5
OPERATION
Preparation
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Firmly secure the wiring connectors as described in section 4
"Connections". Before turning the power ON, remove the switch
cover and make the appropriate switch selections (see section 6(1)
"Switches").
* After changing the switch settings, be sure to turn the power
OFF and back ON.
(1) Turn the power ON.
* Before turning the power ON, check again to verify that the
connections are correct.
Use care because the outputs are not equipped with short-circuit
protection circuits.
(2) The TEACH mode is established when the power is turned ON.
* When in the TEACH mode, verify that nothing is blocking the light
beam.
(3) Perform standard operation (see section 6 (2) "Functions").
* Because the product has been adjusted to detect wafers which
are nearly transparent, an false output could occur if the product
is subjected to an impact shock or vibration while the sensor is
moving or stationary.
Moreover, a malfunction could occur if the comb's tip is touched
by the wafer, or by a finger.
If the comb is touched in this manner, the TEACH operation must
be repeated (see section 6 (2) "Functions").
* If the comb becomes damaged, replace it as described in section
8 "Maintenance and Inspection".
6
SETTING
(1) Switches (see Fig.1)
Open the sensor's switch cover, then specify the desired operation
mode by setting the two switches.
Switch A (output operation setting) specifies the sensor
●
output operation.
・Normal output mode: set the switch to the left.
(Output ON/OFF occurs according to object presence/absence.
This is the default setting.)
・Latch output mode: set the switch to the right
(Once the output switches ON, this ON status is maintained.)
* The latch output mode (sensor output ON HOLD) can be
canceled by executing the Light emission inhibit signal.
Switch B (automatic sensitivity adjustment setting) is
●
used for sensor sensitivity adjustments.
This adjustment operation automatically adjusts the sensitivity of
each optical axis channel individually and is required only after a
comb has been replaced.
Be sure to perform the adjustment after replacing a comb which has
become damaged, etc.
Set the switch B to automatic sensitivity adjustment mode and turn
the power ON.
Be sure that nothing is blocking the light during the automatic
sensitivity adjustment operation (light reception is required at this
time).
Following the automatic sensitivity adjustment operation, be sure to
return the switch setting to the standard operation sure to return
the switch setting to the standard operation
2/4
・ Left-side setting: Standard operation mode (default setting)
・ Right-side setting: Automatic sensitivity adjustment mode
Switch A: Output operation setting
Normal output mode ← → Latch output mode
Switch B: Automatic sensitivity adjustment setting
Standard operation mode ← → Automatic sensitivity adjustment
Switch A : Output operation, setting (factory setting)
(2) Functions
Power ON and TEACH operation
●
When power is turned ON in the standard operation mode, the
internal circuit's operation is checked, and an initial TEACH
operation occurs.
Be sure that nothing is blocking the light at power ON.
If teaching cannot be performed for some reason (light is blocked,
comb is missing or damaged, etc.), the error output turns ON, and
the error channel's output turns ON/OFF repeatedly.
Output inhibit input
●
Turns each channel's open collector output OFF regardless of the
sensor operation status.
This function can be used when the outputs of multiple sensors
are connected in parallel to a PLC.
This function inhibits the outputs of unnecessary sensors which is
are connected to the PLC.
Light emission inhibit input
●
When this input is turned ON, a "light blocked" and "output ON"
status occurs at all channels.
When this input is turned OFF, a re-teaching operation occurs.
Perform this re-teaching operation while the sensor remains
stationary.
Do not perform a re-teaching operation while the sensor is in motion.
The re-teaching operation is completed within approximately 1sec
after the light emission inhibit input is turned OFF.
After 1sec elapses, perform a motion operation.
To obtain optimal detection, turn the light emission inhibit input ON
→ OFF while the sensor is in a standby status (before proceeding
to the wafer detection operation) in order to perform re-teaching.
Error output
●
An error output is issued at power ON if an operational problem
exists (abnormal channel condition, insufficient light reception,
light abnormality due to a damaged comb, malfunction due to
ambient light interference, etc.).
When the error output turns ON, the error channel's output turns
ON/OFF repeatedly.
Switch B : Automatic
sensitivity adjustment setting