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SECTION 6
6.4.2 Troubleshooting Freewheeling Diode and IGBTs
CAUTION
Emitter
CAUTION
6-16
Gate
ESP 400C and 600C Plasma Power Sources
Freewheeling Diodes and IGBTs
1. Remove top cover.
2. Remove "incoming" bus bars.
3. Remove PCB2 and PCB3 from IGBTs. (PC
boards are held in place by four screws each.)
After PCB2 and/or PCB3 have been
removed, protect against electrostatic
damage. The emitter and the gate of each
affected IGBT must be jumpered together
to prevent electrostatic damage.
Electrostatic Discharge Hazard
Electrostatic discharge may damage these
components.
• Damage is accumulative and may only
appear as shortened component life
and not as a catastrophic failure.
• Wear a protective ground strap when
handling to prevent damage to PCB
components.
• Always place a pc board in a static-free
bag when not installed.
Troubleshooting
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