page 48 Test Programs Maintenance Manual Reference: Standard position： Empty arm insertion height： 2mm below wafer Vacuum fine-adjustment value： 6mm [M2]：Check upper and lower limit positions <M2:Upper/Lower limit position check> This program can be used to check the sensor detection status by moving the A-arm vertically. If the loader has not been initialized, initialization starts.
  • Page 49 Maintenance Manual Test Programs [M2]：Check the origin in side-to-side direction <A-arm side-to-side> If the loader has not been initialized, initialization starts. ①Move the A-arm to the first wafer insertion height. [M1]：Initialize [M2]：Move to left side by 1 mm [M3]：Move to right side by 1 mm [M4]：Excitation ON/OFF The sensor status is displayed on Wafer No.
  • Page 50 Test Programs Maintenance Manual No. 15 <Notch alignment adjustment> Notch This program can be used to check and adjust the notch positions f. alignment ① Insert a wafer into any slot of a cassette. and place the cassette on the cassette installation part. adjustment ②...
  • Page 51 Maintenance Manual Test Programs [M1]：Check the L-arm rotation <L-arm rotation check> This program can be used to check the back-side arm rotation origin sensor. Confirm that there is nothing interfering with the arm. If the loader has not been initialized, initialization starts. ①...
  • Page 52 Test Programs Maintenance Manual [M1]：Initialize [M2]：Move all strokes horizontally [M3]：Move the half stroke horizontally [M4]：Excitation ON/OFF The sensor status is displayed on Wafer No. [No.1]：Detect the macro side sensor [No.3]：Detect the horizontal middle point [No.5]：Detect the stage side sensor • Press the [Quit] button, and the loader executes initialization and stops the operation. Do not continue the operation for longer than 5 minutes.
  • Page 53 Maintenance Manual Test Programs No. 19 <Notch sensor Mapping sensor check> This program can be used to check the notch sensor and water sensor operation. Notch sensor and wafer sensor Press the [Start] button. check If the loader has not been initialized, initialization starts. Select the item to adjust using the menu buttons on the liquid crystal panel.
  • Page 54 Test Programs Maintenance Manual <Button motion check> No. 22 This program can be used to check the operation button motions. Button operation Press the [Start] button. check ・ Press a button with an LED, and the LED lights up on the pressed button. ・...
  • Page 55 Maintenance Manual Test Programs Wafer out sensor Wafer sensor vertical motor driver <WafarOut>U109 MO <E MO> No. 24 <Wafer parameter setting> Wafer This program can be used to register wafer types, and set and change the size, thickness and transfer type speed for each wafer type.
  • Page 56 Test Programs Maintenance Manual Transfer speed <Speed> SP1 to SP5 • A-arm horizontal speed <A-arm linier speed> ..... High speed <Fast> / Medium speed <Middle> / Low speed <Slow> A-arm vertical speed <A-arm up down speed> ....High speed <Fast> / Medium speed <Middle> / Low speed <Slow> L-arm rotation speed <L-arm rotation speed>....
  • Page 57 Maintenance Manual Test Programs [M1] Set the loader operation <Loader settings> This program can be used for detailed loader settings. Setting items are displayed on the liquid crystal panel. Change the settings using the 4-way button. Use the menu buttons on the liquid crystal panel for registration, cancellation, and page feed. [M1]: Register <Save>...
  • Page 58 Test Programs Maintenance Manual [M2]：Check the error log and software version.<Version and error log display> This program can be used to check the software version and the history of error occurrences The software version or error log displayed can be cleared and the error log date can be set by manipulating the menu buttons on the liquid crystal panel.
  • Page 59 Maintenance Manual Test Programs This page intentionally left blank. 3-31 Page...

  • Page 60: Replacement Of Consumables

    Use the right tool for the right accessory when assembling this product. If the tools are not used properly or this manual is not followed during assembly, parts may be damaged and product safety cannot be guaranteed. If any noise occurs in the operation of a part, please contact your OLYMPUS ＣＡＵＴＩＯＮ distributor.

  • Page 61: Macro (Center) Table Oil Seal: If A Vacuum Error Has Occurred

    Replacement of Consumables Maintenance Manual 2 Macro (Center) Table Oil Seal: If a vacuum error has occurred Tools Phillips-head screwdriver (No. 0) Flat-blade screwdriver (No. 2.6-30) Special oil seal mounting jig (guide, shaft and collar) Clean wiper and absolute alcohol Flat-blade screwdriver Remove the three M2 cross recessed pan head machine screws...

  • Page 62: Arm: If A Vacuum Error Has Occurred Or The A-Arm Vacuum Pad Has Become Damaged

    Maintenance Manual Replacement of Consumables Insert the collar into the shaft axis. Insert the collar into the oil seal groove and push it down. Remove the special oil seal mounting jig and check that the oil Pulley top seal lip does not protrude from the pulley top surface. surface 10) After the check, attach the macro (center) table.

  • Page 63: Vacuum Table: If A Vacuum Error Has Occurred Or The Table Has Become Damaged

    Replacement of Consumables Maintenance Manual 4 Vacuum Table: If a vacuum error has occurred or the table has become damaged Tools Phillips-head screwdriver (No. 0)  Remove the three M2 cross recessed pan head machine screws , and replace the vacuum table. Standard Working Time 10 minutes 5 Oil Seal for Vacuum Table: If a vacuum error has occurred Tools...
  • Page 64 Maintenance Manual Replacement of Consumables Wind the clean wiper around the flat-blade screwdriver. Moisten Oil seal insertion part it with commercially available absolute alcohol and clean the oil seal insertion part of the vacuum table and the axis of the vacuum stage.

  • Page 65: Arm: If A Vacuum Error Has Occurred Or The L-Arm Vacuum Pad Has Become Damaged

    Replacement of Consumables Maintenance Manual 6 L-arm: If a vacuum error has occurred or the L-arm vacuum pad has become damaged Tools Phillips-head screwdriver (No. 0)  Remove the M2 cross recessed pan head machine screws ①  (four positions for one L-arm vacuum pad). Remove the cover ②...

  • Page 66: Rubber Microscope Legs: If Wafer Transfer Sound Has Increased

    8 Rubber Microscope Legs: If wafer transfer sound has increased Remove the stage and replace the rubber blocks on the underside of the microscope. Since the wafer transfer position must be checked and other related work must be done, please contact your Olympus distributor.  ...
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  • Page 68 Manufactured by OLYMPUS CORPORATION Shinjuku Monolith, 2-3-1 Nishi-Shinjuku, Shinjuku-ku, Tokyo 163-0914, Japan Distributed by OLYMPUS SCIENTIFIC SOLUTIONS AMERICAS CORP. Woerd Avenue Waltham, MA 02453, U.S.A. OLYMPUS SINGAPORE PTE. LTD. 438B Alexandra Road #03-07/12, Alexandra Technopark Blk B, Singapore 119968 OLYMPUS KOREA CO., LTD.

This manual is also suitable for:

Al120-lmb12-lp3Al120-lmb12-fAl120-vs12Al120-rc

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