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4.4. Troubleshooting
4.4. Troubleshooting
This section provides some information regarding typical problems.
Symptom
Stage will not move
Stage moves
uncontrollably
Stage oscillates or
squeals
Collet Chuck will not
close
Collet Chuck will not
open
56
Possible Cause and Solution
Controller trap or fault (refer to the Controller documentation).
Encoder (sine and cosine) signal connections (refer to
l
Controller documentation).
Motor Connections (refer to
l
Gains misadjusted (refer to the Controller documentation).
l
Encoder signals (refer to the Controller documentation).
l
The collet is jammed due to debris, fretting, etc. Clean and lubricate the
the collet assembly (refer to
Insufficient air pressure supplied to the stage. Make sure there are no
l
blockages in the supply line and the pressure is high enough (refer to
Section
1.3.).
The collet is jammed due to debris, fretting, etc. Clean and lubricate the
l
the collet assembly (refer to
ACS Hardware Manual
Chapter 3
Chapter 3
and the Controller documentation).
Section
4.2.1.)
Section
4.2.1.)
and
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