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Mechanical Specifications and Installation
2.3. Securing the Stage to the Mounting Surface
WARN IN G: The ANT130R must be mounted securely. Improper mounting can result in
injury or damage to the equipment.
The mounting surface must be flat and have adequate stiffness to achieve the maximum performance
from the ANT130R stage. When it is mounted to a non-flat surface, the stage can be distorted while the
mounting screws are tightened. This distortion will decrease overall accuracy. Adjustments to the
mounting surface must be done before the stage is secured.
Inspect the mounting surface for dirt or unwanted residue and clean if necessary. Use precision
flatstones on the mounting surface to remove any burrs or high spots. Clean the mounting surface with
a lint-free cloth and acetone or isopropyl alcohol and allow the cleaning solvent to completely dry.
Gently place the stage on the mounting surface.
IM PORTAN T: To maintain accuracy, the mounting surface must be flat to within 1 µm per
50 mm.
IM PORTAN T: The ANT130R is precision machined and verified for flatness prior to
product assembly at the factory. If machining is required to achieve the desired flatness, it
should be performed on the mounting surface rather than the ANT130R. Shimming should
be avoided if possible. If shimming is required, it should be minimized to retain maximum
rigidity of the system.
ANT130R series stages have a fixed mounting pattern (as shown in
Tightening torque values for the mounting hardware are dependent on the properties of the surface to
which the stage is being mounted. Values provided in Table are typical values and may not be accurate
for your mounting surface.
Table 2-1:
St age t o M ount ing Surface Hardware
Mounting Hardware
M6 SHCS
16
Figure 2-3:
M ount ing Hole Pat t ern
Chapter 2
ANT130R Hardware Manual
Figure
2-3).
Typical Screw Torque
4.6 N·m
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