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Time chart
●
ON
Power ON
OFF
Light
All channels
Operation
received
output
range
Light
blocked
1sec
OFF
Light emission
inhibit input
ON
OFF
Output
inhibit input
ON
Teaching occurs at power ON and at the light emission inhibit input.
If teaching cannot be performed or a sensor malfunction is detected
for some reason, the error output turns ON, and the error channel's
output turns ON/OFF repeatedly.
When using the light emission inhibit input had been used to perform
re-teaching, the re-teaching operation is performed after the light
emission inhibit input recovery. Therefore, always wait one second
or longer before starting operation.
Automatic sensitivity adjustment
●
This adjustment is used to adjust the comb sensitivity following a
comb replacement. Be sure to perform the automatic sensitivity
adjustment after replacing a comb.
This adjustment can be performed simply by setting the switch to
the automatic sensitivity adjustment mode, and then turning the
power ON.
Before turning the power ON, be sure that the nothing is blocking
the light.
All outputs are ON during the automatic sensitivity adjustment.
The adjustment takes approximately 6 seconds. When completed,
all outputs turn OFF, ON then OFF, indicating that the adjustment is
completed.
If an error channel exists when the automatic sensitivity adjustment
occurs, the error channel's output turns ON/OFF repeatedly.
If the adjustment is completed normally, return the switch to the
standard operation mode, then turn the power OFF and back ON
again before starting operation.
Latch output mode
●
This mode detects the wafer edge, and is used for high transmittance
(translucent/transparent) wafers.
After the edge is detected, the output ON status is maintained.
Note that of some wafer types (depending on the edge thickness and
shape) is may not be detected.
Therefore, be sure to evaluate the wafer attributes carefully before
operation.
Moreover, in order to detect the wafer edge, the wafer conveyance
speed must be 10mm/sec. or less.
Reset the latch output
●
When in the latch output mode, the latch ON status can be reset
(output OFF) by turning the light emission inhibit input to ON and
then OFF.
7
Mounting instruction
M4 tap mounting holes are provided as shown below.
(Refer to the Outline Dimensions for details.)
M4 tap depth 8mm
Check the light is blocked normally.
Open range
Operation
range
Re-teaching range
1sec
8
MAINTENANCE AND INSPECTION
After replacing a damaged comb, be sure to perform the automatic
sensitivity adjustment.
See section 6-1 "Switches " for the automatic sensitivity adjustment
procedure.
* Although the combs are detachable, use care when detaching them.
Moreover, do not interchange the comb positions.
Detaching a comb
① Press the comb locking levers
inward then pull upward to
remove the comb.
* Replacement sensor unit Model: ASW-F2500
9
RATINGS/PERFORMANCE/SPECIFICATIONS
Model
ASW−SG85F ASW−SG85F−05 ASW−SG86F ASW−SG86F−05
(normal output mode: transmittance of 30% or less /
Wafer types
latch output mode: transmittance of 70% or less)
Number of channels
pitch
Detection method
Comb
Power supply
Current consumption
Operation mode
Normal outpout mode / latch output mode selectable (with
Output mode
Rating: sink current 30VDC or less, 20mA or less
Response time
Light source
Open collector input or contact input
Light emission inhibit ON: 1.5V or less; OFF: 4V or less
Light emission
Normal output mode: Light emission inhibit at ON.
inhibit input
Re-teaching at OFF.
re-teaching
Latch output mode: Latch output reset, Light
emission inhibit at ON.
Re-teaching at OFF
Output inhibit input
Output inhibit ON: 1.5V or less; OFF: 4V or less
Attached cable with connector (Fujitsu FCN-361J040-AU)
Connection
Cable length: 3m
Material
Sensor unit: Polycarbonate; Housing: Aluminum
Weight
Approx. 390g Approx. 250g Approx. 400g Approx. 260g
Accessories
OPERATING ENVIRONMENT
Ambient illumination
Ambient temperature
Ambient humidity
35〜85％RH (non-condensation)
Protective structure
Vibration
10〜55Hz double amplitude 0.5, X,Y,Z directions, 2 hours each
Shock
300m/s
※ For noise prevention, a capacitor is installed between
the 0V power supply and the sensor's aluminum case.
Attaching a comb
② After properly orienting the comb,
press it in until a latching sound
(click) is heard. This locks the
comb in place.
8-inch wafer
25ch
26ch
6.35mm
Through beam
Detachable type
24VDC ±10%, ripple 10% or less
1.8W or less
Dark-ON
switch) ON at error output
NPN open collector output
12ms or less
Infrared LED (870nm)
Open collector or contact input
Cable length: 0.5m
Cable length: 3m
Cable length: 0.5m
Operation manual
1,500 lx or less
−10〜＋55℃ (non-freezing)
ＩＰ40
X, Y, Z directions, 3times each
2
3/4
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