MKS 392 Series User Instruction Manual
  1. Manuals
  2. Brands
  3. MKS Manuals
  4. Transducer
  5. 392 Series
  6. User instruction manual
MKS 392 Series User Instruction Manual

MKS 392 Series User Instruction Manual

Hide thumbs
Table of Contents

Advertisement

Quick Links

Download this manual
EtherCAT
®
Communication
Protocol
User's
Instruction
Manual
MKS p/n 20021549-001
for Series 392 EtherCAT
Transducers
Communication Protocol Manual – p/n 20021549-001 Rev.B
EtherCAT
®

Advertisement

Table of Contents
loading
Need help?

Need help?

Do you have a question about the 392 Series and is the answer not in the manual?

Questions and answers

Related Manuals for MKS 392 Series

Summary of Contents for MKS 392 Series

  • Page 1 EtherCAT ® Communication Protocol User’s Instruction Manual MKS p/n 20021549-001 for Series 392 EtherCAT Transducers Communication Protocol Manual – p/n 20021549-001 Rev.B EtherCAT ®...

  • Page 2: Table Of Contents

    Table of Contents Chapter # Page # Introduction ........................5 Definitions .......................... 5 Physical Interface ......................6 Device Profile ........................8 Process Data Objects ......................8 Object Dictionary Overview ....................9 Object Dictionary Terms and Definitions ................ 9 Object Dictionary Data Types ..................10 Communication Area ......................
  • Page 3 ® ® Granville-Phillips and Micro-Ion , are registered trademarks, and mksinst™ is a trademark of MKS Instruments Inc. EtherCAT ® is a registered trademark and ® patented technology licensed by Beckhoff Automation GmbH, Germany. Windows is a trademark of Microsoft Corporation.
  • Page 4 Communication Protocol Manual – p/n 20021549-001 Rev. B EtherCAT ®...

  • Page 5: Introduction

    Introduction This document describes the physical interface, Device Profile, and Object Dictionary used for the ® Series 392 Micro-Ion ATM Vacuum Transducers. It is assumed the reader has a general knowledge of EtherCAT and EtherCAT Masters. Refer to the following EtherCAT specifications in addition to this manual: •...

  • Page 6: Physical Interface

    Physical Interface ® EtherCAT Connectors The EtherCAT transducers are all equipped with a connector for power input, analog output, and other functions. Two 8P8C connectors are used for the EtherCAT digital IN/OUT. Three switches are used to set the Device ID. Two LEDs show the Run/Error condition(s) and one LED shows the Device State.
  • Page 7 Indicators EtherCAT Status A “RUN” indicator and an “ERR” indicator are used to indicate EtherCAT status. See ETG.1300 for more information. Red LED (ERR) Flash Interval EtherCAT Status No error Blinking 200 ms Invalid configuration Flickering 50 ms ON Invalid firmware 50 ms OFF Single Flash 100 ms ON...

  • Page 8: Device Profile

    Device Address Switches The Device ID and the Configured Station Alias can be set by three hexadecimal rotary switches (labeled “ID” in Figure 1) as stated in ETG.5003.1 and ETG.1020. �������������� = ��100 ( 0��100 ) + ��10 ( 0��10 ) + ��1(0��1) For example, if the address switches from MSD to LSD are set to “321”...

  • Page 9: Object Dictionary Overview

    Underrange Exceeded 0x05 0x0000 0x00 0x06 0xF640 0x12 Combination Gauge Active Sensor Number 0x07 0xF640 0x11 Combination Gauge Active Value 0x08 0xF640 0x01 Trip Point Output ALL Instance Object Dictionary Overview The Object Dictionary of Service Data Objects (SDO) is organized into several sections by Index. Not all sections are used by the 392.

  • Page 10: Object Dictionary Data Types

    the parameter is only writable in PREOP state. No state restriction indicates the parameter access is valid for PREOP, SAFEOP, and OP states. Name Name of Object / Object Parameter Description More info about Object / Object Parameter Object Dictionary Data Types Data types are described in ETG.1020.

  • Page 11: Communication Area

    0x100B STRING(n) Manufacturer Bootloader x.x.x Version 0x1018 Identity Object 0x01 UDINT Vendor ID MKS Vendor ID = 1291 0x02 UDINT Product Code Unique product code 6012 = GP 392 0x03 UDINT Revision Number Coded as 0xnnnnnn00 I.E. 0x01010100 = 1.1.1 Always 0;...
  • Page 12 Index Sub- Data Type Backup(B)/ Access Name Description Index Save(S)? Assignable? 0x08 SI = 0) 0x17FE RxPDO Combo Default No default outputs. Can only write SI 0 = 0x00 0x17FF RxPDO Combo User Rx mappings available for the user. Up to 8 entries can be configured 0x01 (R if SI <= SI0)

  • Page 13: Manufacturer Specific Configuration Data

    Index Sub- Data Type Backup(B)/ Access Name Description Index Save(S)? Assignable? 0x01 (R if SI <= SI0) thru MAPPING (W PREOP if 0x08 SI = 0) 0x1C00 Sync Manager Communication Type 0x01 USINT Communication Type Sync 1 = Mailbox receive (master to slave) Manager 0 0x02 USINT...

  • Page 14: Input Data Of Modules

    Table 11: Manufacturer Configuration Objects Index Sub- Data Type Backup(B)/ Access Name Description Index Save(S)? Assignable? 0x4015 Manufacturer Configuration Hot Cathode 0x01 ENUM Filament Mode "03 00 00 00" - Manual "02 00 00 00" - Alternate "01 00 00 00" – Automatic Updates object 0x8035:01 0x401C Customer Requested...

  • Page 15: Output Data Of Modules

    Index Sub- Data Type Backup(B)/ Access Name Description Index Save(S)? Assignable? 0x600E Input Trip Point 1 0x01 BOOL Status High Trip 1: High Trip asserted 0x02 BOOL Status Low Trip 1: Low Trip asserted 0x600F Input Trip Point 2 Trip Point 2 0x01 BOOL Status High Trip...
  • Page 16 Index Sub- Data Type Backup(B)/ Access Name Description Index Save(S)? Assignable? If the device is configured for automatic filament selection, the Active Filament parameter has RO access. 0x02 BOOL Emission User Mode 0: Automatic - emission is enabled by a different sensor 1: Manual - emission is enabled by the Command Object 0xFB44 0x03...
  • Page 17 Index Sub- Data Type Backup(B)/ Access Name Description Index Save(S)? Assignable? 0x18 REAL Low Trip Hysteresis Hysteresis value for Low Trip Point Index and sub-index Trip Point Source —supports only 0x1A UDINT Source Index combination pressure 0xF6401100: Combo Gauge 0x800F Configuration Trip Point 2 0x01 BOOL...
  • Page 18 Index Sub- Data Type Backup(B)/ Access Name Description Index Save(S)? Assignable? 0x07 UDINT Time Filament 1 powered in seconds 0x08 UDINT Time Filament 2 powered in seconds Communication Protocol Manual – p/n 20021549-001 Rev. B EtherCAT ®...
  • Page 19 Trip Points The 392 provide relays for process control. Each Trip Point can activate the relay upon increasing or decreasing vacuum or differential pressure. NOTE: Trip points cannot be configured to activate on increasing AND decreasing pressure. Only, increasing OR decreasing pressure. For example, if the High Trip Point is Enabled (0x800E/F:01=1), the Trip Point will activate if the pressure p is greater than the Trip Point Limit P1 (0x800E/F:11).
  • Page 20 Table 15:Sensor Warnings and Errors Description 392 Comments Heat Transfer Warnings Reserved Not used Electronics warning Not used Sensor high temperature warning Not used Heat Transfer Errors Sensor element failure Electronics failure Non-volatile memory failure, invalid internal communication Electronics over temperature 3 - 14 Reserved Not used...

  • Page 21: Semiconductor Device Profile Area

    Description 392 Comments Sensor filament 8 alarm Not used Exceeded maximum C/E ratio Not used Electronics failure Non-volatile memory failure, invalid internal communication Over temperature of electronics Not used Over pressure emission off Not used Environment failure Not used Reserved Not used Reserved Not used...

  • Page 22: Exception Handling Data

    15 Exception Handling Data Contains information about Exceptions (Error and Warnings). Table 17: Exception Handling Data Objects Index Sub- Data Type Backup(B)/ Access Name Description Index Save(S)? Assignable? 0xF380 USINT Active Exception Status A condensed summary byte describing the collection of active device exceptions after corresponding masks (0xF3Ax) are applied.

  • Page 23: Manufacturer Specific Device Data

    Index Sub- Data Type Backup(B)/ Access Name Description Index Save(S)? Assignable? Bit 13: Reserved Bit 14: Reserved Bit 15: Configuration exception 0xF390 USINT Latched Exception Status A condensed summary byte describing the collection of device exceptions after corresponding masks (0xF3Ax) are applied. Bit 0: Device Warning Bit 1: Manufacturer Warning Bit 2: Device Error...

  • Page 24: Sdp And Cdp Device Specific Inputs

    17 SDP and CDP Device Specific Inputs Contains Combination Pressure and other Device-wide Status. Table 18: SDP and CDP Device Specific Input Objects Index Sub- Data Type Backup(B)/ Access Name Description Index Save(S)? Assignable? 0xF640 Combination Gauge 0x01 BOOL Combination Gauge Reading 1: Valid Valid 0: Invalid...

  • Page 25: Sdp And Cdp Device Specific Outputs

    SDP and CDP Device Specific Outputs Not used. 19 SDP and CDP Device Specific Configuration Data Table 19: SDP and CDP Device Specific Configuration Data Objects Index Sub- Data Type Backup(B)/ Access Name Description Index Save(S)? Assignable? 0xF840 Configuration Device Device Configuration 0x01 UDINT...

  • Page 26: Sdp And Cdp Device Specific Diagnosis Data

    0x01 UDINT Heat Transfer 0x02 UDINT Hot Cathode Ion 0xF9F3 STRING(15) Vendor Name MKS Instruments 0xF9F4 Semiconductor SDP Device String identifying the device type of a particular module as Name defined by the SDP 0x01 STRING(n) Heat Transfer CG (Combo Gauge)
  • Page 27 Index Sub- Data Type Backup(B)/ Access Name Description Index Save(S)? Assignable? Other values not supported. Byte 1: Index of the Sub Sensor Instance. 0: Heat Transfer byte – byte 0 must be 0x00 Other values not supported Bytes 2-5: Always 0; value is ignored 0x02 USINT Status...
  • Page 28 Index Sub- Data Type Backup(B)/ Access Name Description Index Save(S)? Assignable? 2: Last command completed, errors present, no reply available 3: Last command completed, errors present, reply available 4-99: reserved for future use 100-200: indicates how much of the command has been executed (in %, 100=0%, 200=100%) 201-254: reserved for future use 255: Command is executing (if the percentage display is not...
  • Page 29 Index Sub- Data Type Backup(B)/ Access Name Description Index Save(S)? Assignable? Byte 2: 0: Degas ON/OFF successful 1: Degas ON/OFF failed (unspecified reason) 2: Degas ON failed because pressure too high 3: Degas On failed because Degas Time Off Remaining not equal Zero.
  • Page 30 Index Sub- Data Type Backup(B)/ Access Name Description Index Save(S)? Assignable? Device Reset: Backup parameters will not change as a result of this reset. All setting parameters will revert to power-on defaults as a result of the reset. Factory Reset: All backup parameters will be changed to their as-shipped defaults.
  • Page 31 Index Sub- Data Type Backup(B)/ Access Name Description Index Save(S)? Assignable? 201-254: Reserved; shall be 0 255: command is executing (if the percentage display is not supported) 0x03 ARRAY Response Byte 0: Same as sub-index 0x02 [0..1] OF BYTE Byte 1: Unused – always 0 0xFBF2 Store Parameters Command Execution of this command stores all parameters to non-...
  • Page 32 Index Sub- Data Type Backup(B)/ Access Name Description Index Save(S)? Assignable? volatile memory. If the Checksum cannot be calculated the Abort Code "0x08000021" is returned. 0x01 ARRAY Command Read: Returns information about the supported checksum [0..3] OF type BYTE Bit 0: 1: non-volatile parameters Bit 1: 1: CRC-32...
  • Page 33 Index Sub- Data Type Backup(B)/ Access Name Description Index Save(S)? Assignable? BYTE Byte 2-5: Checksum value 0xFBF4 Load Parameters Command Execution of this command will load all parameters from non- volatile memory. However, this device automatically stores parameters to non-volatile memory. Therefore, this command has no effect.

  • Page 34: Firmware Update

    A high-level procedure is: • Go to EtherCAT INIT State • Go to EtherCAT BOOT State • Download Firmware/SII image from MKS using FoE Protocol • Go to EtherCAT INIT State • Go to EtherCAT PREOP State • Verify new firmware version by reading CoE Object 0x0100A Specific procedures for updating firmware is different for each EtherCAT Master.
  • Page 35 Change Pressure Data Units Change pressure units using CoE Objects 0xF840:01 or 0xF840:03 (some Masters will abstract this to an Enumeration with textual descriptions). For example, to set the units to Torr, send an “SDO Write” to 0xF840:01 with a value of 0x00A10000. Table 20: 0xF840:01 Pressure Data Units Supported Values Data Unit Value...

  • Page 36: Troubleshooting

    Verify PDO Configuration is valid – check if indexes with correct bit-length are mappable. Verify no duplicate mapped objects. Pressure is NaN or 0xF383:n Reports “Electronics Failure” This is most likely due to an internal issue in the electronics – contact MKS for next steps. Other Troubleshooting Contact MKS for support.

  • Page 37: Al Status Codes

    Error Code (hex) Error code (decimal) Meaning PDO length 06040043 100925507 General parameter incompatibility 06040047 100925511 General internal incompatibility in the device 06060000 101056512 Access failed due to hardware error 06070010 101122064 Data type does not match, length of service parameter does not match 06070012 101122066...
  • Page 38 Error Code (hex) Error code (decimal) Meaning 0x001C Invalid Sync manager types 0x001D Invalid output configuration 0x001E Invalid input configuration 0x001F Invalid watchdog configuration 0x0020 Slave need cold start 0x0021 Slave need INIT 0x0022 Slave needs PREOP 0x0023 Slave need SAFEOP 0x0024 Invalid input mapping 0x0025...
  • Page 39 EtherCAT Communication Protocol Operation and Installation Manual MKS p/n 20021549-001, Rev. B October 2021 Communication Protocol Manual – p/n 20021549-001 Rev. B EtherCAT ®...

Table of Contents