Olympus AL120-LMB12-LP3 Manuals

Manuals and User Guides for Olympus AL120-LMB12-LP3. We have 2 Olympus AL120-LMB12-LP3 manuals available for free PDF download: Operation Manual, Maintenance Manual

Olympus AL120-LMB12-LP3 Operation Manual (80 pages)

300mm Semiconductor Wafer Loader

Brand: Olympus | Category: Laboratory Equipment | Size: 26 MB

Table of Contents
16
Ack Acro Nspection
16
Macro Inspection + Back
16
Inspection
22
Stoppage of Transfer
43
Automatic Unloading
44
Inspections
45
Preparations
45
Inspection Operations
45
Special Operations
57
Specifications
59
Problems During Use and Solutions
63
When Warning Codes Are Displayed
63
During the Top Macro Inspection
76
During the Back Macro Inspection
76
When a Wafer Is on the F-Arm
77
When a Wafer Is on the A-Arm
77
When a Wafer Is on the Vacuum Stage
78

Olympus AL120-LMB12-LP3 Maintenance Manual (68 pages)

300mm Semiconductor Wafer Loader

Brand: Olympus | Category: Microscope | Size: 7 MB

Table of Contents
15
Nomenclature
17
Wafer Loader Main Body
17
Al120-Lmb12
17
Al120-Lmb12-Lp3
18
Back Part [Main Disconnector][Al120-LMB12-F]
19
Back Part [Main Disconnector][Al120-LMB12-LP3]
19
Operation Panel
20
Foup Opener Operation Display Panel
20
Remote Controller (Option)
21
Adjustments
23
Registration of Inspection Wafer by Type
23
Registration of a New Type of Inspection Wafer
23
Thickness)
23
Adjusting the Vacuum Switches
28
How to Adjust Vacuum Switches
28
Test Programs
29
How to Use the Programs
29
To Open the Door of the FOUP Opener of AL120-LMB12-LP3
30
Test Names and Functions
31
Replacement of Consumables
60
Macro (Center) Table: if a Vacuum Error Has Occurred or the Table Has Become Damaged
60
Macro (Center) Table Oil Seal: if a Vacuum Error Has Occurred
61
Arm: if a Vacuum Error Has Occurred or the A-Arm Vacuum Pad Has Become Damaged
62
Vacuum Table: if a Vacuum Error Has Occurred or the Table Has Become Damaged
63
Oil Seal for Vacuum Table: if a Vacuum Error Has Occurred
63
Arm: if a Vacuum Error Has Occurred or the L-Arm Vacuum Pad Has Become Damaged
65
Arm: if a Vacuum Error Has Occurred or the F-Arm Vacuum Pad Has Become Damaged
65
Rubber Microscope Legs: if Wafer Transfer Sound Has Increased
66

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Olympus AL120-LMB12-LP3 Manuals

Olympus AL120-LMB12-LP3 Operation Manual (80 pages)

Table of Contents

Olympus AL120-LMB12-LP3 Maintenance Manual (68 pages)

Table of Contents

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