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2.3. Securing the Stage to the Mounting Surface
2.3. Securing the Stage to the Mounting Surface
W A R N I N G : Make sure that all moving parts are secure before moving the ACS. Unsecured
moving parts may shift and cause bodily injury.
W A R N I N G : The ACS must be mounted securely. Improper mounting can result in injury and
damage to the equipment.
The mounting surface must be flat and have adequate stiffness to achieve the maximum performance from
the ACS stage. When it is mounted to a non-flat surface, the stage can be distorted while the mounting
screws are tightened. This distortion will decrease overall accuracy. Adjustments to the mounting surface
must be done before the stage is secured.
Inspect the mounting surface for dirt or unwanted residue and clean if necessary. Use precision flatstones
on the mounting surface to remove any burrs or high spots. Clean the mounting surface with a lint-free cloth
and acetone or isopropyl alcohol and allow the cleaning solvent to completely dry. Gently place the stage on
the mounting surface.
N O T E : To maintain accuracy, the mounting surface must be flat to within 5 µm over the entire stage
footprint.
N O T E : The stage base is precision machined and verified for flatness prior to stage assembly at the
factory. If machining is required to achieve the desired flatness, it should be performed on the mounting
surface rather than the stage base. Shimming should be avoided if possible. If shimming is required, it
should be minimized to improve the rigidity of the system.
ACS series stages have a fixed mounting pattern (as shown in
Eight T-slots are included as a standard feature on the ACS150 and ACS200 models. The dimensions of
these T-slots are identical for the ACS150 and ACS200 (refer to
T-slots are not available on the ACS100 series stages.
Tightening torque values for the mounting hardware are dependent on the properties of the surface to which
the stage is being mounted. Values provided in
mounting surface. Refer to
Table 2-1:
Stage to Mounting Surface Hardware
Mounting Hardware
ACS100
ACS150, ACS200
22
Table 2-1
Section 2.2.
for specific model mounting locations and dimensions.
Standard
5 mm [#10] SHCS
Side
M5 x 0.8 THD x 6.4 [0.25] DP
Standard
6 mm [1/4"] SHCS
Side
M5 x 0.8 THD x 7.6 [0.30] DP
Figure
2-5).
Figure
2-6).
are typical values and may not be accurate for your
ACS Hardware Manual
Typical Screw
Torque
4 N·m
4 N·m
7 N·m
4 N·m
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